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Extract from the Register of European Patents

EP About this file: EP2504126

EP2504126 - WAFER POLISHING APPARATUS [Right-click to bookmark this link]
Status	No opposition filed within time limit Status updated on 26.03.2021 Database last updated on 03.08.2024
Former	The patent has been granted Status updated on 17.04.2020
Former	Grant of patent is intended Status updated on 10.12.2019
Most recent event Tooltip	14.06.2024	Lapse of the patent in a contracting state New state(s): TR	published on 17.07.2024 [2024/29]
Applicant(s)	For all designated states LG Siltron Inc. 274, Imsu-dong Gumi-si Gyeongbuk 730-350 / KR
	[2012/40]
Inventor(s)	01 / LEE, Hyung Rak 265 Bunji Dae-ui-ri Gogyeong-myeon Yeongcheon-si Gyeongbuk 770-842 / KR
	[2012/40]
Representative(s)	Novagraaf Technologies Bâtiment O2 2, rue Sarah Bernhardt CS90017 92665 Asnières-sur-Seine Cedex / FR
	[2020/21]
Former [2012/40]	Novagraaf Technologies 122, rue Edouard Vaillant 92593 Levallois-Perret Cedex / FR
Application number, filing date	11731891.5	05.01.2011
	[2020/21]
	WO2011KR00034
Priority number, date	KR20100002311	11.01.2010 Original published format: KR 20100002311
	[2012/40]
Filing language	EN
Procedural language	EN
Publication	Type:	A2 Application without search report
	No.:	WO2011083953
	Date:	14.07.2011
	Language:	EN
	[2011/28]
	Type:	A2 Application without search report
	No.:	EP2504126
	Date:	03.10.2012
	Language:	EN
	The application published by WIPO in one of the EPO official languages on 14.07.2011 takes the place of the publication of the European patent application.
	[2012/40]
	Type:	B1 Patent specification
	No.:	EP2504126
	Date:	20.05.2020
	Language:	EN
	[2020/21]
Search report(s)	International search report - published on:	KR	15.12.2011
	(Supplementary) European search report - dispatched on:	EP	27.07.2016
Classification	IPC:	B24B37/00, H01L21/304, B24B37/08, B24B37/11, B24D13/12	[2019/49]
	CPC:	B24B37/08 (EP,US); B24B37/11 (EP,US); B24D13/12 (EP,US)
	Former IPC [2012/40]	B24B37/00, H01L21/304
Designated contracting states	AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LI, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR [2012/40]
Extension states	BA	Not yet paid
	ME	Not yet paid
Title	German:	WAFERPOLIERVORRICHTUNG	[2012/40]
	English:	WAFER POLISHING APPARATUS	[2012/40]
	French:	APPAREIL DE POLISSAGE DE TRANCHE	[2012/40]
Entry into regional phase	25.06.2012	National basic fee paid
	25.06.2012	Search fee paid
	25.06.2012	Designation fee(s) paid
	25.06.2012	Examination fee paid
Examination procedure	25.06.2012	Examination requested [2012/40]
	03.02.2017	Amendment by applicant (claims and/or description)
	11.12.2019	Communication of intention to grant the patent
	10.04.2020	Fee for grant paid
	10.04.2020	Fee for publishing/printing paid
	10.04.2020	Receipt of the translation of the claim(s)
Divisional application(s)	The date of the Examining Division's first communication in respect of the earliest application for which a communication has been issued is 11.12.2019
Opposition(s)	23.02.2021	No opposition filed within time limit [2021/17]
Fees paid	Renewal fee
	28.01.2013	Renewal fee patent year 03
	17.01.2014	Renewal fee patent year 04
	29.01.2015	Renewal fee patent year 05
	29.01.2016	Renewal fee patent year 06
	08.12.2016	Renewal fee patent year 07
	24.11.2017	Renewal fee patent year 08
	28.01.2019	Renewal fee patent year 09
	30.01.2020	Renewal fee patent year 10
Opt-out from the exclusive Tooltip competence of the Unified Patent Court	See the Register of the Unified Patent Court for opt-out data
	Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court.
Lapses during opposition Tooltip	HU	05.01.2011
	AL	20.05.2020
	AT	20.05.2020
	CY	20.05.2020
	CZ	20.05.2020
	DK	20.05.2020
	EE	20.05.2020
	ES	20.05.2020
	FI	20.05.2020
	HR	20.05.2020
	IT	20.05.2020
	LT	20.05.2020
	LV	20.05.2020
	MC	20.05.2020
	MK	20.05.2020
	NL	20.05.2020
	PL	20.05.2020
	RO	20.05.2020
	RS	20.05.2020
	SE	20.05.2020
	SI	20.05.2020
	SK	20.05.2020
	SM	20.05.2020
	TR	20.05.2020
	BG	20.08.2020
	NO	20.08.2020
	GR	21.08.2020
	PT	21.09.2020
	GB	05.01.2021
	IE	05.01.2021
	LU	05.01.2021
	BE	31.01.2021
	CH	31.01.2021
	FR	31.01.2021
	LI	31.01.2021
	[2024/29]
Former [2024/22]	HU	05.01.2011
	AL	20.05.2020
	AT	20.05.2020
	CY	20.05.2020
	CZ	20.05.2020
	DK	20.05.2020
	EE	20.05.2020
	ES	20.05.2020
	FI	20.05.2020
	HR	20.05.2020
	IT	20.05.2020
	LT	20.05.2020
	LV	20.05.2020
	MC	20.05.2020
	MK	20.05.2020
	NL	20.05.2020
	PL	20.05.2020
	RO	20.05.2020
	RS	20.05.2020
	SE	20.05.2020
	SI	20.05.2020
	SK	20.05.2020
	SM	20.05.2020
	BG	20.08.2020
	NO	20.08.2020
	GR	21.08.2020
	PT	21.09.2020
	GB	05.01.2021
	IE	05.01.2021
	LU	05.01.2021
	BE	31.01.2021
	CH	31.01.2021
	FR	31.01.2021
	LI	31.01.2021
Former [2023/27]	HU	05.01.2011
	AL	20.05.2020
	AT	20.05.2020
	CY	20.05.2020
	CZ	20.05.2020
	DK	20.05.2020
	EE	20.05.2020
	ES	20.05.2020
	FI	20.05.2020
	HR	20.05.2020
	IT	20.05.2020
	LT	20.05.2020
	LV	20.05.2020
	MC	20.05.2020
	NL	20.05.2020
	PL	20.05.2020
	RO	20.05.2020
	RS	20.05.2020
	SE	20.05.2020
	SI	20.05.2020
	SK	20.05.2020
	SM	20.05.2020
	BG	20.08.2020
	NO	20.08.2020
	GR	21.08.2020
	PT	21.09.2020
	GB	05.01.2021
	IE	05.01.2021
	LU	05.01.2021
	BE	31.01.2021
	CH	31.01.2021
	FR	31.01.2021
	LI	31.01.2021
Former [2023/24]	AL	20.05.2020
	AT	20.05.2020
	CY	20.05.2020
	CZ	20.05.2020
	DK	20.05.2020
	EE	20.05.2020
	ES	20.05.2020
	FI	20.05.2020
	HR	20.05.2020
	IT	20.05.2020
	LT	20.05.2020
	LV	20.05.2020
	MC	20.05.2020
	NL	20.05.2020
	PL	20.05.2020
	RO	20.05.2020
	RS	20.05.2020
	SE	20.05.2020
	SI	20.05.2020
	SK	20.05.2020
	SM	20.05.2020
	BG	20.08.2020
	NO	20.08.2020
	GR	21.08.2020
	PT	21.09.2020
	GB	05.01.2021
	IE	05.01.2021
	LU	05.01.2021
	BE	31.01.2021
	CH	31.01.2021
	FR	31.01.2021
	LI	31.01.2021
Former [2022/33]	AL	20.05.2020
	AT	20.05.2020
	CZ	20.05.2020
	DK	20.05.2020
	EE	20.05.2020
	ES	20.05.2020
	FI	20.05.2020
	HR	20.05.2020
	IT	20.05.2020
	LT	20.05.2020
	LV	20.05.2020
	MC	20.05.2020
	NL	20.05.2020
	PL	20.05.2020
	RO	20.05.2020
	RS	20.05.2020
	SE	20.05.2020
	SI	20.05.2020
	SK	20.05.2020
	SM	20.05.2020
	BG	20.08.2020
	NO	20.08.2020
	GR	21.08.2020
	PT	21.09.2020
	GB	05.01.2021
	IE	05.01.2021
	LU	05.01.2021
	BE	31.01.2021
	CH	31.01.2021
	FR	31.01.2021
	LI	31.01.2021
Former [2022/10]	AL	20.05.2020
	AT	20.05.2020
	CZ	20.05.2020
	DK	20.05.2020
	EE	20.05.2020
	ES	20.05.2020
	FI	20.05.2020
	HR	20.05.2020
	IT	20.05.2020
	LT	20.05.2020
	LV	20.05.2020
	MC	20.05.2020
	NL	20.05.2020
	PL	20.05.2020
	RO	20.05.2020
	RS	20.05.2020
	SE	20.05.2020
	SI	20.05.2020
	SK	20.05.2020
	SM	20.05.2020
	BG	20.08.2020
	NO	20.08.2020
	GR	21.08.2020
	PT	21.09.2020
	GB	05.01.2021
	IE	05.01.2021
	LU	05.01.2021
	CH	31.01.2021
	FR	31.01.2021
	LI	31.01.2021
Former [2022/07]	AL	20.05.2020
	AT	20.05.2020
	CZ	20.05.2020
	DK	20.05.2020
	EE	20.05.2020
	ES	20.05.2020
	FI	20.05.2020
	HR	20.05.2020
	IT	20.05.2020
	LT	20.05.2020
	LV	20.05.2020
	MC	20.05.2020
	NL	20.05.2020
	PL	20.05.2020
	RO	20.05.2020
	RS	20.05.2020
	SE	20.05.2020
	SI	20.05.2020
	SK	20.05.2020
	SM	20.05.2020
	BG	20.08.2020
	NO	20.08.2020
	GR	21.08.2020
	IS	20.09.2020
	PT	21.09.2020
	GB	05.01.2021
	IE	05.01.2021
	LU	05.01.2021
	CH	31.01.2021
	FR	31.01.2021
	LI	31.01.2021
Former [2021/52]	AL	20.05.2020
	AT	20.05.2020
	CZ	20.05.2020
	DK	20.05.2020
	EE	20.05.2020
	ES	20.05.2020
	FI	20.05.2020
	HR	20.05.2020
	IT	20.05.2020
	LT	20.05.2020
	LV	20.05.2020
	MC	20.05.2020
	NL	20.05.2020
	PL	20.05.2020
	RO	20.05.2020
	RS	20.05.2020
	SE	20.05.2020
	SI	20.05.2020
	SK	20.05.2020
	SM	20.05.2020
	BG	20.08.2020
	NO	20.08.2020
	GR	21.08.2020
	IS	20.09.2020
	PT	21.09.2020
	GB	05.01.2021
	LU	05.01.2021
	CH	31.01.2021
	FR	31.01.2021
	LI	31.01.2021
Former [2021/49]	AL	20.05.2020
	AT	20.05.2020
	CZ	20.05.2020
	DK	20.05.2020
	EE	20.05.2020
	ES	20.05.2020
	FI	20.05.2020
	HR	20.05.2020
	IT	20.05.2020
	LT	20.05.2020
	LV	20.05.2020
	MC	20.05.2020
	NL	20.05.2020
	PL	20.05.2020
	RO	20.05.2020
	RS	20.05.2020
	SE	20.05.2020
	SI	20.05.2020
	SK	20.05.2020
	SM	20.05.2020
	BG	20.08.2020
	NO	20.08.2020
	GR	21.08.2020
	IS	20.09.2020
	PT	21.09.2020
	GB	05.01.2021
	LU	05.01.2021
	FR	31.01.2021
Former [2021/48]	AL	20.05.2020
	AT	20.05.2020
	CZ	20.05.2020
	DK	20.05.2020
	EE	20.05.2020
	ES	20.05.2020
	FI	20.05.2020
	HR	20.05.2020
	IT	20.05.2020
	LT	20.05.2020
	LV	20.05.2020
	MC	20.05.2020
	NL	20.05.2020
	PL	20.05.2020
	RO	20.05.2020
	RS	20.05.2020
	SE	20.05.2020
	SI	20.05.2020
	SK	20.05.2020
	SM	20.05.2020
	BG	20.08.2020
	NO	20.08.2020
	GR	21.08.2020
	IS	20.09.2020
	PT	21.09.2020
	LU	05.01.2021
	FR	31.01.2021
Former [2021/43]	AL	20.05.2020
	AT	20.05.2020
	CZ	20.05.2020
	DK	20.05.2020
	EE	20.05.2020
	ES	20.05.2020
	FI	20.05.2020
	HR	20.05.2020
	IT	20.05.2020
	LT	20.05.2020
	LV	20.05.2020
	MC	20.05.2020
	NL	20.05.2020
	PL	20.05.2020
	RO	20.05.2020
	RS	20.05.2020
	SE	20.05.2020
	SI	20.05.2020
	SK	20.05.2020
	SM	20.05.2020
	BG	20.08.2020
	NO	20.08.2020
	GR	21.08.2020
	IS	20.09.2020
	PT	21.09.2020
	LU	05.01.2021
Former [2021/40]	AL	20.05.2020
	AT	20.05.2020
	CZ	20.05.2020
	DK	20.05.2020
	EE	20.05.2020
	ES	20.05.2020
	FI	20.05.2020
	HR	20.05.2020
	IT	20.05.2020
	LT	20.05.2020
	LV	20.05.2020
	MC	20.05.2020
	NL	20.05.2020
	PL	20.05.2020
	RO	20.05.2020
	RS	20.05.2020
	SE	20.05.2020
	SI	20.05.2020
	SK	20.05.2020
	SM	20.05.2020
	BG	20.08.2020
	NO	20.08.2020
	GR	21.08.2020
	IS	20.09.2020
	PT	21.09.2020
Former [2021/24]	AL	20.05.2020
	AT	20.05.2020
	CZ	20.05.2020
	DK	20.05.2020
	EE	20.05.2020
	ES	20.05.2020
	FI	20.05.2020
	HR	20.05.2020
	IT	20.05.2020
	LT	20.05.2020
	LV	20.05.2020
	NL	20.05.2020
	PL	20.05.2020
	RO	20.05.2020
	RS	20.05.2020
	SE	20.05.2020
	SI	20.05.2020
	SK	20.05.2020
	SM	20.05.2020
	BG	20.08.2020
	NO	20.08.2020
	GR	21.08.2020
	IS	20.09.2020
	PT	21.09.2020
Former [2021/10]	AL	20.05.2020
	AT	20.05.2020
	CZ	20.05.2020
	DK	20.05.2020
	EE	20.05.2020
	ES	20.05.2020
	FI	20.05.2020
	HR	20.05.2020
	IT	20.05.2020
	LT	20.05.2020
	LV	20.05.2020
	NL	20.05.2020
	PL	20.05.2020
	RO	20.05.2020
	RS	20.05.2020
	SE	20.05.2020
	SK	20.05.2020
	SM	20.05.2020
	BG	20.08.2020
	NO	20.08.2020
	GR	21.08.2020
	IS	20.09.2020
	PT	21.09.2020
Former [2021/09]	AL	20.05.2020
	AT	20.05.2020
	CZ	20.05.2020
	DK	20.05.2020
	EE	20.05.2020
	ES	20.05.2020
	FI	20.05.2020
	HR	20.05.2020
	IT	20.05.2020
	LT	20.05.2020
	LV	20.05.2020
	NL	20.05.2020
	RO	20.05.2020
	RS	20.05.2020
	SE	20.05.2020
	SM	20.05.2020
	BG	20.08.2020
	NO	20.08.2020
	GR	21.08.2020
	IS	20.09.2020
	PT	21.09.2020
Former [2021/08]	AL	20.05.2020
	DK	20.05.2020
	ES	20.05.2020
	FI	20.05.2020
	HR	20.05.2020
	LT	20.05.2020
	LV	20.05.2020
	NL	20.05.2020
	RO	20.05.2020
	RS	20.05.2020
	SE	20.05.2020
	SM	20.05.2020
	BG	20.08.2020
	NO	20.08.2020
	GR	21.08.2020
	IS	20.09.2020
	PT	21.09.2020
Former [2021/04]	AL	20.05.2020
	FI	20.05.2020
	HR	20.05.2020
	LT	20.05.2020
	LV	20.05.2020
	NL	20.05.2020
	RS	20.05.2020
	SE	20.05.2020
	BG	20.08.2020
	NO	20.08.2020
	GR	21.08.2020
	IS	20.09.2020
	PT	21.09.2020
Former [2021/01]	FI	20.05.2020
	HR	20.05.2020
	LT	20.05.2020
	LV	20.05.2020
	RS	20.05.2020
	SE	20.05.2020
	BG	20.08.2020
	NO	20.08.2020
	GR	21.08.2020
	IS	20.09.2020
	PT	21.09.2020
Former [2020/51]	FI	20.05.2020
	HR	20.05.2020
	LT	20.05.2020
	LV	20.05.2020
	RS	20.05.2020
	SE	20.05.2020
	NO	20.08.2020
	GR	21.08.2020
	IS	20.09.2020
	PT	21.09.2020
Former [2020/50]	FI	20.05.2020
	HR	20.05.2020
	LT	20.05.2020
	LV	20.05.2020
	SE	20.05.2020
	NO	20.08.2020
	GR	21.08.2020
	IS	20.09.2020
	PT	21.09.2020
Former [2020/48]	FI	20.05.2020
	LT	20.05.2020
	SE	20.05.2020
	NO	20.08.2020
	IS	20.09.2020
	PT	21.09.2020
Former [2020/47]	LT	20.05.2020
	NO	20.08.2020
	IS	20.09.2020
Former [2020/46]	IS	20.09.2020
Documents cited:	Search	[Y]US5351447 (GRAUERT ROBERT J [US]) [Y] 6 * figure 1 *;
		[Y]WO9640473 (CLOVER RICHMOND B [US]) [Y] 11-13 * figures 3,10,18 *;
		[XYI]JPH1190801 (TOYO ADVANCED TECH CO) [X] 1,3,4,7-9 * abstract * [Y] 5,6,11-13 [I] 2,10;
		[Y]EP1002626 (CHARTERED SEMICONDUCTOR MFG [SG]) [Y] 5 * paragraph [0040]; figures 3B, 4A, 4B *;
		[A]JP2001030158 (SONY CORP) [A] 6* figure 2 *
	International search	[A]JPH1080861 (SUPER SILICON KENKYUSHO KK);
		[X]JPH1190801 (TOYO ADVANCED TECH CO);
		[Y]JP2000108022 (SYSTEMSEIKO CO LTD);
		[A]JP2009285774 (SHOWA DENKO KK)
	by applicant	JPH1190801

The EPO accepts no responsibility for the accuracy of data originating from other authorities; in particular, it does not guarantee that it is complete, up to date or fit for specific purposes.

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