blank Quick help
blank Maintenance news

Scheduled maintenance

Regular maintenance outages:
between 05.00 and 05.15 hrs CET (Monday to Sunday).

Other outages
Availability
Register Forum

2022.02.11

More...
blank News flashes

News Flashes

New version of the European Patent Register – SPC proceedings information in the Unitary Patent Register.

2024-07-24

More...
blank Related links

Extract from the Register of European Patents

EP About this file: EP2718965

EP2718965 - METHOD FOR PRODUCING A FIELD EFFECT TRANSISTOR WITH IMPLANTATION THROUGH THE SPACERS [Right-click to bookmark this link]
StatusRequest for examination was made
Status updated on  14.03.2014
Database last updated on 31.08.2024
Most recent event   Tooltip05.08.2015New entry: Additional fee for renewal fee: despatch of communication + time limit 
Applicant(s)For all designated states
Commissariat à l'Énergie Atomique et aux Énergies Alternatives
Bâtiment le Ponant D
25 rue Leblanc
75015 Paris / FR
For all designated states
STMicroelectronics, Inc.
750 Canyon Drive, Suite 300
Coppell, TX 75019 / US
[2014/16]
Inventor(s)01 / POSSEME, Nicolas
32 Chemin Louis Le Guennec
F-29660 Carantec / FR
02 / GRENOUILLET, Laurent
171 B Chemin des Vignes
F-38140 Rives / FR
03 / LE TIEC, Yannick
70 Chemin des trois Marie
F-38920 Crolles / FR
04 / LOUBET, Nicolas
24 Knights Bridge Apt D
Guilderland, New York 12084 / US
05 / VINET, Maud
171 B Chemin des Vignes
F-38140 Rives / FR
 [2014/16]
Representative(s)Talbot, Alexandre, et al
Cabinet Hecké
28 Cours Jean Jaurès
38000 Grenoble / FR
[N/P]
Former [2014/16]Talbot, Alexandre, et al
Cabinet Hecké
Europole
10, rue d'Arménie - BP 1537
38025 Grenoble Cedex 1 / FR
Application number, filing date11867399.509.06.2011
WO2011US39774
Filing languageEN
Procedural languageEN
PublicationType: A1 Application with search report
No.:WO2012170027
Date:13.12.2012
Language:EN
[2012/50]
Type: A1 Application with search report 
No.:EP2718965
Date:16.04.2014
Language:EN
The application published by WIPO in one of the EPO official languages on 13.12.2012 takes the place of the publication of the European patent application.
[2014/16]
Search report(s)International search report - published on:US13.12.2012
(Supplementary) European search report - dispatched on:EP10.10.2014
ClassificationIPC:H01L21/336, H01L21/265
[2014/46]
CPC:
H01L21/823418 (EP,US); H01L29/66477 (US); H01L21/2652 (EP,US);
H01L21/2658 (EP,US); H01L21/84 (EP,US); H01L29/66772 (EP,US);
H01L21/26586 (EP,US); H01L29/66545 (EP,US); H01L29/66628 (EP,US) (-)
Former IPC [2014/16]H01L21/336
Designated contracting statesAL,   AT,   BE,   BG,   CH,   CY,   CZ,   DE,   DK,   EE,   ES,   FI,   FR,   GB,   GR,   HR,   HU,   IE,   IS,   IT,   LI,   LT,   LU,   LV,   MC,   MK,   MT,   NL,   NO,   PL,   PT,   RO,   RS,   SE,   SI,   SK,   SM,   TR [2014/16]
TitleGerman:VERFAHREN ZUR HERSTELLUNG EINES FELDEFFEKTTRANSISTORS MIT IMPLANTATION DURCH DIE ABSTANDSHALTER[2014/16]
English:METHOD FOR PRODUCING A FIELD EFFECT TRANSISTOR WITH IMPLANTATION THROUGH THE SPACERS[2014/16]
French:PROCÉDÉ DE FABRICATION D'UN TRANSISTOR À EFFET DE CHAMP COMPORTANT UNE IMPLANTATION À TRAVERS LES ESPACEURS[2014/16]
Entry into regional phase04.12.2013National basic fee paid 
04.12.2013Search fee paid 
04.12.2013Designation fee(s) paid 
04.12.2013Examination fee paid 
Examination procedure04.12.2013Amendment by applicant (claims and/or description)
04.12.2013Examination requested  [2014/16]
18.06.2015Despatch of communication that the application is deemed to be withdrawn, reason: reply to the communication from the examining division not received in time
Fees paidRenewal fee
04.12.2013Renewal fee patent year 03
31.03.2014Renewal fee patent year 04
Penalty fee
Additional fee for renewal fee
30.06.201505   M06   Not yet paid
Opt-out from the exclusive  Tooltip
competence of the Unified
Patent Court
See the Register of the Unified Patent Court for opt-out data
Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court.
Documents cited:Search[A]US5960322  (XIANG QI [US], et al) [A] 1 * figures 3-6 *;
 [A]WO0122487  (KONINKL PHILIPS ELECTRONICS NV [NL], et al) [A] 1* page 10, line 27 - page 11, line 7 *;
 [XY]US6391733  (FISHER PHILIP A [US]) [X] 1 * column 2, line 44 - line 48 * * column 1, lines 20-23 * * column 4, line 54 - column 5, line 18 * * column 5, line 19 - line 34 * [Y] 2-6;
 [A]EP1294026  (SHARP KK [JP]) [A] 1 * figure 1 *;
 [Y]US2005255660  (LIN CHUN TE [TW], et al) [Y] 3 * abstract * * paragraphs [0019] - [0022] *;
 [Y]  - SATO Y ET AL, "Influence of Doping Gradient near a Channel End on Parasitic Series Resistance of Thin-Film Fully-Depleted Metal-Oxide-Semiconductor Field-Effect Transistors", JAPANESE JOURNAL OF APPLIED PHYSICS, JAPAN SOCIETY OF APPLIED PHYSICS, JP, (20041001), vol. 43, no. 10, doi:10.1143/JJAP.43.6948, ISSN 0021-4922, pages 6948 - 6956, XP001516447 [Y] 2,4 * page 6951, column r - page 6952, column r; figure 12 *

DOI:   http://dx.doi.org/10.1143/JJAP.43.6948
 [Y]  - FENOUILLET-BERANGER C ET AL, "Impact of a 10nm ultra-thin BOX (UTBOX) and ground plane on FDSOI devices for 32nm node and below", SOLID STATE ELECTRONICS, ELSEVIER SCIENCE PUBLISHERS, BARKING, GB, vol. 54, no. 9, ISSN 0038-1101, (20100901), pages 849 - 854, (20100608), XP027114250 [Y] 5,6 * figures 1,2 *
International search[Y]US4829356  (ARNDT JUERGEN [DE]);
 [Y]US5441899  (NAKAI TETSUYA [JP], et al);
 [Y]US2005009348  (GHYSELEN BRUNO [FR], et al);
 [Y]US7144786  (VAN BENTUM RALF [DE], et al)
The EPO accepts no responsibility for the accuracy of data originating from other authorities; in particular, it does not guarantee that it is complete, up to date or fit for specific purposes.