-
EP2896995
European procedure
- EP About this file
- EP Legal status
- EP Federated register
- EP Event history
- EP Citations
- EP Patent family
- EP All documents
Extract from the Register of European Patents
EP About this file: EP2896995
| EP2896995 - A radiation source [Right-click to bookmark this link] | Status | The application is deemed to be withdrawn Status updated on 24.06.2016 Database last updated on 24.08.2024 | Most recent event Tooltip | 24.06.2016 | Application deemed to be withdrawn | published on 27.07.2016 [2016/30] | Applicant(s) | For all designated states ASML Netherlands B.V. P.O. Box 324 5500 AH Veldhoven / NL | [2015/30] | Inventor(s) | 01 /
Nikipelov, Andrey, Alexandrovich P.O.Box 324 5500 AH Veldhoven / NL | 02 /
De Vries, Gosse, Charles P.O.Box 324 5500 AH Veldhoven / NL | 03 /
Engelen, Wouter, Joep P.O.Box 324 5500 AH Veldhoven / NL | 04 /
Frijns, Olav, Waldemar, Vladimir P.O.Box 324 5500 AH Veldhoven / NL | 05 /
Grimminck, Leonardus, Adrianus, Gerardus P.O.Box 324 5500 AH Veldhoven / NL | 06 /
Loopstra, Erik, Roelof P.O.Box 324 5500 AH Veldhoven / NL | [2015/30] | Representative(s) | Siem, Max Yoe Shé ASML Netherlands B.V. Corporate Intellectual Property P.O. Box 324 5500 AH Veldhoven / NL | [2015/30] | Application number, filing date | 14151497.6 | 16.01.2014 | [2015/30] | Filing language | EN | Procedural language | EN | Publication | Type: | A1 Application with search report | No.: | EP2896995 | Date: | 22.07.2015 | Language: | EN | [2015/30] | Search report(s) | (Supplementary) European search report - dispatched on: | EP | 12.12.2014 | Classification | IPC: | G03F7/20, H01S3/09, H05H7/04 | [2015/30] | CPC: |
G03F7/70008 (EP);
G03F7/7055 (EP);
G03F7/7085 (EP);
H01S3/0903 (EP);
H05H7/04 (EP);
H05H2007/041 (EP)
| Designated contracting states | AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LI, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR [2015/30] | Extension states | BA | Not yet paid | ME | Not yet paid | Title | German: | Strahlungsquelle | [2015/30] | English: | A radiation source | [2015/30] | French: | Source de radiation | [2015/30] | Examination procedure | 05.06.2014 | Loss of particular rights, legal effect: Claims | 11.07.2014 | Despatch of communication of loss of particular rights: Claims {1} | 23.01.2016 | Application deemed to be withdrawn, date of legal effect [2016/30] | 04.03.2016 | Despatch of communication that the application is deemed to be withdrawn, reason: examination fee not paid in time [2016/30] | Fees paid | Penalty fee | Additional fee for renewal fee | 31.01.2016 | 03 M06 Not yet paid |
| Opt-out from the exclusive Tooltip competence of the Unified Patent Court | See the Register of the Unified Patent Court for opt-out data | ||
| Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court. | Documents cited: | Search | [Y]US2007152171 (GOLDSTEIN MICHAEL [US], et al) [Y] 20,21,24 * paragraph [0019] - paragraph [0031]; figures 1,4 *; | [Y]US2002018189 (MULKENS JOHANNES CATHARINUS HU [NL], et al) [Y] 22 * paragraph [0034] * * paragraph [0050] - paragraph [0052]; figure 1 * * paragraph [0061] - paragraph [0063]; figure 3 *; | [XAY] - DI MITRI S ET AL, "FERMI@Elettra, a seeded free electron laser source for a broad scientific user program", ADVANCES IN X-RAY FREE-ELECTRON LASERS: RADIATION SCHEMES, X-RAY OPTICS, AND INSTRUMENTATION, SPIE, 1000 20TH ST. BELLINGHAM WA 98225-6705 USA, (20110505), vol. 8078, no. 1, doi:10.1117/12.886491, pages 1 - 13, XP060013781 [X] 1-10,18,19,25 * paragraph [0001] * * paragraph [02.2]; figure 3.2 * [A] 11-17 [Y] 20-24 DOI: http://dx.doi.org/10.1117/12.886491 | [XY] - YU L-H ET AL, "The DUV-FEL development program", PROCEEDINGS OF THE 2001 PARTICLE ACCELERATOR CONFERENCE : CHICAGO, ILLINOIS, U.S.A., JUNE 18 - 22, 2001, IEEE OPERATIONS CENTER, PISCATAWAY, NJ, (20010618), vol. 4, doi:10.1109/PAC.2001.987925, ISBN 978-0-7803-7191-0, pages 2830 - 2832, XP010581749 [X] 1-10,18,19,25 * paragraph [0002] * [Y] 20-24 DOI: http://dx.doi.org/10.1109/PAC.2001.987925 | [Y] - GIOVANNI CIRMI ET AL, "Paper;Cut-off scaling of high-harmonic generation driven by a femtosecond visible optical parametric amplifier;Cut-off scaling of high-harmonic generation driven by a femtosecond visible optical parametric amplifier", JOURNAL OF PHYSICS B, ATOMIC MOLECULAR AND OPTICAL PHYSICS, INSTITUTE OF PHYSICS PUBLISHING, BRISTOL, GB, (20120912), vol. 45, no. 20, doi:10.1088/0953-4075/45/20/205601, ISSN 0953-4075, page 205601, XP020229911 [Y] 23 * page 8, paragraph 1 * DOI: http://dx.doi.org/10.1088/0953-4075/45/20/205601 |