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Extract from the Register of European Patents

EP About this file: EP2584062

EP2584062 - Sputter target and its application [Right-click to bookmark this link]
StatusThe application is deemed to be withdrawn
Status updated on  12.08.2016
Database last updated on 15.06.2024
Most recent event   Tooltip12.08.2016Application deemed to be withdrawnpublished on 14.09.2016  [2016/37]
Applicant(s)For all designated states
Heraeus Deutschland GmbH & Co. KG
Heraeusstr. 12-14
63450 Hanau / DE
For all designated states
Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V.
Hansastrasse 27c
80686 München / DE
[N/P]
Former [2015/08]For all designated states
Heraeus Deutschland GmbH & Co. KG
Heraeusstr. 12-14
63450 Hanau / DE
For all designated states
Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V.
Hansastrasse 27c
80686 München / DE
Former [2013/17]For all designated states
Heraeus Materials Technology GmbH & Co. KG
Heraeusstrasse 12-14
63450 Hanau / DE
For all designated states
Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V.
Hansastrasse 27c
80686 München / DE
Inventor(s)01 / Herzog, Andreas
Holunderweg 49
63486 Bruchköbel / DE
02 / Schultheis, Markus
Am Rausch 22
36103 Flieden / DE
03 / Schneider-Betz, Sabine
Oisterwijker Strasse 51
63303 Dreieich / DE
04 / Schlott, Martin, Dr.
Scharfensteiner Strasse 33
63075 Offenbach / DE
05 / Dewald, Wilma
Schunterstrasse 56
38106 Braunschweig / DE
 [2013/17]
Representative(s)Staudt, Armin Walter
Sandeldamm 24a
63450 Hanau / DE
[N/P]
Former [2014/30]Staudt, Armin Walter
Patentanwalt
Sandeldamm 24a
63450 Hanau / DE
Former [2013/17]Brand, Normen
Heraeus Holding GmbH Schutzrechte Heraeusstraße 12-14
63450 Hanau / DE
Application number, filing date11008408.419.10.2011
[2013/17]
Filing languageDE
Procedural languageDE
PublicationType: A1 Application with search report 
No.:EP2584062
Date:24.04.2013
Language:DE
[2013/17]
Search report(s)(Supplementary) European search report - dispatched on:EP08.12.2011
ClassificationIPC:C23C14/08, C23C14/34
[2013/17]
CPC:
C23C14/0089 (EP); C23C14/083 (EP); C23C14/3414 (EP)
Designated contracting statesAL,   AT,   BE,   BG,   CH,   CY,   CZ,   DE,   DK,   EE,   ES,   FI,   FR,   GB,   GR,   HR,   HU,   IE,   IS,   IT,   LI,   LT,   LU,   LV,   MC,   MK,   MT,   NL,   NO,   PL,   PT,   RO,   RS,   SE,   SI,   SK,   SM,   TR [2013/17]
Extension statesBANot yet paid
MENot yet paid
TitleGerman:Sputtertarget und seine Verwendung[2013/17]
English:Sputter target and its application[2013/17]
French:Cible de circuits et son utilisation[2013/17]
Examination procedure26.01.2012Examination requested  [2013/17]
03.07.2014Despatch of a communication from the examining division (Time limit: M06)
13.01.2015Reply to a communication from the examining division
06.11.2015Communication of intention to grant the patent
17.03.2016Application deemed to be withdrawn, date of legal effect  [2016/37]
22.04.2016Despatch of communication that the application is deemed to be withdrawn, reason: fee for grant / fee for printing not paid in time  [2016/37]
Divisional application(s)The date of the Examining Division's first communication in respect of the earliest application for which a communication has been issued is  03.07.2014
Fees paidRenewal fee
24.10.2013Renewal fee patent year 03
23.10.2014Renewal fee patent year 04
26.10.2015Renewal fee patent year 05
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Patent Court		 See the Register of the Unified Patent Court for opt-out data
Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court.
Documents cited:Search[A]EP2116631  (APPLIED MATERIALS INC [US]) [A] 1-3,5,7,11 * column 3, paragraph 15 - column 4, paragraph 24 * * column 7, paragraph 42 *;
 [A]WO03066928  (SAINT GOBAIN [FR], et al) [A] 1-3,5,7,11 * page 2, line 22 - page 3, line 28 * * page 4, lines 20-34 * * page 5, line 21 - page 6, line 2 *;
 [A]WO2009133076  (APPLIED MATERIALS INC A CORP O [US], et al) [A] 1 * page 4, lines 1-11,30-32 * * page 5, line 1 - page 6, line 23 *;
 [A]  - KUBART T ET AL, "Influence of the target composition on reactively sputtered titanium oxide films", VACUUM, PERGAMON PRESS, GB, vol. 83, no. 10, doi:10.1016/J.VACUUM.2009.03.026, ISSN 0042-207X, (20090616), pages 1295 - 1298, (20090328), XP026152057 [A] 1 * page 1296, column l, paragraph 2 *

DOI:   http://dx.doi.org/10.1016/j.vacuum.2009.03.026
by applicantUS5976639
 US6387576
 JPH07233469
 US6193856
The EPO accepts no responsibility for the accuracy of data originating from other authorities; in particular, it does not guarantee that it is complete, up to date or fit for specific purposes.