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Extract from the Register of European Patents

EP About this file: EP3050087

EP3050087 - SUBTRACTIVE SELF-ALIGNED VIA AND PLUG PATTERNING FOR BACK END OF LINE (BEOL) INTERCONNECTS [Right-click to bookmark this link]
StatusNo opposition filed within time limit
Status updated on  05.03.2021
Database last updated on 05.10.2024
FormerThe patent has been granted
Status updated on  27.03.2020
FormerGrant of patent is intended
Status updated on  06.01.2020
Most recent event   Tooltip08.07.2022Lapse of the patent in a contracting state
New state(s): MK		published on 10.08.2022  [2022/32]
Applicant(s)For all designated states
Intel Corporation
2200 Mission College Boulevard
Santa Clara, CA 95054 / US
[2016/31]
Inventor(s)01 / BRISTOL, Robert L.
9325 NW Skyline Boulevard
Portland, Oregon 97231 / US
02 / GSTREIN, Florian
2523 NE 10th Avenue
Portland, Oregon 97212 / US
03 / SCHENKER, Richard E.
15151 NW Casey Drive
Portland, Oregon 97229 / US
04 / NYHUS, Paul A.
c/o Intel Corporation
2200 Mission College Boulevard
M/S: RNB4-150
Santa Clara, CA 95054 / US
05 / WALLACE, Charles H.
2127 NE 25th Avenue
Portland, Oregon 97212 / US
06 / YOO, Hui Jae
946 NE 73rd Avenue
Hillsboro, Oregon 97124 / US
 [2016/31]
Representative(s)Goddar, Heinz J.
Boehmert & Boehmert
Anwaltspartnerschaft mbB
Pettenkoferstrasse 22
80336 München / DE
[2020/18]
Former [2016/31]Goddar, Heinz J.
Boehmert & Boehmert
Anwaltspartnerschaft mbB
Patentanwälte Rechtsanwälte
Pettenkoferstrasse 20-22
80336 München / DE
Application number, filing date13894766.827.09.2013
[2016/31]
WO2013US62319
Filing languageEN
Procedural languageEN
PublicationType: A1 Application with search report
No.:WO2015047318
Date:02.04.2015
Language:EN
[2015/13]
Type: A1 Application with search report 
No.:EP3050087
Date:03.08.2016
Language:EN
The application published by WIPO in one of the EPO official languages on 02.04.2015 takes the place of the publication of the European patent application.
[2016/31]
Type: B1 Patent specification 
No.:EP3050087
Date:29.04.2020
Language:EN
[2020/18]
Search report(s)International search report - published on:KR02.04.2015
(Supplementary) European search report - dispatched on:EP27.06.2017
ClassificationIPC:H01L21/768
[2017/30]
CPC:
H01L21/76897 (EP,KR,US); H01L21/76816 (EP,KR,US); H01L21/31144 (EP,US);
H01L21/3205 (KR); H01L21/76808 (EP,KR,US); H01L21/76811 (EP,KR,US);
H01L21/76825 (US); H01L23/5226 (US); H01L23/528 (US);
H01L21/76834 (EP); H01L21/76883 (EP); H01L2924/0002 (EP,US) (-)
C-Set:
H01L2924/0002, H01L2924/00 (EP,US)
Former IPC [2016/31]H01L21/3205, H01L21/28
Designated contracting statesAL,   AT,   BE,   BG,   CH,   CY,   CZ,   DE,   DK,   EE,   ES,   FI,   FR,   GB,   GR,   HR,   HU,   IE,   IS,   IT,   LI,   LT,   LU,   LV,   MC,   MK,   MT,   NL,   NO,   PL,   PT,   RO,   RS,   SE,   SI,   SK,   SM,   TR [2016/31]
Extension statesBANot yet paid
MENot yet paid
TitleGerman:SUBTRAKTIVE SELBSTJUSTIERENDE DURCHFÜHRUNG UND STECKERSTRUKTURIERUNG FÜR BEOL-VERBINDUNGEN[2016/31]
English:SUBTRACTIVE SELF-ALIGNED VIA AND PLUG PATTERNING FOR BACK END OF LINE (BEOL) INTERCONNECTS[2016/31]
French:MODÉLISATION DE TROU D'INTERCONNEXION ET DE FICHE AUTO-ALIGNÉE SOUSTRACTIVE POUR DES INTERCONNEXIONS D'EXTRÉMITÉ ARRIÈRE DE LIGNE (BEOL)[2016/31]
Entry into regional phase10.02.2016National basic fee paid 
10.02.2016Search fee paid 
10.02.2016Designation fee(s) paid 
10.02.2016Examination fee paid 
Examination procedure10.02.2016Examination requested  [2016/31]
24.01.2018Amendment by applicant (claims and/or description)
07.01.2020Communication of intention to grant the patent
20.03.2020Fee for grant paid
20.03.2020Fee for publishing/printing paid
20.03.2020Receipt of the translation of the claim(s)
Divisional application(s)The date of the Examining Division's first communication in respect of the earliest application for which a communication has been issued is  07.01.2020
Opposition(s)01.02.2021No opposition filed within time limit [2021/14]
Fees paidRenewal fee
10.02.2016Renewal fee patent year 03
13.09.2016Renewal fee patent year 04
12.09.2017Renewal fee patent year 05
11.09.2018Renewal fee patent year 06
13.09.2019Renewal fee patent year 07
Opt-out from the exclusive  Tooltip
competence of the Unified
Patent Court		 See the Register of the Unified Patent Court for opt-out data
Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court.
Lapses during opposition  TooltipHU27.09.2013
AL29.04.2020
AT29.04.2020
CY29.04.2020
CZ29.04.2020
DK29.04.2020
EE29.04.2020
ES29.04.2020
FI29.04.2020
HR29.04.2020
IT29.04.2020
LT29.04.2020
LV29.04.2020
MC29.04.2020
MK29.04.2020
MT29.04.2020
PL29.04.2020
RO29.04.2020
RS29.04.2020
SE29.04.2020
SI29.04.2020
SK29.04.2020
SM29.04.2020
TR29.04.2020
BG29.07.2020
NO29.07.2020
GR30.07.2020
IS29.08.2020
PT31.08.2020
IE27.09.2020
LU27.09.2020
BE30.09.2020
CH30.09.2020
LI30.09.2020
[2022/32]
Former [2022/27]HU27.09.2013
AL29.04.2020
AT29.04.2020
CY29.04.2020
CZ29.04.2020
DK29.04.2020
EE29.04.2020
ES29.04.2020
FI29.04.2020
HR29.04.2020
IT29.04.2020
LT29.04.2020
LV29.04.2020
MC29.04.2020
MT29.04.2020
PL29.04.2020
RO29.04.2020
RS29.04.2020
SE29.04.2020
SI29.04.2020
SK29.04.2020
SM29.04.2020
TR29.04.2020
BG29.07.2020
NO29.07.2020
GR30.07.2020
IS29.08.2020
PT31.08.2020
IE27.09.2020
LU27.09.2020
BE30.09.2020
CH30.09.2020
LI30.09.2020
Former [2021/37]AL29.04.2020
AT29.04.2020
CZ29.04.2020
DK29.04.2020
EE29.04.2020
ES29.04.2020
FI29.04.2020
HR29.04.2020
IT29.04.2020
LT29.04.2020
LV29.04.2020
MC29.04.2020
PL29.04.2020
RO29.04.2020
RS29.04.2020
SE29.04.2020
SI29.04.2020
SK29.04.2020
SM29.04.2020
BG29.07.2020
NO29.07.2020
GR30.07.2020
IS29.08.2020
PT31.08.2020
IE27.09.2020
LU27.09.2020
BE30.09.2020
CH30.09.2020
LI30.09.2020
Former [2021/36]AL29.04.2020
AT29.04.2020
CZ29.04.2020
DK29.04.2020
EE29.04.2020
ES29.04.2020
FI29.04.2020
HR29.04.2020
IT29.04.2020
LT29.04.2020
LV29.04.2020
MC29.04.2020
PL29.04.2020
RO29.04.2020
RS29.04.2020
SE29.04.2020
SI29.04.2020
SK29.04.2020
SM29.04.2020
BG29.07.2020
NO29.07.2020
GR30.07.2020
IS29.08.2020
PT31.08.2020
LU27.09.2020
BE30.09.2020
Former [2021/27]AL29.04.2020
AT29.04.2020
CZ29.04.2020
DK29.04.2020
EE29.04.2020
ES29.04.2020
FI29.04.2020
HR29.04.2020
IT29.04.2020
LT29.04.2020
LV29.04.2020
MC29.04.2020
PL29.04.2020
RO29.04.2020
RS29.04.2020
SE29.04.2020
SI29.04.2020
SK29.04.2020
SM29.04.2020
BG29.07.2020
NO29.07.2020
GR30.07.2020
IS29.08.2020
PT31.08.2020
LU27.09.2020
Former [2021/23]AL29.04.2020
AT29.04.2020
CZ29.04.2020
DK29.04.2020
EE29.04.2020
ES29.04.2020
FI29.04.2020
HR29.04.2020
IT29.04.2020
LT29.04.2020
LV29.04.2020
MC29.04.2020
PL29.04.2020
RO29.04.2020
RS29.04.2020
SE29.04.2020
SI29.04.2020
SK29.04.2020
SM29.04.2020
BG29.07.2020
NO29.07.2020
GR30.07.2020
IS29.08.2020
PT31.08.2020
Former [2021/10]AL29.04.2020
AT29.04.2020
CZ29.04.2020
DK29.04.2020
EE29.04.2020
ES29.04.2020
FI29.04.2020
HR29.04.2020
IT29.04.2020
LT29.04.2020
LV29.04.2020
PL29.04.2020
RO29.04.2020
RS29.04.2020
SE29.04.2020
SK29.04.2020
SM29.04.2020
BG29.07.2020
NO29.07.2020
GR30.07.2020
IS29.08.2020
PT31.08.2020
Former [2021/09]AL29.04.2020
AT29.04.2020
CZ29.04.2020
DK29.04.2020
EE29.04.2020
ES29.04.2020
FI29.04.2020
HR29.04.2020
IT29.04.2020
LT29.04.2020
LV29.04.2020
RO29.04.2020
RS29.04.2020
SE29.04.2020
SM29.04.2020
BG29.07.2020
NO29.07.2020
GR30.07.2020
IS29.08.2020
PT31.08.2020
Former [2021/08]AL29.04.2020
DK29.04.2020
ES29.04.2020
FI29.04.2020
HR29.04.2020
LT29.04.2020
LV29.04.2020
RO29.04.2020
RS29.04.2020
SE29.04.2020
SM29.04.2020
BG29.07.2020
NO29.07.2020
GR30.07.2020
IS29.08.2020
PT31.08.2020
Former [2021/04]AL29.04.2020
FI29.04.2020
HR29.04.2020
LT29.04.2020
LV29.04.2020
RS29.04.2020
SE29.04.2020
BG29.07.2020
NO29.07.2020
GR30.07.2020
IS29.08.2020
PT31.08.2020
Former [2021/01]FI29.04.2020
HR29.04.2020
LT29.04.2020
LV29.04.2020
RS29.04.2020
SE29.04.2020
BG29.07.2020
NO29.07.2020
GR30.07.2020
IS29.08.2020
PT31.08.2020
Former [2020/51]FI29.04.2020
HR29.04.2020
LT29.04.2020
LV29.04.2020
RS29.04.2020
SE29.04.2020
NO29.07.2020
GR30.07.2020
IS29.08.2020
PT31.08.2020
Former [2020/50]FI29.04.2020
HR29.04.2020
LT29.04.2020
LV29.04.2020
SE29.04.2020
NO29.07.2020
GR30.07.2020
IS29.08.2020
PT31.08.2020
Former [2020/48]FI29.04.2020
LT29.04.2020
SE29.04.2020
NO29.07.2020
IS29.08.2020
PT31.08.2020
Former [2020/47]LT29.04.2020
NO29.07.2020
IS29.08.2020
Former [2020/46]IS29.08.2020
Documents cited:Search   [ ] - No further relevant documents disclosed
International search[A]US2005233503  (LEIB JURGEN [DE], et al);
 [A]US2009032967  (BECKER SCOTT T [US], et al);
 [A]US2010032846  (CHIDAMBARRAO DURESETI [US], et al);
 [A]US2012175626  (ERICKSON KARL R [US], et al);
 [A]US2012313251  (KATO HIROKAZU [US]);
 [A]US2013252420  (SANDHU GURTEJ S [US])
by applicantUS2013252420
The EPO accepts no responsibility for the accuracy of data originating from other authorities; in particular, it does not guarantee that it is complete, up to date or fit for specific purposes.