EP2447209 - Microelectromechanical system (MEMS) [Right-click to bookmark this link] | Status | No opposition filed within time limit Status updated on 16.12.2016 Database last updated on 02.09.2024 | Most recent event Tooltip | 12.10.2018 | Lapse of the patent in a contracting state New state(s): AL | published on 14.11.2018 [2018/46] | Applicant(s) | For all designated states Thales 45, rue de Villiers 92200 Neuilly Sur Seine / FR | [2012/18] | Inventor(s) | 01 /
Leverrier, Bertrand 15 rue Chantebise 26120 MONTELIER / FR | 02 /
Lefort, Olivier 202 Rue Chateauvert 26000 VALENCE / FR | 03 /
Boura, André 5 Rue Alienor d'Aquitaine 86100 CHATELLERAULT / FR | 04 /
Chaumet, Bernard 6 rue Gustave Courbet 86100 CHATELLERAULT / FR | [2012/18] | Representative(s) | Brunelli, Gérald Marks & Clerk France Immeuble Visium 22, avenue Aristide Briand 94117 Arcueil Cedex / FR | [N/P] |
Former [2012/18] | Brunelli, Gérald Marks & Clerk France Immeuble Visium 22, avenue Aristide Briand 94117 Arcueil Cedex / FR | Application number, filing date | 11182970.1 | 27.09.2011 | [2012/18] | Priority number, date | FR20100004273 | 29.10.2010 Original published format: FR 1004273 | [2012/18] | Filing language | FR | Procedural language | FR | Publication | Type: | A1 Application with search report | No.: | EP2447209 | Date: | 02.05.2012 | Language: | FR | [2012/18] | Type: | B1 Patent specification | No.: | EP2447209 | Date: | 10.02.2016 | Language: | FR | [2016/06] | Search report(s) | (Supplementary) European search report - dispatched on: | EP | 04.11.2011 | Classification | IPC: | B81B3/00, B81B7/00 | [2012/18] | CPC: |
B81B7/0048 (EP,US);
G01C19/5719 (EP,US);
B81B2201/0235 (EP,US);
B81B2201/0242 (EP,US);
B81B2203/0109 (EP,US)
| Designated contracting states | AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LI, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR [2016/06] |
Former [2012/18] | AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LI, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR | Title | German: | Mikroelektromechanisches System (MEMS) | [2012/18] | English: | Microelectromechanical system (MEMS) | [2012/18] | French: | Microsystème électromécanique (MEMS) | [2012/18] | Examination procedure | 11.06.2012 | Amendment by applicant (claims and/or description) | 11.06.2012 | Examination requested [2012/30] | 22.09.2015 | Communication of intention to grant the patent | 03.12.2015 | Fee for grant paid | 03.12.2015 | Fee for publishing/printing paid | 03.12.2015 | Receipt of the translation of the claim(s) | Divisional application(s) | The date of the Examining Division's first communication in respect of the earliest application for which a communication has been issued is 22.09.2015 | Opposition(s) | 11.11.2016 | No opposition filed within time limit [2017/03] | Fees paid | Renewal fee | 12.09.2013 | Renewal fee patent year 03 | 12.09.2014 | Renewal fee patent year 04 | 11.09.2015 | Renewal fee patent year 05 |
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Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court. | Lapses during opposition Tooltip | HU | 27.09.2011 | AL | 10.02.2016 | AT | 10.02.2016 | CY | 10.02.2016 | CZ | 10.02.2016 | DK | 10.02.2016 | EE | 10.02.2016 | ES | 10.02.2016 | FI | 10.02.2016 | HR | 10.02.2016 | IT | 10.02.2016 | LT | 10.02.2016 | LV | 10.02.2016 | MC | 10.02.2016 | MK | 10.02.2016 | MT | 10.02.2016 | NL | 10.02.2016 | PL | 10.02.2016 | RO | 10.02.2016 | RS | 10.02.2016 | SE | 10.02.2016 | SI | 10.02.2016 | SK | 10.02.2016 | SM | 10.02.2016 | TR | 10.02.2016 | BG | 10.05.2016 | NO | 10.05.2016 | GR | 11.05.2016 | IS | 10.06.2016 | PT | 13.06.2016 | IE | 27.09.2016 | LU | 27.09.2016 | BE | 30.09.2016 | CH | 30.09.2016 | LI | 30.09.2016 | [2018/46] |
Former [2018/31] | HU | 27.09.2011 | |
AT | 10.02.2016 | ||
CY | 10.02.2016 | ||
CZ | 10.02.2016 | ||
DK | 10.02.2016 | ||
EE | 10.02.2016 | ||
ES | 10.02.2016 | ||
FI | 10.02.2016 | ||
HR | 10.02.2016 | ||
IT | 10.02.2016 | ||
LT | 10.02.2016 | ||
LV | 10.02.2016 | ||
MC | 10.02.2016 | ||
MK | 10.02.2016 | ||
MT | 10.02.2016 | ||
NL | 10.02.2016 | ||
PL | 10.02.2016 | ||
RO | 10.02.2016 | ||
RS | 10.02.2016 | ||
SE | 10.02.2016 | ||
SI | 10.02.2016 | ||
SK | 10.02.2016 | ||
SM | 10.02.2016 | ||
TR | 10.02.2016 | ||
BG | 10.05.2016 | ||
NO | 10.05.2016 | ||
GR | 11.05.2016 | ||
IS | 10.06.2016 | ||
PT | 13.06.2016 | ||
IE | 27.09.2016 | ||
LU | 27.09.2016 | ||
BE | 30.09.2016 | ||
CH | 30.09.2016 | ||
LI | 30.09.2016 | ||
Former [2018/29] | HU | 27.09.2011 | |
AT | 10.02.2016 | ||
CY | 10.02.2016 | ||
CZ | 10.02.2016 | ||
DK | 10.02.2016 | ||
EE | 10.02.2016 | ||
ES | 10.02.2016 | ||
FI | 10.02.2016 | ||
HR | 10.02.2016 | ||
IT | 10.02.2016 | ||
LT | 10.02.2016 | ||
LV | 10.02.2016 | ||
MC | 10.02.2016 | ||
MK | 10.02.2016 | ||
NL | 10.02.2016 | ||
PL | 10.02.2016 | ||
RO | 10.02.2016 | ||
RS | 10.02.2016 | ||
SE | 10.02.2016 | ||
SI | 10.02.2016 | ||
SK | 10.02.2016 | ||
SM | 10.02.2016 | ||
TR | 10.02.2016 | ||
BG | 10.05.2016 | ||
NO | 10.05.2016 | ||
GR | 11.05.2016 | ||
IS | 10.06.2016 | ||
PT | 13.06.2016 | ||
IE | 27.09.2016 | ||
LU | 27.09.2016 | ||
BE | 30.09.2016 | ||
CH | 30.09.2016 | ||
LI | 30.09.2016 | ||
Former [2018/28] | HU | 27.09.2011 | |
AT | 10.02.2016 | ||
CY | 10.02.2016 | ||
CZ | 10.02.2016 | ||
DK | 10.02.2016 | ||
EE | 10.02.2016 | ||
ES | 10.02.2016 | ||
FI | 10.02.2016 | ||
HR | 10.02.2016 | ||
IT | 10.02.2016 | ||
LT | 10.02.2016 | ||
LV | 10.02.2016 | ||
MC | 10.02.2016 | ||
MK | 10.02.2016 | ||
NL | 10.02.2016 | ||
PL | 10.02.2016 | ||
RO | 10.02.2016 | ||
RS | 10.02.2016 | ||
SE | 10.02.2016 | ||
SI | 10.02.2016 | ||
SK | 10.02.2016 | ||
SM | 10.02.2016 | ||
BG | 10.05.2016 | ||
NO | 10.05.2016 | ||
GR | 11.05.2016 | ||
IS | 10.06.2016 | ||
PT | 13.06.2016 | ||
IE | 27.09.2016 | ||
LU | 27.09.2016 | ||
BE | 30.09.2016 | ||
CH | 30.09.2016 | ||
LI | 30.09.2016 | ||
Former [2017/41] | AT | 10.02.2016 | |
CZ | 10.02.2016 | ||
DK | 10.02.2016 | ||
EE | 10.02.2016 | ||
ES | 10.02.2016 | ||
FI | 10.02.2016 | ||
HR | 10.02.2016 | ||
IT | 10.02.2016 | ||
LT | 10.02.2016 | ||
LV | 10.02.2016 | ||
MC | 10.02.2016 | ||
NL | 10.02.2016 | ||
PL | 10.02.2016 | ||
RO | 10.02.2016 | ||
RS | 10.02.2016 | ||
SE | 10.02.2016 | ||
SI | 10.02.2016 | ||
SK | 10.02.2016 | ||
SM | 10.02.2016 | ||
BG | 10.05.2016 | ||
NO | 10.05.2016 | ||
GR | 11.05.2016 | ||
IS | 10.06.2016 | ||
PT | 13.06.2016 | ||
IE | 27.09.2016 | ||
LU | 27.09.2016 | ||
BE | 30.09.2016 | ||
CH | 30.09.2016 | ||
LI | 30.09.2016 | ||
Former [2017/31] | AT | 10.02.2016 | |
CZ | 10.02.2016 | ||
DK | 10.02.2016 | ||
EE | 10.02.2016 | ||
ES | 10.02.2016 | ||
FI | 10.02.2016 | ||
HR | 10.02.2016 | ||
IT | 10.02.2016 | ||
LT | 10.02.2016 | ||
LV | 10.02.2016 | ||
MC | 10.02.2016 | ||
NL | 10.02.2016 | ||
PL | 10.02.2016 | ||
RO | 10.02.2016 | ||
RS | 10.02.2016 | ||
SE | 10.02.2016 | ||
SI | 10.02.2016 | ||
SK | 10.02.2016 | ||
SM | 10.02.2016 | ||
BG | 10.05.2016 | ||
NO | 10.05.2016 | ||
GR | 11.05.2016 | ||
IS | 10.06.2016 | ||
PT | 13.06.2016 | ||
BE | 30.09.2016 | ||
Former [2017/12] | AT | 10.02.2016 | |
CZ | 10.02.2016 | ||
DK | 10.02.2016 | ||
EE | 10.02.2016 | ||
ES | 10.02.2016 | ||
FI | 10.02.2016 | ||
HR | 10.02.2016 | ||
IT | 10.02.2016 | ||
LT | 10.02.2016 | ||
LV | 10.02.2016 | ||
NL | 10.02.2016 | ||
PL | 10.02.2016 | ||
RO | 10.02.2016 | ||
RS | 10.02.2016 | ||
SE | 10.02.2016 | ||
SI | 10.02.2016 | ||
SK | 10.02.2016 | ||
SM | 10.02.2016 | ||
BG | 10.05.2016 | ||
NO | 10.05.2016 | ||
GR | 11.05.2016 | ||
IS | 10.06.2016 | ||
PT | 13.06.2016 | ||
BE | 30.09.2016 | ||
Former [2016/50] | AT | 10.02.2016 | |
CZ | 10.02.2016 | ||
DK | 10.02.2016 | ||
EE | 10.02.2016 | ||
ES | 10.02.2016 | ||
FI | 10.02.2016 | ||
HR | 10.02.2016 | ||
IT | 10.02.2016 | ||
LT | 10.02.2016 | ||
LV | 10.02.2016 | ||
NL | 10.02.2016 | ||
PL | 10.02.2016 | ||
RO | 10.02.2016 | ||
RS | 10.02.2016 | ||
SE | 10.02.2016 | ||
SK | 10.02.2016 | ||
SM | 10.02.2016 | ||
NO | 10.05.2016 | ||
GR | 11.05.2016 | ||
IS | 10.06.2016 | ||
PT | 13.06.2016 | ||
Former [2016/49] | AT | 10.02.2016 | |
DK | 10.02.2016 | ||
EE | 10.02.2016 | ||
ES | 10.02.2016 | ||
FI | 10.02.2016 | ||
HR | 10.02.2016 | ||
IT | 10.02.2016 | ||
LT | 10.02.2016 | ||
LV | 10.02.2016 | ||
NL | 10.02.2016 | ||
PL | 10.02.2016 | ||
RS | 10.02.2016 | ||
SE | 10.02.2016 | ||
NO | 10.05.2016 | ||
GR | 11.05.2016 | ||
IS | 10.06.2016 | ||
PT | 13.06.2016 | ||
Former [2016/46] | AT | 10.02.2016 | |
DK | 10.02.2016 | ||
ES | 10.02.2016 | ||
FI | 10.02.2016 | ||
HR | 10.02.2016 | ||
IT | 10.02.2016 | ||
LT | 10.02.2016 | ||
LV | 10.02.2016 | ||
NL | 10.02.2016 | ||
PL | 10.02.2016 | ||
RS | 10.02.2016 | ||
SE | 10.02.2016 | ||
NO | 10.05.2016 | ||
GR | 11.05.2016 | ||
IS | 10.06.2016 | ||
PT | 13.06.2016 | ||
Former [2016/39] | AT | 10.02.2016 | |
ES | 10.02.2016 | ||
FI | 10.02.2016 | ||
HR | 10.02.2016 | ||
IT | 10.02.2016 | ||
LT | 10.02.2016 | ||
LV | 10.02.2016 | ||
NL | 10.02.2016 | ||
PL | 10.02.2016 | ||
RS | 10.02.2016 | ||
SE | 10.02.2016 | ||
NO | 10.05.2016 | ||
GR | 11.05.2016 | ||
IS | 10.06.2016 | ||
PT | 13.06.2016 | ||
Former [2016/38] | AT | 10.02.2016 | |
ES | 10.02.2016 | ||
FI | 10.02.2016 | ||
HR | 10.02.2016 | ||
IT | 10.02.2016 | ||
LT | 10.02.2016 | ||
NL | 10.02.2016 | ||
PL | 10.02.2016 | ||
NO | 10.05.2016 | ||
GR | 11.05.2016 | ||
IS | 10.06.2016 | ||
PT | 13.06.2016 | ||
Former [2016/36] | AT | 10.02.2016 | |
ES | 10.02.2016 | ||
FI | 10.02.2016 | ||
HR | 10.02.2016 | ||
IT | 10.02.2016 | ||
LT | 10.02.2016 | ||
NL | 10.02.2016 | ||
PL | 10.02.2016 | ||
NO | 10.05.2016 | ||
GR | 11.05.2016 | ||
Former [2016/35] | ES | 10.02.2016 | |
FI | 10.02.2016 | ||
HR | 10.02.2016 | ||
NO | 10.05.2016 | ||
GR | 11.05.2016 | Documents cited: | Search | [XAI]GB2444373 (NANOMETRICS INC [CA]) [X] 1-3,5,10 * abstract * * page 3, lines 9-21 * * page 5, line 23 - page 9, line 10 * * figures 2,4 * [A] 4,6-8 [I] 9,11; | [XAI]US5203208 (BERNSTEIN JONATHAN J [US]) [X] 1-3,5,10 * abstract * * column 2, line 17 - column 3, line 32 * * figure 1 * [A] 4,6-8 [I] 9,11; | [XAI]WO03054477 (THALES SA [FR], et al) [X] 1,3,5,7,8,10 * abstract * * page 6, line 9 - page 15, line 35 * * figures 1-6 * [A] 2,4,6 [I] 9,11; | [XAI]WO02093180 (HONEYWELL INT INC [US]) [X] 1-3,5,10 * abstract * * page 6, line 28 - page 12, line 30 * * figures 2,3 * [A] 4,6-8 [I] 9,11; | [XPL]WO2011000644 (THALES SA [FR], et al) [XP] 1-7,10 * abstract * * page 7, line 20 - page 15, line 2 * * figures 1a,1b,3a,3b * [L] ; | [A]US2004187578 (MALAMETZ DAVID L [US], et al) [A] 1-11 * abstract * * page 1, paragraphs 11,12 * * page 2, paragraph 16 * * figure 2 *; | [A]US6230567 (GREIFF PAUL [US]) [A] 1-11 * abstract * * column 3, lines 7-30 * * column 3, line 54 - column 4, line 27 * * figures 1,2 * |