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EP2650913
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EP About this file: EP2650913
| EP2650913 - DRY CLEANING METHOD [Right-click to bookmark this link] | Status | The application is deemed to be withdrawn Status updated on 25.11.2016 Database last updated on 12.06.2024 | Most recent event Tooltip | 25.11.2016 | Application deemed to be withdrawn | published on 28.12.2016 [2016/52] | Applicant(s) | For all designated states Central Glass Company, Limited 5253 Oaza Okiube Ube-shi Yamaguchi 755-0001 / JP | [2013/42] | Inventor(s) | 01 /
UMEZAKI, Tomonori c/o Chemical Research Center of Glass Company, Limited 5253, Oaza Okiube Obe-shi, Yamaguchi 755-0001 / JP | 02 /
TAKEDA, Yuta c/o Chemical Research Center of Glass Company, Limited 5253, Oaza Okiube Obe-shi, Yamaguchi 755-0001 / JP | [2013/46] |
| Former [2013/42] | 01 /
UMEZAKI, Tomonori / JP | ||
| 02 /
TAKEDA, Yuta / JP | Representative(s) | Manitz Finsterwald Patent- und Rechtsanwaltspartnerschaft mbB Martin-Greif-Strasse 1 80336 München / DE | [N/P] |
| Former [2013/42] | Manitz, Finsterwald & Partner GbR Martin-Greif-Strasse 1 80336 München / DE | Application number, filing date | 12751926.2 | 19.01.2012 | WO2012JP51025 | Priority number, date | JP20110046149 | 03.03.2011 Original published format: JP 2011046149 | [2013/42] | Filing language | JA | Procedural language | EN | Publication | Type: | A1 Application with search report | No.: | WO2012117758 | Date: | 07.09.2012 | Language: | JA | [2012/36] | Type: | A1 Application with search report | No.: | EP2650913 | Date: | 16.10.2013 | Language: | EN | [2013/42] | Search report(s) | International search report - published on: | JP | 07.09.2012 | (Supplementary) European search report - dispatched on: | EP | 02.07.2014 | Classification | IPC: | H01L21/31, C23C16/44, H01L21/205, B08B9/027 | [2014/31] | CPC: |
C23C16/4405 (EP,KR,US);
B08B9/027 (US);
H01L21/0262 (KR);
H01L21/302 (KR);
H01L21/31 (KR)
|
| Former IPC [2013/42] | H01L21/31, C23C16/44, H01L21/205 | Designated contracting states | AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LI, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR [2013/42] | Title | German: | TROCKENREINIGUNGSVERFAHREN | [2013/42] | English: | DRY CLEANING METHOD | [2013/42] | French: | PROCÉDÉ DE NETTOYAGE À SEC | [2013/42] | Entry into regional phase | 08.07.2013 | Translation filed | 08.07.2013 | National basic fee paid | 08.07.2013 | Search fee paid | 08.07.2013 | Designation fee(s) paid | 08.07.2013 | Examination fee paid | Examination procedure | 08.07.2013 | Examination requested [2013/42] | 27.01.2015 | Amendment by applicant (claims and/or description) | 19.02.2016 | Communication of intention to grant the patent | 30.06.2016 | Application deemed to be withdrawn, date of legal effect [2016/52] | 11.08.2016 | Despatch of communication that the application is deemed to be withdrawn, reason: fee for grant / fee for printing not paid in time [2016/52] | Divisional application(s) | The date of the Examining Division's first communication in respect of the earliest application for which a communication has been issued is 19.02.2016 | Fees paid | Renewal fee | 30.01.2014 | Renewal fee patent year 03 | 30.01.2015 | Renewal fee patent year 04 | Penalty fee | Additional fee for renewal fee | 31.01.2016 | 05 M06 Not yet paid |
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| Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court. | Documents cited: | Search | [XI] - STEVEN R DROES ET AL, "UTILIZATION OF fB-DIKETONES FOR ETCHING AND CLEANING OF METAL OXIDE AND SULFIDE THIN FILMS", MRS PROCEEDINGS, (19931231), XP055123339 [X] 1,2 * abstract, introduction, experimental, conclusions; pages 471,473; table 1 * [I] 3 | [A] - SEKIGUCHI A ET AL, "Reaction of copper oxide and beta -diketone for in situ cleaning of metal copper in a copper chemical vapor deposition reactor", JAPANESE JOURNAL OF APPLIED PHYSICS, JAPAN SOCIETY OF APPLIED PHYSICS, JP, (20001130), vol. 39, no. 11, doi:10.1143/JJAP.39.6478, ISSN 0021-4922, pages 6478 - 6486, XP002205430 [A] 3 * experimental equipment and experimental processes; page 6479 * DOI: http://dx.doi.org/10.1143/JJAP.39.6478 | International search | [A]JP2001284330 (HITACHI LTD); | [A]WO2006028118 (ROHM CO LTD [JP], et al); | [A]JP2010276483 (ROHM CO LTD) | by applicant | JPH05254998 | JP2010003872 |