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Extract from the Register of European Patents

EP About this file: EP2699966

EP2699966 - NETWORK ARCHITECTURE AND PROTOCOL FOR CLUSTER OF LITHOGRAPHY MACHINES [Right-click to bookmark this link]
StatusNo opposition filed within time limit
Status updated on  11.02.2022
Database last updated on 19.10.2024
FormerThe patent has been granted
Status updated on  05.03.2021
FormerGrant of patent is intended
Status updated on  21.12.2020
Most recent event   Tooltip06.09.2024Lapse of the patent in a contracting state
New state(s): MT		published on 09.10.2024  [2024/41]
Applicant(s)For all designated states
ASML Netherlands B.V.
De Run 6501
5504 DR Veldhoven / NL
[2019/36]
Former [2014/09]For all designated states
Mapper Lithography IP B.V.
Computerlaan 15
2628 XK Delft / NL
Inventor(s)01 / VAN KERVINCK, Marcel Nicolaas Jacobus
Prins Willem Alexanderweg 325
NL-2595 BV Den Haag / NL
02 / DE BOER, Guido
Recht van Ter Leede 31
NL-4143 LN Leerdam / NL
 [2014/09]
Representative(s)ASML Netherlands B.V.
Corporate Intellectual Property
P.O. Box 324
5500 AH Veldhoven / NL
[2021/14]
Application number, filing date12716017.423.04.2012
[2021/14]
WO2012EP57366
Priority number, dateUS201161478117P22.04.2011         Original published format: US 201161478117 P
US201161533673P12.09.2011         Original published format: US 201161533673 P
[2014/09]
Filing languageEN
Procedural languageEN
PublicationType: A2 Application without search report
No.:WO2012143548
Date:26.10.2012
Language:EN
[2012/43]
Type: A2 Application without search report 
No.:EP2699966
Date:26.02.2014
Language:EN
The application published by WIPO in one of the EPO official languages on 26.10.2012 takes the place of the publication of the European patent application.
[2014/09]
Type: B1 Patent specification 
No.:EP2699966
Date:07.04.2021
Language:EN
[2021/14]
Search report(s)International search report - published on:EP13.12.2012
ClassificationIPC:G03F7/20, H01J37/317
[2014/09]
CPC:
B82Y10/00 (EP,CN,KR,US); G03F7/70525 (EP,CN,KR,US); G03F7/70508 (EP,CN,KR,US);
G06F9/48 (US); B82Y40/00 (EP,CN,KR,US); G03F7/70483 (KR,US);
G03F7/70991 (EP,CN,KR,US); G05B19/41865 (KR,US); G06F9/4881 (KR,US);
H01J37/3177 (EP,CN,KR,US); H01L2224/27622 (KR); H05K2203/0502 (KR);
Y10S977/887 (KR) (-)
Designated contracting statesAL,   AT,   BE,   BG,   CH,   CY,   CZ,   DE,   DK,   EE,   ES,   FI,   FR,   GB,   GR,   HR,   HU,   IE,   IS,   IT,   LI,   LT,   LU,   LV,   MC,   MK,   MT,   NL,   NO,   PL,   PT,   RO,   RS,   SE,   SI,   SK,   SM,   TR [2014/09]
Extension statesBANot yet paid
MENot yet paid
TitleGerman:NETZWERKARCHITEKTUR UND PROTOKOLL FÜR EINEN CLUSTER VON LITHOGRAFIEGERÄTEN[2021/01]
English:NETWORK ARCHITECTURE AND PROTOCOL FOR CLUSTER OF LITHOGRAPHY MACHINES[2014/09]
French:ARCHITECTURE DE RESEAU ET PROTOCOLE POUR UN CLUSTER DES APPAREILS LITHOGRAPHIQUES[2021/01]
Former [2014/09]NETZWERKARCHITEKTUR UND PROTOKOLL FÜR LITHOGRAFIEMASCHINEN-CLUSTER
Former [2014/09]ARCHITECTURE DE RÉSEAU ET PROTOCOLE POUR GROUPE DE MACHINES LITHOGRAPHIQUES
Entry into regional phase22.11.2013National basic fee paid 
22.11.2013Designation fee(s) paid 
22.11.2013Examination fee paid 
Examination procedure21.02.2013Request for preliminary examination filed
International Preliminary Examining Authority: EP
22.11.2013Amendment by applicant (claims and/or description)
22.11.2013Examination requested  [2014/09]
03.03.2016Despatch of a communication from the examining division (Time limit: M06)
09.09.2016Reply to a communication from the examining division
22.12.2020Communication of intention to grant the patent
24.02.2021Fee for grant paid
24.02.2021Fee for publishing/printing paid
24.02.2021Receipt of the translation of the claim(s)
Divisional application(s)The date of the Examining Division's first communication in respect of the earliest application for which a communication has been issued is  03.03.2016
Opposition(s)10.01.2022No opposition filed within time limit [2022/11]
Fees paidRenewal fee
30.04.2014Renewal fee patent year 03
30.04.2015Renewal fee patent year 04
02.05.2016Renewal fee patent year 05
02.05.2017Renewal fee patent year 06
30.04.2018Renewal fee patent year 07
23.04.2019Renewal fee patent year 08
27.04.2020Renewal fee patent year 09
Opt-out from the exclusive  Tooltip
competence of the Unified
Patent Court		 See the Register of the Unified Patent Court for opt-out data
Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court.
Stay/Interruption03.01.2019Interruption of proceedings. Reason: legal prevention of applicant[2019/22]
01.08.2019Resumption of proceedings[2019/23]
03.01.2019Interruption of proceedings. Reason: legal prevention of applicant[2019/23]
Lapses during opposition  TooltipHU23.04.2012
AL07.04.2021
AT07.04.2021
CY07.04.2021
CZ07.04.2021
DK07.04.2021
EE07.04.2021
ES07.04.2021
FI07.04.2021
HR07.04.2021
IT07.04.2021
LT07.04.2021
LV07.04.2021
MC07.04.2021
MK07.04.2021
MT07.04.2021
NL07.04.2021
PL07.04.2021
RO07.04.2021
RS07.04.2021
SE07.04.2021
SI07.04.2021
SK07.04.2021
SM07.04.2021
IE23.04.2021
LU23.04.2021
BE30.04.2021
CH30.04.2021
LI30.04.2021
BG07.07.2021
GB07.07.2021
NO07.07.2021
GR08.07.2021
IS07.08.2021
PT09.08.2021
[2024/41]
Former [2024/22]HU23.04.2012
AL07.04.2021
AT07.04.2021
CY07.04.2021
CZ07.04.2021
DK07.04.2021
EE07.04.2021
ES07.04.2021
FI07.04.2021
HR07.04.2021
IT07.04.2021
LT07.04.2021
LV07.04.2021
MC07.04.2021
MK07.04.2021
NL07.04.2021
PL07.04.2021
RO07.04.2021
RS07.04.2021
SE07.04.2021
SI07.04.2021
SK07.04.2021
SM07.04.2021
IE23.04.2021
LU23.04.2021
BE30.04.2021
CH30.04.2021
LI30.04.2021
BG07.07.2021
GB07.07.2021
NO07.07.2021
GR08.07.2021
IS07.08.2021
PT09.08.2021
Former [2023/29]HU23.04.2012
AL07.04.2021
AT07.04.2021
CY07.04.2021
CZ07.04.2021
DK07.04.2021
EE07.04.2021
ES07.04.2021
FI07.04.2021
HR07.04.2021
IT07.04.2021
LT07.04.2021
LV07.04.2021
MC07.04.2021
NL07.04.2021
PL07.04.2021
RO07.04.2021
RS07.04.2021
SE07.04.2021
SI07.04.2021
SK07.04.2021
SM07.04.2021
IE23.04.2021
LU23.04.2021
BE30.04.2021
CH30.04.2021
LI30.04.2021
BG07.07.2021
GB07.07.2021
NO07.07.2021
GR08.07.2021
IS07.08.2021
PT09.08.2021
Former [2023/24]AL07.04.2021
AT07.04.2021
CY07.04.2021
CZ07.04.2021
DK07.04.2021
EE07.04.2021
ES07.04.2021
FI07.04.2021
HR07.04.2021
IT07.04.2021
LT07.04.2021
LV07.04.2021
MC07.04.2021
NL07.04.2021
PL07.04.2021
RO07.04.2021
RS07.04.2021
SE07.04.2021
SI07.04.2021
SK07.04.2021
SM07.04.2021
IE23.04.2021
LU23.04.2021
BE30.04.2021
CH30.04.2021
LI30.04.2021
BG07.07.2021
GB07.07.2021
NO07.07.2021
GR08.07.2021
IS07.08.2021
PT09.08.2021
Former [2022/36]AL07.04.2021
AT07.04.2021
CZ07.04.2021
DK07.04.2021
EE07.04.2021
ES07.04.2021
FI07.04.2021
HR07.04.2021
IT07.04.2021
LT07.04.2021
LV07.04.2021
MC07.04.2021
NL07.04.2021
PL07.04.2021
RO07.04.2021
RS07.04.2021
SE07.04.2021
SI07.04.2021
SK07.04.2021
SM07.04.2021
IE23.04.2021
LU23.04.2021
BE30.04.2021
CH30.04.2021
LI30.04.2021
BG07.07.2021
GB07.07.2021
NO07.07.2021
GR08.07.2021
IS07.08.2021
PT09.08.2021
Former [2022/34]AL07.04.2021
AT07.04.2021
CZ07.04.2021
DK07.04.2021
EE07.04.2021
ES07.04.2021
FI07.04.2021
HR07.04.2021
LT07.04.2021
LV07.04.2021
MC07.04.2021
NL07.04.2021
PL07.04.2021
RO07.04.2021
RS07.04.2021
SE07.04.2021
SI07.04.2021
SK07.04.2021
SM07.04.2021
IE23.04.2021
LU23.04.2021
BE30.04.2021
CH30.04.2021
LI30.04.2021
BG07.07.2021
GB07.07.2021
NO07.07.2021
GR08.07.2021
IS07.08.2021
PT09.08.2021
Former [2022/29]AL07.04.2021
AT07.04.2021
CZ07.04.2021
DK07.04.2021
EE07.04.2021
ES07.04.2021
FI07.04.2021
HR07.04.2021
LT07.04.2021
LV07.04.2021
MC07.04.2021
NL07.04.2021
PL07.04.2021
RO07.04.2021
RS07.04.2021
SE07.04.2021
SI07.04.2021
SK07.04.2021
SM07.04.2021
IE23.04.2021
LU23.04.2021
CH30.04.2021
LI30.04.2021
BG07.07.2021
GB07.07.2021
NO07.07.2021
GR08.07.2021
IS07.08.2021
PT09.08.2021
Former [2022/26]AL07.04.2021
AT07.04.2021
CZ07.04.2021
DK07.04.2021
EE07.04.2021
ES07.04.2021
FI07.04.2021
HR07.04.2021
LT07.04.2021
LV07.04.2021
MC07.04.2021
NL07.04.2021
PL07.04.2021
RO07.04.2021
RS07.04.2021
SE07.04.2021
SK07.04.2021
SM07.04.2021
IE23.04.2021
LU23.04.2021
CH30.04.2021
LI30.04.2021
BG07.07.2021
GB07.07.2021
NO07.07.2021
GR08.07.2021
IS07.08.2021
PT09.08.2021
Former [2022/23]AT07.04.2021
CZ07.04.2021
DK07.04.2021
EE07.04.2021
ES07.04.2021
FI07.04.2021
HR07.04.2021
LT07.04.2021
LV07.04.2021
MC07.04.2021
NL07.04.2021
PL07.04.2021
RO07.04.2021
RS07.04.2021
SE07.04.2021
SK07.04.2021
SM07.04.2021
IE23.04.2021
LU23.04.2021
CH30.04.2021
LI30.04.2021
BG07.07.2021
GB07.07.2021
NO07.07.2021
GR08.07.2021
IS07.08.2021
PT09.08.2021
Former [2022/22]AT07.04.2021
CZ07.04.2021
DK07.04.2021
EE07.04.2021
ES07.04.2021
FI07.04.2021
HR07.04.2021
LT07.04.2021
LV07.04.2021
MC07.04.2021
NL07.04.2021
PL07.04.2021
RO07.04.2021
RS07.04.2021
SE07.04.2021
SK07.04.2021
SM07.04.2021
IE23.04.2021
LU23.04.2021
CH30.04.2021
LI30.04.2021
BG07.07.2021
GB07.07.2021
NO07.07.2021
GR08.07.2021
PT09.08.2021
IS22.12.2021
Former [2022/21]AT07.04.2021
CZ07.04.2021
DK07.04.2021
EE07.04.2021
ES07.04.2021
FI07.04.2021
HR07.04.2021
LT07.04.2021
LV07.04.2021
MC07.04.2021
NL07.04.2021
PL07.04.2021
RO07.04.2021
RS07.04.2021
SE07.04.2021
SK07.04.2021
SM07.04.2021
IE23.04.2021
LU23.04.2021
CH30.04.2021
LI30.04.2021
BG07.07.2021
NO07.07.2021
GR08.07.2021
PT09.08.2021
IS22.12.2021
Former [2022/10]AT07.04.2021
CZ07.04.2021
DK07.04.2021
EE07.04.2021
ES07.04.2021
FI07.04.2021
HR07.04.2021
LT07.04.2021
LV07.04.2021
MC07.04.2021
NL07.04.2021
PL07.04.2021
RO07.04.2021
RS07.04.2021
SE07.04.2021
SK07.04.2021
SM07.04.2021
LU23.04.2021
CH30.04.2021
LI30.04.2021
BG07.07.2021
NO07.07.2021
GR08.07.2021
PT09.08.2021
IS22.12.2021
Former [2022/09]AT07.04.2021
CZ07.04.2021
DK07.04.2021
ES07.04.2021
FI07.04.2021
HR07.04.2021
LT07.04.2021
LV07.04.2021
MC07.04.2021
NL07.04.2021
PL07.04.2021
RO07.04.2021
RS07.04.2021
SE07.04.2021
SK07.04.2021
SM07.04.2021
LU23.04.2021
BG07.07.2021
NO07.07.2021
GR08.07.2021
IS07.08.2021
PT09.08.2021
Former [2022/08]AT07.04.2021
CZ07.04.2021
DK07.04.2021
ES07.04.2021
FI07.04.2021
HR07.04.2021
LT07.04.2021
LV07.04.2021
MC07.04.2021
NL07.04.2021
PL07.04.2021
RS07.04.2021
SE07.04.2021
SM07.04.2021
LU23.04.2021
BG07.07.2021
NO07.07.2021
GR08.07.2021
IS07.08.2021
PT09.08.2021
Former [2022/07]AT07.04.2021
ES07.04.2021
FI07.04.2021
HR07.04.2021
LT07.04.2021
LV07.04.2021
MC07.04.2021
NL07.04.2021
PL07.04.2021
RS07.04.2021
SE07.04.2021
SM07.04.2021
LU23.04.2021
BG07.07.2021
NO07.07.2021
GR08.07.2021
IS07.08.2021
PT09.08.2021
Former [2022/04]AT07.04.2021
ES07.04.2021
FI07.04.2021
HR07.04.2021
LT07.04.2021
LV07.04.2021
NL07.04.2021
PL07.04.2021
RS07.04.2021
SE07.04.2021
LU23.04.2021
BG07.07.2021
NO07.07.2021
GR08.07.2021
IS07.08.2021
PT09.08.2021
Former [2021/52]AT07.04.2021
ES07.04.2021
FI07.04.2021
HR07.04.2021
LT07.04.2021
LV07.04.2021
NL07.04.2021
PL07.04.2021
RS07.04.2021
SE07.04.2021
BG07.07.2021
NO07.07.2021
GR08.07.2021
IS07.08.2021
PT09.08.2021
Former [2021/51]AT07.04.2021
ES07.04.2021
FI07.04.2021
HR07.04.2021
LT07.04.2021
LV07.04.2021
NL07.04.2021
RS07.04.2021
SE07.04.2021
BG07.07.2021
NO07.07.2021
GR08.07.2021
IS07.08.2021
PT09.08.2021
Former [2021/50]AT07.04.2021
FI07.04.2021
HR07.04.2021
LT07.04.2021
LV07.04.2021
NL07.04.2021
SE07.04.2021
BG07.07.2021
NO07.07.2021
GR08.07.2021
PT09.08.2021
Former [2021/49]AT07.04.2021
FI07.04.2021
HR07.04.2021
LT07.04.2021
LV07.04.2021
NL07.04.2021
SE07.04.2021
BG07.07.2021
NO07.07.2021
GR08.07.2021
Former [2021/47]AT07.04.2021
FI07.04.2021
LT07.04.2021
NL07.04.2021
BG07.07.2021
Former [2021/46]AT07.04.2021
FI07.04.2021
LT07.04.2021
Cited inInternational search[XYI]EP0507589  (NIPPON KOGAKU KK [JP]) [X] 1 * column 4, line 30 - column 6, line 28; figure 2 * [Y] 15,16 [I] 2-7,10-14,17-21;
 [Y]US2002120417  (NAYA HIDEMITSU [JP], et al) [Y] 15,16* paragraph [0045]; figure 1 *;
 [XYI]US2007142950  (OKITA SHINICHI [JP]) [X] 1 * paragraphs [0034] - [0037] - [0046] - [0058]; figures 1,2 * [Y] 15,16 [I] 2-7,10-14,17-21;
 [XYI]US2007219736  (OKITA SHINICHI [JP]) [X] 1 * paragraphs [0079] - [0092] - [ 190] - [0193]; figures 1,2,22 * [Y] 15,16 [I] 2-7,10-14,17-21
by applicantUS6897458
 US6958804
 US7019908
 US7084414
 US7129502
 US2007064213
 US20080031573
 US20080031594
 US20080045243
 US20080055839
 US20080058596
 US20080101682
The EPO accepts no responsibility for the accuracy of data originating from other authorities; in particular, it does not guarantee that it is complete, up to date or fit for specific purposes.