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Extract from the Register of European Patents

EP About this file: EP2647037

EP2647037 - METHOD FOR THE HYDROGEN PASSIVATION OF SEMICONDUCTOR LAYERS [Right-click to bookmark this link]
StatusNo opposition filed within time limit
Status updated on  05.02.2016
Database last updated on 26.07.2024
Most recent event   Tooltip12.10.2018Lapse of the patent in a contracting state
New state(s): AL		published on 14.11.2018  [2018/46]
Applicant(s)For all designated states
Evonik Degussa GmbH
Rellinghauser Straße 1-11
45128 Essen / DE
[N/P]
Former [2013/41]For all designated states
Evonik Degussa GmbH
Rellinghauser Straße 1- 11
45128 Essen / DE
Inventor(s)01 / STENNER, Patrik
Martin-Luther-King-Str. 22b
63452 Hanau / DE
02 / WIEBER, Stephan
Marie-Juchacz-Str. 7
76137 Karlsruhe / DE
03 / CÖLLE, Michael
Waldstrasse 52
90596 Schwanstetten / DE
04 / PATZ, Matthias
Lindhorststr. 34
46240 Bottrop / DE
05 / CARIUS, Reinhard
Kommstrasse 8
52428 Jülich / DE
06 / BRONGER, Torsten
Lochnerstraße 7
52064 Aachen / DE
 [2013/41]
Representative(s)Olbricht, Gerhard
Degussa AG
Intellectual Property Mangement
Patente - Marken
Standort Marl, Bau 1042 - PB 15
45764 Marl / DE
[2015/14]
Former [2013/41]Olbricht, Gerhard
Degussa AG Intellectual Property Mangement Patente - Marken Standort Marl Bau 1042 - PB 15
45764 Marl / DE
Application number, filing date11779713.411.11.2011
WO2011EP69921
Priority number, dateDE2010105321403.12.2010         Original published format: DE102010053214
[2013/41]
Filing languageDE
Procedural languageDE
PublicationType: A1 Application with search report
No.:WO2012072403
Date:07.06.2012
Language:DE
[2012/23]
Type: A1 Application with search report 
No.:EP2647037
Date:09.10.2013
Language:DE
The application published by WIPO in one of the EPO official languages on 07.06.2012 takes the place of the publication of the European patent application.
[2013/41]
Type: B1 Patent specification 
No.:EP2647037
Date:01.04.2015
Language:DE
[2015/14]
Search report(s)International search report - published on:EP07.06.2012
ClassificationIPC:H01L21/30, H01L31/18, H05H1/34, H05H1/48
[2013/41]
CPC:
H01L21/3003 (EP,US); H01L21/30 (KR); H01L31/18 (KR);
H01L31/1868 (EP,US); H05H1/48 (EP,KR,US); H01L31/1804 (EP,US);
Y02E10/50 (US); Y02P70/50 (EP,US) (-)
Designated contracting statesAL,   AT,   BE,   BG,   CH,   CY,   CZ,   DE,   DK,   EE,   ES,   FI,   FR,   GB,   GR,   HR,   HU,   IE,   IS,   IT,   LI,   LT,   LU,   LV,   MC,   MK,   MT,   NL,   NO,   PL,   PT,   RO,   RS,   SE,   SI,   SK,   SM,   TR [2013/41]
Extension statesBANot yet paid
MENot yet paid
TitleGerman:VERFAHREN ZUR WASSERSTOFFPASSIVIERUNG VON HALBLEITERSCHICHTEN[2013/41]
English:METHOD FOR THE HYDROGEN PASSIVATION OF SEMICONDUCTOR LAYERS[2013/41]
French:PROCÉDÉ DE PASSIVATION À L'HYDROGÈNE DE COUCHES DE SEMI-CONDUCTEURS[2013/41]
Entry into regional phase10.05.2013National basic fee paid 
10.05.2013Designation fee(s) paid 
10.05.2013Examination fee paid 
Examination procedure10.05.2013Examination requested  [2013/41]
07.01.2014Amendment by applicant (claims and/or description)
25.06.2014Despatch of a communication from the examining division (Time limit: M06)
25.11.2014Reply to a communication from the examining division
15.01.2015Communication of intention to grant the patent
19.02.2015Fee for grant paid
19.02.2015Fee for publishing/printing paid
19.02.2015Receipt of the translation of the claim(s)
Divisional application(s)The date of the Examining Division's first communication in respect of the earliest application for which a communication has been issued is  25.06.2014
Opposition(s)05.01.2016No opposition filed within time limit [2016/10]
Fees paidRenewal fee
28.11.2013Renewal fee patent year 03
25.11.2014Renewal fee patent year 04
Opt-out from the exclusive  Tooltip
competence of the Unified
Patent Court		 See the Register of the Unified Patent Court for opt-out data
Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court.
Lapses during opposition  TooltipHU11.11.2011
AL01.04.2015
BG01.04.2015
CY01.04.2015
CZ01.04.2015
DK01.04.2015
EE01.04.2015
FI01.04.2015
HR01.04.2015
LT01.04.2015
LV01.04.2015
MC01.04.2015
MK01.04.2015
MT01.04.2015
PL01.04.2015
RO01.04.2015
RS01.04.2015
SE01.04.2015
SI01.04.2015
SK01.04.2015
SM01.04.2015
TR01.04.2015
NO01.07.2015
GR02.07.2015
IS01.08.2015
PT03.08.2015
LU11.11.2015
BE30.11.2015
CH30.11.2015
LI30.11.2015
[2018/46]
Former [2018/31]HU11.11.2011
BG01.04.2015
CY01.04.2015
CZ01.04.2015
DK01.04.2015
EE01.04.2015
FI01.04.2015
HR01.04.2015
LT01.04.2015
LV01.04.2015
MC01.04.2015
MK01.04.2015
MT01.04.2015
PL01.04.2015
RO01.04.2015
RS01.04.2015
SE01.04.2015
SI01.04.2015
SK01.04.2015
SM01.04.2015
TR01.04.2015
NO01.07.2015
GR02.07.2015
IS01.08.2015
PT03.08.2015
LU11.11.2015
BE30.11.2015
CH30.11.2015
LI30.11.2015
Former [2017/39]HU11.11.2011
BG01.04.2015
CY01.04.2015
CZ01.04.2015
DK01.04.2015
EE01.04.2015
FI01.04.2015
HR01.04.2015
LT01.04.2015
LV01.04.2015
MC01.04.2015
MT01.04.2015
PL01.04.2015
RO01.04.2015
RS01.04.2015
SE01.04.2015
SI01.04.2015
SK01.04.2015
SM01.04.2015
NO01.07.2015
GR02.07.2015
IS01.08.2015
PT03.08.2015
LU11.11.2015
BE30.11.2015
CH30.11.2015
LI30.11.2015
Former [2016/34]CZ01.04.2015
DK01.04.2015
EE01.04.2015
FI01.04.2015
HR01.04.2015
LT01.04.2015
LV01.04.2015
MC01.04.2015
PL01.04.2015
RO01.04.2015
RS01.04.2015
SI01.04.2015
SK01.04.2015
NO01.07.2015
GR02.07.2015
IS01.08.2015
PT03.08.2015
LU11.11.2015
CH30.11.2015
LI30.11.2015
Former [2016/31]CZ01.04.2015
DK01.04.2015
EE01.04.2015
FI01.04.2015
HR01.04.2015
LT01.04.2015
LV01.04.2015
MC01.04.2015
PL01.04.2015
RO01.04.2015
RS01.04.2015
SI01.04.2015
SK01.04.2015
NO01.07.2015
GR02.07.2015
IS01.08.2015
PT03.08.2015
LU11.11.2015
Former [2016/28]CZ01.04.2015
DK01.04.2015
EE01.04.2015
FI01.04.2015
HR01.04.2015
LT01.04.2015
LV01.04.2015
MC01.04.2015
PL01.04.2015
RO01.04.2015
RS01.04.2015
SI01.04.2015
SK01.04.2015
NO01.07.2015
GR02.07.2015
IS01.08.2015
PT03.08.2015
Former [2016/24]CZ01.04.2015
DK01.04.2015
EE01.04.2015
FI01.04.2015
HR01.04.2015
LT01.04.2015
LV01.04.2015
PL01.04.2015
RO01.04.2015
RS01.04.2015
SI01.04.2015
SK01.04.2015
NO01.07.2015
GR02.07.2015
IS01.08.2015
PT03.08.2015
Former [2016/10]CZ01.04.2015
DK01.04.2015
EE01.04.2015
FI01.04.2015
HR01.04.2015
LT01.04.2015
LV01.04.2015
PL01.04.2015
RO01.04.2015
RS01.04.2015
SK01.04.2015
NO01.07.2015
GR02.07.2015
IS01.08.2015
PT03.08.2015
Former [2016/09]CZ01.04.2015
DK01.04.2015
EE01.04.2015
FI01.04.2015
HR01.04.2015
LT01.04.2015
LV01.04.2015
RS01.04.2015
NO01.07.2015
GR02.07.2015
IS01.08.2015
PT03.08.2015
Former [2016/07]CZ01.04.2015
DK01.04.2015
FI01.04.2015
HR01.04.2015
LT01.04.2015
LV01.04.2015
RS01.04.2015
NO01.07.2015
GR02.07.2015
IS01.08.2015
PT03.08.2015
Former [2015/50]CZ01.04.2015
FI01.04.2015
HR01.04.2015
LT01.04.2015
LV01.04.2015
RS01.04.2015
NO01.07.2015
GR02.07.2015
IS01.08.2015
PT03.08.2015
Former [2015/49]CZ01.04.2015
FI01.04.2015
HR01.04.2015
LT01.04.2015
LV01.04.2015
RS01.04.2015
NO01.07.2015
GR02.07.2015
PT03.08.2015
Cited inInternational search[XYI]US5424103  (AHN BYUNG C [KR]) [X] 1,2,5,7,9-11 * column 1, lines 6-13 * * column 4, line 7 - column 5, line 16 * [Y] 4,8 [I] 3,6;
 [Y]WO2008061602  (PLASMATREAT GMBH [DE], et al) [Y] 4,8* pages 6,18,19 *
ExaminationWO2012072401
 WO2012072406
by applicantUS4343830
 EP0264762
 EP0419693
 US5304509
 US6130397
The EPO accepts no responsibility for the accuracy of data originating from other authorities; in particular, it does not guarantee that it is complete, up to date or fit for specific purposes.