EP2555234 - Electrostatic clamp, lithographic apparatus and method of manufacturing an electrostatic clamp [Right-click to bookmark this link] | Status | No opposition filed within time limit Status updated on 25.06.2021 Database last updated on 19.10.2024 | |
Former | The patent has been granted Status updated on 17.07.2020 | ||
Former | Grant of patent is intended Status updated on 03.05.2020 | ||
Former | Request for examination was made Status updated on 09.03.2020 | ||
Former | Grant of patent is intended Status updated on 14.11.2019 | ||
Former | Request for examination was made Status updated on 22.12.2017 | Most recent event Tooltip | 06.09.2024 | Lapse of the patent in a contracting state New state(s): MT | published on 09.10.2024 [2024/41] | Applicant(s) | For all designated states ASML Holding N.V. De Run 6501 5504 DR Veldhoven / NL | [2013/06] | Inventor(s) | 01 /
Helmus, Peter 29 Reynolds Farm Road New Milford, CT 6776 / US | 02 /
Wilklow, Ronald 207 Puritan Road Fairfield, CT 6824 / US | 03 /
Deng, Jianguo 77 Danburry Road Wilton CT 06897 / US | [2015/37] |
Former [2013/06] | 01 /
Helmus, Peter 29 Reynolds Farm Road New Milford, CT 6776 / US | ||
02 /
Wilklow, Ronald 207 Puritan Road Fairfield, CT 6824 / US | Representative(s) | ASML Netherlands B.V. Corporate Intellectual Property P.O. Box 324 5500 AH Veldhoven / NL | [N/P] |
Former [2020/34] | Ketting, Alfred, et al ASML Netherlands B.V. Corporate Intellectual Property De Run 6501 P.O. Box 324 5500 AH Veldhoven / NL | ||
Former [2013/06] | Siem, Max Yoe Shé, et al ASML Netherlands B.V. Corporate Intellectual Property P.O. Box 324 5500 AH Veldhoven / NL | Application number, filing date | 12171001.6 | 06.06.2012 | [2013/06] | Priority number, date | US201161514320P | 02.08.2011 Original published format: US 201161514320 P | [2013/06] | Filing language | EN | Procedural language | EN | Publication | Type: | A2 Application without search report | No.: | EP2555234 | Date: | 06.02.2013 | Language: | EN | [2013/06] | Type: | A3 Search report | No.: | EP2555234 | Date: | 14.06.2017 | Language: | EN | [2017/24] | Type: | B1 Patent specification | No.: | EP2555234 | Date: | 19.08.2020 | Language: | EN | [2020/34] | Search report(s) | (Supplementary) European search report - dispatched on: | EP | 17.05.2017 | Classification | IPC: | G03F7/20, H01L21/683 | [2019/46] | CPC: |
H01L21/6831 (EP,US);
G03F7/70708 (EP,US);
H01L21/6833 (EP,US);
Y10T156/10 (EP,US)
|
Former IPC [2013/06] | H01L21/683 | Designated contracting states | AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LI, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR [2018/04] |
Former [2013/06] | AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LI, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR | Title | German: | Elektrostatische Klemme, lithografische Vorrichtung und Verfahren zur Herstellung einer elektrostatischen Klemme | [2013/06] | English: | Electrostatic clamp, lithographic apparatus and method of manufacturing an electrostatic clamp | [2013/06] | French: | Dispositif de maintien électrostatique, appareil lithographique et procédé de fabrication d'un dispositif de maintien électrostatique | [2013/06] | Examination procedure | 06.06.2012 | Date on which the examining division has become responsible | 13.12.2017 | Amendment by applicant (claims and/or description) | 13.12.2017 | Examination requested [2018/04] | 15.11.2019 | Communication of intention to grant the patent | 04.03.2020 | Disapproval of the communication of intention to grant the patent by the applicant or resumption of examination proceedings by the EPO | 04.03.2020 | Fee for grant paid | 04.03.2020 | Fee for publishing/printing paid | 04.05.2020 | Communication of intention to grant the patent | 09.07.2020 | Fee for grant paid | 09.07.2020 | Fee for publishing/printing paid | 09.07.2020 | Receipt of the translation of the claim(s) | Divisional application(s) | The date of the Examining Division's first communication in respect of the earliest application for which a communication has been issued is 15.11.2019 | Opposition(s) | 20.05.2021 | No opposition filed within time limit [2021/30] | Fees paid | Renewal fee | 25.06.2014 | Renewal fee patent year 03 | 19.06.2015 | Renewal fee patent year 04 | 27.06.2016 | Renewal fee patent year 05 | 27.06.2017 | Renewal fee patent year 06 | 27.06.2018 | Renewal fee patent year 07 | 25.06.2019 | Renewal fee patent year 08 | 24.06.2020 | Renewal fee patent year 09 |
Opt-out from the exclusive Tooltip competence of the Unified Patent Court | See the Register of the Unified Patent Court for opt-out data | ||
Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court. | Lapses during opposition Tooltip | HU | 06.06.2012 | AL | 19.08.2020 | AT | 19.08.2020 | CY | 19.08.2020 | CZ | 19.08.2020 | DK | 19.08.2020 | EE | 19.08.2020 | ES | 19.08.2020 | FI | 19.08.2020 | HR | 19.08.2020 | IT | 19.08.2020 | LT | 19.08.2020 | LV | 19.08.2020 | MC | 19.08.2020 | MK | 19.08.2020 | MT | 19.08.2020 | NL | 19.08.2020 | PL | 19.08.2020 | RO | 19.08.2020 | RS | 19.08.2020 | SE | 19.08.2020 | SI | 19.08.2020 | SK | 19.08.2020 | SM | 19.08.2020 | TR | 19.08.2020 | BG | 19.11.2020 | NO | 19.11.2020 | GR | 20.11.2020 | IS | 19.12.2020 | PT | 21.12.2020 | [2024/41] |
Former [2024/29] | HU | 06.06.2012 | |
AL | 19.08.2020 | ||
AT | 19.08.2020 | ||
CY | 19.08.2020 | ||
CZ | 19.08.2020 | ||
DK | 19.08.2020 | ||
EE | 19.08.2020 | ||
ES | 19.08.2020 | ||
FI | 19.08.2020 | ||
HR | 19.08.2020 | ||
IT | 19.08.2020 | ||
LT | 19.08.2020 | ||
LV | 19.08.2020 | ||
MC | 19.08.2020 | ||
MK | 19.08.2020 | ||
NL | 19.08.2020 | ||
PL | 19.08.2020 | ||
RO | 19.08.2020 | ||
RS | 19.08.2020 | ||
SE | 19.08.2020 | ||
SI | 19.08.2020 | ||
SK | 19.08.2020 | ||
SM | 19.08.2020 | ||
TR | 19.08.2020 | ||
BG | 19.11.2020 | ||
NO | 19.11.2020 | ||
GR | 20.11.2020 | ||
IS | 19.12.2020 | ||
PT | 21.12.2020 | ||
Former [2024/22] | HU | 06.06.2012 | |
AL | 19.08.2020 | ||
AT | 19.08.2020 | ||
CY | 19.08.2020 | ||
CZ | 19.08.2020 | ||
DK | 19.08.2020 | ||
EE | 19.08.2020 | ||
ES | 19.08.2020 | ||
FI | 19.08.2020 | ||
HR | 19.08.2020 | ||
IT | 19.08.2020 | ||
LT | 19.08.2020 | ||
LV | 19.08.2020 | ||
MC | 19.08.2020 | ||
MK | 19.08.2020 | ||
NL | 19.08.2020 | ||
PL | 19.08.2020 | ||
RO | 19.08.2020 | ||
RS | 19.08.2020 | ||
SE | 19.08.2020 | ||
SI | 19.08.2020 | ||
SK | 19.08.2020 | ||
SM | 19.08.2020 | ||
BG | 19.11.2020 | ||
NO | 19.11.2020 | ||
GR | 20.11.2020 | ||
IS | 19.12.2020 | ||
PT | 21.12.2020 | ||
Former [2023/29] | HU | 06.06.2012 | |
AL | 19.08.2020 | ||
AT | 19.08.2020 | ||
CY | 19.08.2020 | ||
CZ | 19.08.2020 | ||
DK | 19.08.2020 | ||
EE | 19.08.2020 | ||
ES | 19.08.2020 | ||
FI | 19.08.2020 | ||
HR | 19.08.2020 | ||
IT | 19.08.2020 | ||
LT | 19.08.2020 | ||
LV | 19.08.2020 | ||
MC | 19.08.2020 | ||
NL | 19.08.2020 | ||
PL | 19.08.2020 | ||
RO | 19.08.2020 | ||
RS | 19.08.2020 | ||
SE | 19.08.2020 | ||
SI | 19.08.2020 | ||
SK | 19.08.2020 | ||
SM | 19.08.2020 | ||
BG | 19.11.2020 | ||
NO | 19.11.2020 | ||
GR | 20.11.2020 | ||
IS | 19.12.2020 | ||
PT | 21.12.2020 | ||
Former [2023/24] | AL | 19.08.2020 | |
AT | 19.08.2020 | ||
CY | 19.08.2020 | ||
CZ | 19.08.2020 | ||
DK | 19.08.2020 | ||
EE | 19.08.2020 | ||
ES | 19.08.2020 | ||
FI | 19.08.2020 | ||
HR | 19.08.2020 | ||
IT | 19.08.2020 | ||
LT | 19.08.2020 | ||
LV | 19.08.2020 | ||
MC | 19.08.2020 | ||
NL | 19.08.2020 | ||
PL | 19.08.2020 | ||
RO | 19.08.2020 | ||
RS | 19.08.2020 | ||
SE | 19.08.2020 | ||
SI | 19.08.2020 | ||
SK | 19.08.2020 | ||
SM | 19.08.2020 | ||
BG | 19.11.2020 | ||
NO | 19.11.2020 | ||
GR | 20.11.2020 | ||
IS | 19.12.2020 | ||
PT | 21.12.2020 | ||
Former [2022/08] | AL | 19.08.2020 | |
AT | 19.08.2020 | ||
CZ | 19.08.2020 | ||
DK | 19.08.2020 | ||
EE | 19.08.2020 | ||
ES | 19.08.2020 | ||
FI | 19.08.2020 | ||
HR | 19.08.2020 | ||
IT | 19.08.2020 | ||
LT | 19.08.2020 | ||
LV | 19.08.2020 | ||
MC | 19.08.2020 | ||
NL | 19.08.2020 | ||
PL | 19.08.2020 | ||
RO | 19.08.2020 | ||
RS | 19.08.2020 | ||
SE | 19.08.2020 | ||
SI | 19.08.2020 | ||
SK | 19.08.2020 | ||
SM | 19.08.2020 | ||
BG | 19.11.2020 | ||
NO | 19.11.2020 | ||
GR | 20.11.2020 | ||
IS | 19.12.2020 | ||
PT | 21.12.2020 | ||
Former [2021/36] | AL | 19.08.2020 | |
AT | 19.08.2020 | ||
CZ | 19.08.2020 | ||
DK | 19.08.2020 | ||
EE | 19.08.2020 | ||
ES | 19.08.2020 | ||
FI | 19.08.2020 | ||
HR | 19.08.2020 | ||
IT | 19.08.2020 | ||
LT | 19.08.2020 | ||
LV | 19.08.2020 | ||
NL | 19.08.2020 | ||
PL | 19.08.2020 | ||
RO | 19.08.2020 | ||
RS | 19.08.2020 | ||
SE | 19.08.2020 | ||
SI | 19.08.2020 | ||
SK | 19.08.2020 | ||
SM | 19.08.2020 | ||
BG | 19.11.2020 | ||
NO | 19.11.2020 | ||
GR | 20.11.2020 | ||
IS | 19.12.2020 | ||
PT | 21.12.2020 | ||
Former [2021/34] | AL | 19.08.2020 | |
AT | 19.08.2020 | ||
CZ | 19.08.2020 | ||
DK | 19.08.2020 | ||
EE | 19.08.2020 | ||
ES | 19.08.2020 | ||
FI | 19.08.2020 | ||
HR | 19.08.2020 | ||
IT | 19.08.2020 | ||
LT | 19.08.2020 | ||
LV | 19.08.2020 | ||
NL | 19.08.2020 | ||
PL | 19.08.2020 | ||
RO | 19.08.2020 | ||
RS | 19.08.2020 | ||
SE | 19.08.2020 | ||
SK | 19.08.2020 | ||
SM | 19.08.2020 | ||
BG | 19.11.2020 | ||
NO | 19.11.2020 | ||
GR | 20.11.2020 | ||
IS | 19.12.2020 | ||
PT | 21.12.2020 | ||
Former [2021/28] | AL | 19.08.2020 | |
AT | 19.08.2020 | ||
CZ | 19.08.2020 | ||
DK | 19.08.2020 | ||
EE | 19.08.2020 | ||
ES | 19.08.2020 | ||
FI | 19.08.2020 | ||
HR | 19.08.2020 | ||
LT | 19.08.2020 | ||
LV | 19.08.2020 | ||
NL | 19.08.2020 | ||
PL | 19.08.2020 | ||
RO | 19.08.2020 | ||
RS | 19.08.2020 | ||
SE | 19.08.2020 | ||
SK | 19.08.2020 | ||
SM | 19.08.2020 | ||
BG | 19.11.2020 | ||
NO | 19.11.2020 | ||
GR | 20.11.2020 | ||
IS | 19.12.2020 | ||
PT | 21.12.2020 | ||
Former [2021/25] | AL | 19.08.2020 | |
AT | 19.08.2020 | ||
CZ | 19.08.2020 | ||
DK | 19.08.2020 | ||
EE | 19.08.2020 | ||
ES | 19.08.2020 | ||
FI | 19.08.2020 | ||
HR | 19.08.2020 | ||
LT | 19.08.2020 | ||
LV | 19.08.2020 | ||
NL | 19.08.2020 | ||
PL | 19.08.2020 | ||
RO | 19.08.2020 | ||
RS | 19.08.2020 | ||
SE | 19.08.2020 | ||
SM | 19.08.2020 | ||
BG | 19.11.2020 | ||
NO | 19.11.2020 | ||
GR | 20.11.2020 | ||
IS | 19.12.2020 | ||
PT | 21.12.2020 | ||
Former [2021/24] | AT | 19.08.2020 | |
CZ | 19.08.2020 | ||
DK | 19.08.2020 | ||
EE | 19.08.2020 | ||
FI | 19.08.2020 | ||
HR | 19.08.2020 | ||
LT | 19.08.2020 | ||
LV | 19.08.2020 | ||
NL | 19.08.2020 | ||
PL | 19.08.2020 | ||
RO | 19.08.2020 | ||
RS | 19.08.2020 | ||
SE | 19.08.2020 | ||
SM | 19.08.2020 | ||
BG | 19.11.2020 | ||
NO | 19.11.2020 | ||
GR | 20.11.2020 | ||
IS | 19.12.2020 | ||
PT | 21.12.2020 | ||
Former [2021/23] | CZ | 19.08.2020 | |
DK | 19.08.2020 | ||
EE | 19.08.2020 | ||
FI | 19.08.2020 | ||
HR | 19.08.2020 | ||
LT | 19.08.2020 | ||
LV | 19.08.2020 | ||
NL | 19.08.2020 | ||
PL | 19.08.2020 | ||
RO | 19.08.2020 | ||
RS | 19.08.2020 | ||
SE | 19.08.2020 | ||
SM | 19.08.2020 | ||
BG | 19.11.2020 | ||
NO | 19.11.2020 | ||
GR | 20.11.2020 | ||
IS | 19.12.2020 | ||
PT | 21.12.2020 | ||
Former [2021/22] | CZ | 19.08.2020 | |
DK | 19.08.2020 | ||
EE | 19.08.2020 | ||
FI | 19.08.2020 | ||
HR | 19.08.2020 | ||
LT | 19.08.2020 | ||
LV | 19.08.2020 | ||
NL | 19.08.2020 | ||
PL | 19.08.2020 | ||
RO | 19.08.2020 | ||
RS | 19.08.2020 | ||
SE | 19.08.2020 | ||
BG | 19.11.2020 | ||
NO | 19.11.2020 | ||
GR | 20.11.2020 | ||
IS | 19.12.2020 | ||
PT | 21.12.2020 | ||
Former [2021/20] | DK | 19.08.2020 | |
FI | 19.08.2020 | ||
HR | 19.08.2020 | ||
LT | 19.08.2020 | ||
LV | 19.08.2020 | ||
NL | 19.08.2020 | ||
PL | 19.08.2020 | ||
RS | 19.08.2020 | ||
SE | 19.08.2020 | ||
BG | 19.11.2020 | ||
NO | 19.11.2020 | ||
GR | 20.11.2020 | ||
IS | 19.12.2020 | ||
PT | 21.12.2020 | ||
Former [2021/12] | FI | 19.08.2020 | |
HR | 19.08.2020 | ||
LT | 19.08.2020 | ||
LV | 19.08.2020 | ||
NL | 19.08.2020 | ||
PL | 19.08.2020 | ||
RS | 19.08.2020 | ||
SE | 19.08.2020 | ||
BG | 19.11.2020 | ||
NO | 19.11.2020 | ||
GR | 20.11.2020 | ||
IS | 19.12.2020 | ||
PT | 21.12.2020 | ||
Former [2021/10] | FI | 19.08.2020 | |
HR | 19.08.2020 | ||
LT | 19.08.2020 | ||
LV | 19.08.2020 | ||
PL | 19.08.2020 | ||
RS | 19.08.2020 | ||
SE | 19.08.2020 | ||
BG | 19.11.2020 | ||
NO | 19.11.2020 | ||
GR | 20.11.2020 | ||
IS | 19.12.2020 | ||
PT | 21.12.2020 | ||
Former [2021/09] | FI | 19.08.2020 | |
LT | 19.08.2020 | ||
SE | 19.08.2020 | ||
BG | 19.11.2020 | ||
NO | 19.11.2020 | ||
GR | 20.11.2020 | ||
PT | 21.12.2020 | ||
Former [2021/08] | FI | 19.08.2020 | |
LT | 19.08.2020 | ||
SE | 19.08.2020 | ||
BG | 19.11.2020 | ||
NO | 19.11.2020 | ||
PT | 21.12.2020 | ||
Former [2021/07] | FI | 19.08.2020 | |
LT | 19.08.2020 | ||
NO | 19.11.2020 | Documents cited: | Search | [XI]US2006002052 (LAGOS BRYAN C [US]) [X] 1,2,5,7-11,13 * abstract * * claims 1-26 * * page 2, paragraphs 19,20 * * page 3, paragraph 25 * * page 4, paragraph 33 * * figures 1,5 * [I] 3,4,6,12,14,15; | [A]JP2002170871 (KYOCERA CORP) [A] 1-15 * abstract * * page 3, paragraph 16 * * figures 1,2 *; | [A]JP2008218978 (ZAIKEN KK) [A] 1-15 * abstract * * page 10, paragraph 34 * * figure 9 *; | [A]WO2010004915 (CREATIVE TECH CORP [JP], et al) [A] 1-15 * abstract * * figures 1-6 * | Examination | JP2009176928 | by applicant | US6864957 |