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EP2813601
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EP About this file: EP2813601
| EP2813601 - Device for moving a substrate holder during a vertical gal-vanic metal deposition, and a method for vertical galvanic metal deposition using such a device [Right-click to bookmark this link] | Status | The application is deemed to be withdrawn Status updated on 13.11.2015 Database last updated on 12.07.2024 | Most recent event Tooltip | 13.11.2015 | Application deemed to be withdrawn | published on 16.12.2015 [2015/51] | Applicant(s) | For all designated states MKS IP Association Erasmusstraße 20 10553 Berlin / DE | [N/P] |
| Former [2014/51] | For all designated states Atotech Deutschland GmbH Erasmusstraße 20 10553 Berlin / DE | Inventor(s) | 01 /
Klingl, Heinz Schönblickstraße 3 86356 Neusäß / DE | 02 /
Weinhold, Ray Habsburgerstraße 70a 90475 Nürnberg / DE | [2014/51] | Representative(s) | Wonnemann, Jörg Atotech Deutschland GmbH Patent Management Erasmusstraße 20 10553 Berlin / DE | [2014/51] | Application number, filing date | 13171963.5 | 14.06.2013 | [2014/51] | Filing language | EN | Procedural language | EN | Publication | Type: | A1 Application with search report | No.: | EP2813601 | Date: | 17.12.2014 | Language: | EN | [2014/51] | Search report(s) | (Supplementary) European search report - dispatched on: | EP | 28.02.2014 | Classification | IPC: | C25D5/04, C25D17/06, C25D21/10 | [2014/51] | CPC: |
C25D21/10 (EP);
C25D17/06 (EP);
C25D21/12 (EP);
C25D5/04 (EP)
| Designated contracting states | AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LI, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR [2014/51] | Extension states | BA | Not yet paid | ME | Not yet paid | Title | German: | Vorrichtung zum Bewegen eines Substrathalters während einer vertikalen galvanischen Metallabscheidung und Verfahren zur vertikalen galvanischen Metallabscheidung unter Verwendung solch einer Vorrichtung | [2014/51] | English: | Device for moving a substrate holder during a vertical gal-vanic metal deposition, and a method for vertical galvanic metal deposition using such a device | [2014/51] | French: | Dispositif pour déplacer un support de substrat pendant un dépôt de métal galvanique vertical et procédé de dépôt de métal galvanique vertical utilisant un tel dispositif | [2014/51] | Examination procedure | 14.06.2013 | Examination requested [2014/51] | 18.06.2015 | Application deemed to be withdrawn, date of legal effect [2015/51] | 24.07.2015 | Despatch of communication that the application is deemed to be withdrawn, reason: examination fee not paid in time [2015/51] | Fees paid | Penalty fee | Additional fee for renewal fee | 30.06.2015 | 03 M06 Not yet paid |
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| Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court. | Documents cited: | Search | [XI]DE4212045 (SCHERING AG [DE]) [X] 1,2,4,7-13 * column 1, lines 3-8 * * column 3, lines 24-48 * * column 4, line 47 - column 5, line 32 * * column 6, line 27 - column 7, line 46; figures 1-3 * [I] 5,6; | [X]DE102005024771 (HANSGROHE AG [DE]) [X] 1,3,7-13 * paragraphs [0001] , [0002] , [0518] - [0026]; figures 1-3 *; | [X]US2002071917 (HEPTING EMIL [DE]) [X] 1,2,7-13 * paragraphs [0020] - [0035]; figures 1-5 *; | [X]US2004037682 (YOSHIOKA JUNICHIRO [JP] ET AL) [X] 1-3,7,8,10,12 * paragraphs [0039] - [0074]; figures 2,3-5,9,10 *; | [X]GB2247027 (HENIG HANS HENIG HANS [DE]) [X] 1,7-9,11-13 * page 9, line 5 - page 26, line 18; figures 1-8 *; | [X]EP1441048 (DAINIPPON SCREEN MFG [JP]) [X] 1,3,7-12 * paragraphs [0198] - [0213]; figure 5 * |