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Extract from the Register of European Patents

EP About this file: EP2360712

EP2360712 - Particle beam system [Right-click to bookmark this link]
StatusNo opposition filed within time limit
Status updated on  02.04.2022
Database last updated on 08.10.2024
FormerThe patent has been granted
Status updated on  23.04.2021
FormerGrant of patent is intended
Status updated on  10.12.2020
FormerExamination is in progress
Status updated on  29.06.2018
FormerRequest for examination was made
Status updated on  14.07.2017
Most recent event   Tooltip06.09.2024Lapse of the patent in a contracting state
New state(s): MT		published on 09.10.2024  [2024/41]
Applicant(s)For all designated states
Carl Zeiss Microscopy GmbH
Carl-Zeiss-Promenade 10
07745 Jena / DE
[2021/08]
Former [2011/34]For all designated states
Carl Zeiss NTS GmbH
Carl-Zeiss-Strasse 56
73447 Oberkochen / DE
Inventor(s)01 / Biberger, Josef
Schweinbach 39
93359 Wildenberg / DE
02 / Pulwey, Ralph
Heinrich-Rieger-Strasse 12/2
73430 Aalen / DE
 [2011/34]
Representative(s)Diehl & Partner
Patent- und Rechtsanwaltskanzlei mbB
Erika-Mann-Straße 9
80636 München / DE
[2021/21]
Former [2011/34]Diehl & Partner GbR
Patentanwälte Augustenstrasse 46
80333 München / DE
Application number, filing date11001143.411.02.2011
[2011/34]
Priority number, dateDE2010100777712.02.2010         Original published format: DE102010007777
[2011/34]
Filing languageEN
Procedural languageEN
PublicationType: A2 Application without search report 
No.:EP2360712
Date:24.08.2011
Language:EN
[2011/34]
Type: A3 Search report 
No.:EP2360712
Date:04.01.2017
Language:EN
[2017/01]
Type: B1 Patent specification 
No.:EP2360712
Date:26.05.2021
Language:EN
[2021/21]
Search report(s)(Supplementary) European search report - dispatched on:EP06.12.2016
ClassificationIPC:H01J37/04, H01J37/24, H01J37/26, H01J37/317
[2017/01]
CPC:
H01J37/045 (EP,US); H01J37/3174 (US); H01J37/24 (EP,US);
H01J37/26 (US); H01J2237/0432 (EP,US); H01J2237/2485 (EP,US);
H01J2237/28 (EP,US); H01J2237/317 (EP,US) (-)
Former IPC [2011/34]H01J37/04, H01J37/24
Designated contracting statesAL,   AT,   BE,   BG,   CH,   CY,   CZ,   DE,   DK,   EE,   ES,   FI,   FR,   GB,   GR,   HR,   HU,   IE,   IS,   IT,   LI,   LT,   LU,   LV,   MC,   MK,   MT,   NL,   NO,   PL,   PT,   RO,   RS,   SE,   SI,   SK,   SM,   TR [2017/33]
Former [2011/34]AL,  AT,  BE,  BG,  CH,  CY,  CZ,  DE,  DK,  EE,  ES,  FI,  FR,  GB,  GR,  HR,  HU,  IE,  IS,  IT,  LI,  LT,  LU,  LV,  MC,  MK,  MT,  NL,  NO,  PL,  PT,  RO,  RS,  SE,  SI,  SK,  SM,  TR 
TitleGerman:Teilchenstrahlsystem[2011/34]
English:Particle beam system[2011/34]
French:Système de faisceau à particules chargées[2011/34]
Examination procedure11.02.2011Date on which the examining division has become responsible
04.07.2017Amendment by applicant (claims and/or description)
04.07.2017Examination requested  [2017/33]
28.06.2018Despatch of a communication from the examining division (Time limit: M03)
09.08.2018Reply to a communication from the examining division
11.12.2020Communication of intention to grant the patent
15.04.2021Fee for grant paid
15.04.2021Fee for publishing/printing paid
15.04.2021Receipt of the translation of the claim(s)
Divisional application(s)The date of the Examining Division's first communication in respect of the earliest application for which a communication has been issued is  28.06.2018
Opposition(s)01.03.2022No opposition filed within time limit [2022/18]
Fees paidRenewal fee
21.02.2013Renewal fee patent year 03
20.02.2014Renewal fee patent year 04
23.02.2015Renewal fee patent year 05
22.02.2016Renewal fee patent year 06
17.02.2017Renewal fee patent year 07
22.02.2018Renewal fee patent year 08
21.02.2019Renewal fee patent year 09
24.02.2020Renewal fee patent year 10
22.02.2021Renewal fee patent year 11
Opt-out from the exclusive  Tooltip
competence of the Unified
Patent Court		 See the Register of the Unified Patent Court for opt-out data
Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court.
Lapses during opposition  TooltipHU11.02.2011
AL26.05.2021
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GB11.02.2022
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LU11.02.2022
BE28.02.2022
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[2024/41]
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Former [2024/22]HU11.02.2011
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Former [2024/20]HU11.02.2011
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PT27.09.2021
GB11.02.2022
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BE28.02.2022
CH28.02.2022
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CH28.02.2022
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LU11.02.2022
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Documents cited:Search[A]JPS56118251  (HITACHI LTD) [A] 1-15 * abstract *;
 [A]JPS5971246  (NIPPON TELEGRAPH & TELEPHONE) [A] 1-15 * abstract *;
 [A]JPS61147524  (TOSHIBA CORP) [A] 1-15 * abstract *;
 [A]US6278124  (PENBERTH MICHAEL J [GB], et al) [A] 1-15* column 13, lines 23-50; figure 9 *;
 [Y]JP3432091B  (JEOL LTD) [Y] 13 * paragraphs [0025] - [0047]; figures 1, 3, 7 *;
 [Y]US2004124365  (STEIGERWALD MICHAEL [DE]) [Y] 12,14 * paragraph [0050]; figures 1, 2 *;
 [Y]JP2006196260  (JEOL LTD) [Y] 1-15 * paragraphs [0007] - [0035] - [0 47]; figure 2 *;
 [A]US2007075256  (BULLER BENYAMIN [US], et al) [A] 1-15 * paragraphs [0006] - [0008] - [0026] , [0029] - [0033] - [0 35]; figures 1,2,4,6 *;
 [Y]JP2009038706  (SHINDENGEN ELECTRIC MFG) [Y] 1-15 * paragraphs [0003] - [0004] - [0 18] - [0040]; figures 1,2 *
The EPO accepts no responsibility for the accuracy of data originating from other authorities; in particular, it does not guarantee that it is complete, up to date or fit for specific purposes.