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Extract from the Register of European Patents

EP About this file: EP2472327

EP2472327 - Photoresists and methods for use thereof [Right-click to bookmark this link]
StatusThe application is deemed to be withdrawn
Status updated on  31.10.2014
Database last updated on 19.10.2024
Most recent event   Tooltip31.10.2014Application deemed to be withdrawnpublished on 03.12.2014  [2014/49]
Applicant(s)For all designated states
Rohm and Haas Electronic Materials LLC
455 Forest Street
Marlborough, MA 01752 / US
[2012/27]
Inventor(s)01 / Pohlers, Gerhard
49 Evelyn Road
Needham, MA 02494 / US
02 / Caporale, Stefan J.
62 Thomas Drive
Marlborough, MA 01752 / US
 [2012/27]
Representative(s)Buckley, Guy Julian
Patent Outsourcing Limited
1 King Street
Bakewell
Derbyshire DE45 1DZ / GB
[N/P]
Former [2012/27]Buckley, Guy Julian
Patent Outsourcing Limited 1 King Street Bakewell
Derbyshire DE45 1DZ / GB
Application number, filing date11195276.822.12.2011
[2012/27]
Priority number, dateUS201061428777P30.12.2010         Original published format: US 201061428777 P
[2012/27]
Filing languageEN
Procedural languageEN
PublicationType: A1 Application with search report 
No.:EP2472327
Date:04.07.2012
Language:EN
[2012/27]
Search report(s)(Supplementary) European search report - dispatched on:EP12.04.2012
ClassificationIPC:G03F7/039, G03F7/40, H01L21/266
[2012/27]
CPC:
H01L21/266 (EP,US); G03F7/0395 (KR); G03F7/0392 (EP,US);
G03F7/0397 (EP,US); G03F7/09 (EP,US); G03F7/40 (EP,US);
H01L21/0273 (KR); H01L21/0274 (KR); H01L21/0279 (KR) (-)
Designated contracting statesAL,   AT,   BE,   BG,   CH,   CY,   CZ,   DE,   DK,   EE,   ES,   FI,   FR,   GB,   GR,   HR,   HU,   IE,   IS,   IT,   LI,   LT,   LU,   LV,   MC,   MK,   MT,   NL,   NO,   PL,   PT,   RO,   RS,   SE,   SI,   SK,   SM,   TR [2012/27]
Extension statesBANot yet paid
MENot yet paid
TitleGerman:Fotoresiste und Verwendungsverfahren dafür[2012/27]
English:Photoresists and methods for use thereof[2012/27]
French:Photorésines et leurs procédés d'utilisation[2012/27]
Examination procedure22.12.2011Examination requested  [2012/27]
24.04.2012Despatch of a communication from the examining division (Time limit: M06)
04.11.2012Reply to a communication from the examining division
01.07.2014Application deemed to be withdrawn, date of legal effect  [2014/49]
25.07.2014Despatch of communication that the application is deemed to be withdrawn, reason: renewal fee not paid in time  [2014/49]
Divisional application(s)The date of the Examining Division's first communication in respect of the earliest application for which a communication has been issued is  24.04.2012
Fees paidPenalty fee
Additional fee for renewal fee
31.12.201303   M06   Not yet paid
Opt-out from the exclusive  Tooltip
competence of the Unified
Patent Court		 See the Register of the Unified Patent Court for opt-out data
Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court.
Documents cited:Search[X]US2003134232  (YOKOYAMA YOSHIYUKI [JP], et al) [X] 1-13 * paragraphs [0060] , [0116]; examples 1-9; claims 1-19 *;
 [X]US6887644  (NOZAKI KOJI [JP], et al) [X] 1-3,5,8,9,11-13 * Copolymers (V) and (VI); paragraph [0072]; claims 1-27 *;
 [X]US2007026339  (ALLEN ROBERT D [US], et al) [X] 1-13 * Formula (XIX); paragraphs [0013] , [0048] , [0052] , [0053] , [0065] *;
 [X]WO2008023750  (JSR CORP [JP], et al) [X] 1-3,5,7-9,11-13 * Formula (II);; claims 1-12 *;
 [X]US2005079438  (CAO HEIDI [US], et al) [X] 1-3,5,7-9,11-13 * paragraphs [0001] , [0019]; figure 4; claims 1-26 *;
 [X]US2004007382  (MORTINI BENEDICTE [FR]) [X] 1-3,5,7,9,11-13 * paragraph [0045]; figure 1; claims 1-33 *;
 [X]US2009130590  (CHEN KUANG-JUNG [US], et al) [X] 1-3,5,7-9,11-13 * paragraphs [0043] , [0053]; claims 1-25 *
by applicantUS6124217
 US6153504
 US6245682
 US6042997
 US5492793
 US5843624
 US6057083
 US4968581
 US4883740
 US4810613
 US4491628
 CA2001384
 US5186383
 US5902472
 US5990564
 US6099713
 US6013572
 EP1148548
The EPO accepts no responsibility for the accuracy of data originating from other authorities; in particular, it does not guarantee that it is complete, up to date or fit for specific purposes.