EP2761646 - METHODS OF FORMING THROUGH-SUBSTRATE VIAS [Right-click to bookmark this link] | Status | No opposition filed within time limit Status updated on 04.01.2019 Database last updated on 22.08.2024 | |
Former | The patent has been granted Status updated on 26.01.2018 | ||
Former | Grant of patent is intended Status updated on 19.09.2017 | ||
Former | Examination is in progress Status updated on 17.03.2017 | Most recent event Tooltip | 10.07.2020 | Lapse of the patent in a contracting state New state(s): IS | published on 12.08.2020 [2020/33] | Applicant(s) | For all designated states Micron Technology, Inc. 8000 South Federal Way Boise, ID 83716 / US | [2014/32] | Inventor(s) | 01 /
ENGLAND, Luke, G. 4359 S. Trails End Ln. Boise, ID 83716 / US | [2014/32] | Representative(s) | Somervell, Thomas Richard Marks & Clerk LLP Alpha Tower Suffolk Street Queensway Birmingham B1 1TT / GB | [2014/32] | Application number, filing date | 12836871.9 | 05.09.2012 | [2018/09] | WO2012US53792 | Priority number, date | US201113247769 | 28.09.2011 Original published format: US201113247769 | [2014/32] | Filing language | EN | Procedural language | EN | Publication | Type: | A1 Application with search report | No.: | WO2013048685 | Date: | 04.04.2013 | Language: | EN | [2013/14] | Type: | A1 Application with search report | No.: | EP2761646 | Date: | 06.08.2014 | Language: | EN | The application published by WIPO in one of the EPO official languages on 04.04.2013 takes the place of the publication of the European patent application. | [2014/32] | Type: | B1 Patent specification | No.: | EP2761646 | Date: | 28.02.2018 | Language: | EN | [2018/09] | Search report(s) | International search report - published on: | KR | 04.04.2013 | (Supplementary) European search report - dispatched on: | EP | 15.07.2015 | Classification | IPC: | H01L21/768, C25D5/10, C25D5/50, H05K3/42, C25D5/12, H01L23/48, // H01L23/498, H01L21/48, C25D5/48 | [2017/38] | CPC: |
C25D5/10 (EP,CN,US);
H01L21/76898 (EP,CN,US);
C25D5/12 (EP,US);
C25D5/50 (EP,CN,US);
H01L21/76879 (CN);
H01L21/76883 (CN);
H01L23/481 (EP,US);
H05K3/426 (EP,CN,US);
C25D5/48 (EP,CN,US);
H01L21/486 (EP,CN,US);
H01L2221/1068 (CN);
H01L23/49827 (EP,CN,US);
| C-Set: |
H01L2924/0002, H01L2924/00 (CN,EP,US)
|
Former IPC [2015/33] | H01L21/768, C25D5/10, C25D5/50, H05K3/42, C25D5/12, // H01L23/498, H01L21/48, C25D5/48 | ||
Former IPC [2014/32] | H01L21/28, H01L21/3205, H01L21/768 | Designated contracting states | AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LI, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR [2014/32] | Extension states | BA | Not yet paid | ME | Not yet paid | Title | German: | VERFAHREN ZUR HERSTELLUNG VON SUBSTRATDURCHGÄNGEN | [2014/32] | English: | METHODS OF FORMING THROUGH-SUBSTRATE VIAS | [2014/32] | French: | PROCÉDÉS DE FORMATION DE TROUS DE RACCORDEMENT À TRAVERS UN SUBSTRAT | [2014/32] | Entry into regional phase | 17.03.2014 | National basic fee paid | 17.03.2014 | Search fee paid | 17.03.2014 | Designation fee(s) paid | 17.03.2014 | Examination fee paid | Examination procedure | 17.03.2014 | Examination requested [2014/32] | 09.02.2016 | Amendment by applicant (claims and/or description) | 23.03.2017 | Despatch of a communication from the examining division (Time limit: M04) | 20.07.2017 | Reply to a communication from the examining division | 20.09.2017 | Communication of intention to grant the patent | 11.01.2018 | Fee for grant paid | 11.01.2018 | Fee for publishing/printing paid | 11.01.2018 | Receipt of the translation of the claim(s) | Divisional application(s) | The date of the Examining Division's first communication in respect of the earliest application for which a communication has been issued is 23.03.2017 | Opposition(s) | 29.11.2018 | No opposition filed within time limit [2019/06] | Fees paid | Renewal fee | 12.09.2014 | Renewal fee patent year 03 | 11.09.2015 | Renewal fee patent year 04 | 13.09.2016 | Renewal fee patent year 05 | 12.09.2017 | Renewal fee patent year 06 |
Opt-out from the exclusive Tooltip competence of the Unified Patent Court | See the Register of the Unified Patent Court for opt-out data | ||
Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court. | Lapses during opposition Tooltip | HU | 05.09.2012 | AL | 28.02.2018 | AT | 28.02.2018 | CY | 28.02.2018 | CZ | 28.02.2018 | DK | 28.02.2018 | EE | 28.02.2018 | ES | 28.02.2018 | FI | 28.02.2018 | HR | 28.02.2018 | IT | 28.02.2018 | LT | 28.02.2018 | LV | 28.02.2018 | MC | 28.02.2018 | MK | 28.02.2018 | NL | 28.02.2018 | PL | 28.02.2018 | PT | 28.02.2018 | RO | 28.02.2018 | RS | 28.02.2018 | SE | 28.02.2018 | SI | 28.02.2018 | SK | 28.02.2018 | SM | 28.02.2018 | TR | 28.02.2018 | BG | 28.05.2018 | NO | 28.05.2018 | GR | 29.05.2018 | IS | 28.06.2018 | IE | 05.09.2018 | LU | 05.09.2018 | MT | 05.09.2018 | BE | 30.09.2018 | CH | 30.09.2018 | LI | 30.09.2018 | [2020/33] |
Former [2020/31] | HU | 05.09.2012 | |
AL | 28.02.2018 | ||
AT | 28.02.2018 | ||
CY | 28.02.2018 | ||
CZ | 28.02.2018 | ||
DK | 28.02.2018 | ||
EE | 28.02.2018 | ||
ES | 28.02.2018 | ||
FI | 28.02.2018 | ||
HR | 28.02.2018 | ||
IT | 28.02.2018 | ||
LT | 28.02.2018 | ||
LV | 28.02.2018 | ||
MC | 28.02.2018 | ||
MK | 28.02.2018 | ||
NL | 28.02.2018 | ||
PL | 28.02.2018 | ||
PT | 28.02.2018 | ||
RO | 28.02.2018 | ||
RS | 28.02.2018 | ||
SE | 28.02.2018 | ||
SI | 28.02.2018 | ||
SK | 28.02.2018 | ||
SM | 28.02.2018 | ||
TR | 28.02.2018 | ||
BG | 28.05.2018 | ||
NO | 28.05.2018 | ||
GR | 29.05.2018 | ||
IE | 05.09.2018 | ||
LU | 05.09.2018 | ||
MT | 05.09.2018 | ||
BE | 30.09.2018 | ||
CH | 30.09.2018 | ||
LI | 30.09.2018 | ||
Former [2020/28] | HU | 05.09.2012 | |
AL | 28.02.2018 | ||
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CY | 28.02.2018 | ||
CZ | 28.02.2018 | ||
DK | 28.02.2018 | ||
EE | 28.02.2018 | ||
ES | 28.02.2018 | ||
FI | 28.02.2018 | ||
HR | 28.02.2018 | ||
IT | 28.02.2018 | ||
LT | 28.02.2018 | ||
LV | 28.02.2018 | ||
MC | 28.02.2018 | ||
NL | 28.02.2018 | ||
PL | 28.02.2018 | ||
PT | 28.02.2018 | ||
RO | 28.02.2018 | ||
RS | 28.02.2018 | ||
SE | 28.02.2018 | ||
SI | 28.02.2018 | ||
SK | 28.02.2018 | ||
SM | 28.02.2018 | ||
TR | 28.02.2018 | ||
BG | 28.05.2018 | ||
NO | 28.05.2018 | ||
GR | 29.05.2018 | ||
IE | 05.09.2018 | ||
LU | 05.09.2018 | ||
MT | 05.09.2018 | ||
BE | 30.09.2018 | ||
CH | 30.09.2018 | ||
LI | 30.09.2018 | ||
Former [2020/16] | AL | 28.02.2018 | |
AT | 28.02.2018 | ||
CY | 28.02.2018 | ||
CZ | 28.02.2018 | ||
DK | 28.02.2018 | ||
EE | 28.02.2018 | ||
ES | 28.02.2018 | ||
FI | 28.02.2018 | ||
HR | 28.02.2018 | ||
IT | 28.02.2018 | ||
LT | 28.02.2018 | ||
LV | 28.02.2018 | ||
MC | 28.02.2018 | ||
NL | 28.02.2018 | ||
PL | 28.02.2018 | ||
RO | 28.02.2018 | ||
RS | 28.02.2018 | ||
SE | 28.02.2018 | ||
SI | 28.02.2018 | ||
SK | 28.02.2018 | ||
SM | 28.02.2018 | ||
TR | 28.02.2018 | ||
BG | 28.05.2018 | ||
NO | 28.05.2018 | ||
GR | 29.05.2018 | ||
IE | 05.09.2018 | ||
LU | 05.09.2018 | ||
MT | 05.09.2018 | ||
BE | 30.09.2018 | ||
CH | 30.09.2018 | ||
LI | 30.09.2018 | ||
Former [2020/08] | AL | 28.02.2018 | |
AT | 28.02.2018 | ||
CY | 28.02.2018 | ||
CZ | 28.02.2018 | ||
DK | 28.02.2018 | ||
EE | 28.02.2018 | ||
ES | 28.02.2018 | ||
FI | 28.02.2018 | ||
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IT | 28.02.2018 | ||
LT | 28.02.2018 | ||
LV | 28.02.2018 | ||
MC | 28.02.2018 | ||
NL | 28.02.2018 | ||
PL | 28.02.2018 | ||
RO | 28.02.2018 | ||
RS | 28.02.2018 | ||
SE | 28.02.2018 | ||
SI | 28.02.2018 | ||
SK | 28.02.2018 | ||
SM | 28.02.2018 | ||
BG | 28.05.2018 | ||
NO | 28.05.2018 | ||
GR | 29.05.2018 | ||
IE | 05.09.2018 | ||
LU | 05.09.2018 | ||
MT | 05.09.2018 | ||
BE | 30.09.2018 | ||
CH | 30.09.2018 | ||
LI | 30.09.2018 | ||
Former [2019/40] | AL | 28.02.2018 | |
AT | 28.02.2018 | ||
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CZ | 28.02.2018 | ||
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MC | 28.02.2018 | ||
NL | 28.02.2018 | ||
PL | 28.02.2018 | ||
RO | 28.02.2018 | ||
RS | 28.02.2018 | ||
SE | 28.02.2018 | ||
SI | 28.02.2018 | ||
SK | 28.02.2018 | ||
SM | 28.02.2018 | ||
BG | 28.05.2018 | ||
NO | 28.05.2018 | ||
GR | 29.05.2018 | ||
IE | 05.09.2018 | ||
LU | 05.09.2018 | ||
BE | 30.09.2018 | ||
CH | 30.09.2018 | ||
LI | 30.09.2018 | ||
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CZ | 28.02.2018 | ||
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MC | 28.02.2018 | ||
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RS | 28.02.2018 | ||
SE | 28.02.2018 | ||
SI | 28.02.2018 | ||
SK | 28.02.2018 | ||
SM | 28.02.2018 | ||
BG | 28.05.2018 | ||
NO | 28.05.2018 | ||
GR | 29.05.2018 | ||
IE | 05.09.2018 | ||
LU | 05.09.2018 | ||
BE | 30.09.2018 | ||
Former [2019/33] | AL | 28.02.2018 | |
AT | 28.02.2018 | ||
CY | 28.02.2018 | ||
CZ | 28.02.2018 | ||
DK | 28.02.2018 | ||
EE | 28.02.2018 | ||
ES | 28.02.2018 | ||
FI | 28.02.2018 | ||
HR | 28.02.2018 | ||
IT | 28.02.2018 | ||
LT | 28.02.2018 | ||
LV | 28.02.2018 | ||
MC | 28.02.2018 | ||
NL | 28.02.2018 | ||
PL | 28.02.2018 | ||
RO | 28.02.2018 | ||
RS | 28.02.2018 | ||
SE | 28.02.2018 | ||
SI | 28.02.2018 | ||
SK | 28.02.2018 | ||
SM | 28.02.2018 | ||
BG | 28.05.2018 | ||
NO | 28.05.2018 | ||
GR | 29.05.2018 | ||
IE | 05.09.2018 | ||
LU | 05.09.2018 | ||
Former [2019/30] | AL | 28.02.2018 | |
AT | 28.02.2018 | ||
CY | 28.02.2018 | ||
CZ | 28.02.2018 | ||
DK | 28.02.2018 | ||
EE | 28.02.2018 | ||
ES | 28.02.2018 | ||
FI | 28.02.2018 | ||
HR | 28.02.2018 | ||
IT | 28.02.2018 | ||
LT | 28.02.2018 | ||
LV | 28.02.2018 | ||
MC | 28.02.2018 | ||
NL | 28.02.2018 | ||
PL | 28.02.2018 | ||
RO | 28.02.2018 | ||
RS | 28.02.2018 | ||
SE | 28.02.2018 | ||
SI | 28.02.2018 | ||
SK | 28.02.2018 | ||
SM | 28.02.2018 | ||
BG | 28.05.2018 | ||
NO | 28.05.2018 | ||
GR | 29.05.2018 | ||
LU | 05.09.2018 | ||
Former [2019/24] | AL | 28.02.2018 | |
AT | 28.02.2018 | ||
CY | 28.02.2018 | ||
CZ | 28.02.2018 | ||
DK | 28.02.2018 | ||
EE | 28.02.2018 | ||
ES | 28.02.2018 | ||
FI | 28.02.2018 | ||
HR | 28.02.2018 | ||
IT | 28.02.2018 | ||
LT | 28.02.2018 | ||
LV | 28.02.2018 | ||
MC | 28.02.2018 | ||
NL | 28.02.2018 | ||
PL | 28.02.2018 | ||
RO | 28.02.2018 | ||
RS | 28.02.2018 | ||
SE | 28.02.2018 | ||
SI | 28.02.2018 | ||
SK | 28.02.2018 | ||
SM | 28.02.2018 | ||
BG | 28.05.2018 | ||
NO | 28.05.2018 | ||
GR | 29.05.2018 | ||
Former [2019/13] | AL | 28.02.2018 | |
AT | 28.02.2018 | ||
CY | 28.02.2018 | ||
CZ | 28.02.2018 | ||
DK | 28.02.2018 | ||
EE | 28.02.2018 | ||
ES | 28.02.2018 | ||
FI | 28.02.2018 | ||
HR | 28.02.2018 | ||
IT | 28.02.2018 | ||
LT | 28.02.2018 | ||
LV | 28.02.2018 | ||
NL | 28.02.2018 | ||
PL | 28.02.2018 | ||
RO | 28.02.2018 | ||
RS | 28.02.2018 | ||
SE | 28.02.2018 | ||
SI | 28.02.2018 | ||
SK | 28.02.2018 | ||
SM | 28.02.2018 | ||
BG | 28.05.2018 | ||
NO | 28.05.2018 | ||
GR | 29.05.2018 | ||
Former [2018/52] | AL | 28.02.2018 | |
AT | 28.02.2018 | ||
CY | 28.02.2018 | ||
CZ | 28.02.2018 | ||
DK | 28.02.2018 | ||
EE | 28.02.2018 | ||
ES | 28.02.2018 | ||
FI | 28.02.2018 | ||
HR | 28.02.2018 | ||
IT | 28.02.2018 | ||
LT | 28.02.2018 | ||
LV | 28.02.2018 | ||
NL | 28.02.2018 | ||
PL | 28.02.2018 | ||
RO | 28.02.2018 | ||
RS | 28.02.2018 | ||
SE | 28.02.2018 | ||
SK | 28.02.2018 | ||
SM | 28.02.2018 | ||
BG | 28.05.2018 | ||
NO | 28.05.2018 | ||
GR | 29.05.2018 | ||
Former [2018/51] | AL | 28.02.2018 | |
AT | 28.02.2018 | ||
CY | 28.02.2018 | ||
CZ | 28.02.2018 | ||
DK | 28.02.2018 | ||
EE | 28.02.2018 | ||
ES | 28.02.2018 | ||
FI | 28.02.2018 | ||
HR | 28.02.2018 | ||
IT | 28.02.2018 | ||
LT | 28.02.2018 | ||
LV | 28.02.2018 | ||
NL | 28.02.2018 | ||
PL | 28.02.2018 | ||
RO | 28.02.2018 | ||
RS | 28.02.2018 | ||
SE | 28.02.2018 | ||
SK | 28.02.2018 | ||
BG | 28.05.2018 | ||
NO | 28.05.2018 | ||
GR | 29.05.2018 | ||
Former [2018/50] | AL | 28.02.2018 | |
AT | 28.02.2018 | ||
CY | 28.02.2018 | ||
CZ | 28.02.2018 | ||
EE | 28.02.2018 | ||
ES | 28.02.2018 | ||
FI | 28.02.2018 | ||
HR | 28.02.2018 | ||
IT | 28.02.2018 | ||
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PL | 28.02.2018 | ||
RO | 28.02.2018 | ||
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SE | 28.02.2018 | ||
SK | 28.02.2018 | ||
BG | 28.05.2018 | ||
NO | 28.05.2018 | ||
GR | 29.05.2018 | ||
Former [2018/47] | AL | 28.02.2018 | |
AT | 28.02.2018 | ||
CY | 28.02.2018 | ||
ES | 28.02.2018 | ||
FI | 28.02.2018 | ||
HR | 28.02.2018 | ||
IT | 28.02.2018 | ||
LT | 28.02.2018 | ||
LV | 28.02.2018 | ||
NL | 28.02.2018 | ||
RS | 28.02.2018 | ||
SE | 28.02.2018 | ||
BG | 28.05.2018 | ||
NO | 28.05.2018 | ||
GR | 29.05.2018 | ||
Former [2018/46] | AL | 28.02.2018 | |
AT | 28.02.2018 | ||
CY | 28.02.2018 | ||
ES | 28.02.2018 | ||
FI | 28.02.2018 | ||
HR | 28.02.2018 | ||
LT | 28.02.2018 | ||
LV | 28.02.2018 | ||
NL | 28.02.2018 | ||
RS | 28.02.2018 | ||
SE | 28.02.2018 | ||
BG | 28.05.2018 | ||
NO | 28.05.2018 | ||
GR | 29.05.2018 | ||
Former [2018/40] | AT | 28.02.2018 | |
CY | 28.02.2018 | ||
ES | 28.02.2018 | ||
FI | 28.02.2018 | ||
HR | 28.02.2018 | ||
LT | 28.02.2018 | ||
LV | 28.02.2018 | ||
NL | 28.02.2018 | ||
RS | 28.02.2018 | ||
SE | 28.02.2018 | ||
BG | 28.05.2018 | ||
NO | 28.05.2018 | ||
GR | 29.05.2018 | ||
Former [2018/39] | AT | 28.02.2018 | |
CY | 28.02.2018 | ||
ES | 28.02.2018 | ||
FI | 28.02.2018 | ||
HR | 28.02.2018 | ||
LT | 28.02.2018 | ||
LV | 28.02.2018 | ||
NL | 28.02.2018 | ||
RS | 28.02.2018 | ||
SE | 28.02.2018 | ||
NO | 28.05.2018 | ||
GR | 29.05.2018 | ||
Former [2018/37] | CY | 28.02.2018 | |
ES | 28.02.2018 | ||
FI | 28.02.2018 | ||
HR | 28.02.2018 | ||
LT | 28.02.2018 | ||
NL | 28.02.2018 | ||
NO | 28.05.2018 | ||
GR | 29.05.2018 | ||
Former [2018/36] | CY | 28.02.2018 | |
ES | 28.02.2018 | ||
FI | 28.02.2018 | ||
HR | 28.02.2018 | ||
LT | 28.02.2018 | ||
NL | 28.02.2018 | ||
NO | 28.05.2018 | ||
Former [2018/35] | CY | 28.02.2018 | |
FI | 28.02.2018 | ||
HR | 28.02.2018 | ||
LT | 28.02.2018 | ||
NL | 28.02.2018 | ||
NO | 28.05.2018 | Documents cited: | Search | [Y]US2005051883 (FUKAZAWA MOTOHIKO [JP]) [Y] 1-15 * paragraph [0092] - paragraph [0097] * * paragraph [0110] - paragraph [0113] * * figures 1A-3B *; | [Y]US6218302 (BRAECKELMANN GREGOR [US], et al) [Y] 1-15 * column 4, line 15 - column 5, line 43 * * figures 4,5 *; | [A]US2006219565 (PREUSSE AXEL [DE], et al) [A] 1-15 * paragraph [0025] - paragraph [0033] * * figure 1 *; | [Y]US2007034517 (TSAO JUNG-CHIH [TW], et al) [Y] 13-15 * paragraph [0021] - paragraph [0037] * * figure 6 *; | [Y]US2011101531 (NEUILLY FRANCOIS [FR], et al) [Y] 1-15 * paragraph [0038] - paragraph [0043] * * paragraph [0048] - paragraph [0049] * * figure 3 *; | [A]WO2011109648 (GEORGIA TECH RES INST [US], et al) [A] 1-15 * page 9, line 12 - page 11, line 11 * * figure 1 * | [A] - KUAN H LU ET AL, "Thermal stress induced delamination of through silicon vias in 3-D interconnects", ELECTRONIC COMPONENTS AND TECHNOLOGY CONFERENCE (ECTC), 2010 PROCEEDINGS 60TH, IEEE, PISCATAWAY, NJ, USA, (201006), ISBN 978-1-4244-6410-4, pages 40 - 45, XP031694106 [A] 1-15 * the whole document * | International search | [Y]KR20000011786 (MOTOROLA INC [US]); | [Y]US2005136635 (SAVASTIOUK SERGEY [US], et al); | [A]US6936925 (LOPATIN SERGEY [US], et al); | [A]KR20110022571 (NOVELLUS SYSTEMS INC [US]); | [A]US6358848 (LOPATIN SERGEY [US]) | Examination | JP2003328184 | US2008081473 | US2009278238 | by applicant | JP2003328184 | US2008081473 |