EP2642662 - HBAR resonator comprising a structure for amplifying the amplitude of at least one resonance of said resonator and methods for producing said resonator [Right-click to bookmark this link] | Status | No opposition filed within time limit Status updated on 13.08.2021 Database last updated on 27.07.2024 | |
Former | The patent has been granted Status updated on 04.09.2020 | ||
Former | Grant of patent is intended Status updated on 12.07.2020 | ||
Former | Examination is in progress Status updated on 29.09.2017 | Most recent event Tooltip | 14.06.2024 | Lapse of the patent in a contracting state New state(s): TR | published on 17.07.2024 [2024/29] | Applicant(s) | For all designated states COMMISSARIAT À L'ÉNERGIE ATOMIQUE ET AUX ÉNERGIES ALTERNATIVES Bâtiment "Le Ponant D" 25, rue Leblanc 75015 Paris / FR | For all designated states Centre National de la Recherche Scientifique 3, rue Michel-Ange 75016 Paris / FR | [2020/41] |
Former [2013/39] | For all designated states COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES Bâtiment "Le Ponant D" 25, rue Leblanc 75015 Paris / FR | ||
For all designated states Centre National de la Recherche Scientifique 3, rue Michel Ange 75016 Paris / FR | Inventor(s) | 01 /
Reinhardt, Alexandre 4, rue de la Distillerie 38400 Saint Martin d'Heres / FR | 02 /
Ballandras, Sylvain 9, rue Alexandre Estignard 25000 Besancon / FR | 03 /
Perruchot, François 75, rue Ampère 38000 Grenoble / FR | [2013/39] | Representative(s) | Atout PI Laplace Immeuble Up On 25 Boulevard Romain Rolland CS 40072 75685 Paris Cedex 14 / FR | [N/P] |
Former [2020/41] | Esselin, Sophie, et al Marks & Clerk France Conseils en Propriété Industrielle Immeuble Visium 22 avenue Aristide Briand 94117 Arcueil Cedex / FR | ||
Former [2013/39] | Esselin, Sophie, et al Marks & Clerk France Conseils en Propriété Industrielle Immeuble Visium 22, Avenue Aristide Briand 94117 Arcueil Cedex / FR | Application number, filing date | 13159872.4 | 19.03.2013 | [2013/39] | Priority number, date | FR20120052462 | 20.03.2012 Original published format: FR 1252462 | [2013/39] | Filing language | FR | Procedural language | FR | Publication | Type: | A1 Application with search report | No.: | EP2642662 | Date: | 25.09.2013 | Language: | FR | [2013/39] | Type: | B1 Patent specification | No.: | EP2642662 | Date: | 07.10.2020 | Language: | FR | [2020/41] | Search report(s) | (Supplementary) European search report - dispatched on: | EP | 24.04.2013 | Classification | IPC: | H03H9/17, H03H9/02 | [2013/39] | CPC: |
H03H9/02078 (EP,US);
H03H9/17 (US);
H03H3/04 (US);
H03H9/172 (EP,US);
H03H9/175 (EP);
Y10T29/42 (EP,US)
| Designated contracting states | AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LI, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR [2020/41] |
Former [2013/39] | AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LI, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR | Title | German: | HBAR-Resonator, der eine Amplitudenverstärkungsstruktur von mindestens einer Resonanz des entsprechenden Resonators umfasst, und Verfahren zur Herstellung dieses Resonators | [2013/39] | English: | HBAR resonator comprising a structure for amplifying the amplitude of at least one resonance of said resonator and methods for producing said resonator | [2013/39] | French: | Résonateur HBAR comportant une structure d'amplification de l'amplitude d'au moins une résonance dudit résonateur et procédés de réalisation de ce résonateur | [2013/39] | Examination procedure | 12.03.2014 | Amendment by applicant (claims and/or description) | 12.03.2014 | Examination requested [2014/17] | 27.09.2017 | Despatch of a communication from the examining division (Time limit: M06) | 26.03.2018 | Reply to a communication from the examining division | 12.12.2018 | Despatch of a communication from the examining division (Time limit: M06) | 18.06.2019 | Reply to a communication from the examining division | 08.06.2020 | Cancellation of oral proceeding that was planned for 10.06.2020 | 10.06.2020 | Date of oral proceedings (cancelled) | 13.07.2020 | Communication of intention to grant the patent | 28.08.2020 | Fee for grant paid | 28.08.2020 | Fee for publishing/printing paid | 28.08.2020 | Receipt of the translation of the claim(s) | Divisional application(s) | The date of the Examining Division's first communication in respect of the earliest application for which a communication has been issued is 27.09.2017 | Opposition(s) | 08.07.2021 | No opposition filed within time limit [2021/37] | Fees paid | Renewal fee | 24.02.2015 | Renewal fee patent year 03 | 26.02.2016 | Renewal fee patent year 04 | 28.02.2017 | Renewal fee patent year 05 | 27.02.2018 | Renewal fee patent year 06 | 26.02.2019 | Renewal fee patent year 07 | 27.02.2020 | Renewal fee patent year 08 |
Opt-out from the exclusive Tooltip competence of the Unified Patent Court | See the Register of the Unified Patent Court for opt-out data | ||
Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court. | Lapses during opposition Tooltip | HU | 19.03.2013 | AL | 07.10.2020 | AT | 07.10.2020 | CY | 07.10.2020 | CZ | 07.10.2020 | DK | 07.10.2020 | EE | 07.10.2020 | ES | 07.10.2020 | FI | 07.10.2020 | HR | 07.10.2020 | IT | 07.10.2020 | LT | 07.10.2020 | LV | 07.10.2020 | MC | 07.10.2020 | MK | 07.10.2020 | NL | 07.10.2020 | PL | 07.10.2020 | RO | 07.10.2020 | RS | 07.10.2020 | SE | 07.10.2020 | SI | 07.10.2020 | SK | 07.10.2020 | SM | 07.10.2020 | TR | 07.10.2020 | BG | 07.01.2021 | NO | 07.01.2021 | GR | 08.01.2021 | IS | 07.02.2021 | PT | 08.02.2021 | IE | 19.03.2021 | LU | 19.03.2021 | BE | 31.03.2021 | CH | 31.03.2021 | LI | 31.03.2021 | [2024/29] |
Former [2024/22] | HU | 19.03.2013 | |
AL | 07.10.2020 | ||
AT | 07.10.2020 | ||
CY | 07.10.2020 | ||
CZ | 07.10.2020 | ||
DK | 07.10.2020 | ||
EE | 07.10.2020 | ||
ES | 07.10.2020 | ||
FI | 07.10.2020 | ||
HR | 07.10.2020 | ||
IT | 07.10.2020 | ||
LT | 07.10.2020 | ||
LV | 07.10.2020 | ||
MC | 07.10.2020 | ||
MK | 07.10.2020 | ||
NL | 07.10.2020 | ||
PL | 07.10.2020 | ||
RO | 07.10.2020 | ||
RS | 07.10.2020 | ||
SE | 07.10.2020 | ||
SI | 07.10.2020 | ||
SK | 07.10.2020 | ||
SM | 07.10.2020 | ||
BG | 07.01.2021 | ||
NO | 07.01.2021 | ||
GR | 08.01.2021 | ||
IS | 07.02.2021 | ||
PT | 08.02.2021 | ||
IE | 19.03.2021 | ||
LU | 19.03.2021 | ||
BE | 31.03.2021 | ||
CH | 31.03.2021 | ||
LI | 31.03.2021 | ||
Former [2023/30] | HU | 19.03.2013 | |
AL | 07.10.2020 | ||
AT | 07.10.2020 | ||
CY | 07.10.2020 | ||
CZ | 07.10.2020 | ||
DK | 07.10.2020 | ||
EE | 07.10.2020 | ||
ES | 07.10.2020 | ||
FI | 07.10.2020 | ||
HR | 07.10.2020 | ||
IT | 07.10.2020 | ||
LT | 07.10.2020 | ||
LV | 07.10.2020 | ||
MC | 07.10.2020 | ||
NL | 07.10.2020 | ||
PL | 07.10.2020 | ||
RO | 07.10.2020 | ||
RS | 07.10.2020 | ||
SE | 07.10.2020 | ||
SI | 07.10.2020 | ||
SK | 07.10.2020 | ||
SM | 07.10.2020 | ||
BG | 07.01.2021 | ||
NO | 07.01.2021 | ||
GR | 08.01.2021 | ||
IS | 07.02.2021 | ||
PT | 08.02.2021 | ||
IE | 19.03.2021 | ||
LU | 19.03.2021 | ||
BE | 31.03.2021 | ||
CH | 31.03.2021 | ||
LI | 31.03.2021 | ||
Former [2023/27] | HU | 19.03.2013 | |
AL | 07.10.2020 | ||
AT | 07.10.2020 | ||
CZ | 07.10.2020 | ||
DK | 07.10.2020 | ||
EE | 07.10.2020 | ||
ES | 07.10.2020 | ||
FI | 07.10.2020 | ||
HR | 07.10.2020 | ||
IT | 07.10.2020 | ||
LT | 07.10.2020 | ||
LV | 07.10.2020 | ||
MC | 07.10.2020 | ||
NL | 07.10.2020 | ||
PL | 07.10.2020 | ||
RO | 07.10.2020 | ||
RS | 07.10.2020 | ||
SE | 07.10.2020 | ||
SI | 07.10.2020 | ||
SK | 07.10.2020 | ||
SM | 07.10.2020 | ||
BG | 07.01.2021 | ||
NO | 07.01.2021 | ||
GR | 08.01.2021 | ||
IS | 07.02.2021 | ||
PT | 08.02.2021 | ||
IE | 19.03.2021 | ||
LU | 19.03.2021 | ||
BE | 31.03.2021 | ||
CH | 31.03.2021 | ||
LI | 31.03.2021 | ||
Former [2022/34] | AL | 07.10.2020 | |
AT | 07.10.2020 | ||
CZ | 07.10.2020 | ||
DK | 07.10.2020 | ||
EE | 07.10.2020 | ||
ES | 07.10.2020 | ||
FI | 07.10.2020 | ||
HR | 07.10.2020 | ||
IT | 07.10.2020 | ||
LT | 07.10.2020 | ||
LV | 07.10.2020 | ||
MC | 07.10.2020 | ||
NL | 07.10.2020 | ||
PL | 07.10.2020 | ||
RO | 07.10.2020 | ||
RS | 07.10.2020 | ||
SE | 07.10.2020 | ||
SI | 07.10.2020 | ||
SK | 07.10.2020 | ||
SM | 07.10.2020 | ||
BG | 07.01.2021 | ||
NO | 07.01.2021 | ||
GR | 08.01.2021 | ||
IS | 07.02.2021 | ||
PT | 08.02.2021 | ||
IE | 19.03.2021 | ||
LU | 19.03.2021 | ||
BE | 31.03.2021 | ||
CH | 31.03.2021 | ||
LI | 31.03.2021 | ||
Former [2022/23] | AL | 07.10.2020 | |
AT | 07.10.2020 | ||
CZ | 07.10.2020 | ||
DK | 07.10.2020 | ||
EE | 07.10.2020 | ||
ES | 07.10.2020 | ||
FI | 07.10.2020 | ||
HR | 07.10.2020 | ||
IT | 07.10.2020 | ||
LT | 07.10.2020 | ||
LV | 07.10.2020 | ||
MC | 07.10.2020 | ||
NL | 07.10.2020 | ||
PL | 07.10.2020 | ||
RO | 07.10.2020 | ||
RS | 07.10.2020 | ||
SE | 07.10.2020 | ||
SI | 07.10.2020 | ||
SK | 07.10.2020 | ||
SM | 07.10.2020 | ||
BG | 07.01.2021 | ||
NO | 07.01.2021 | ||
GR | 08.01.2021 | ||
IS | 07.02.2021 | ||
PT | 08.02.2021 | ||
IE | 19.03.2021 | ||
LU | 19.03.2021 | ||
CH | 31.03.2021 | ||
LI | 31.03.2021 | ||
Former [2022/10] | AL | 07.10.2020 | |
AT | 07.10.2020 | ||
CZ | 07.10.2020 | ||
DK | 07.10.2020 | ||
EE | 07.10.2020 | ||
ES | 07.10.2020 | ||
FI | 07.10.2020 | ||
HR | 07.10.2020 | ||
IT | 07.10.2020 | ||
LT | 07.10.2020 | ||
LV | 07.10.2020 | ||
MC | 07.10.2020 | ||
NL | 07.10.2020 | ||
PL | 07.10.2020 | ||
RO | 07.10.2020 | ||
RS | 07.10.2020 | ||
SE | 07.10.2020 | ||
SI | 07.10.2020 | ||
SK | 07.10.2020 | ||
SM | 07.10.2020 | ||
BG | 07.01.2021 | ||
NO | 07.01.2021 | ||
GR | 08.01.2021 | ||
PT | 08.02.2021 | ||
IE | 19.03.2021 | ||
LU | 19.03.2021 | ||
CH | 31.03.2021 | ||
LI | 31.03.2021 | ||
Former [2022/09] | AL | 07.10.2020 | |
AT | 07.10.2020 | ||
CZ | 07.10.2020 | ||
DK | 07.10.2020 | ||
EE | 07.10.2020 | ||
ES | 07.10.2020 | ||
FI | 07.10.2020 | ||
HR | 07.10.2020 | ||
IT | 07.10.2020 | ||
LT | 07.10.2020 | ||
LV | 07.10.2020 | ||
MC | 07.10.2020 | ||
NL | 07.10.2020 | ||
PL | 07.10.2020 | ||
RO | 07.10.2020 | ||
RS | 07.10.2020 | ||
SE | 07.10.2020 | ||
SI | 07.10.2020 | ||
SK | 07.10.2020 | ||
SM | 07.10.2020 | ||
BG | 07.01.2021 | ||
NO | 07.01.2021 | ||
GR | 08.01.2021 | ||
IS | 07.02.2021 | ||
PT | 08.02.2021 | ||
IE | 19.03.2021 | ||
LU | 19.03.2021 | ||
Former [2022/07] | AL | 07.10.2020 | |
AT | 07.10.2020 | ||
CZ | 07.10.2020 | ||
DK | 07.10.2020 | ||
EE | 07.10.2020 | ||
ES | 07.10.2020 | ||
FI | 07.10.2020 | ||
HR | 07.10.2020 | ||
IT | 07.10.2020 | ||
LT | 07.10.2020 | ||
LV | 07.10.2020 | ||
MC | 07.10.2020 | ||
NL | 07.10.2020 | ||
PL | 07.10.2020 | ||
RO | 07.10.2020 | ||
RS | 07.10.2020 | ||
SE | 07.10.2020 | ||
SI | 07.10.2020 | ||
SK | 07.10.2020 | ||
SM | 07.10.2020 | ||
BG | 07.01.2021 | ||
NO | 07.01.2021 | ||
GR | 08.01.2021 | ||
IS | 07.02.2021 | ||
PT | 08.02.2021 | ||
IE | 19.03.2021 | ||
Former [2021/49] | AL | 07.10.2020 | |
AT | 07.10.2020 | ||
CZ | 07.10.2020 | ||
DK | 07.10.2020 | ||
EE | 07.10.2020 | ||
ES | 07.10.2020 | ||
FI | 07.10.2020 | ||
HR | 07.10.2020 | ||
IT | 07.10.2020 | ||
LT | 07.10.2020 | ||
LV | 07.10.2020 | ||
MC | 07.10.2020 | ||
NL | 07.10.2020 | ||
PL | 07.10.2020 | ||
RO | 07.10.2020 | ||
RS | 07.10.2020 | ||
SE | 07.10.2020 | ||
SI | 07.10.2020 | ||
SK | 07.10.2020 | ||
SM | 07.10.2020 | ||
BG | 07.01.2021 | ||
NO | 07.01.2021 | ||
GR | 08.01.2021 | ||
IS | 07.02.2021 | ||
PT | 08.02.2021 | ||
Former [2021/48] | AL | 07.10.2020 | |
AT | 07.10.2020 | ||
CZ | 07.10.2020 | ||
DK | 07.10.2020 | ||
EE | 07.10.2020 | ||
ES | 07.10.2020 | ||
FI | 07.10.2020 | ||
HR | 07.10.2020 | ||
IT | 07.10.2020 | ||
LT | 07.10.2020 | ||
LV | 07.10.2020 | ||
MC | 07.10.2020 | ||
NL | 07.10.2020 | ||
PL | 07.10.2020 | ||
RO | 07.10.2020 | ||
RS | 07.10.2020 | ||
SE | 07.10.2020 | ||
SK | 07.10.2020 | ||
SM | 07.10.2020 | ||
BG | 07.01.2021 | ||
NO | 07.01.2021 | ||
GR | 08.01.2021 | ||
IS | 07.02.2021 | ||
PT | 08.02.2021 | ||
Former [2021/45] | AL | 07.10.2020 | |
AT | 07.10.2020 | ||
CZ | 07.10.2020 | ||
DK | 07.10.2020 | ||
EE | 07.10.2020 | ||
ES | 07.10.2020 | ||
FI | 07.10.2020 | ||
HR | 07.10.2020 | ||
LT | 07.10.2020 | ||
LV | 07.10.2020 | ||
MC | 07.10.2020 | ||
NL | 07.10.2020 | ||
PL | 07.10.2020 | ||
RO | 07.10.2020 | ||
RS | 07.10.2020 | ||
SE | 07.10.2020 | ||
SK | 07.10.2020 | ||
SM | 07.10.2020 | ||
BG | 07.01.2021 | ||
NO | 07.01.2021 | ||
GR | 08.01.2021 | ||
IS | 07.02.2021 | ||
PT | 08.02.2021 | ||
Former [2021/37] | AT | 07.10.2020 | |
CZ | 07.10.2020 | ||
DK | 07.10.2020 | ||
EE | 07.10.2020 | ||
ES | 07.10.2020 | ||
FI | 07.10.2020 | ||
HR | 07.10.2020 | ||
LT | 07.10.2020 | ||
LV | 07.10.2020 | ||
NL | 07.10.2020 | ||
PL | 07.10.2020 | ||
RO | 07.10.2020 | ||
RS | 07.10.2020 | ||
SE | 07.10.2020 | ||
SK | 07.10.2020 | ||
SM | 07.10.2020 | ||
BG | 07.01.2021 | ||
NO | 07.01.2021 | ||
GR | 08.01.2021 | ||
IS | 07.02.2021 | ||
PT | 08.02.2021 | ||
Former [2021/36] | AT | 07.10.2020 | |
CZ | 07.10.2020 | ||
EE | 07.10.2020 | ||
ES | 07.10.2020 | ||
FI | 07.10.2020 | ||
HR | 07.10.2020 | ||
LT | 07.10.2020 | ||
LV | 07.10.2020 | ||
NL | 07.10.2020 | ||
PL | 07.10.2020 | ||
RO | 07.10.2020 | ||
RS | 07.10.2020 | ||
SE | 07.10.2020 | ||
SK | 07.10.2020 | ||
SM | 07.10.2020 | ||
BG | 07.01.2021 | ||
NO | 07.01.2021 | ||
GR | 08.01.2021 | ||
IS | 07.02.2021 | ||
PT | 08.02.2021 | ||
Former [2021/35] | AT | 07.10.2020 | |
CZ | 07.10.2020 | ||
ES | 07.10.2020 | ||
FI | 07.10.2020 | ||
HR | 07.10.2020 | ||
LT | 07.10.2020 | ||
LV | 07.10.2020 | ||
NL | 07.10.2020 | ||
PL | 07.10.2020 | ||
RO | 07.10.2020 | ||
RS | 07.10.2020 | ||
SE | 07.10.2020 | ||
SK | 07.10.2020 | ||
SM | 07.10.2020 | ||
BG | 07.01.2021 | ||
NO | 07.01.2021 | ||
GR | 08.01.2021 | ||
IS | 07.02.2021 | ||
PT | 08.02.2021 | ||
Former [2021/34] | AT | 07.10.2020 | |
CZ | 07.10.2020 | ||
ES | 07.10.2020 | ||
FI | 07.10.2020 | ||
HR | 07.10.2020 | ||
LT | 07.10.2020 | ||
LV | 07.10.2020 | ||
NL | 07.10.2020 | ||
PL | 07.10.2020 | ||
RS | 07.10.2020 | ||
SE | 07.10.2020 | ||
SM | 07.10.2020 | ||
BG | 07.01.2021 | ||
NO | 07.01.2021 | ||
GR | 08.01.2021 | ||
IS | 07.02.2021 | ||
PT | 08.02.2021 | ||
Former [2021/33] | AT | 07.10.2020 | |
ES | 07.10.2020 | ||
FI | 07.10.2020 | ||
HR | 07.10.2020 | ||
LT | 07.10.2020 | ||
LV | 07.10.2020 | ||
NL | 07.10.2020 | ||
PL | 07.10.2020 | ||
RS | 07.10.2020 | ||
SE | 07.10.2020 | ||
SM | 07.10.2020 | ||
BG | 07.01.2021 | ||
NO | 07.01.2021 | ||
GR | 08.01.2021 | ||
IS | 07.02.2021 | ||
PT | 08.02.2021 | ||
Former [2021/32] | AT | 07.10.2020 | |
ES | 07.10.2020 | ||
FI | 07.10.2020 | ||
HR | 07.10.2020 | ||
LV | 07.10.2020 | ||
NL | 07.10.2020 | ||
PL | 07.10.2020 | ||
RS | 07.10.2020 | ||
SE | 07.10.2020 | ||
SM | 07.10.2020 | ||
BG | 07.01.2021 | ||
NO | 07.01.2021 | ||
GR | 08.01.2021 | ||
IS | 07.02.2021 | ||
PT | 08.02.2021 | ||
Former [2021/28] | AT | 07.10.2020 | |
ES | 07.10.2020 | ||
FI | 07.10.2020 | ||
HR | 07.10.2020 | ||
LV | 07.10.2020 | ||
NL | 07.10.2020 | ||
PL | 07.10.2020 | ||
RS | 07.10.2020 | ||
SE | 07.10.2020 | ||
BG | 07.01.2021 | ||
NO | 07.01.2021 | ||
GR | 08.01.2021 | ||
IS | 07.02.2021 | ||
PT | 08.02.2021 | ||
Former [2021/25] | AT | 07.10.2020 | |
ES | 07.10.2020 | ||
FI | 07.10.2020 | ||
LV | 07.10.2020 | ||
NL | 07.10.2020 | ||
PL | 07.10.2020 | ||
RS | 07.10.2020 | ||
SE | 07.10.2020 | ||
BG | 07.01.2021 | ||
NO | 07.01.2021 | ||
GR | 08.01.2021 | ||
IS | 07.02.2021 | ||
PT | 08.02.2021 | ||
Former [2021/24] | AT | 07.10.2020 | |
FI | 07.10.2020 | ||
LV | 07.10.2020 | ||
NL | 07.10.2020 | ||
RS | 07.10.2020 | ||
SE | 07.10.2020 | ||
BG | 07.01.2021 | ||
NO | 07.01.2021 | ||
GR | 08.01.2021 | ||
PT | 08.02.2021 | ||
Former [2021/23] | FI | 07.10.2020 | |
LV | 07.10.2020 | ||
NL | 07.10.2020 | ||
RS | 07.10.2020 | ||
SE | 07.10.2020 | ||
NO | 07.01.2021 | ||
GR | 08.01.2021 | ||
PT | 08.02.2021 | ||
Former [2021/22] | FI | 07.10.2020 | |
NL | 07.10.2020 | ||
RS | 07.10.2020 | ||
NO | 07.01.2021 | ||
PT | 08.02.2021 | ||
Former [2021/21] | FI | 07.10.2020 | |
NL | 07.10.2020 | ||
PT | 08.02.2021 | ||
Former [2021/20] | FI | 07.10.2020 | Documents cited: | Search | [A]DE102009047807 (SIEMENS AG [DE]) [A] 1-29* paragraph [0059] - paragraph [0060]; figure 3 *; | [XI] - PIJOLAT M ET AL, "LiNbO3 Film Bulk Acoustic Resonator", FREQUENCY CONTROL SYMPOSIUM (FCS), 2010 IEEE INTERNATIONAL, IEEE, PISCATAWAY, NJ, USA, (20100601), ISBN 978-1-4244-6399-2, pages 661 - 664, XP031738433 [X] 1,4,5,8,10,11,13,16,18-20,22,23 * the whole document * [I] 2,3,6,7,9,12,14,15,17,21,24-29 | [XI] - PIJOLAT M ET AL, "High quality factor lithium niobate electrostrictive HBAR resonators", FREQUENCY CONTROL AND THE EUROPEAN FREQUENCY AND TIME FORUM (FCS), 2011 JOINT CONFERENCE OF THE IEEE INTERNATIONAL, IEEE, (20110502), doi:10.1109/FCS.2011.5977743, ISBN 978-1-61284-111-3, pages 1 - 3, XP032009268 [X] 1,4,8,10,11,13,16,18-23 * the whole document * [I] 2,3,5-7,9,12,14,15,17,24-29 DOI: http://dx.doi.org/10.1109/FCS.2011.5977743 | Examination | US5864261 | US2006119453 | US2006170519 | - ALIEV G ET AL, "Hypersonic acoustic mirrors and microcavities in porous silicon", APPLIED PHYSICS LETTERS, A I P PUBLISHING LLC, US, (20100322), vol. 96, no. 12, doi:10.1063/1.3367747, ISSN 0003-6951, pages 124101 - 124101, XP012130564 DOI: http://dx.doi.org/10.1063/1.3367747 | by applicant | FR1058402 | FR2938136 | - H. ZHANG; W. PANG; H. YU; E.S. KIM, "High-tone bulk acoustic resonators on sapphire, crystal quartz, fused silica and silicon substrates", J. APPL. PHYS., (2006), vol. 99, page 124911, XP012083562 | - H.L. SALVO; M. GOTTLIEB; B.R. MCAVOY, "Shear mode transducers for high-Q bulk microwave resonators", PROCEEDINGS OF THE 41 ST ANNUAL FREQUENCY CONTROL SYMPOSIUM, (1982), pages 388 - 390 | - D. GACHON; E. COURJON; J. MASSON; V. PETRINI; J.Y. RAUCH; S. BALLANDRAS, "LiNb03-LiNb03 high overtone bulk acoustic resonator exhibiting high Q.f product", PROCEEDINGS OF THE 2007 IEEE ULTRASONICS SYMPOSIUM, pages 1417 - 1420 | - K.M. LAKIN; G.R. KLINE; K.T. MCCARRON, "High-Q microwave acoustic resonators and filters", IEEE TRANSACTIONS ON MICROWAVE THEORY AND TECHNIQUES, (1993), vol. 41, no. 2, doi:doi:10.1109/22.260698, pages 2139 - 2146, XP000426128 DOI: http://dx.doi.org/10.1109/22.260698 | - G.R. KLINE; K.M. LAKIN; K.T. MCCARRON, "Overmoded high-Q resonators for microwave oscillators", PROCEEDINGS OF THE 1993 IEEE INTERNATIONAL FREQUENCY CONTROL SYMPOSIUM, (1993), doi:doi:10.1109/FREQ.1993.367467, page 718, XP010126168 DOI: http://dx.doi.org/10.1109/FREQ.1993.367467 | - M. PIJOLAT; S. LOUBRIAT; S. QUESTE; D. MERCIER; A. REINHARDT; E. DEFAÿ; C. DEGUET; L. CLAVELIER; H. MORICEAU; M. AÏD, "Large electromechanical coupling factor film bulk acoustic resonator with X-cut LiNb03 layer transfer", APPL. PHYS. LETT., (2009), vol. 95, doi:doi:10.1063/1.3258496, page 182106, XP012126324 DOI: http://dx.doi.org/10.1063/1.3258496 | - W. PANG; H. ZHANG; J.J. KIM; H. YU; E.S. KIM, "High-Q single mode high-tone bulk acoustic resonator integrated with surface- micromachined FBAR filter", PROCEEDINGS OF THE 2005 MTT-S INTERNATIONAL MICROWAVE SYMPOSIUM, (2005), page 413, XP010844755 | - A. REINHARDT; T. PASTUREAUD; S. BALLANDRAS; V. LAUDE, "Scattering matrix method for modeling acoustic waves in piezoelectric, fluid and metallic multilayers", JOURN. APPL. PHYS., (2003), vol. 94, no. 10, pages 6923 - 6931 | - M. PIJOLAT; D. MERCIER; A. REINHARDT; E. DEFAÿ; C. DEGUET; M. AÏD; J. S. MOULET; B. GHYSELEN; S. BALLANDRAS, "Mode conversion in high overtone bulk acoustic wave resonators", PROCEEDINGS OF THE 2009 INTERNATIONAL FREQUENCY CONTROL SYMPOSIUM, (2009), pages 290 - 294, XP031492385 | - G.N. ALIEV; B. GOLLER; D. KOVALEV; P.A. SNOW, "Hypersonic acoustic mirrors and microcavities in porous silicon", APPLIED PHYSICS LETTERS, (2010), vol. 96, doi:doi:10.1063/1.3367747, page 124101, XP012130564 DOI: http://dx.doi.org/10.1063/1.3367747 |