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Extract from the Register of European Patents

EP About this file: EP2987239

EP2987239 - A NANOMECHANICAL RESONATOR ARRAY AND PRODUCTION METHOD THEREOF [Right-click to bookmark this link]
StatusNo opposition filed within time limit
Status updated on  20.10.2017
Database last updated on 28.09.2024
FormerThe patent has been granted
Status updated on  11.11.2016
FormerGrant of patent is intended
Status updated on  04.11.2016
Most recent event   Tooltip17.07.2020Lapse of the patent in a contracting state
New state(s): AL		published on 19.08.2020  [2020/34]
Applicant(s)For all designated states
KOC Universitesi
Rumelifeneri Yolu
Sariyer
34450 Istanbul / TR
[2016/08]
Inventor(s)01 / ALACA, Burhanettin, Erdem
KOC Universitesi Lojmanlari 5/2
Rumelifeneri Yolu
Sariyer
34450 Istanbul / TR
02 / LEBLEBICI, Yusuf
Route de la Croix 68
CH-1095 Lutry / CH
03 / YORULMAZ, Ismail
Maden Mah. Maden Cami Sok. 2/7
Sariyer
34450 Istanbul / TR
04 / KILINC, Yasin
Yunus Emre Mah. Taner Sok. 83/2
Yenimahalle
06170 Ankara / TR
05 / AKSOY, Bekir
Bolluca Merkez Mah. Osman Gazi Cad.
170. Sok. No:1
Arnavutkoy
34287 Istanbul / TR
 [2016/08]
Representative(s)Cayli, Hülya
Paragon Consultancy Inc. Koza Sokak No: 63/2 GOP
06540 Ankara / TR
[2016/08]
Application number, filing date13721927.519.04.2013
[2016/08]
WO2013EP58133
Filing languageEN
Procedural languageEN
PublicationType: A1 Application with search report
No.:WO2014169960
Date:23.10.2014
Language:EN
[2014/43]
Type: A1 Application with search report 
No.:EP2987239
Date:24.02.2016
Language:EN
The application published by WIPO in one of the EPO official languages on 23.10.2014 takes the place of the publication of the European patent application.
[2016/08]
Type: B1 Patent specification 
No.:EP2987239
Date:14.12.2016
Language:EN
[2016/50]
Search report(s)International search report - published on:EP23.10.2014
ClassificationIPC:H03H9/24
[2016/08]
CPC:
B82B1/005 (US); H03B5/30 (US); H03H9/2405 (EP,US);
H03H9/2463 (EP,US); B82Y15/00 (US); B82Y40/00 (US);
H03H2009/02291 (EP,US); Y10S977/762 (EP,US); Y10S977/888 (EP,US);
Y10S977/956 (EP,US) (-)
Designated contracting statesAL,   AT,   BE,   BG,   CH,   CY,   CZ,   DE,   DK,   EE,   ES,   FI,   FR,   GB,   GR,   HR,   HU,   IE,   IS,   IT,   LI,   LT,   LU,   LV,   MC,   MK,   MT,   NL,   NO,   PL,   PT,   RO,   RS,   SE,   SI,   SK,   SM,   TR [2016/08]
Extension statesBANot yet paid
MENot yet paid
TitleGerman:NANOMECHANISCHE RESONATORANORDNUNG UND HERSTELLUNGSVERFAHREN DAFÜR[2016/08]
English:A NANOMECHANICAL RESONATOR ARRAY AND PRODUCTION METHOD THEREOF[2016/08]
French:RÉSEAU DE RÉSONATEURS NANOMÉCANIQUE ET SON PROCÉDÉ DE FABRICATION[2016/08]
Entry into regional phase09.11.2015National basic fee paid 
09.11.2015Designation fee(s) paid 
09.11.2015Examination fee paid 
Examination procedure17.02.2015Request for preliminary examination filed
International Preliminary Examining Authority: EP
09.11.2015Examination requested  [2016/08]
09.09.2016Communication of intention to grant the patent
02.11.2016Fee for grant paid
02.11.2016Fee for publishing/printing paid
02.11.2016Receipt of the translation of the claim(s)
Divisional application(s)The date of the Examining Division's first communication in respect of the earliest application for which a communication has been issued is  09.09.2016
Opposition(s)15.09.2017No opposition filed within time limit [2017/47]
Fees paidRenewal fee
09.11.2015Renewal fee patent year 03
18.03.2016Renewal fee patent year 04
Opt-out from the exclusive  Tooltip
competence of the Unified
Patent Court		 See the Register of the Unified Patent Court for opt-out data
Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court.
Lapses during opposition  TooltipHU19.04.2013
AL14.12.2016
AT14.12.2016
BE14.12.2016
CY14.12.2016
CZ14.12.2016
DK14.12.2016
EE14.12.2016
ES14.12.2016
FI14.12.2016
HR14.12.2016
IT14.12.2016
LT14.12.2016
LV14.12.2016
MC14.12.2016
MK14.12.2016
NL14.12.2016
PL14.12.2016
RO14.12.2016
RS14.12.2016
SE14.12.2016
SI14.12.2016
SK14.12.2016
SM14.12.2016
BG14.03.2017
NO14.03.2017
GR15.03.2017
IS14.04.2017
PT14.04.2017
GB19.04.2017
IE19.04.2017
LU19.04.2017
MT19.04.2017
CH30.04.2017
LI30.04.2017
[2020/34]
Former [2019/51]HU19.04.2013
AT14.12.2016
BE14.12.2016
CY14.12.2016
CZ14.12.2016
DK14.12.2016
EE14.12.2016
ES14.12.2016
FI14.12.2016
HR14.12.2016
IT14.12.2016
LT14.12.2016
LV14.12.2016
MC14.12.2016
MK14.12.2016
NL14.12.2016
PL14.12.2016
RO14.12.2016
RS14.12.2016
SE14.12.2016
SI14.12.2016
SK14.12.2016
SM14.12.2016
BG14.03.2017
NO14.03.2017
GR15.03.2017
IS14.04.2017
PT14.04.2017
GB19.04.2017
IE19.04.2017
LU19.04.2017
MT19.04.2017
CH30.04.2017
LI30.04.2017
Former [2019/48]HU19.04.2013
AT14.12.2016
BE14.12.2016
CY14.12.2016
CZ14.12.2016
DK14.12.2016
EE14.12.2016
ES14.12.2016
FI14.12.2016
HR14.12.2016
IT14.12.2016
LT14.12.2016
LV14.12.2016
MC14.12.2016
NL14.12.2016
PL14.12.2016
RO14.12.2016
RS14.12.2016
SE14.12.2016
SI14.12.2016
SK14.12.2016
SM14.12.2016
BG14.03.2017
NO14.03.2017
GR15.03.2017
IS14.04.2017
PT14.04.2017
GB19.04.2017
IE19.04.2017
LU19.04.2017
MT19.04.2017
CH30.04.2017
LI30.04.2017
Former [2019/31]HU19.04.2013
AT14.12.2016
BE14.12.2016
CZ14.12.2016
DK14.12.2016
EE14.12.2016
ES14.12.2016
FI14.12.2016
HR14.12.2016
IT14.12.2016
LT14.12.2016
LV14.12.2016
MC14.12.2016
NL14.12.2016
PL14.12.2016
RO14.12.2016
RS14.12.2016
SE14.12.2016
SI14.12.2016
SK14.12.2016
SM14.12.2016
BG14.03.2017
NO14.03.2017
GR15.03.2017
IS14.04.2017
PT14.04.2017
GB19.04.2017
IE19.04.2017
LU19.04.2017
MT19.04.2017
CH30.04.2017
LI30.04.2017
Former [2018/43]AT14.12.2016
BE14.12.2016
CZ14.12.2016
DK14.12.2016
EE14.12.2016
ES14.12.2016
FI14.12.2016
HR14.12.2016
IT14.12.2016
LT14.12.2016
LV14.12.2016
MC14.12.2016
NL14.12.2016
PL14.12.2016
RO14.12.2016
RS14.12.2016
SE14.12.2016
SI14.12.2016
SK14.12.2016
SM14.12.2016
BG14.03.2017
NO14.03.2017
GR15.03.2017
IS14.04.2017
PT14.04.2017
GB19.04.2017
IE19.04.2017
LU19.04.2017
MT19.04.2017
CH30.04.2017
LI30.04.2017
Former [2018/14]AT14.12.2016
BE14.12.2016
CZ14.12.2016
DK14.12.2016
EE14.12.2016
ES14.12.2016
FI14.12.2016
HR14.12.2016
IT14.12.2016
LT14.12.2016
LV14.12.2016
MC14.12.2016
NL14.12.2016
PL14.12.2016
RO14.12.2016
RS14.12.2016
SE14.12.2016
SI14.12.2016
SK14.12.2016
SM14.12.2016
BG14.03.2017
NO14.03.2017
GR15.03.2017
IS14.04.2017
PT14.04.2017
GB19.04.2017
LU19.04.2017
CH30.04.2017
LI30.04.2017
Former [2018/06]AT14.12.2016
BE14.12.2016
CZ14.12.2016
DK14.12.2016
EE14.12.2016
ES14.12.2016
FI14.12.2016
HR14.12.2016
IT14.12.2016
LT14.12.2016
LV14.12.2016
MC14.12.2016
NL14.12.2016
PL14.12.2016
RO14.12.2016
RS14.12.2016
SE14.12.2016
SK14.12.2016
SM14.12.2016
BG14.03.2017
NO14.03.2017
GR15.03.2017
IS14.04.2017
PT14.04.2017
Former [2018/01]AT14.12.2016
BE14.12.2016
CZ14.12.2016
DK14.12.2016
EE14.12.2016
ES14.12.2016
FI14.12.2016
HR14.12.2016
IT14.12.2016
LT14.12.2016
LV14.12.2016
NL14.12.2016
PL14.12.2016
RO14.12.2016
RS14.12.2016
SE14.12.2016
SK14.12.2016
SM14.12.2016
BG14.03.2017
NO14.03.2017
GR15.03.2017
IS14.04.2017
PT14.04.2017
Former [2017/41]AT14.12.2016
BE14.12.2016
CZ14.12.2016
EE14.12.2016
ES14.12.2016
FI14.12.2016
HR14.12.2016
IT14.12.2016
LT14.12.2016
LV14.12.2016
NL14.12.2016
PL14.12.2016
RO14.12.2016
RS14.12.2016
SE14.12.2016
SK14.12.2016
SM14.12.2016
BG14.03.2017
NO14.03.2017
GR15.03.2017
IS14.04.2017
PT14.04.2017
Former [2017/36]BE14.12.2016
CZ14.12.2016
EE14.12.2016
ES14.12.2016
FI14.12.2016
HR14.12.2016
LT14.12.2016
LV14.12.2016
NL14.12.2016
PL14.12.2016
RO14.12.2016
RS14.12.2016
SE14.12.2016
SK14.12.2016
NO14.03.2017
GR15.03.2017
IS14.04.2017
Former [2017/34]CZ14.12.2016
FI14.12.2016
HR14.12.2016
LT14.12.2016
LV14.12.2016
NL14.12.2016
RS14.12.2016
SE14.12.2016
NO14.03.2017
GR15.03.2017
Former [2017/31]FI14.12.2016
HR14.12.2016
LT14.12.2016
LV14.12.2016
NL14.12.2016
RS14.12.2016
SE14.12.2016
NO14.03.2017
GR15.03.2017
Former [2017/28]FI14.12.2016
HR14.12.2016
LT14.12.2016
LV14.12.2016
RS14.12.2016
SE14.12.2016
NO14.03.2017
GR15.03.2017
Former [2017/12]LV14.12.2016
Cited inInternational search[A]WO2008036830  (UNIV BOSTON [US], et al) [A] 1-17 * page 5, line 7 - line 23; figure 4 *;
 [XA]US2009219114  (KAUNISTO RISTO H S [FI], et al) [X] 1,3 * paragraph [0032] - paragraph [0036]; figures 1,4 * [A] 2,4-17
 [XI]  - EVREN F ARKAN ET AL, "Monolithic integration of Si nanowires with metallic electrodes: NEMS resonator and switch applications;Monolithic integration of Si nanowires with metallic electrodes", JOURNAL OF MICROMECHANICS & MICROENGINEERING, INSTITUTE OF PHYSICS PUBLISHING, BRISTOL, GB, (20111122), vol. 21, no. 12, doi:10.1088/0960-1317/21/12/125018, ISSN 0960-1317, page 125018, XP020214544 [X] 1,3,13 * the whole document * [I] 2,4-12,14-17

DOI:   http://dx.doi.org/10.1088/0960-1317/21/12/125018
by applicantUS7295088
 US6236281
 US6930569
 US7227432
 US7319372
 US141355
 US7696843
    - BANNON , F. D.; CLARK, J. R.; NGUYEN, C. T.-C., "High frequency micromechanical filters", IEEE J. SOLID-STATE CIRCUITS, (2000), vol. 35, no. 4, pages 512 - 526
The EPO accepts no responsibility for the accuracy of data originating from other authorities; in particular, it does not guarantee that it is complete, up to date or fit for specific purposes.