EP2518773 - Manufacturing method of semiconductor device [Right-click to bookmark this link] | Status | No opposition filed within time limit Status updated on 17.07.2015 Database last updated on 24.08.2024 | Most recent event Tooltip | 12.10.2018 | Lapse of the patent in a contracting state New state(s): AL | published on 14.11.2018 [2018/46] | Applicant(s) | For all designated states Semiconductor Energy Laboratory Co., Ltd. 398, Hase Atsugi-shi, Kanagawa 243-0036 / JP | [2012/44] | Inventor(s) | 01 /
Koezuka, Junichi c/o Semiconductor Energy Laboratory Co., Ltd. 398, Hase Atsugi-shi Kanagawa 243-0036 / JP | 02 /
Yamade, Naoto c/o Semiconductor Energy Laboratory Co., Ltd. 398, Hase Atsugi-shi Kanagawa 243-0036 / JP | 03 /
Sato, Yuhei c/o Semiconductor Energy Laboratory Co., Ltd. 398, Hase Atsugi-shi Kanagawa 243-0036 / JP | 04 /
Okazaki, Yutaka c/o Semiconductor Energy Laboratory Co., Ltd. 398, Hase Atsugi-shi Kanagawa 243-0036 / JP | 05 /
Yamazaki, Shunpei c/o Semiconductor Energy Laboratory Co., Ltd. 398, Hase Atsugi-shi Kanagawa 243-0036 / JP | [2012/44] | Representative(s) | Grünecker Patent- und Rechtsanwälte PartG mbB Leopoldstraße 4 80802 München / DE | [N/P] |
Former [2012/44] | Grünecker, Kinkeldey, Stockmair & Schwanhäusser Leopoldstrasse 4 80802 München / DE | Application number, filing date | 12165147.5 | 23.04.2012 | [2012/44] | Priority number, date | JP20110100040 | 27.04.2011 Original published format: JP 2011100040 | [2012/44] | Filing language | EN | Procedural language | EN | Publication | Type: | A1 Application with search report | No.: | EP2518773 | Date: | 31.10.2012 | Language: | EN | [2012/44] | Type: | B1 Patent specification | No.: | EP2518773 | Date: | 10.09.2014 | Language: | EN | [2014/37] | Search report(s) | (Supplementary) European search report - dispatched on: | EP | 16.08.2012 | Classification | IPC: | H01L29/786, H01L29/66 | [2012/44] | CPC: |
H01L29/66969 (EP,CN,US);
H01L29/66742 (KR,US);
H01L27/1274 (US);
H01L21/02565 (US);
H01L21/02609 (US);
H01L21/02667 (KR,US);
H01L21/383 (US);
H01L21/44 (US);
H01L21/477 (US);
H01L27/1225 (US);
H01L29/04 (KR);
H01L29/78606 (EP,CN,US);
| Designated contracting states | AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LI, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR [2012/44] | Title | German: | Herstellungsverfahren für ein Halbleiterbauelement | [2012/44] | English: | Manufacturing method of semiconductor device | [2012/44] | French: | Procédé de fabrication d'un dispositif semi-conducteur | [2012/44] | Examination procedure | 26.04.2013 | Amendment by applicant (claims and/or description) | 26.04.2013 | Examination requested [2013/24] | 28.05.2013 | Despatch of a communication from the examining division (Time limit: M04) | 04.10.2013 | Reply to a communication from the examining division | 09.01.2014 | Communication of intention to grant the patent | 26.03.2014 | Disapproval of the communication of intention to grant the patent by the applicant or resumption of examination proceedings by the EPO | 23.05.2014 | Communication of intention to grant the patent | 28.07.2014 | Fee for grant paid | 28.07.2014 | Fee for publishing/printing paid | 28.07.2014 | Receipt of the translation of the claim(s) | Divisional application(s) | The date of the Examining Division's first communication in respect of the earliest application for which a communication has been issued is 28.05.2013 | Opposition(s) | 11.06.2015 | No opposition filed within time limit [2015/34] | Fees paid | Renewal fee | 25.03.2014 | Renewal fee patent year 03 |
Opt-out from the exclusive Tooltip competence of the Unified Patent Court | See the Register of the Unified Patent Court for opt-out data | ||
Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court. | Lapses during opposition Tooltip | HU | 23.04.2012 | AL | 10.09.2014 | AT | 10.09.2014 | BE | 10.09.2014 | BG | 10.09.2014 | CY | 10.09.2014 | CZ | 10.09.2014 | DK | 10.09.2014 | EE | 10.09.2014 | ES | 10.09.2014 | FI | 10.09.2014 | HR | 10.09.2014 | IT | 10.09.2014 | LT | 10.09.2014 | LV | 10.09.2014 | MC | 10.09.2014 | MK | 10.09.2014 | MT | 10.09.2014 | PL | 10.09.2014 | RO | 10.09.2014 | RS | 10.09.2014 | SE | 10.09.2014 | SI | 10.09.2014 | SK | 10.09.2014 | SM | 10.09.2014 | TR | 10.09.2014 | NO | 10.12.2014 | GR | 11.12.2014 | IS | 10.01.2015 | PT | 12.01.2015 | IE | 23.04.2015 | LU | 23.04.2015 | CH | 30.04.2015 | FR | 30.04.2015 | LI | 30.04.2015 | [2018/46] |
Former [2018/31] | HU | 23.04.2012 | |
AT | 10.09.2014 | ||
BE | 10.09.2014 | ||
BG | 10.09.2014 | ||
CY | 10.09.2014 | ||
CZ | 10.09.2014 | ||
DK | 10.09.2014 | ||
EE | 10.09.2014 | ||
ES | 10.09.2014 | ||
FI | 10.09.2014 | ||
HR | 10.09.2014 | ||
IT | 10.09.2014 | ||
LT | 10.09.2014 | ||
LV | 10.09.2014 | ||
MC | 10.09.2014 | ||
MK | 10.09.2014 | ||
MT | 10.09.2014 | ||
PL | 10.09.2014 | ||
RO | 10.09.2014 | ||
RS | 10.09.2014 | ||
SE | 10.09.2014 | ||
SI | 10.09.2014 | ||
SK | 10.09.2014 | ||
SM | 10.09.2014 | ||
TR | 10.09.2014 | ||
NO | 10.12.2014 | ||
GR | 11.12.2014 | ||
IS | 10.01.2015 | ||
PT | 12.01.2015 | ||
IE | 23.04.2015 | ||
LU | 23.04.2015 | ||
CH | 30.04.2015 | ||
FR | 30.04.2015 | ||
LI | 30.04.2015 | ||
Former [2017/38] | HU | 23.04.2012 | |
AT | 10.09.2014 | ||
BE | 10.09.2014 | ||
BG | 10.09.2014 | ||
CY | 10.09.2014 | ||
CZ | 10.09.2014 | ||
DK | 10.09.2014 | ||
EE | 10.09.2014 | ||
ES | 10.09.2014 | ||
FI | 10.09.2014 | ||
HR | 10.09.2014 | ||
IT | 10.09.2014 | ||
LT | 10.09.2014 | ||
LV | 10.09.2014 | ||
MC | 10.09.2014 | ||
MT | 10.09.2014 | ||
PL | 10.09.2014 | ||
RO | 10.09.2014 | ||
RS | 10.09.2014 | ||
SE | 10.09.2014 | ||
SI | 10.09.2014 | ||
SK | 10.09.2014 | ||
SM | 10.09.2014 | ||
TR | 10.09.2014 | ||
NO | 10.12.2014 | ||
GR | 11.12.2014 | ||
IS | 10.01.2015 | ||
PT | 12.01.2015 | ||
IE | 23.04.2015 | ||
LU | 23.04.2015 | ||
CH | 30.04.2015 | ||
FR | 30.04.2015 | ||
LI | 30.04.2015 | ||
Former [2017/03] | AT | 10.09.2014 | |
BE | 10.09.2014 | ||
CY | 10.09.2014 | ||
CZ | 10.09.2014 | ||
DK | 10.09.2014 | ||
EE | 10.09.2014 | ||
ES | 10.09.2014 | ||
FI | 10.09.2014 | ||
HR | 10.09.2014 | ||
IT | 10.09.2014 | ||
LT | 10.09.2014 | ||
LV | 10.09.2014 | ||
MC | 10.09.2014 | ||
MT | 10.09.2014 | ||
PL | 10.09.2014 | ||
RO | 10.09.2014 | ||
RS | 10.09.2014 | ||
SE | 10.09.2014 | ||
SI | 10.09.2014 | ||
SK | 10.09.2014 | ||
NO | 10.12.2014 | ||
GR | 11.12.2014 | ||
IS | 10.01.2015 | ||
PT | 12.01.2015 | ||
IE | 23.04.2015 | ||
LU | 23.04.2015 | ||
CH | 30.04.2015 | ||
FR | 30.04.2015 | ||
LI | 30.04.2015 | ||
Former [2016/33] | AT | 10.09.2014 | |
BE | 10.09.2014 | ||
CY | 10.09.2014 | ||
CZ | 10.09.2014 | ||
DK | 10.09.2014 | ||
EE | 10.09.2014 | ||
ES | 10.09.2014 | ||
FI | 10.09.2014 | ||
HR | 10.09.2014 | ||
IT | 10.09.2014 | ||
LT | 10.09.2014 | ||
LV | 10.09.2014 | ||
MC | 10.09.2014 | ||
PL | 10.09.2014 | ||
RO | 10.09.2014 | ||
RS | 10.09.2014 | ||
SE | 10.09.2014 | ||
SI | 10.09.2014 | ||
SK | 10.09.2014 | ||
NO | 10.12.2014 | ||
GR | 11.12.2014 | ||
IS | 10.01.2015 | ||
PT | 12.01.2015 | ||
IE | 23.04.2015 | ||
LU | 23.04.2015 | ||
CH | 30.04.2015 | ||
FR | 30.04.2015 | ||
LI | 30.04.2015 | ||
Former [2016/20] | AT | 10.09.2014 | |
CY | 10.09.2014 | ||
CZ | 10.09.2014 | ||
DK | 10.09.2014 | ||
EE | 10.09.2014 | ||
ES | 10.09.2014 | ||
FI | 10.09.2014 | ||
HR | 10.09.2014 | ||
IT | 10.09.2014 | ||
LT | 10.09.2014 | ||
LV | 10.09.2014 | ||
MC | 10.09.2014 | ||
PL | 10.09.2014 | ||
RO | 10.09.2014 | ||
RS | 10.09.2014 | ||
SE | 10.09.2014 | ||
SI | 10.09.2014 | ||
SK | 10.09.2014 | ||
NO | 10.12.2014 | ||
GR | 11.12.2014 | ||
IS | 10.01.2015 | ||
PT | 12.01.2015 | ||
IE | 23.04.2015 | ||
LU | 23.04.2015 | ||
CH | 30.04.2015 | ||
FR | 30.04.2015 | ||
LI | 30.04.2015 | ||
Former [2016/12] | AT | 10.09.2014 | |
CY | 10.09.2014 | ||
CZ | 10.09.2014 | ||
DK | 10.09.2014 | ||
EE | 10.09.2014 | ||
ES | 10.09.2014 | ||
FI | 10.09.2014 | ||
HR | 10.09.2014 | ||
IT | 10.09.2014 | ||
LT | 10.09.2014 | ||
LV | 10.09.2014 | ||
MC | 10.09.2014 | ||
PL | 10.09.2014 | ||
RO | 10.09.2014 | ||
RS | 10.09.2014 | ||
SE | 10.09.2014 | ||
SI | 10.09.2014 | ||
SK | 10.09.2014 | ||
NO | 10.12.2014 | ||
GR | 11.12.2014 | ||
IS | 10.01.2015 | ||
PT | 12.01.2015 | ||
LU | 23.04.2015 | ||
CH | 30.04.2015 | ||
FR | 30.04.2015 | ||
LI | 30.04.2015 | ||
Former [2016/06] | AT | 10.09.2014 | |
CY | 10.09.2014 | ||
CZ | 10.09.2014 | ||
DK | 10.09.2014 | ||
EE | 10.09.2014 | ||
ES | 10.09.2014 | ||
FI | 10.09.2014 | ||
HR | 10.09.2014 | ||
IT | 10.09.2014 | ||
LT | 10.09.2014 | ||
LV | 10.09.2014 | ||
MC | 10.09.2014 | ||
PL | 10.09.2014 | ||
RO | 10.09.2014 | ||
RS | 10.09.2014 | ||
SE | 10.09.2014 | ||
SI | 10.09.2014 | ||
SK | 10.09.2014 | ||
NO | 10.12.2014 | ||
GR | 11.12.2014 | ||
IS | 10.01.2015 | ||
PT | 12.01.2015 | ||
LU | 23.04.2015 | ||
CH | 30.04.2015 | ||
LI | 30.04.2015 | ||
Former [2016/01] | AT | 10.09.2014 | |
CY | 10.09.2014 | ||
CZ | 10.09.2014 | ||
DK | 10.09.2014 | ||
EE | 10.09.2014 | ||
ES | 10.09.2014 | ||
FI | 10.09.2014 | ||
HR | 10.09.2014 | ||
IT | 10.09.2014 | ||
LT | 10.09.2014 | ||
LV | 10.09.2014 | ||
MC | 10.09.2014 | ||
PL | 10.09.2014 | ||
RO | 10.09.2014 | ||
RS | 10.09.2014 | ||
SE | 10.09.2014 | ||
SI | 10.09.2014 | ||
SK | 10.09.2014 | ||
NO | 10.12.2014 | ||
GR | 11.12.2014 | ||
IS | 10.01.2015 | ||
PT | 12.01.2015 | ||
LU | 23.04.2015 | ||
Former [2015/52] | AT | 10.09.2014 | |
CY | 10.09.2014 | ||
CZ | 10.09.2014 | ||
DK | 10.09.2014 | ||
EE | 10.09.2014 | ||
ES | 10.09.2014 | ||
FI | 10.09.2014 | ||
HR | 10.09.2014 | ||
IT | 10.09.2014 | ||
LT | 10.09.2014 | ||
LV | 10.09.2014 | ||
PL | 10.09.2014 | ||
RO | 10.09.2014 | ||
RS | 10.09.2014 | ||
SE | 10.09.2014 | ||
SI | 10.09.2014 | ||
SK | 10.09.2014 | ||
NO | 10.12.2014 | ||
GR | 11.12.2014 | ||
IS | 10.01.2015 | ||
PT | 12.01.2015 | ||
LU | 23.04.2015 | ||
Former [2015/50] | AT | 10.09.2014 | |
CY | 10.09.2014 | ||
CZ | 10.09.2014 | ||
DK | 10.09.2014 | ||
EE | 10.09.2014 | ||
ES | 10.09.2014 | ||
FI | 10.09.2014 | ||
HR | 10.09.2014 | ||
IT | 10.09.2014 | ||
LT | 10.09.2014 | ||
LV | 10.09.2014 | ||
PL | 10.09.2014 | ||
RO | 10.09.2014 | ||
RS | 10.09.2014 | ||
SE | 10.09.2014 | ||
SI | 10.09.2014 | ||
SK | 10.09.2014 | ||
NO | 10.12.2014 | ||
GR | 11.12.2014 | ||
IS | 10.01.2015 | ||
PT | 12.01.2015 | ||
Former [2015/37] | AT | 10.09.2014 | |
CY | 10.09.2014 | ||
CZ | 10.09.2014 | ||
DK | 10.09.2014 | ||
EE | 10.09.2014 | ||
ES | 10.09.2014 | ||
FI | 10.09.2014 | ||
HR | 10.09.2014 | ||
IT | 10.09.2014 | ||
LT | 10.09.2014 | ||
LV | 10.09.2014 | ||
PL | 10.09.2014 | ||
RO | 10.09.2014 | ||
RS | 10.09.2014 | ||
SE | 10.09.2014 | ||
SK | 10.09.2014 | ||
NO | 10.12.2014 | ||
GR | 11.12.2014 | ||
IS | 10.01.2015 | ||
PT | 12.01.2015 | ||
Former [2015/35] | AT | 10.09.2014 | |
CY | 10.09.2014 | ||
CZ | 10.09.2014 | ||
DK | 10.09.2014 | ||
EE | 10.09.2014 | ||
ES | 10.09.2014 | ||
FI | 10.09.2014 | ||
HR | 10.09.2014 | ||
LT | 10.09.2014 | ||
LV | 10.09.2014 | ||
PL | 10.09.2014 | ||
RO | 10.09.2014 | ||
RS | 10.09.2014 | ||
SE | 10.09.2014 | ||
SK | 10.09.2014 | ||
NO | 10.12.2014 | ||
GR | 11.12.2014 | ||
IS | 10.01.2015 | ||
PT | 12.01.2015 | ||
Former [2015/25] | AT | 10.09.2014 | |
CY | 10.09.2014 | ||
CZ | 10.09.2014 | ||
EE | 10.09.2014 | ||
ES | 10.09.2014 | ||
FI | 10.09.2014 | ||
HR | 10.09.2014 | ||
LT | 10.09.2014 | ||
LV | 10.09.2014 | ||
PL | 10.09.2014 | ||
RO | 10.09.2014 | ||
RS | 10.09.2014 | ||
SE | 10.09.2014 | ||
SK | 10.09.2014 | ||
NO | 10.12.2014 | ||
GR | 11.12.2014 | ||
IS | 10.01.2015 | ||
PT | 12.01.2015 | ||
Former [2015/24] | CY | 10.09.2014 | |
CZ | 10.09.2014 | ||
EE | 10.09.2014 | ||
ES | 10.09.2014 | ||
FI | 10.09.2014 | ||
HR | 10.09.2014 | ||
LT | 10.09.2014 | ||
LV | 10.09.2014 | ||
PL | 10.09.2014 | ||
RO | 10.09.2014 | ||
RS | 10.09.2014 | ||
SE | 10.09.2014 | ||
SK | 10.09.2014 | ||
NO | 10.12.2014 | ||
GR | 11.12.2014 | ||
IS | 10.01.2015 | ||
PT | 12.01.2015 | ||
Former [2015/23] | CY | 10.09.2014 | |
CZ | 10.09.2014 | ||
EE | 10.09.2014 | ||
ES | 10.09.2014 | ||
FI | 10.09.2014 | ||
HR | 10.09.2014 | ||
LT | 10.09.2014 | ||
LV | 10.09.2014 | ||
RO | 10.09.2014 | ||
RS | 10.09.2014 | ||
SE | 10.09.2014 | ||
SK | 10.09.2014 | ||
NO | 10.12.2014 | ||
GR | 11.12.2014 | ||
IS | 10.01.2015 | ||
PT | 12.01.2015 | ||
Former [2015/22] | CY | 10.09.2014 | |
ES | 10.09.2014 | ||
FI | 10.09.2014 | ||
HR | 10.09.2014 | ||
LT | 10.09.2014 | ||
LV | 10.09.2014 | ||
RO | 10.09.2014 | ||
RS | 10.09.2014 | ||
SE | 10.09.2014 | ||
NO | 10.12.2014 | ||
GR | 11.12.2014 | ||
PT | 12.01.2015 | ||
Former [2015/12] | CY | 10.09.2014 | |
ES | 10.09.2014 | ||
FI | 10.09.2014 | ||
HR | 10.09.2014 | ||
LT | 10.09.2014 | ||
LV | 10.09.2014 | ||
RS | 10.09.2014 | ||
SE | 10.09.2014 | ||
NO | 10.12.2014 | ||
GR | 11.12.2014 | ||
Former [2015/11] | CY | 10.09.2014 | |
ES | 10.09.2014 | ||
FI | 10.09.2014 | ||
LT | 10.09.2014 | ||
SE | 10.09.2014 | ||
NO | 10.12.2014 | ||
GR | 11.12.2014 | ||
Former [2015/10] | ES | 10.09.2014 | |
FI | 10.09.2014 | ||
LT | 10.09.2014 | ||
SE | 10.09.2014 | ||
NO | 10.12.2014 | ||
Former [2015/09] | FI | 10.09.2014 | |
LT | 10.09.2014 | ||
SE | 10.09.2014 | ||
Former [2015/08] | LT | 10.09.2014 | Documents cited: | Search | [A]US2011062432 (YAMAZAKI SHUNPEI [JP], et al); | [A]US2011084264 (YAMAZAKI SHUNPEI [JP], et al) | by applicant | JP2006165528 | JP2011100040 |