EP2568062 - STAGE HEATER AND METHOD FOR PRODUCING SHAFT [Right-click to bookmark this link] | Status | No opposition filed within time limit Status updated on 22.01.2016 Database last updated on 04.06.2024 | Most recent event Tooltip | 12.10.2018 | Lapse of the patent in a contracting state New state(s): AL | published on 14.11.2018 [2018/46] | Applicant(s) | For all designated states NHK Spring Co., Ltd. 3-10, Fukuura Kanazawa-ku Yokohama-shi Kanagawa 236-0004 / JP | [2013/11] | Inventor(s) | 01 /
KAYAMOTO, Takashi c/o NHK SPRING CO. LTD. 2-1-49 Numame Isehara-shi Kanagawa 259-1126 / JP | 02 /
HIRANO, Satoshi c/o NHK SPRING CO. LTD. 2-1-49 Numame Isehara-shi Kanagawa 259-1126 / JP | [2013/11] | Representative(s) | Hoffmann Eitle Patent- und Rechtsanwälte PartmbB Arabellastraße 30 81925 München / DE | [2015/12] |
Former [2013/11] | HOFFMANN EITLE Patent- und Rechtsanwälte Arabellastrasse 4 81925 München / DE | Application number, filing date | 11777417.4 | 19.04.2011 | WO2011JP59660 | Priority number, date | JP20100107709 | 07.05.2010 Original published format: JP 2010107709 | [2013/11] | Filing language | JA | Procedural language | EN | Publication | Type: | A1 Application with search report | No.: | WO2011138898 | Date: | 10.11.2011 | Language: | JA | [2011/45] | Type: | A1 Application with search report | No.: | EP2568062 | Date: | 13.03.2013 | Language: | EN | [2013/11] | Type: | B1 Patent specification | No.: | EP2568062 | Date: | 18.03.2015 | Language: | EN | [2015/12] | Search report(s) | International search report - published on: | JP | 10.11.2011 | (Supplementary) European search report - dispatched on: | EP | 05.02.2014 | Classification | IPC: | C23C16/458, H01L21/687, H01L21/67 | [2014/10] | CPC: |
C23C16/458 (KR);
C23C16/4586 (EP,US);
H01L21/02 (KR);
H01L21/67103 (EP,US);
H01L21/683 (KR);
H01L21/68792 (EP,US);
H05B3/06 (KR)
(-)
|
Former IPC [2013/11] | C23C16/458, H01L21/02, H01L21/683, H05B3/06 | Designated contracting states | AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LI, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR [2013/11] | Extension states | BA | Not yet paid | ME | Not yet paid | Title | German: | PLATTFORMERHITZER UND VERFAHREN ZUR HERSTELLUNG EINES TRÄGERS DAFÜR | [2013/11] | English: | STAGE HEATER AND METHOD FOR PRODUCING SHAFT | [2013/11] | French: | DISPOSITIF DE CHAUFFAGE DE PLATE-FORME ET PROCÉDÉ DE PRODUCTION D'UN SUPPORT | [2013/11] | Entry into regional phase | 02.11.2012 | Translation filed | 02.11.2012 | National basic fee paid | 02.11.2012 | Search fee paid | 02.11.2012 | Designation fee(s) paid | 02.11.2012 | Examination fee paid | Examination procedure | 02.11.2012 | Examination requested [2013/11] | 03.09.2014 | Amendment by applicant (claims and/or description) | 23.10.2014 | Communication of intention to grant the patent | 05.02.2015 | Fee for grant paid | 05.02.2015 | Fee for publishing/printing paid | 05.02.2015 | Receipt of the translation of the claim(s) | Divisional application(s) | The date of the Examining Division's first communication in respect of the earliest application for which a communication has been issued is 23.10.2014 | Opposition(s) | 21.12.2015 | No opposition filed within time limit [2016/08] | Fees paid | Renewal fee | 15.04.2013 | Renewal fee patent year 03 | 25.03.2014 | Renewal fee patent year 04 |
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Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court. | Lapses during opposition Tooltip | HU | 19.04.2011 | AL | 18.03.2015 | AT | 18.03.2015 | BE | 18.03.2015 | BG | 18.03.2015 | CY | 18.03.2015 | CZ | 18.03.2015 | DK | 18.03.2015 | EE | 18.03.2015 | ES | 18.03.2015 | FI | 18.03.2015 | HR | 18.03.2015 | IT | 18.03.2015 | LT | 18.03.2015 | LV | 18.03.2015 | MC | 18.03.2015 | MK | 18.03.2015 | MT | 18.03.2015 | NL | 18.03.2015 | PL | 18.03.2015 | RO | 18.03.2015 | RS | 18.03.2015 | SE | 18.03.2015 | SI | 18.03.2015 | SK | 18.03.2015 | SM | 18.03.2015 | TR | 18.03.2015 | IE | 19.04.2015 | LU | 19.04.2015 | CH | 30.04.2015 | LI | 30.04.2015 | FR | 18.05.2015 | GB | 18.06.2015 | NO | 18.06.2015 | GR | 19.06.2015 | IS | 18.07.2015 | PT | 20.07.2015 | [2018/46] |
Former [2018/31] | HU | 19.04.2011 | |
AT | 18.03.2015 | ||
BE | 18.03.2015 | ||
BG | 18.03.2015 | ||
CY | 18.03.2015 | ||
CZ | 18.03.2015 | ||
DK | 18.03.2015 | ||
EE | 18.03.2015 | ||
ES | 18.03.2015 | ||
FI | 18.03.2015 | ||
HR | 18.03.2015 | ||
IT | 18.03.2015 | ||
LT | 18.03.2015 | ||
LV | 18.03.2015 | ||
MC | 18.03.2015 | ||
MK | 18.03.2015 | ||
MT | 18.03.2015 | ||
NL | 18.03.2015 | ||
PL | 18.03.2015 | ||
RO | 18.03.2015 | ||
RS | 18.03.2015 | ||
SE | 18.03.2015 | ||
SI | 18.03.2015 | ||
SK | 18.03.2015 | ||
SM | 18.03.2015 | ||
TR | 18.03.2015 | ||
IE | 19.04.2015 | ||
LU | 19.04.2015 | ||
CH | 30.04.2015 | ||
LI | 30.04.2015 | ||
FR | 18.05.2015 | ||
GB | 18.06.2015 | ||
NO | 18.06.2015 | ||
GR | 19.06.2015 | ||
IS | 18.07.2015 | ||
PT | 20.07.2015 | ||
Former [2018/02] | HU | 19.04.2011 | |
AT | 18.03.2015 | ||
BE | 18.03.2015 | ||
BG | 18.03.2015 | ||
CY | 18.03.2015 | ||
CZ | 18.03.2015 | ||
DK | 18.03.2015 | ||
EE | 18.03.2015 | ||
ES | 18.03.2015 | ||
FI | 18.03.2015 | ||
HR | 18.03.2015 | ||
IT | 18.03.2015 | ||
LT | 18.03.2015 | ||
LV | 18.03.2015 | ||
MC | 18.03.2015 | ||
MT | 18.03.2015 | ||
NL | 18.03.2015 | ||
PL | 18.03.2015 | ||
RO | 18.03.2015 | ||
RS | 18.03.2015 | ||
SE | 18.03.2015 | ||
SI | 18.03.2015 | ||
SK | 18.03.2015 | ||
SM | 18.03.2015 | ||
TR | 18.03.2015 | ||
IE | 19.04.2015 | ||
LU | 19.04.2015 | ||
CH | 30.04.2015 | ||
LI | 30.04.2015 | ||
FR | 18.05.2015 | ||
GB | 18.06.2015 | ||
NO | 18.06.2015 | ||
GR | 19.06.2015 | ||
IS | 18.07.2015 | ||
PT | 20.07.2015 | ||
Former [2017/38] | HU | 19.04.2011 | |
AT | 18.03.2015 | ||
BE | 18.03.2015 | ||
BG | 18.03.2015 | ||
CY | 18.03.2015 | ||
CZ | 18.03.2015 | ||
DK | 18.03.2015 | ||
EE | 18.03.2015 | ||
ES | 18.03.2015 | ||
FI | 18.03.2015 | ||
HR | 18.03.2015 | ||
IT | 18.03.2015 | ||
LT | 18.03.2015 | ||
LV | 18.03.2015 | ||
MC | 18.03.2015 | ||
MT | 18.03.2015 | ||
NL | 18.03.2015 | ||
PL | 18.03.2015 | ||
RO | 18.03.2015 | ||
RS | 18.03.2015 | ||
SE | 18.03.2015 | ||
SI | 18.03.2015 | ||
SK | 18.03.2015 | ||
SM | 18.03.2015 | ||
TR | 18.03.2015 | ||
IE | 19.04.2015 | ||
CH | 30.04.2015 | ||
LI | 30.04.2015 | ||
FR | 18.05.2015 | ||
GB | 18.06.2015 | ||
NO | 18.06.2015 | ||
GR | 19.06.2015 | ||
IS | 18.07.2015 | ||
PT | 20.07.2015 | ||
Former [2017/03] | AT | 18.03.2015 | |
BE | 18.03.2015 | ||
CZ | 18.03.2015 | ||
DK | 18.03.2015 | ||
EE | 18.03.2015 | ||
ES | 18.03.2015 | ||
FI | 18.03.2015 | ||
HR | 18.03.2015 | ||
IT | 18.03.2015 | ||
LT | 18.03.2015 | ||
LV | 18.03.2015 | ||
MC | 18.03.2015 | ||
MT | 18.03.2015 | ||
NL | 18.03.2015 | ||
PL | 18.03.2015 | ||
RO | 18.03.2015 | ||
RS | 18.03.2015 | ||
SE | 18.03.2015 | ||
SI | 18.03.2015 | ||
SK | 18.03.2015 | ||
IE | 19.04.2015 | ||
CH | 30.04.2015 | ||
LI | 30.04.2015 | ||
FR | 18.05.2015 | ||
GB | 18.06.2015 | ||
NO | 18.06.2015 | ||
GR | 19.06.2015 | ||
IS | 18.07.2015 | ||
PT | 20.07.2015 | ||
Former [2016/37] | AT | 18.03.2015 | |
BE | 18.03.2015 | ||
CZ | 18.03.2015 | ||
DK | 18.03.2015 | ||
EE | 18.03.2015 | ||
ES | 18.03.2015 | ||
FI | 18.03.2015 | ||
HR | 18.03.2015 | ||
IT | 18.03.2015 | ||
LT | 18.03.2015 | ||
LV | 18.03.2015 | ||
MC | 18.03.2015 | ||
NL | 18.03.2015 | ||
PL | 18.03.2015 | ||
RO | 18.03.2015 | ||
RS | 18.03.2015 | ||
SE | 18.03.2015 | ||
SI | 18.03.2015 | ||
SK | 18.03.2015 | ||
IE | 19.04.2015 | ||
CH | 30.04.2015 | ||
LI | 30.04.2015 | ||
FR | 18.05.2015 | ||
GB | 18.06.2015 | ||
NO | 18.06.2015 | ||
GR | 19.06.2015 | ||
IS | 18.07.2015 | ||
PT | 20.07.2015 | ||
Former [2016/23] | AT | 18.03.2015 | |
CZ | 18.03.2015 | ||
DK | 18.03.2015 | ||
EE | 18.03.2015 | ||
ES | 18.03.2015 | ||
FI | 18.03.2015 | ||
HR | 18.03.2015 | ||
IT | 18.03.2015 | ||
LT | 18.03.2015 | ||
LV | 18.03.2015 | ||
MC | 18.03.2015 | ||
NL | 18.03.2015 | ||
PL | 18.03.2015 | ||
RO | 18.03.2015 | ||
RS | 18.03.2015 | ||
SE | 18.03.2015 | ||
SI | 18.03.2015 | ||
SK | 18.03.2015 | ||
IE | 19.04.2015 | ||
CH | 30.04.2015 | ||
LI | 30.04.2015 | ||
FR | 18.05.2015 | ||
GB | 18.06.2015 | ||
NO | 18.06.2015 | ||
GR | 19.06.2015 | ||
IS | 18.07.2015 | ||
PT | 20.07.2015 | ||
Former [2016/20] | AT | 18.03.2015 | |
CZ | 18.03.2015 | ||
DK | 18.03.2015 | ||
EE | 18.03.2015 | ||
ES | 18.03.2015 | ||
FI | 18.03.2015 | ||
HR | 18.03.2015 | ||
IT | 18.03.2015 | ||
LT | 18.03.2015 | ||
LV | 18.03.2015 | ||
MC | 18.03.2015 | ||
NL | 18.03.2015 | ||
PL | 18.03.2015 | ||
RO | 18.03.2015 | ||
RS | 18.03.2015 | ||
SE | 18.03.2015 | ||
SI | 18.03.2015 | ||
SK | 18.03.2015 | ||
IE | 19.04.2015 | ||
CH | 30.04.2015 | ||
LI | 30.04.2015 | ||
FR | 18.05.2015 | ||
NO | 18.06.2015 | ||
GR | 19.06.2015 | ||
IS | 18.07.2015 | ||
PT | 20.07.2015 | ||
Former [2016/12] | AT | 18.03.2015 | |
CZ | 18.03.2015 | ||
DK | 18.03.2015 | ||
EE | 18.03.2015 | ||
ES | 18.03.2015 | ||
FI | 18.03.2015 | ||
HR | 18.03.2015 | ||
IT | 18.03.2015 | ||
LT | 18.03.2015 | ||
LV | 18.03.2015 | ||
MC | 18.03.2015 | ||
NL | 18.03.2015 | ||
PL | 18.03.2015 | ||
RO | 18.03.2015 | ||
RS | 18.03.2015 | ||
SE | 18.03.2015 | ||
SI | 18.03.2015 | ||
SK | 18.03.2015 | ||
CH | 30.04.2015 | ||
LI | 30.04.2015 | ||
FR | 18.05.2015 | ||
NO | 18.06.2015 | ||
GR | 19.06.2015 | ||
IS | 18.07.2015 | ||
PT | 20.07.2015 | ||
Former [2016/07] | AT | 18.03.2015 | |
CZ | 18.03.2015 | ||
DK | 18.03.2015 | ||
EE | 18.03.2015 | ||
ES | 18.03.2015 | ||
FI | 18.03.2015 | ||
HR | 18.03.2015 | ||
IT | 18.03.2015 | ||
LT | 18.03.2015 | ||
LV | 18.03.2015 | ||
MC | 18.03.2015 | ||
NL | 18.03.2015 | ||
PL | 18.03.2015 | ||
RO | 18.03.2015 | ||
RS | 18.03.2015 | ||
SE | 18.03.2015 | ||
SK | 18.03.2015 | ||
CH | 30.04.2015 | ||
LI | 30.04.2015 | ||
NO | 18.06.2015 | ||
GR | 19.06.2015 | ||
IS | 18.07.2015 | ||
PT | 20.07.2015 | ||
Former [2016/06] | AT | 18.03.2015 | |
CZ | 18.03.2015 | ||
EE | 18.03.2015 | ||
ES | 18.03.2015 | ||
FI | 18.03.2015 | ||
HR | 18.03.2015 | ||
IT | 18.03.2015 | ||
LT | 18.03.2015 | ||
LV | 18.03.2015 | ||
MC | 18.03.2015 | ||
NL | 18.03.2015 | ||
PL | 18.03.2015 | ||
RO | 18.03.2015 | ||
RS | 18.03.2015 | ||
SE | 18.03.2015 | ||
SK | 18.03.2015 | ||
CH | 30.04.2015 | ||
LI | 30.04.2015 | ||
NO | 18.06.2015 | ||
GR | 19.06.2015 | ||
IS | 18.07.2015 | ||
PT | 20.07.2015 | ||
Former [2016/03] | AT | 18.03.2015 | |
CZ | 18.03.2015 | ||
EE | 18.03.2015 | ||
ES | 18.03.2015 | ||
FI | 18.03.2015 | ||
HR | 18.03.2015 | ||
IT | 18.03.2015 | ||
LT | 18.03.2015 | ||
LV | 18.03.2015 | ||
MC | 18.03.2015 | ||
NL | 18.03.2015 | ||
PL | 18.03.2015 | ||
RO | 18.03.2015 | ||
RS | 18.03.2015 | ||
SE | 18.03.2015 | ||
SK | 18.03.2015 | ||
NO | 18.06.2015 | ||
GR | 19.06.2015 | ||
IS | 18.07.2015 | ||
PT | 20.07.2015 | ||
Former [2016/01] | AT | 18.03.2015 | |
CZ | 18.03.2015 | ||
EE | 18.03.2015 | ||
ES | 18.03.2015 | ||
FI | 18.03.2015 | ||
HR | 18.03.2015 | ||
LT | 18.03.2015 | ||
LV | 18.03.2015 | ||
MC | 18.03.2015 | ||
NL | 18.03.2015 | ||
PL | 18.03.2015 | ||
RO | 18.03.2015 | ||
RS | 18.03.2015 | ||
SE | 18.03.2015 | ||
SK | 18.03.2015 | ||
NO | 18.06.2015 | ||
GR | 19.06.2015 | ||
IS | 18.07.2015 | ||
PT | 20.07.2015 | ||
Former [2015/51] | AT | 18.03.2015 | |
CZ | 18.03.2015 | ||
EE | 18.03.2015 | ||
ES | 18.03.2015 | ||
FI | 18.03.2015 | ||
HR | 18.03.2015 | ||
LT | 18.03.2015 | ||
LV | 18.03.2015 | ||
NL | 18.03.2015 | ||
PL | 18.03.2015 | ||
RO | 18.03.2015 | ||
RS | 18.03.2015 | ||
SE | 18.03.2015 | ||
SK | 18.03.2015 | ||
NO | 18.06.2015 | ||
GR | 19.06.2015 | ||
IS | 18.07.2015 | ||
PT | 20.07.2015 | ||
Former [2015/50] | CZ | 18.03.2015 | |
EE | 18.03.2015 | ||
ES | 18.03.2015 | ||
FI | 18.03.2015 | ||
HR | 18.03.2015 | ||
LT | 18.03.2015 | ||
LV | 18.03.2015 | ||
NL | 18.03.2015 | ||
PL | 18.03.2015 | ||
RO | 18.03.2015 | ||
RS | 18.03.2015 | ||
SE | 18.03.2015 | ||
SK | 18.03.2015 | ||
NO | 18.06.2015 | ||
GR | 19.06.2015 | ||
IS | 18.07.2015 | ||
PT | 20.07.2015 | ||
Former [2015/49] | CZ | 18.03.2015 | |
EE | 18.03.2015 | ||
ES | 18.03.2015 | ||
FI | 18.03.2015 | ||
HR | 18.03.2015 | ||
LT | 18.03.2015 | ||
LV | 18.03.2015 | ||
NL | 18.03.2015 | ||
RO | 18.03.2015 | ||
RS | 18.03.2015 | ||
SE | 18.03.2015 | ||
SK | 18.03.2015 | ||
NO | 18.06.2015 | ||
GR | 19.06.2015 | ||
PT | 20.07.2015 | ||
Former [2015/41] | FI | 18.03.2015 | |
HR | 18.03.2015 | ||
LT | 18.03.2015 | ||
LV | 18.03.2015 | ||
NL | 18.03.2015 | ||
RS | 18.03.2015 | ||
SE | 18.03.2015 | ||
NO | 18.06.2015 | ||
GR | 19.06.2015 | ||
Former [2015/39] | FI | 18.03.2015 | |
HR | 18.03.2015 | ||
LT | 18.03.2015 | ||
LV | 18.03.2015 | ||
RS | 18.03.2015 | ||
SE | 18.03.2015 | ||
NO | 18.06.2015 | ||
GR | 19.06.2015 | ||
Former [2015/37] | FI | 18.03.2015 | |
HR | 18.03.2015 | ||
LT | 18.03.2015 | ||
SE | 18.03.2015 | ||
NO | 18.06.2015 | ||
GR | 19.06.2015 | ||
Former [2015/36] | FI | 18.03.2015 | |
HR | 18.03.2015 | ||
LT | 18.03.2015 | ||
SE | 18.03.2015 | ||
NO | 18.06.2015 | ||
Former [2015/35] | LT | 18.03.2015 | |
NO | 18.06.2015 | Documents cited: | Search | [YD]JP2010040422 (NGK INSULATORS LTD) [YD] 1-8 * abstract *; | [Y]WO2009109016 (COMMW SCIENT IND RES ORG [AU], et al) [Y] 1-8 * the whole document *; | [A]WO9949501 (APPLIED MATERIALS INC [US]) [A] 1,5 * abstract *; | [A]JP2009291793 (KUROKI KOGYOSHO KK) [A] 1,5 * abstract *; | [A]US2006093736 (RAYBOULD DEREK [US], et al) [A] 1,5 * the whole document * | International search | [Y]JP2008016396 (NHK SPRING CO LTD); | [Y]WO2009109016 (COMMW SCIENT IND RES ORG [AU], et al) | by applicant | JP2010040422 |