EP2355125 - Particle beam device and method for operation of a particle beam device [Right-click to bookmark this link] | Status | No opposition filed within time limit Status updated on 26.02.2016 Database last updated on 03.09.2024 | Most recent event Tooltip | 12.10.2018 | Lapse of the patent in a contracting state New state(s): AL | published on 14.11.2018 [2018/46] | Applicant(s) | For all designated states Carl Zeiss Microscopy GmbH Carl-Zeiss-Promenade 10 07745 Jena / DE | [2015/15] |
Former [2011/32] | For all designated states Carl Zeiss NTS GmbH Carl-Zeiss-Strasse 56 73447 Oberkochen / DE | Inventor(s) | 01 /
Preikszas, Dirk Dives-sur-Mer-Strasse 5 73447 Oberkochen / DE | [2011/32] | Representative(s) | Tongbhoyai, Martin Freischem & Partner Patentanwälte mbB Salierring 47-53 50677 Köln / DE | [N/P] |
Former [2015/17] | Tongbhoyai, Martin Patentanwälte Freischem Salierring 47-53 50677 Köln / DE | ||
Former [2011/32] | Tongbhoyai, Martin Patentanwälte Freischem Salierring 47-53 50677 Köln / DE | Application number, filing date | 11152427.8 | 27.01.2011 | [2011/32] | Priority number, date | DE20101001346 | 28.01.2010 Original published format: DE102010001346 | [2011/32] | Filing language | EN | Procedural language | EN | Publication | Type: | A2 Application without search report | No.: | EP2355125 | Date: | 10.08.2011 | Language: | EN | [2011/32] | Type: | A3 Search report | No.: | EP2355125 | Date: | 25.04.2012 | Language: | EN | [2012/17] | Type: | B1 Patent specification | No.: | EP2355125 | Date: | 22.04.2015 | Language: | EN | [2015/17] | Search report(s) | (Supplementary) European search report - dispatched on: | EP | 27.03.2012 | Classification | IPC: | H01J37/145, H01J37/244, H01J37/28, H01J37/05 | [2011/32] | CPC: |
H01J37/145 (EP,US);
H01J37/05 (EP,US);
H01J37/244 (EP,US);
H01J37/28 (EP,US)
| Designated contracting states | AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LI, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR [2015/17] |
Former [2011/32] | AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LI, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR | Title | German: | Teilchenstrahlgerät und Verfahren zum Betreiben eines Teilchenstrahlgeräts | [2011/32] | English: | Particle beam device and method for operation of a particle beam device | [2011/32] | French: | Dispositif de faisceau à particules et procédé de fonctionnement d'un dispositif de faisceau à particules | [2011/32] | Examination procedure | 25.10.2012 | Amendment by applicant (claims and/or description) | 25.10.2012 | Examination requested [2012/50] | 06.11.2014 | Communication of intention to grant the patent | 13.03.2015 | Fee for grant paid | 13.03.2015 | Fee for publishing/printing paid | 13.03.2015 | Receipt of the translation of the claim(s) | Divisional application(s) | The date of the Examining Division's first communication in respect of the earliest application for which a communication has been issued is 06.11.2014 | Opposition(s) | 25.01.2016 | No opposition filed within time limit [2016/13] | Fees paid | Renewal fee | 28.01.2013 | Renewal fee patent year 03 | 30.01.2014 | Renewal fee patent year 04 | 23.01.2015 | Renewal fee patent year 05 |
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Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court. | Lapses during opposition Tooltip | HU | 27.01.2011 | AL | 22.04.2015 | AT | 22.04.2015 | BE | 22.04.2015 | BG | 22.04.2015 | CY | 22.04.2015 | DK | 22.04.2015 | EE | 22.04.2015 | ES | 22.04.2015 | FI | 22.04.2015 | HR | 22.04.2015 | IT | 22.04.2015 | LT | 22.04.2015 | LV | 22.04.2015 | MC | 22.04.2015 | MK | 22.04.2015 | PL | 22.04.2015 | RO | 22.04.2015 | RS | 22.04.2015 | SE | 22.04.2015 | SI | 22.04.2015 | SK | 22.04.2015 | SM | 22.04.2015 | TR | 22.04.2015 | NO | 22.07.2015 | GR | 23.07.2015 | IS | 22.08.2015 | PT | 24.08.2015 | [2018/46] |
Former [2018/38] | HU | 27.01.2011 | |
AT | 22.04.2015 | ||
BE | 22.04.2015 | ||
BG | 22.04.2015 | ||
CY | 22.04.2015 | ||
DK | 22.04.2015 | ||
EE | 22.04.2015 | ||
ES | 22.04.2015 | ||
FI | 22.04.2015 | ||
HR | 22.04.2015 | ||
IT | 22.04.2015 | ||
LT | 22.04.2015 | ||
LV | 22.04.2015 | ||
MC | 22.04.2015 | ||
MK | 22.04.2015 | ||
PL | 22.04.2015 | ||
RO | 22.04.2015 | ||
RS | 22.04.2015 | ||
SE | 22.04.2015 | ||
SI | 22.04.2015 | ||
SK | 22.04.2015 | ||
SM | 22.04.2015 | ||
TR | 22.04.2015 | ||
NO | 22.07.2015 | ||
GR | 23.07.2015 | ||
IS | 22.08.2015 | ||
PT | 24.08.2015 | ||
Former [2018/31] | HU | 27.01.2011 | |
AT | 22.04.2015 | ||
BE | 22.04.2015 | ||
CY | 22.04.2015 | ||
DK | 22.04.2015 | ||
EE | 22.04.2015 | ||
ES | 22.04.2015 | ||
FI | 22.04.2015 | ||
HR | 22.04.2015 | ||
IT | 22.04.2015 | ||
LT | 22.04.2015 | ||
LV | 22.04.2015 | ||
MC | 22.04.2015 | ||
MK | 22.04.2015 | ||
PL | 22.04.2015 | ||
RO | 22.04.2015 | ||
RS | 22.04.2015 | ||
SE | 22.04.2015 | ||
SI | 22.04.2015 | ||
SK | 22.04.2015 | ||
SM | 22.04.2015 | ||
TR | 22.04.2015 | ||
NO | 22.07.2015 | ||
GR | 23.07.2015 | ||
IS | 22.08.2015 | ||
PT | 24.08.2015 | ||
Former [2018/29] | HU | 27.01.2011 | |
AT | 22.04.2015 | ||
BE | 22.04.2015 | ||
CY | 22.04.2015 | ||
DK | 22.04.2015 | ||
EE | 22.04.2015 | ||
ES | 22.04.2015 | ||
FI | 22.04.2015 | ||
HR | 22.04.2015 | ||
IT | 22.04.2015 | ||
LT | 22.04.2015 | ||
LV | 22.04.2015 | ||
MC | 22.04.2015 | ||
MK | 22.04.2015 | ||
MT | 22.04.2015 | ||
PL | 22.04.2015 | ||
RO | 22.04.2015 | ||
RS | 22.04.2015 | ||
SE | 22.04.2015 | ||
SI | 22.04.2015 | ||
SK | 22.04.2015 | ||
SM | 22.04.2015 | ||
TR | 22.04.2015 | ||
NO | 22.07.2015 | ||
GR | 23.07.2015 | ||
IS | 22.08.2015 | ||
PT | 24.08.2015 | ||
Former [2018/28] | HU | 27.01.2011 | |
AT | 22.04.2015 | ||
BE | 22.04.2015 | ||
CY | 22.04.2015 | ||
DK | 22.04.2015 | ||
EE | 22.04.2015 | ||
ES | 22.04.2015 | ||
FI | 22.04.2015 | ||
HR | 22.04.2015 | ||
IT | 22.04.2015 | ||
LT | 22.04.2015 | ||
LV | 22.04.2015 | ||
MC | 22.04.2015 | ||
MK | 22.04.2015 | ||
MT | 22.04.2015 | ||
PL | 22.04.2015 | ||
RO | 22.04.2015 | ||
RS | 22.04.2015 | ||
SE | 22.04.2015 | ||
SI | 22.04.2015 | ||
SK | 22.04.2015 | ||
SM | 22.04.2015 | ||
NO | 22.07.2015 | ||
GR | 23.07.2015 | ||
IS | 22.08.2015 | ||
PT | 24.08.2015 | ||
Former [2017/40] | AT | 22.04.2015 | |
BE | 22.04.2015 | ||
DK | 22.04.2015 | ||
EE | 22.04.2015 | ||
ES | 22.04.2015 | ||
FI | 22.04.2015 | ||
HR | 22.04.2015 | ||
IT | 22.04.2015 | ||
LT | 22.04.2015 | ||
LV | 22.04.2015 | ||
MC | 22.04.2015 | ||
MT | 22.04.2015 | ||
PL | 22.04.2015 | ||
RO | 22.04.2015 | ||
RS | 22.04.2015 | ||
SE | 22.04.2015 | ||
SI | 22.04.2015 | ||
SK | 22.04.2015 | ||
NO | 22.07.2015 | ||
GR | 23.07.2015 | ||
IS | 22.08.2015 | ||
PT | 24.08.2015 | ||
Former [2016/42] | AT | 22.04.2015 | |
BE | 22.04.2015 | ||
DK | 22.04.2015 | ||
EE | 22.04.2015 | ||
ES | 22.04.2015 | ||
FI | 22.04.2015 | ||
HR | 22.04.2015 | ||
IT | 22.04.2015 | ||
LT | 22.04.2015 | ||
LV | 22.04.2015 | ||
MC | 22.04.2015 | ||
PL | 22.04.2015 | ||
RO | 22.04.2015 | ||
RS | 22.04.2015 | ||
SI | 22.04.2015 | ||
SK | 22.04.2015 | ||
NO | 22.07.2015 | ||
GR | 23.07.2015 | ||
IS | 22.08.2015 | ||
PT | 24.08.2015 | ||
Former [2016/37] | AT | 22.04.2015 | |
BE | 22.04.2015 | ||
DK | 22.04.2015 | ||
EE | 22.04.2015 | ||
ES | 22.04.2015 | ||
FI | 22.04.2015 | ||
HR | 22.04.2015 | ||
IT | 22.04.2015 | ||
LT | 22.04.2015 | ||
LV | 22.04.2015 | ||
PL | 22.04.2015 | ||
RO | 22.04.2015 | ||
RS | 22.04.2015 | ||
SI | 22.04.2015 | ||
SK | 22.04.2015 | ||
NO | 22.07.2015 | ||
GR | 23.07.2015 | ||
IS | 22.08.2015 | ||
PT | 24.08.2015 | ||
Former [2016/24] | AT | 22.04.2015 | |
DK | 22.04.2015 | ||
EE | 22.04.2015 | ||
ES | 22.04.2015 | ||
FI | 22.04.2015 | ||
HR | 22.04.2015 | ||
IT | 22.04.2015 | ||
LT | 22.04.2015 | ||
LV | 22.04.2015 | ||
PL | 22.04.2015 | ||
RO | 22.04.2015 | ||
RS | 22.04.2015 | ||
SI | 22.04.2015 | ||
SK | 22.04.2015 | ||
NO | 22.07.2015 | ||
GR | 23.07.2015 | ||
IS | 22.08.2015 | ||
PT | 24.08.2015 | ||
Former [2016/21] | AT | 22.04.2015 | |
DK | 22.04.2015 | ||
EE | 22.04.2015 | ||
ES | 22.04.2015 | ||
FI | 22.04.2015 | ||
HR | 22.04.2015 | ||
IT | 22.04.2015 | ||
LT | 22.04.2015 | ||
LV | 22.04.2015 | ||
PL | 22.04.2015 | ||
RO | 22.04.2015 | ||
RS | 22.04.2015 | ||
SK | 22.04.2015 | ||
NO | 22.07.2015 | ||
GR | 23.07.2015 | ||
IS | 22.08.2015 | ||
PT | 24.08.2015 | ||
Former [2016/10] | AT | 22.04.2015 | |
DK | 22.04.2015 | ||
EE | 22.04.2015 | ||
ES | 22.04.2015 | ||
FI | 22.04.2015 | ||
HR | 22.04.2015 | ||
LT | 22.04.2015 | ||
LV | 22.04.2015 | ||
PL | 22.04.2015 | ||
RO | 22.04.2015 | ||
RS | 22.04.2015 | ||
SK | 22.04.2015 | ||
NO | 22.07.2015 | ||
GR | 23.07.2015 | ||
IS | 22.08.2015 | ||
PT | 24.08.2015 | ||
Former [2016/09] | AT | 22.04.2015 | |
DK | 22.04.2015 | ||
EE | 22.04.2015 | ||
ES | 22.04.2015 | ||
FI | 22.04.2015 | ||
HR | 22.04.2015 | ||
LT | 22.04.2015 | ||
LV | 22.04.2015 | ||
RS | 22.04.2015 | ||
NO | 22.07.2015 | ||
GR | 23.07.2015 | ||
IS | 22.08.2015 | ||
PT | 24.08.2015 | ||
Former [2016/07] | AT | 22.04.2015 | |
DK | 22.04.2015 | ||
ES | 22.04.2015 | ||
FI | 22.04.2015 | ||
HR | 22.04.2015 | ||
LT | 22.04.2015 | ||
LV | 22.04.2015 | ||
RS | 22.04.2015 | ||
NO | 22.07.2015 | ||
GR | 23.07.2015 | ||
IS | 22.08.2015 | ||
PT | 24.08.2015 | ||
Former [2015/51] | AT | 22.04.2015 | |
ES | 22.04.2015 | ||
FI | 22.04.2015 | ||
HR | 22.04.2015 | ||
LT | 22.04.2015 | ||
LV | 22.04.2015 | ||
RS | 22.04.2015 | ||
NO | 22.07.2015 | ||
GR | 23.07.2015 | ||
IS | 22.08.2015 | ||
PT | 24.08.2015 | ||
Former [2015/50] | ES | 22.04.2015 | |
FI | 22.04.2015 | ||
HR | 22.04.2015 | ||
LT | 22.04.2015 | ||
LV | 22.04.2015 | ||
RS | 22.04.2015 | ||
NO | 22.07.2015 | ||
GR | 23.07.2015 | ||
IS | 22.08.2015 | ||
PT | 24.08.2015 | ||
Former [2015/49] | ES | 22.04.2015 | |
FI | 22.04.2015 | ||
HR | 22.04.2015 | ||
LT | 22.04.2015 | ||
LV | 22.04.2015 | ||
RS | 22.04.2015 | ||
NO | 22.07.2015 | ||
GR | 23.07.2015 | ||
PT | 24.08.2015 | Documents cited: | Search | [I]US5164594 (THOMPSON STEPHEN P [GB], et al) [I] 1-15 * the whole document *; | [Y]JPS59201357 (SHIMADZU CORP) [Y] 1-15 * abstract *; | [Y]US2002079463 (SHICHI HIROYASU [JP], et al) [Y] 1-15 * abstract * * paragraphs [0128] - [0131] * * paragraphs [0141] - [0169] *; | [Y]US2008073582 (SHICHI HIROYASU [JP], et al) [Y] 1-15 * abstract * * paragraphs [0086] , [0087] * | by applicant | DE102006059162 |