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Extract from the Register of European Patents

EP About this file: EP2650901

EP2650901 - CHARGED PARTICLE BEAM APPARATUS AND METHOD OF IRRADIATING CHARGED PARTICLE BEAM [Right-click to bookmark this link]
StatusThe application has been withdrawn
Status updated on  21.11.2014
Database last updated on 14.09.2024
Most recent event   Tooltip21.11.2014Withdrawal of applicationpublished on 24.12.2014  [2014/52]
Applicant(s)For all designated states
Hitachi High-Technologies Corporation
24-14, Nishi Shimbashi 1-chome
Minato-ku
Tokyo 105-8717 / JP
[N/P]
Former [2013/42]For all designated states
Hitachi High-Technologies Corporation
24-14, Nishi Shimbashi 1-chome Minato-ku
Tokyo 105-8717 / JP
Inventor(s)01 / NOMAGUCHI, Tsunenori
c/o Naka Division
Hitachi High-Technologies Corporation
882 Oaza Ichige
Hitachinaka-shi
Ibaraki 312-8504 / JP
02 / SEKIHARA, Isamu
c/o Naka Division
Hitachi High-Technologies Corporation
882 Oaza Ichige
Hitachinaka-shi
Ibaraki 312-8504 / JP
03 / AGEMURA, Toshihide
c/o Naka Division
Hitachi High-Technologies Corporation
882 Oaza Ichige
Hitachinaka-shi
Ibaraki 312-8504 / JP
 [2013/42]
Representative(s)Beetz & Partner mbB
Patentanwälte
Prinzregentenstraße 54
80538 München / DE
[N/P]
Former [2013/42]Beetz & Partner
Patentanwälte Steinsdorfstrasse 10
80538 München / DE
Application number, filing date11847394.130.11.2011
WO2011JP77670
Priority number, dateJP2010027180606.12.2010         Original published format: JP 2010271806
[2013/42]
Filing languageJA
Procedural languageEN
PublicationType: A1 Application with search report
No.:WO2012077554
Date:14.06.2012
Language:JA
[2012/24]
Type: A1 Application with search report 
No.:EP2650901
Date:16.10.2013
Language:EN
[2013/42]
Search report(s)International search report - published on:JP14.06.2012
ClassificationIPC:H01J37/147, H01J37/317
[2013/42]
CPC:
H01J37/147 (EP,US); H01J29/70 (EP,US); H01J37/023 (EP,US);
H01J37/317 (EP,US); H01J2237/03 (EP,US)
Designated contracting statesAL,   AT,   BE,   BG,   CH,   CY,   CZ,   DE,   DK,   EE,   ES,   FI,   FR,   GB,   GR,   HR,   HU,   IE,   IS,   IT,   LI,   LT,   LU,   LV,   MC,   MK,   MT,   NL,   NO,   PL,   PT,   RO,   RS,   SE,   SI,   SK,   SM,   TR [2013/42]
TitleGerman:VORRICHTUNG FÜR GELADENE PARTIKELSTRAHLEN UND VERFAHREN ZUR AUSSTRAHLUNG GELADENER PARTIKELSTRAHLEN[2013/42]
English:CHARGED PARTICLE BEAM APPARATUS AND METHOD OF IRRADIATING CHARGED PARTICLE BEAM[2013/42]
French:APPAREIL À FAISCEAU DE PARTICULES CHARGÉES ET PROCÉDÉ D'IRRADIATION DE FAISCEAU DE PARTICULES CHARGÉES[2013/42]
Entry into regional phase07.06.2013Translation filed 
08.07.2013National basic fee paid 
08.07.2013Search fee paid 
08.07.2013Designation fee(s) paid 
08.07.2013Examination fee paid 
Examination procedure07.06.2013Amendment by applicant (claims and/or description)
08.07.2013Examination requested  [2013/42]
18.11.2014Application withdrawn by applicant  [2014/52]
Fees paidRenewal fee
02.12.2013Renewal fee patent year 03
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Cited inInternational search[X]JPH03101849U  (NISSIN ELECTRIC CO., LTD.);
 [A]JPH085528  (SHARP KK);
 [A]JP2002117796  (JEOL LTD);
 [A]JP2002148159  (HITACHI LTD);
 [X]JP2003513419  (VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATES, INC.);
 [X]JP2003528659  (GSI GESELLSCHAFT FUER SCHWERIONENFORSCHUNG MBH);
 [A]JP2004362829  (HITACHI HIGH TECH CORP);
 [A]JP2006032154  (NOGUCHI HIROYUKI, et al);
 [XP]JP2011146690  (CANON ANELVA CORP)
by applicantJPH085528
 JP2002148159
 JP2002277364
 JP2004264145
 JP2007193977
The EPO accepts no responsibility for the accuracy of data originating from other authorities; in particular, it does not guarantee that it is complete, up to date or fit for specific purposes.