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Extract from the Register of European Patents

EP About this file: EP2929558

EP2929558 - SEMICONDUCTOR INSPECTION AND METROLOGY SYSTEM USING LASER PULSE MULTIPLIER [Right-click to bookmark this link]
StatusNo opposition filed within time limit
Status updated on  21.07.2023
Database last updated on 26.06.2024
FormerThe patent has been granted
Status updated on  12.08.2022
FormerGrant of patent is intended
Status updated on  07.04.2022
FormerExamination is in progress
Status updated on  08.05.2019
Most recent event   Tooltip14.06.2024Lapse of the patent in a contracting state
New state(s): MC, TR		published on 17.07.2024 [2024/29]
Applicant(s)For all designated states
Kla-Tencor Corporation
One Technology Drive
Milpitas, California 95035 / US
[2015/42]
Inventor(s)01 / CHUANG, Yung-Ho Alex
10678 Farallone Drive
Cupertino, California 95014 / US
02 / LIOU, Justin Dianhuan
3491 Flora Vista Avenue
Santa Clara, California 95051 / US
03 / ARMSTRONG, J., Joseph
43141 Gallegos Avenue
Fremont, California 94539 / US
04 / DENG, Yujun
1712 Fan Street
San Jose, California 95131 / US
 [2015/42]
Representative(s)FRKelly
Waterways House
Grand Canal Quay
Dublin D02 PD39 / IE
[N/P]
Former [2022/37]FRKelly
27 Clyde Road
Dublin D04 F838 / IE
Former [2015/42]Keane, Paul Fachtna
FRKelly
27 Clyde Road
Dublin 4 / IE
Application number, filing date13860524.103.12.2013
[2015/42]
WO2013US72774
Priority number, dateUS201261733858P05.12.2012         Original published format: US 201261733858 P
US20121371159311.12.2012         Original published format: US201213711593
[2015/42]
Filing languageEN
Procedural languageEN
PublicationType: A1 Application with search report
No.:WO2014089020
Date:12.06.2014
Language:EN
[2014/24]
Type: A1 Application with search report 
No.:EP2929558
Date:14.10.2015
Language:EN
The application published by WIPO in one of the EPO official languages on 12.06.2014 takes the place of the publication of the European patent application.
[2015/42]
Type: B1 Patent specification 
No.:EP2929558
Date:14.09.2022
Language:EN
[2022/37]
Search report(s)International search report - published on:KR12.06.2014
(Supplementary) European search report - dispatched on:EP04.07.2016
ClassificationIPC:H01S3/00, G01N21/88, G02B27/10, // G01N21/95
[2022/11]
CPC:
H01S3/005 (EP,CN,KR,US); C23C16/00 (KR,US); G01N21/8806 (EP,KR);
G01N21/9501 (EP,KR); G02B17/00 (US); G02B17/0848 (KR,US);
G02B27/00 (KR,US); G02B27/108 (EP,US); H01L22/12 (KR);
H01S3/00 (US); H01S3/10 (KR,US); G01N2021/8838 (EP,KR) (-)
Former IPC [2015/42]H01L21/66
Designated contracting statesAL,   AT,   BE,   BG,   CH,   CY,   CZ,   DE,   DK,   EE,   ES,   FI,   FR,   GB,   GR,   HR,   HU,   IE,   IS,   IT,   LI,   LT,   LU,   LV,   MC,   MK,   MT,   NL,   NO,   PL,   PT,   RO,   RS,   SE,   SI,   SK,   SM,   TR [2015/42]
Extension statesBANot yet paid
MENot yet paid
TitleGerman:HALBLEITERPRÜFUNGS- UND -METROLOGIESYSTEM MIT EINEM LASERPULSVERVIELFACHER[2015/42]
English:SEMICONDUCTOR INSPECTION AND METROLOGY SYSTEM USING LASER PULSE MULTIPLIER[2015/42]
French:SYSTÈME DE MÉTROLOGIE ET D'INSPECTION DE SEMI-CONDUCTEUR À L'AIDE D'UN MULTIPLICATEUR D'IMPULSION LASER[2015/42]
Entry into regional phase06.07.2015National basic fee paid 
06.07.2015Search fee paid 
06.07.2015Designation fee(s) paid 
06.07.2015Examination fee paid 
Examination procedure06.07.2015Examination requested  [2015/42]
16.01.2017Amendment by applicant (claims and/or description)
13.05.2019Despatch of a communication from the examining division (Time limit: M04)
23.09.2019Reply to a communication from the examining division
21.06.2021Despatch of a communication from the examining division (Time limit: M04)
11.10.2021Reply to a communication from the examining division
08.04.2022Communication of intention to grant the patent
05.08.2022Fee for grant paid
05.08.2022Fee for publishing/printing paid
05.08.2022Receipt of the translation of the claim(s)
Divisional application(s)The date of the Examining Division's first communication in respect of the earliest application for which a communication has been issued is  13.05.2019
Opposition(s)15.06.2023No opposition filed within time limit [2023/34]
Fees paidRenewal fee
28.12.2015Renewal fee patent year 03
27.12.2016Renewal fee patent year 04
27.12.2017Renewal fee patent year 05
31.12.2018Renewal fee patent year 06
27.12.2019Renewal fee patent year 07
28.12.2020Renewal fee patent year 08
27.12.2021Renewal fee patent year 09
Opt-out from the exclusive  Tooltip
competence of the Unified
Patent Court		 See the Register of the Unified Patent Court for opt-out data
Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court.
Lapses during opposition  TooltipHU03.12.2013
AL14.09.2022
AT14.09.2022
CY14.09.2022
CZ14.09.2022
DK14.09.2022
EE14.09.2022
ES14.09.2022
FI14.09.2022
HR14.09.2022
IT14.09.2022
LT14.09.2022
LV14.09.2022
MC14.09.2022
MK14.09.2022
PL14.09.2022
RO14.09.2022
RS14.09.2022
SE14.09.2022
SI14.09.2022
SK14.09.2022
SM14.09.2022
TR14.09.2022
IE03.12.2022
LU03.12.2022
GB14.12.2022
NO14.12.2022
GR15.12.2022
BE31.12.2022
CH31.12.2022
FR31.12.2022
LI31.12.2022
IS14.01.2023
PT16.01.2023
[2024/29]
Former [2024/27]HU03.12.2013
AL14.09.2022
AT14.09.2022
CY14.09.2022
CZ14.09.2022
DK14.09.2022
EE14.09.2022
ES14.09.2022
FI14.09.2022
HR14.09.2022
IT14.09.2022
LT14.09.2022
LV14.09.2022
MK14.09.2022
PL14.09.2022
RO14.09.2022
RS14.09.2022
SE14.09.2022
SI14.09.2022
SK14.09.2022
SM14.09.2022
IE03.12.2022
LU03.12.2022
GB14.12.2022
NO14.12.2022
GR15.12.2022
BE31.12.2022
CH31.12.2022
FR31.12.2022
LI31.12.2022
IS14.01.2023
PT16.01.2023
Former [2024/26]HU03.12.2013
AL14.09.2022
AT14.09.2022
CY14.09.2022
CZ14.09.2022
DK14.09.2022
EE14.09.2022
ES14.09.2022
FI14.09.2022
HR14.09.2022
IT14.09.2022
LT14.09.2022
LV14.09.2022
PL14.09.2022
RO14.09.2022
RS14.09.2022
SE14.09.2022
SI14.09.2022
SK14.09.2022
SM14.09.2022
IE03.12.2022
LU03.12.2022
GB14.12.2022
NO14.12.2022
GR15.12.2022
BE31.12.2022
CH31.12.2022
FR31.12.2022
LI31.12.2022
IS14.01.2023
PT16.01.2023
Former [2024/21]HU03.12.2013
AL14.09.2022
AT14.09.2022
CY14.09.2022
CZ14.09.2022
DK14.09.2022
EE14.09.2022
ES14.09.2022
FI14.09.2022
HR14.09.2022
LT14.09.2022
LV14.09.2022
PL14.09.2022
RO14.09.2022
RS14.09.2022
SE14.09.2022
SI14.09.2022
SK14.09.2022
SM14.09.2022
IE03.12.2022
LU03.12.2022
GB14.12.2022
NO14.12.2022
GR15.12.2022
BE31.12.2022
CH31.12.2022
FR31.12.2022
LI31.12.2022
IS14.01.2023
PT16.01.2023
Former [2024/18]HU03.12.2013
AL14.09.2022
AT14.09.2022
CZ14.09.2022
DK14.09.2022
EE14.09.2022
ES14.09.2022
FI14.09.2022
HR14.09.2022
LT14.09.2022
LV14.09.2022
PL14.09.2022
RO14.09.2022
RS14.09.2022
SE14.09.2022
SI14.09.2022
SK14.09.2022
SM14.09.2022
IE03.12.2022
LU03.12.2022
GB14.12.2022
NO14.12.2022
GR15.12.2022
BE31.12.2022
CH31.12.2022
FR31.12.2022
LI31.12.2022
IS14.01.2023
PT16.01.2023
Former [2023/52]AL14.09.2022
AT14.09.2022
CZ14.09.2022
DK14.09.2022
EE14.09.2022
ES14.09.2022
FI14.09.2022
HR14.09.2022
LT14.09.2022
LV14.09.2022
PL14.09.2022
RO14.09.2022
RS14.09.2022
SE14.09.2022
SI14.09.2022
SK14.09.2022
SM14.09.2022
IE03.12.2022
LU03.12.2022
GB14.12.2022
NO14.12.2022
GR15.12.2022
BE31.12.2022
CH31.12.2022
FR31.12.2022
LI31.12.2022
IS14.01.2023
PT16.01.2023
Former [2023/49]AL14.09.2022
AT14.09.2022
CZ14.09.2022
DK14.09.2022
EE14.09.2022
ES14.09.2022
FI14.09.2022
HR14.09.2022
LT14.09.2022
LV14.09.2022
PL14.09.2022
RO14.09.2022
RS14.09.2022
SE14.09.2022
SI14.09.2022
SK14.09.2022
SM14.09.2022
IE03.12.2022
LU03.12.2022
GB14.12.2022
NO14.12.2022
GR15.12.2022
BE31.12.2022
CH31.12.2022
LI31.12.2022
IS14.01.2023
PT16.01.2023
Former [2023/48]AL14.09.2022
AT14.09.2022
CZ14.09.2022
DK14.09.2022
EE14.09.2022
ES14.09.2022
FI14.09.2022
HR14.09.2022
LT14.09.2022
LV14.09.2022
PL14.09.2022
RO14.09.2022
RS14.09.2022
SE14.09.2022
SI14.09.2022
SK14.09.2022
SM14.09.2022
IE03.12.2022
LU03.12.2022
GB14.12.2022
NO14.12.2022
GR15.12.2022
CH31.12.2022
LI31.12.2022
IS14.01.2023
PT16.01.2023
Former [2023/47]AL14.09.2022
AT14.09.2022
CZ14.09.2022
DK14.09.2022
EE14.09.2022
ES14.09.2022
FI14.09.2022
HR14.09.2022
LT14.09.2022
LV14.09.2022
PL14.09.2022
RO14.09.2022
RS14.09.2022
SE14.09.2022
SI14.09.2022
SK14.09.2022
SM14.09.2022
LU03.12.2022
GB14.12.2022
NO14.12.2022
GR15.12.2022
CH31.12.2022
LI31.12.2022
IS14.01.2023
PT16.01.2023
Former [2023/38]AL14.09.2022
AT14.09.2022
CZ14.09.2022
DK14.09.2022
EE14.09.2022
ES14.09.2022
FI14.09.2022
HR14.09.2022
LT14.09.2022
LV14.09.2022
PL14.09.2022
RO14.09.2022
RS14.09.2022
SE14.09.2022
SI14.09.2022
SK14.09.2022
SM14.09.2022
LU03.12.2022
NO14.12.2022
GR15.12.2022
IS14.01.2023
PT16.01.2023
Former [2023/37]AL14.09.2022
AT14.09.2022
CZ14.09.2022
DK14.09.2022
EE14.09.2022
ES14.09.2022
FI14.09.2022
HR14.09.2022
LT14.09.2022
LV14.09.2022
PL14.09.2022
RO14.09.2022
RS14.09.2022
SE14.09.2022
SI14.09.2022
SK14.09.2022
SM14.09.2022
NO14.12.2022
GR15.12.2022
IS14.01.2023
PT16.01.2023
Former [2023/33]AL14.09.2022
AT14.09.2022
CZ14.09.2022
DK14.09.2022
EE14.09.2022
ES14.09.2022
FI14.09.2022
HR14.09.2022
LT14.09.2022
LV14.09.2022
PL14.09.2022
RO14.09.2022
RS14.09.2022
SE14.09.2022
SK14.09.2022
SM14.09.2022
NO14.12.2022
GR15.12.2022
IS14.01.2023
PT16.01.2023
Former [2023/29]AL14.09.2022
AT14.09.2022
CZ14.09.2022
EE14.09.2022
ES14.09.2022
FI14.09.2022
HR14.09.2022
LT14.09.2022
LV14.09.2022
PL14.09.2022
RO14.09.2022
RS14.09.2022
SE14.09.2022
SK14.09.2022
SM14.09.2022
NO14.12.2022
GR15.12.2022
IS14.01.2023
PT16.01.2023
Former [2023/26]AT14.09.2022
CZ14.09.2022
EE14.09.2022
ES14.09.2022
FI14.09.2022
HR14.09.2022
LT14.09.2022
LV14.09.2022
PL14.09.2022
RO14.09.2022
RS14.09.2022
SE14.09.2022
SK14.09.2022
SM14.09.2022
NO14.12.2022
GR15.12.2022
IS14.01.2023
PT16.01.2023
Former [2023/23]AT14.09.2022
CZ14.09.2022
EE14.09.2022
ES14.09.2022
FI14.09.2022
HR14.09.2022
LT14.09.2022
LV14.09.2022
RO14.09.2022
RS14.09.2022
SE14.09.2022
SK14.09.2022
SM14.09.2022
NO14.12.2022
GR15.12.2022
PT16.01.2023
Former [2023/22]AT14.09.2022
CZ14.09.2022
ES14.09.2022
FI14.09.2022
HR14.09.2022
LT14.09.2022
LV14.09.2022
RO14.09.2022
RS14.09.2022
SE14.09.2022
SM14.09.2022
NO14.12.2022
GR15.12.2022
PT16.01.2023
Former [2023/20]FI14.09.2022
HR14.09.2022
LT14.09.2022
LV14.09.2022
RS14.09.2022
SE14.09.2022
SM14.09.2022
NO14.12.2022
GR15.12.2022
Former [2023/10]FI14.09.2022
HR14.09.2022
LT14.09.2022
LV14.09.2022
RS14.09.2022
SE14.09.2022
NO14.12.2022
GR15.12.2022
Former [2023/09]FI14.09.2022
LT14.09.2022
LV14.09.2022
RS14.09.2022
SE14.09.2022
NO14.12.2022
Former [2023/08]FI14.09.2022
LT14.09.2022
RS14.09.2022
SE14.09.2022
NO14.12.2022
Documents cited:Search[X]US2003043876  (LUBLIN LEONARD [US], et al) [X] 1-15* paragraph [0031] - paragraph [0032]; figure 2 *;
 [X]US2005190452  (GOVORKOV SERGEI V [US], et al) [X] 1-15 * abstract *;
 [X]DE102009047098  (ZEISS CARL SMT GMBH [DE]) [X] 1-15 * abstract * * paragraph [0002]; figure 5 * * paragraph [0038] - paragraph [0042] *
International search[A]KR20000034461  (DAEWOO ELECTRONICS CO LTD);
 [Y]JP2006186046  (KOMATSU MFG CO LTD, et al);
 [A]US2006171036  (GOVORKOV SERGEI V [US], et al);
 [X]WO2011064059  (ZEISS CARL SMT GMBH [DE], et al);
 [A]JP2012098103  (HITACHI HIGH TECH CORP)
ExaminationUS2001021206
by applicantUS2001021206
 US2003043876
 US2005190452
 JP2006186046
 WO2011064059
The EPO accepts no responsibility for the accuracy of data originating from other authorities; in particular, it does not guarantee that it is complete, up to date or fit for specific purposes.