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Extract from the Register of European Patents

EP About this file: EP2828895

EP2828895 - COPPER-ASSISTED, ANTI-REFLECTION ETCHING OF SILICON SURFACES [Right-click to bookmark this link]
StatusNo opposition filed within time limit
Status updated on  13.08.2021
Database last updated on 05.10.2024
FormerThe patent has been granted
Status updated on  04.09.2020
FormerGrant of patent is intended
Status updated on  11.06.2020
FormerExamination is in progress
Status updated on  09.06.2017
Most recent event   Tooltip06.09.2024Lapse of the patent in a contracting state
New state(s): MT		published on 09.10.2024 [2024/41]
Applicant(s)For all designated states
Alliance for Sustainable Energy, LLC
15013 Denver West Parkway
Golden, CO 80401 / US
[2016/15]
Former [2015/05]For all designated states
Alliance for Sustainable Energy, LLC
15013 Denver West Parkway
Golden, CO 80401 / US
For all designated states
Toor, Fatima
90 Hall Road
Sturbridge, MA 01566 / US
For all designated states
Branz, Howard M.
15013 Denver West Parkway
Golden, CO 80401 / US
Inventor(s)01 / TOOR, Fatima
2621 Heinz Road Apt 7
Iowa City, IA 52240 / US
02 / BRANZ, Howard M.
c/o National Renewable Energy Laboratory
15013 Denver West Parkway
Golden, CO 80401 / US
 [2015/11]
Former [2015/05]01 / TOOR, Fatima
90 Hall Road
Sturbridge, MA 01566 / US
02 / BRANZ, Howard M.
c/o National Renewable Energy Laboratory
15013 Denver West Parkway
Golden, CO 80401 / US
Representative(s)Secerna LLP
The Old Fire Station
18 Clifford Street
York YO1 9RD / GB
[2020/41]
Former [2015/05]Secerna LLP
The Catalyst
Baird Lane, Heslington East
York YO10 5GA / GB
Application number, filing date13764428.211.03.2013
[2020/41]
WO2013US30257
Priority number, dateUS20121342374519.03.2012         Original published format: US201213423745
[2015/05]
Filing languageEN
Procedural languageEN
PublicationType: A1 Application with search report
No.:WO2013142122
Date:26.09.2013
Language:EN
[2013/39]
Type: A1 Application with search report 
No.:EP2828895
Date:28.01.2015
Language:EN
The application published by WIPO in one of the EPO official languages on 26.09.2013 takes the place of the publication of the European patent application.
[2015/05]
Type: B1 Patent specification 
No.:EP2828895
Date:07.10.2020
Language:EN
[2020/41]
Search report(s)International search report - published on:US26.09.2013
(Supplementary) European search report - dispatched on:EP24.09.2015
ClassificationIPC:H01L31/0236, H01L31/18
[2015/44]
CPC:
H01L31/1804 (EP,CN); H01L31/02363 (EP,CN); Y02E10/547 (EP);
Y02P70/50 (EP)
Former IPC [2015/05]H01L31/0236
Designated contracting statesAL,   AT,   BE,   BG,   CH,   CY,   CZ,   DE,   DK,   EE,   ES,   FI,   FR,   GB,   GR,   HR,   HU,   IE,   IS,   IT,   LI,   LT,   LU,   LV,   MC,   MK,   MT,   NL,   NO,   PL,   PT,   RO,   RS,   SE,   SI,   SK,   SM,   TR [2015/05]
Extension statesBANot yet paid
MENot yet paid
TitleGerman:KUPFERGESTÜTZTE ANTIREFLEXIVE ÄTZUNG VON SILICIUMOBERFLÄCHEN[2015/05]
English:COPPER-ASSISTED, ANTI-REFLECTION ETCHING OF SILICON SURFACES[2015/05]
French:GRAVURE ANTIREFLET DE SURFACES DE SILICIUM ASSISTÉE PAR DU CUIVRE[2015/05]
Entry into regional phase16.09.2014National basic fee paid 
16.09.2014Search fee paid 
16.09.2014Designation fee(s) paid 
16.09.2014Examination fee paid 
Examination procedure16.09.2014Examination requested  [2015/05]
30.03.2016Amendment by applicant (claims and/or description)
13.06.2017Despatch of a communication from the examining division (Time limit: M04)
04.10.2017Reply to a communication from the examining division
12.06.2020Communication of intention to grant the patent
28.08.2020Fee for grant paid
28.08.2020Fee for publishing/printing paid
28.08.2020Receipt of the translation of the claim(s)
Divisional application(s)EP20199628.7  / EP3780121
The date of the Examining Division's first communication in respect of the earliest application for which a communication has been issued is  13.06.2017
Opposition(s)08.07.2021No opposition filed within time limit [2021/37]
Fees paidRenewal fee
13.03.2015Renewal fee patent year 03
08.03.2016Renewal fee patent year 04
07.03.2017Renewal fee patent year 05
08.03.2018Renewal fee patent year 06
08.03.2019Renewal fee patent year 07
10.03.2020Renewal fee patent year 08
Opt-out from the exclusive  Tooltip
competence of the Unified
Patent Court		 See the Register of the Unified Patent Court for opt-out data
Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court.
Lapses during opposition  TooltipHU11.03.2013
AL07.10.2020
AT07.10.2020
CY07.10.2020
CZ07.10.2020
DK07.10.2020
EE07.10.2020
ES07.10.2020
FI07.10.2020
HR07.10.2020
IT07.10.2020
LT07.10.2020
LV07.10.2020
MC07.10.2020
MK07.10.2020
MT07.10.2020
NL07.10.2020
PL07.10.2020
RO07.10.2020
RS07.10.2020
SE07.10.2020
SI07.10.2020
SK07.10.2020
SM07.10.2020
TR07.10.2020
BG07.01.2021
NO07.01.2021
GR08.01.2021
IS07.02.2021
PT08.02.2021
IE11.03.2021
LU11.03.2021
BE31.03.2021
CH31.03.2021
FR31.03.2021
LI31.03.2021
[2024/41]
Former [2024/29]HU11.03.2013
AL07.10.2020
AT07.10.2020
CY07.10.2020
CZ07.10.2020
DK07.10.2020
EE07.10.2020
ES07.10.2020
FI07.10.2020
HR07.10.2020
IT07.10.2020
LT07.10.2020
LV07.10.2020
MC07.10.2020
MK07.10.2020
NL07.10.2020
PL07.10.2020
RO07.10.2020
RS07.10.2020
SE07.10.2020
SI07.10.2020
SK07.10.2020
SM07.10.2020
TR07.10.2020
BG07.01.2021
NO07.01.2021
GR08.01.2021
IS07.02.2021
PT08.02.2021
IE11.03.2021
LU11.03.2021
BE31.03.2021
CH31.03.2021
FR31.03.2021
LI31.03.2021
Former [2024/22]HU11.03.2013
AL07.10.2020
AT07.10.2020
CY07.10.2020
CZ07.10.2020
DK07.10.2020
EE07.10.2020
ES07.10.2020
FI07.10.2020
HR07.10.2020
IT07.10.2020
LT07.10.2020
LV07.10.2020
MC07.10.2020
MK07.10.2020
NL07.10.2020
PL07.10.2020
RO07.10.2020
RS07.10.2020
SE07.10.2020
SI07.10.2020
SK07.10.2020
SM07.10.2020
BG07.01.2021
NO07.01.2021
GR08.01.2021
IS07.02.2021
PT08.02.2021
IE11.03.2021
LU11.03.2021
BE31.03.2021
CH31.03.2021
FR31.03.2021
LI31.03.2021
Former [2023/30]HU11.03.2013
AL07.10.2020
AT07.10.2020
CY07.10.2020
CZ07.10.2020
DK07.10.2020
EE07.10.2020
ES07.10.2020
FI07.10.2020
HR07.10.2020
IT07.10.2020
LT07.10.2020
LV07.10.2020
MC07.10.2020
NL07.10.2020
PL07.10.2020
RO07.10.2020
RS07.10.2020
SE07.10.2020
SI07.10.2020
SK07.10.2020
SM07.10.2020
BG07.01.2021
NO07.01.2021
GR08.01.2021
IS07.02.2021
PT08.02.2021
IE11.03.2021
LU11.03.2021
BE31.03.2021
CH31.03.2021
FR31.03.2021
LI31.03.2021
Former [2023/27]HU11.03.2013
AL07.10.2020
AT07.10.2020
CZ07.10.2020
DK07.10.2020
EE07.10.2020
ES07.10.2020
FI07.10.2020
HR07.10.2020
IT07.10.2020
LT07.10.2020
LV07.10.2020
MC07.10.2020
NL07.10.2020
PL07.10.2020
RO07.10.2020
RS07.10.2020
SE07.10.2020
SI07.10.2020
SK07.10.2020
SM07.10.2020
BG07.01.2021
NO07.01.2021
GR08.01.2021
IS07.02.2021
PT08.02.2021
IE11.03.2021
LU11.03.2021
BE31.03.2021
CH31.03.2021
FR31.03.2021
LI31.03.2021
Former [2022/34]AL07.10.2020
AT07.10.2020
CZ07.10.2020
DK07.10.2020
EE07.10.2020
ES07.10.2020
FI07.10.2020
HR07.10.2020
IT07.10.2020
LT07.10.2020
LV07.10.2020
MC07.10.2020
NL07.10.2020
PL07.10.2020
RO07.10.2020
RS07.10.2020
SE07.10.2020
SI07.10.2020
SK07.10.2020
SM07.10.2020
BG07.01.2021
NO07.01.2021
GR08.01.2021
IS07.02.2021
PT08.02.2021
IE11.03.2021
LU11.03.2021
BE31.03.2021
CH31.03.2021
FR31.03.2021
LI31.03.2021
Former [2022/23]AL07.10.2020
AT07.10.2020
CZ07.10.2020
DK07.10.2020
EE07.10.2020
ES07.10.2020
FI07.10.2020
HR07.10.2020
IT07.10.2020
LT07.10.2020
LV07.10.2020
MC07.10.2020
NL07.10.2020
PL07.10.2020
RO07.10.2020
RS07.10.2020
SE07.10.2020
SI07.10.2020
SK07.10.2020
SM07.10.2020
BG07.01.2021
NO07.01.2021
GR08.01.2021
IS07.02.2021
PT08.02.2021
IE11.03.2021
LU11.03.2021
CH31.03.2021
FR31.03.2021
LI31.03.2021
Former [2022/10]AL07.10.2020
AT07.10.2020
CZ07.10.2020
DK07.10.2020
EE07.10.2020
ES07.10.2020
FI07.10.2020
HR07.10.2020
IT07.10.2020
LT07.10.2020
LV07.10.2020
MC07.10.2020
NL07.10.2020
PL07.10.2020
RO07.10.2020
RS07.10.2020
SE07.10.2020
SI07.10.2020
SK07.10.2020
SM07.10.2020
BG07.01.2021
NO07.01.2021
GR08.01.2021
PT08.02.2021
IE11.03.2021
LU11.03.2021
CH31.03.2021
FR31.03.2021
LI31.03.2021
Former [2022/08]AL07.10.2020
AT07.10.2020
CZ07.10.2020
DK07.10.2020
EE07.10.2020
ES07.10.2020
FI07.10.2020
HR07.10.2020
IT07.10.2020
LT07.10.2020
LV07.10.2020
MC07.10.2020
NL07.10.2020
PL07.10.2020
RO07.10.2020
RS07.10.2020
SE07.10.2020
SI07.10.2020
SK07.10.2020
SM07.10.2020
BG07.01.2021
NO07.01.2021
GR08.01.2021
IS07.02.2021
PT08.02.2021
IE11.03.2021
LU11.03.2021
FR31.03.2021
Former [2022/07]AL07.10.2020
AT07.10.2020
CZ07.10.2020
DK07.10.2020
EE07.10.2020
ES07.10.2020
FI07.10.2020
HR07.10.2020
IT07.10.2020
LT07.10.2020
LV07.10.2020
MC07.10.2020
NL07.10.2020
PL07.10.2020
RO07.10.2020
RS07.10.2020
SE07.10.2020
SI07.10.2020
SK07.10.2020
SM07.10.2020
BG07.01.2021
NO07.01.2021
GR08.01.2021
IS07.02.2021
PT08.02.2021
IE11.03.2021
Former [2021/49]AL07.10.2020
AT07.10.2020
CZ07.10.2020
DK07.10.2020
EE07.10.2020
ES07.10.2020
FI07.10.2020
HR07.10.2020
IT07.10.2020
LT07.10.2020
LV07.10.2020
MC07.10.2020
NL07.10.2020
PL07.10.2020
RO07.10.2020
RS07.10.2020
SE07.10.2020
SI07.10.2020
SK07.10.2020
SM07.10.2020
BG07.01.2021
NO07.01.2021
GR08.01.2021
IS07.02.2021
PT08.02.2021
Former [2021/48]AL07.10.2020
AT07.10.2020
CZ07.10.2020
DK07.10.2020
EE07.10.2020
ES07.10.2020
FI07.10.2020
HR07.10.2020
IT07.10.2020
LT07.10.2020
LV07.10.2020
MC07.10.2020
NL07.10.2020
PL07.10.2020
RO07.10.2020
RS07.10.2020
SE07.10.2020
SK07.10.2020
SM07.10.2020
BG07.01.2021
NO07.01.2021
GR08.01.2021
IS07.02.2021
PT08.02.2021
Former [2021/45]AL07.10.2020
AT07.10.2020
CZ07.10.2020
DK07.10.2020
EE07.10.2020
ES07.10.2020
FI07.10.2020
HR07.10.2020
LT07.10.2020
LV07.10.2020
MC07.10.2020
NL07.10.2020
PL07.10.2020
RO07.10.2020
RS07.10.2020
SE07.10.2020
SK07.10.2020
SM07.10.2020
BG07.01.2021
NO07.01.2021
GR08.01.2021
IS07.02.2021
PT08.02.2021
Former [2021/37]AT07.10.2020
CZ07.10.2020
DK07.10.2020
EE07.10.2020
ES07.10.2020
FI07.10.2020
HR07.10.2020
LT07.10.2020
LV07.10.2020
NL07.10.2020
PL07.10.2020
RO07.10.2020
RS07.10.2020
SE07.10.2020
SK07.10.2020
SM07.10.2020
BG07.01.2021
NO07.01.2021
GR08.01.2021
IS07.02.2021
PT08.02.2021
Former [2021/36]AT07.10.2020
CZ07.10.2020
EE07.10.2020
ES07.10.2020
FI07.10.2020
HR07.10.2020
LT07.10.2020
LV07.10.2020
NL07.10.2020
PL07.10.2020
RO07.10.2020
RS07.10.2020
SE07.10.2020
SK07.10.2020
SM07.10.2020
BG07.01.2021
NO07.01.2021
GR08.01.2021
IS07.02.2021
PT08.02.2021
Former [2021/35]AT07.10.2020
CZ07.10.2020
ES07.10.2020
FI07.10.2020
HR07.10.2020
LT07.10.2020
LV07.10.2020
NL07.10.2020
PL07.10.2020
RO07.10.2020
RS07.10.2020
SE07.10.2020
SK07.10.2020
SM07.10.2020
BG07.01.2021
NO07.01.2021
GR08.01.2021
IS07.02.2021
PT08.02.2021
Former [2021/34]AT07.10.2020
CZ07.10.2020
ES07.10.2020
FI07.10.2020
HR07.10.2020
LT07.10.2020
LV07.10.2020
NL07.10.2020
PL07.10.2020
RS07.10.2020
SE07.10.2020
SM07.10.2020
BG07.01.2021
NO07.01.2021
GR08.01.2021
IS07.02.2021
PT08.02.2021
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RS07.10.2020
SE07.10.2020
SM07.10.2020
BG07.01.2021
NO07.01.2021
GR08.01.2021
IS07.02.2021
PT08.02.2021
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FI07.10.2020
HR07.10.2020
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NL07.10.2020
PL07.10.2020
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SE07.10.2020
SM07.10.2020
BG07.01.2021
NO07.01.2021
GR08.01.2021
IS07.02.2021
PT08.02.2021
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FI07.10.2020
HR07.10.2020
LV07.10.2020
NL07.10.2020
PL07.10.2020
RS07.10.2020
SE07.10.2020
BG07.01.2021
NO07.01.2021
GR08.01.2021
IS07.02.2021
PT08.02.2021
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NL07.10.2020
PL07.10.2020
RS07.10.2020
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BG07.01.2021
NO07.01.2021
GR08.01.2021
IS07.02.2021
PT08.02.2021
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GR08.01.2021
PT08.02.2021
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PT08.02.2021
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PT08.02.2021
Former [2021/20]FI07.10.2020
Documents cited:Search[IA]WO2009084933  (LG ELECTRONICS INC [KR], et al) [I] 1-3,5-8,10,12 * page 5, paragraph 40 - page 10, paragraph 81 * * figures 1-5 * [A] 4,9,11,13-15;
 [XA]US2011215441  (LIN CHING-FUH [TW], et al) [X] 1,3,5-8,10,12 * page 2, paragraphs 24-30 * [A] 2,4,9,11,13-15;
 [A]US2011294255  (LIN CHING-FUH [TW], et al) [A] 1-15 * page 2, paragraphs 20-24 ** figure 1 *;
 [XI]US8075792  (BRANZ HOWARD [US], et al) [X] 1-10,12 * abstract * * column 4, lines 4-31 * * column 7, line 49 - column 9, line 36 * * claims 10,16 * * column 10, line 53 - column 11, line 6 * [I] 11,13-15
International search[Y]US2009236317  (YOST VERNON [US], et al);
 [A]US2011045627  (SACHS EMANUEL M [US], et al);
 [Y]US2011316145  (TSAO CHIA-WEN [TW], et al)
The EPO accepts no responsibility for the accuracy of data originating from other authorities; in particular, it does not guarantee that it is complete, up to date or fit for specific purposes.