EP2647044 - ASSEMBLY OF STACKED MICROELECTRONIC COMPONENTS HAVING THROUGH-SILICON VIAS, AND CORRESPONDING METHOD OF MANUFACTURE [Right-click to bookmark this link] | |||
Former [2013/41] | MICROELECTRONIC ASSEMBLY WITH PLURAL STACKED ACTIVE CHIPS HAVING THROUGH - SILICON VIAS FORMED IN STAGES | ||
[2020/09] | Status | No opposition filed within time limit Status updated on 11.06.2021 Database last updated on 03.09.2024 | |
Former | The patent has been granted Status updated on 03.07.2020 | ||
Former | Grant of patent is intended Status updated on 24.02.2020 | ||
Former | Examination is in progress Status updated on 03.05.2019 | Most recent event Tooltip | 27.04.2024 | Lapse of the patent in a contracting state New state(s): MK | published on 29.05.2024 [2024/22] | Applicant(s) | For all designated states Tessera, Inc. 3025 Orchard Parkway San Jose, CA 95134 / US | [2013/41] | Inventor(s) | 01 /
OGANESIAN, Vage C/o Tessera Research LLC 3025 Orchard Parkway San Jose, CA 95134 / US | 02 /
HABA, Belgacem C/o Tessera Research Llc 3025 OrchardParkway San Jose, CA 95134 / US | 03 /
MOHAMMED, Ilyas C/o Tessera Research LLC 3025 Orchard Parkway San Jose, CA 95134 / US | 04 /
MITCHELL, Craig C/o Tessera Research LLC 3025 Orchard Parkway San Jose, CA 95134 / US | 05 /
SAVALIA, Piyush C/o Tessera Research LLC 3025 Orchard Parkway San Jose, CA 95134 / US | [2013/41] | Representative(s) | Clark, Jane Anne, et al Mathys & Squire The Shard 32 London Bridge Street London SE1 9SG / GB | [N/P] |
Former [2020/32] | Clark, Jane Anne, et al Mathys & Squire LLP The Shard 32 London Bridge Street London SE1 9SG / GB | ||
Former [2013/41] | Clark, Jane Anne, et al Mathys & Squire LLP 120 Holborn London EC1N 2SQ / GB | Application number, filing date | 11711724.2 | 23.03.2011 | [2020/32] | WO2011US29568 | Priority number, date | US201113051414 | 18.03.2011 Original published format: US201113051414 | US20100419037P | 02.12.2010 Original published format: US 419037 P | [2013/41] | Filing language | EN | Procedural language | EN | Publication | Type: | A1 Application with search report | No.: | WO2012074571 | Date: | 07.06.2012 | Language: | EN | [2012/23] | Type: | A1 Application with search report | No.: | EP2647044 | Date: | 09.10.2013 | Language: | EN | The application published by WIPO in one of the EPO official languages on 07.06.2012 takes the place of the publication of the European patent application. | [2013/41] | Type: | B1 Patent specification | No.: | EP2647044 | Date: | 05.08.2020 | Language: | EN | [2020/32] | Search report(s) | International search report - published on: | EP | 07.06.2012 | Classification | IPC: | H01L21/768, H01L23/31, H01L23/48, H01L25/065 | [2020/09] | CPC: |
H01L21/76898 (EP,US);
H01L23/48 (KR);
H01L25/00 (US);
H01L23/12 (KR);
H01L23/3178 (EP,US);
H01L23/481 (EP,US);
H01L24/81 (US);
H01L24/92 (EP,US);
H01L24/94 (EP,US);
H01L25/0657 (EP,US);
H01L25/50 (EP,US);
H01L2224/0401 (EP,US);
H01L2224/05009 (EP,US);
H01L2224/13025 (EP,US);
H01L2224/16225 (EP,US);
H01L2224/29109 (EP,US);
H01L2224/29111 (EP,US);
H01L2224/29144 (EP,US);
H01L2224/29188 (EP,US);
H01L2224/2919 (EP,US);
H01L2224/32145 (EP,US);
H01L2224/32245 (EP,US);
H01L2224/73253 (EP,US);
H01L2224/83005 (EP,US);
H01L2224/9202 (EP,US);
H01L2224/94 (EP,US);
H01L2225/06513 (EP,US);
H01L2225/06527 (EP,US);
H01L2225/06541 (EP,US);
H01L2924/10253 (EP,US);
H01L2924/1032 (EP,US);
H01L2924/1037 (EP,US);
H01L2924/12042 (EP,US);
H01L2924/14 (EP,US);
H01L2924/1433 (EP,US);
H01L2924/1436 (EP,US);
| C-Set: |
H01L2224/94, H01L2224/83 (EP,US);
H01L2924/12042, H01L2924/00 (US,EP) |
Former IPC [2013/41] | H01L23/48, H01L25/065 | Designated contracting states | AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LI, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR [2013/41] | Extension states | BA | Not yet paid | ME | Not yet paid | Title | German: | ANORDNUNG VON GESTAPELTEN MIKROELEKTRONISCHEN KOMPONENTEN MIT DURCHKONTAKTIERUNGEN, SOWIE ZUGEHÖRIGES HERSTELLUNGSVERFAHREN | [2020/13] | English: | ASSEMBLY OF STACKED MICROELECTRONIC COMPONENTS HAVING THROUGH-SILICON VIAS, AND CORRESPONDING METHOD OF MANUFACTURE | [2020/13] | French: | ENSEMBLE DE COMPOSANTS MICROÉLECTRONIQUES EMPILÉS AYANT DES INTERCONNEXIONS VERTICALES ET PROCÉDÉ DE FABRICATION CORRESPONDANT | [2020/13] |
Former [2013/41] | MIKROELEKTRONISCHE ANORDNUNG MIT MEHREREN GESTAPELTEN AKTIVEN CHIPS MIT SILIZIUMDURCHKONTAKTIERUNGEN IN STUFEN | ||
Former [2013/41] | MICROELECTRONIC ASSEMBLY WITH PLURAL STACKED ACTIVE CHIPS HAVING THROUGH - SILICON VIAS FORMED IN STAGES | ||
Former [2013/41] | ENSEMBLE MICROÉLECTRONIQUE AYANT PLUSIEURS PUCES ACTIVES EMPILÉES AYANT DES INTERCONNEXIONS VERTICALES FORMÉES EN ÉTAGES | Entry into regional phase | 20.06.2013 | National basic fee paid | 20.06.2013 | Designation fee(s) paid | 20.06.2013 | Examination fee paid | Examination procedure | 20.06.2013 | Examination requested [2013/41] | 22.01.2014 | Amendment by applicant (claims and/or description) | 07.05.2019 | Despatch of a communication from the examining division (Time limit: M04) | 17.09.2019 | Reply to a communication from the examining division | 17.12.2019 | Despatch of a communication from the examining division (Time limit: M04) | 08.01.2020 | Reply to a communication from the examining division | 25.02.2020 | Communication of intention to grant the patent | 24.06.2020 | Fee for grant paid | 24.06.2020 | Fee for publishing/printing paid | 24.06.2020 | Receipt of the translation of the claim(s) | Divisional application(s) | The date of the Examining Division's first communication in respect of the earliest application for which a communication has been issued is 07.05.2019 | Opposition(s) | 07.05.2021 | No opposition filed within time limit [2021/28] | Fees paid | Renewal fee | 20.06.2013 | Renewal fee patent year 03 | 12.03.2014 | Renewal fee patent year 04 | 27.03.2015 | Renewal fee patent year 05 | 31.03.2016 | Renewal fee patent year 06 | 27.03.2017 | Renewal fee patent year 07 | 27.03.2018 | Renewal fee patent year 08 | 27.03.2019 | Renewal fee patent year 09 | 27.03.2020 | Renewal fee patent year 10 |
Opt-out from the exclusive Tooltip competence of the Unified Patent Court | See the Register of the Unified Patent Court for opt-out data | ||
Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court. | Lapses during opposition Tooltip | HU | 23.03.2011 | AL | 05.08.2020 | AT | 05.08.2020 | CY | 05.08.2020 | CZ | 05.08.2020 | DK | 05.08.2020 | EE | 05.08.2020 | ES | 05.08.2020 | FI | 05.08.2020 | HR | 05.08.2020 | IT | 05.08.2020 | LT | 05.08.2020 | LV | 05.08.2020 | MC | 05.08.2020 | MK | 05.08.2020 | NL | 05.08.2020 | PL | 05.08.2020 | RO | 05.08.2020 | RS | 05.08.2020 | SE | 05.08.2020 | SI | 05.08.2020 | SK | 05.08.2020 | SM | 05.08.2020 | BG | 05.11.2020 | NO | 05.11.2020 | GR | 06.11.2020 | IS | 05.12.2020 | PT | 07.12.2020 | GB | 23.03.2021 | IE | 23.03.2021 | LU | 23.03.2021 | BE | 31.03.2021 | CH | 31.03.2021 | FR | 31.03.2021 | LI | 31.03.2021 | [2024/22] |
Former [2023/27] | HU | 23.03.2011 | |
AL | 05.08.2020 | ||
AT | 05.08.2020 | ||
CY | 05.08.2020 | ||
CZ | 05.08.2020 | ||
DK | 05.08.2020 | ||
EE | 05.08.2020 | ||
ES | 05.08.2020 | ||
FI | 05.08.2020 | ||
HR | 05.08.2020 | ||
IT | 05.08.2020 | ||
LT | 05.08.2020 | ||
LV | 05.08.2020 | ||
MC | 05.08.2020 | ||
NL | 05.08.2020 | ||
PL | 05.08.2020 | ||
RO | 05.08.2020 | ||
RS | 05.08.2020 | ||
SE | 05.08.2020 | ||
SI | 05.08.2020 | ||
SK | 05.08.2020 | ||
SM | 05.08.2020 | ||
BG | 05.11.2020 | ||
NO | 05.11.2020 | ||
GR | 06.11.2020 | ||
IS | 05.12.2020 | ||
PT | 07.12.2020 | ||
GB | 23.03.2021 | ||
IE | 23.03.2021 | ||
LU | 23.03.2021 | ||
BE | 31.03.2021 | ||
CH | 31.03.2021 | ||
FR | 31.03.2021 | ||
LI | 31.03.2021 | ||
Former [2023/24] | AL | 05.08.2020 | |
AT | 05.08.2020 | ||
CY | 05.08.2020 | ||
CZ | 05.08.2020 | ||
DK | 05.08.2020 | ||
EE | 05.08.2020 | ||
ES | 05.08.2020 | ||
FI | 05.08.2020 | ||
HR | 05.08.2020 | ||
IT | 05.08.2020 | ||
LT | 05.08.2020 | ||
LV | 05.08.2020 | ||
MC | 05.08.2020 | ||
NL | 05.08.2020 | ||
PL | 05.08.2020 | ||
RO | 05.08.2020 | ||
RS | 05.08.2020 | ||
SE | 05.08.2020 | ||
SI | 05.08.2020 | ||
SK | 05.08.2020 | ||
SM | 05.08.2020 | ||
BG | 05.11.2020 | ||
NO | 05.11.2020 | ||
GR | 06.11.2020 | ||
IS | 05.12.2020 | ||
PT | 07.12.2020 | ||
GB | 23.03.2021 | ||
IE | 23.03.2021 | ||
LU | 23.03.2021 | ||
BE | 31.03.2021 | ||
CH | 31.03.2021 | ||
FR | 31.03.2021 | ||
LI | 31.03.2021 | ||
Former [2022/34] | AL | 05.08.2020 | |
AT | 05.08.2020 | ||
CZ | 05.08.2020 | ||
DK | 05.08.2020 | ||
EE | 05.08.2020 | ||
ES | 05.08.2020 | ||
FI | 05.08.2020 | ||
HR | 05.08.2020 | ||
IT | 05.08.2020 | ||
LT | 05.08.2020 | ||
LV | 05.08.2020 | ||
MC | 05.08.2020 | ||
NL | 05.08.2020 | ||
PL | 05.08.2020 | ||
RO | 05.08.2020 | ||
RS | 05.08.2020 | ||
SE | 05.08.2020 | ||
SI | 05.08.2020 | ||
SK | 05.08.2020 | ||
SM | 05.08.2020 | ||
BG | 05.11.2020 | ||
NO | 05.11.2020 | ||
GR | 06.11.2020 | ||
IS | 05.12.2020 | ||
PT | 07.12.2020 | ||
GB | 23.03.2021 | ||
IE | 23.03.2021 | ||
LU | 23.03.2021 | ||
BE | 31.03.2021 | ||
CH | 31.03.2021 | ||
FR | 31.03.2021 | ||
LI | 31.03.2021 | ||
Former [2022/11] | AL | 05.08.2020 | |
AT | 05.08.2020 | ||
CZ | 05.08.2020 | ||
DK | 05.08.2020 | ||
EE | 05.08.2020 | ||
ES | 05.08.2020 | ||
FI | 05.08.2020 | ||
HR | 05.08.2020 | ||
IT | 05.08.2020 | ||
LT | 05.08.2020 | ||
LV | 05.08.2020 | ||
MC | 05.08.2020 | ||
NL | 05.08.2020 | ||
PL | 05.08.2020 | ||
RO | 05.08.2020 | ||
RS | 05.08.2020 | ||
SE | 05.08.2020 | ||
SI | 05.08.2020 | ||
SK | 05.08.2020 | ||
SM | 05.08.2020 | ||
BG | 05.11.2020 | ||
NO | 05.11.2020 | ||
GR | 06.11.2020 | ||
IS | 05.12.2020 | ||
PT | 07.12.2020 | ||
GB | 23.03.2021 | ||
IE | 23.03.2021 | ||
LU | 23.03.2021 | ||
CH | 31.03.2021 | ||
FR | 31.03.2021 | ||
LI | 31.03.2021 | ||
Former [2022/08] | AL | 05.08.2020 | |
AT | 05.08.2020 | ||
CZ | 05.08.2020 | ||
DK | 05.08.2020 | ||
EE | 05.08.2020 | ||
ES | 05.08.2020 | ||
FI | 05.08.2020 | ||
HR | 05.08.2020 | ||
IT | 05.08.2020 | ||
LT | 05.08.2020 | ||
LV | 05.08.2020 | ||
MC | 05.08.2020 | ||
NL | 05.08.2020 | ||
PL | 05.08.2020 | ||
RO | 05.08.2020 | ||
RS | 05.08.2020 | ||
SE | 05.08.2020 | ||
SI | 05.08.2020 | ||
SK | 05.08.2020 | ||
SM | 05.08.2020 | ||
BG | 05.11.2020 | ||
NO | 05.11.2020 | ||
GR | 06.11.2020 | ||
IS | 05.12.2020 | ||
PT | 07.12.2020 | ||
GB | 23.03.2021 | ||
IE | 23.03.2021 | ||
LU | 23.03.2021 | ||
FR | 31.03.2021 | ||
Former [2022/07] | AL | 05.08.2020 | |
AT | 05.08.2020 | ||
CZ | 05.08.2020 | ||
DK | 05.08.2020 | ||
EE | 05.08.2020 | ||
ES | 05.08.2020 | ||
FI | 05.08.2020 | ||
HR | 05.08.2020 | ||
IT | 05.08.2020 | ||
LT | 05.08.2020 | ||
LV | 05.08.2020 | ||
MC | 05.08.2020 | ||
NL | 05.08.2020 | ||
PL | 05.08.2020 | ||
RO | 05.08.2020 | ||
RS | 05.08.2020 | ||
SE | 05.08.2020 | ||
SI | 05.08.2020 | ||
SK | 05.08.2020 | ||
SM | 05.08.2020 | ||
BG | 05.11.2020 | ||
NO | 05.11.2020 | ||
GR | 06.11.2020 | ||
IS | 05.12.2020 | ||
PT | 07.12.2020 | ||
IE | 23.03.2021 | ||
Former [2021/45] | AL | 05.08.2020 | |
AT | 05.08.2020 | ||
CZ | 05.08.2020 | ||
DK | 05.08.2020 | ||
EE | 05.08.2020 | ||
ES | 05.08.2020 | ||
FI | 05.08.2020 | ||
HR | 05.08.2020 | ||
IT | 05.08.2020 | ||
LT | 05.08.2020 | ||
LV | 05.08.2020 | ||
MC | 05.08.2020 | ||
NL | 05.08.2020 | ||
PL | 05.08.2020 | ||
RO | 05.08.2020 | ||
RS | 05.08.2020 | ||
SE | 05.08.2020 | ||
SI | 05.08.2020 | ||
SK | 05.08.2020 | ||
SM | 05.08.2020 | ||
BG | 05.11.2020 | ||
NO | 05.11.2020 | ||
GR | 06.11.2020 | ||
IS | 05.12.2020 | ||
PT | 07.12.2020 | ||
Former [2021/36] | AL | 05.08.2020 | |
AT | 05.08.2020 | ||
CZ | 05.08.2020 | ||
DK | 05.08.2020 | ||
EE | 05.08.2020 | ||
ES | 05.08.2020 | ||
FI | 05.08.2020 | ||
HR | 05.08.2020 | ||
IT | 05.08.2020 | ||
LT | 05.08.2020 | ||
LV | 05.08.2020 | ||
NL | 05.08.2020 | ||
PL | 05.08.2020 | ||
RO | 05.08.2020 | ||
RS | 05.08.2020 | ||
SE | 05.08.2020 | ||
SI | 05.08.2020 | ||
SK | 05.08.2020 | ||
SM | 05.08.2020 | ||
BG | 05.11.2020 | ||
NO | 05.11.2020 | ||
GR | 06.11.2020 | ||
IS | 05.12.2020 | ||
PT | 07.12.2020 | ||
Former [2021/34] | AL | 05.08.2020 | |
AT | 05.08.2020 | ||
CZ | 05.08.2020 | ||
DK | 05.08.2020 | ||
EE | 05.08.2020 | ||
ES | 05.08.2020 | ||
FI | 05.08.2020 | ||
HR | 05.08.2020 | ||
IT | 05.08.2020 | ||
LT | 05.08.2020 | ||
LV | 05.08.2020 | ||
NL | 05.08.2020 | ||
PL | 05.08.2020 | ||
RO | 05.08.2020 | ||
RS | 05.08.2020 | ||
SE | 05.08.2020 | ||
SK | 05.08.2020 | ||
SM | 05.08.2020 | ||
BG | 05.11.2020 | ||
NO | 05.11.2020 | ||
GR | 06.11.2020 | ||
IS | 05.12.2020 | ||
PT | 07.12.2020 | ||
Former [2021/28] | AL | 05.08.2020 | |
AT | 05.08.2020 | ||
CZ | 05.08.2020 | ||
DK | 05.08.2020 | ||
EE | 05.08.2020 | ||
ES | 05.08.2020 | ||
FI | 05.08.2020 | ||
HR | 05.08.2020 | ||
LT | 05.08.2020 | ||
LV | 05.08.2020 | ||
NL | 05.08.2020 | ||
PL | 05.08.2020 | ||
RO | 05.08.2020 | ||
RS | 05.08.2020 | ||
SE | 05.08.2020 | ||
SK | 05.08.2020 | ||
SM | 05.08.2020 | ||
BG | 05.11.2020 | ||
NO | 05.11.2020 | ||
GR | 06.11.2020 | ||
IS | 05.12.2020 | ||
PT | 07.12.2020 | ||
Former [2021/25] | AL | 05.08.2020 | |
AT | 05.08.2020 | ||
CZ | 05.08.2020 | ||
DK | 05.08.2020 | ||
EE | 05.08.2020 | ||
ES | 05.08.2020 | ||
FI | 05.08.2020 | ||
HR | 05.08.2020 | ||
LT | 05.08.2020 | ||
LV | 05.08.2020 | ||
NL | 05.08.2020 | ||
PL | 05.08.2020 | ||
RO | 05.08.2020 | ||
RS | 05.08.2020 | ||
SE | 05.08.2020 | ||
SM | 05.08.2020 | ||
BG | 05.11.2020 | ||
NO | 05.11.2020 | ||
GR | 06.11.2020 | ||
IS | 05.12.2020 | ||
PT | 07.12.2020 | ||
Former [2021/23] | AT | 05.08.2020 | |
CZ | 05.08.2020 | ||
DK | 05.08.2020 | ||
EE | 05.08.2020 | ||
ES | 05.08.2020 | ||
FI | 05.08.2020 | ||
HR | 05.08.2020 | ||
LT | 05.08.2020 | ||
LV | 05.08.2020 | ||
NL | 05.08.2020 | ||
PL | 05.08.2020 | ||
RO | 05.08.2020 | ||
RS | 05.08.2020 | ||
SE | 05.08.2020 | ||
SM | 05.08.2020 | ||
BG | 05.11.2020 | ||
NO | 05.11.2020 | ||
GR | 06.11.2020 | ||
IS | 05.12.2020 | ||
PT | 07.12.2020 | ||
Former [2021/22] | AT | 05.08.2020 | |
CZ | 05.08.2020 | ||
DK | 05.08.2020 | ||
EE | 05.08.2020 | ||
ES | 05.08.2020 | ||
FI | 05.08.2020 | ||
HR | 05.08.2020 | ||
LT | 05.08.2020 | ||
LV | 05.08.2020 | ||
NL | 05.08.2020 | ||
PL | 05.08.2020 | ||
RO | 05.08.2020 | ||
RS | 05.08.2020 | ||
SE | 05.08.2020 | ||
BG | 05.11.2020 | ||
NO | 05.11.2020 | ||
GR | 06.11.2020 | ||
IS | 05.12.2020 | ||
PT | 07.12.2020 | ||
Former [2021/20] | AT | 05.08.2020 | |
DK | 05.08.2020 | ||
ES | 05.08.2020 | ||
FI | 05.08.2020 | ||
HR | 05.08.2020 | ||
LT | 05.08.2020 | ||
LV | 05.08.2020 | ||
NL | 05.08.2020 | ||
PL | 05.08.2020 | ||
RS | 05.08.2020 | ||
SE | 05.08.2020 | ||
BG | 05.11.2020 | ||
NO | 05.11.2020 | ||
GR | 06.11.2020 | ||
IS | 05.12.2020 | ||
PT | 07.12.2020 | ||
Former [2021/12] | AT | 05.08.2020 | |
ES | 05.08.2020 | ||
FI | 05.08.2020 | ||
HR | 05.08.2020 | ||
LT | 05.08.2020 | ||
LV | 05.08.2020 | ||
NL | 05.08.2020 | ||
PL | 05.08.2020 | ||
RS | 05.08.2020 | ||
SE | 05.08.2020 | ||
BG | 05.11.2020 | ||
NO | 05.11.2020 | ||
GR | 06.11.2020 | ||
IS | 05.12.2020 | ||
PT | 07.12.2020 | ||
Former [2021/10] | AT | 05.08.2020 | |
ES | 05.08.2020 | ||
FI | 05.08.2020 | ||
HR | 05.08.2020 | ||
LT | 05.08.2020 | ||
LV | 05.08.2020 | ||
PL | 05.08.2020 | ||
RS | 05.08.2020 | ||
SE | 05.08.2020 | ||
BG | 05.11.2020 | ||
NO | 05.11.2020 | ||
GR | 06.11.2020 | ||
IS | 05.12.2020 | ||
PT | 07.12.2020 | ||
Former [2021/09] | AT | 05.08.2020 | |
ES | 05.08.2020 | ||
FI | 05.08.2020 | ||
LT | 05.08.2020 | ||
SE | 05.08.2020 | ||
BG | 05.11.2020 | ||
NO | 05.11.2020 | ||
GR | 06.11.2020 | ||
PT | 07.12.2020 | ||
Former [2021/08] | ES | 05.08.2020 | |
FI | 05.08.2020 | ||
LT | 05.08.2020 | ||
SE | 05.08.2020 | ||
BG | 05.11.2020 | ||
NO | 05.11.2020 | ||
PT | 07.12.2020 | ||
Former [2021/07] | FI | 05.08.2020 | |
LT | 05.08.2020 | ||
NO | 05.11.2020 | Cited in | International search | [A]US2003178714 (SAKODA HIDEHARU [JP], et al) [A] 16-25* the whole document *; | [X]US2004016942 (MIYAZAWA IKUYA [JP], et al) [X] 1,2,5,6,11-13,24,25 * paragraph [0063]; figure 5 *; | [XY]US2004155354 (HANAOKA TERUNAO [JP], et al) [X] 1-6,8,10-18,20-25 * paragraphs [0165] - [0169] - [ 185]; figures 10, 11 * [Y] 7,9; | [Y]US2006154446 (WOOD ALAN G [US], et al) [Y] 7,9 * paragraphs [0051] , [0 55]; figures 2D-2F *; | [A]US2007035020 (UMEMOTO MITSUO [JP]) [A] 1,12,15,17,18 * figures 8-10 *; | [I]US2008230923 (JO CHA-JEA [KR], et al) [I] 16-25 * paragraphs [0048] - [0065]; figures 3A-E, 4 *; | [X]US2009032966 (LEE JONG HO [KR], et al) [X] 16,20-24 * paragraphs [0036] - [0044] - [0 67] , [0 68] , [0 71]; figures 1A-E, 10, 11, 14 *; | [A]US2009045504 (SUH MIN SUK [KR]) [A] 1-10,12,15,24,25 * figures 3, 5, 7, 9-11 *; | [A]US2010193964 (FAROOQ MUKTA G [US], et al) [A] 1-15,24,25 * paragraph [0046]; figure 12 * | Examination | JP2005019521 | US2007037379 | by applicant | US2008246136 | US20100842717 | US20100842612 | US20100842669 | US20100842692 | US20100842587 | US20100842651 | US20100419033 | US20100958866 |