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Extract from the Register of European Patents

EP About this file: EP2765613

EP2765613 - Process for fabricating a transistor [Right-click to bookmark this link]
StatusThe application is deemed to be withdrawn
Status updated on  10.07.2015
Database last updated on 31.08.2024
Most recent event   Tooltip10.07.2015Application deemed to be withdrawnpublished on 12.08.2015  [2015/33]
Applicant(s)For all designated states
COMMISSARIAT À L'ÉNERGIE ATOMIQUE ET AUX ÉNERGIES ALTERNATIVES
Bâtiment "Le Ponant D"
25, rue Leblanc
75015 Paris / FR
For all designated states
STMicroelectronics (Crolles 2) SAS
850, rue Jean Monnet
38920 Crolles / FR
For all designated states
STmicroelectronics SA
29, boulevard Romain Rolland
92120 Montrouge / FR
[N/P]
Former [2014/33]For all designated states
COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
Bâtiment "Le Ponant D" 25, rue Leblanc
75015 Paris / FR
For all designated states
STMicroelectronics (Crolles 2) SAS
850, rue Jean Monnet
38920 Crolles / FR
For all designated states
STmicroelectronics SA
29, boulevard Romain Rolland
92120 Montrouge / FR
Inventor(s)01 / Niebojewski, Heimanu
10 Rue des Bergers
38000 Grenoble / FR
02 / Morand, Yves
16 rue Amédée Morel
38000 Grenoble / FR
03 / Vinet, Maud
171 B Chemin des Vignes
38140 Rives / FR
 [2014/33]
Representative(s)Hautier, Nicolas
Cabinet Hautier
20, rue de la Liberté
06000 Nice / FR
[N/P]
Former [2014/33]Hautier, Nicolas
Cabinet Hautier 20, rue de la Liberté
06000 Nice / FR
Application number, filing date14154710.911.02.2014
[2014/33]
Priority number, dateFR2013005114011.02.2013         Original published format: FR 1351140
[2014/33]
Filing languageFR
Procedural languageFR
PublicationType: A1 Application with search report 
No.:EP2765613
Date:13.08.2014
Language:FR
[2014/33]
Search report(s)(Supplementary) European search report - dispatched on:EP06.03.2014
ClassificationIPC:H01L29/786, H01L29/66
[2014/33]
CPC:
H01L29/6656 (EP,US); H01L21/84 (EP,US); H01L27/1203 (EP,US);
H01L29/66636 (EP,US); H01L29/66772 (EP,US); H01L29/78603 (EP,US)
Designated contracting statesAL,   AT,   BE,   BG,   CH,   CY,   CZ,   DE,   DK,   EE,   ES,   FI,   FR,   GB,   GR,   HR,   HU,   IE,   IS,   IT,   LI,   LT,   LU,   LV,   MC,   MK,   MT,   NL,   NO,   PL,   PT,   RO,   RS,   SE,   SI,   SK,   SM,   TR [2014/33]
Extension statesBANot yet paid
MENot yet paid
TitleGerman:Herstellungsverfahren eines Transistors[2014/33]
English:Process for fabricating a transistor[2014/33]
French:Procédé de fabrication d'un transistor[2014/33]
Examination procedure11.02.2014Examination requested  [2014/33]
14.02.2015Application deemed to be withdrawn, date of legal effect  [2015/33]
25.03.2015Despatch of communication that the application is deemed to be withdrawn, reason: examination fee not paid in time  [2015/33]
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Documents cited:Search[A]US2006094182  (HANAFI HUSSEIN I [US], et al) [A] 1-17 * abstract * * figures 18-24 * * paragraphs [0024] , [0026] , [0029] , [0033] , [0034] , [0035] , [0037] *;
 [A]US2007166890  (CHENG KANGGUO [US], et al) [A] 1-17 * abstract * * paragraphs [0027] , [0030] , [0033] *;
 [A]US2007278591  (LUO ZHIJIONG [US], et al) [A] 1-17 * abstract * * figures 1-8 ** paragraphs [0005] , [0023] , [0024] *;
 [I]US2012273886  (ZHONG HUICAI [US], et al) [I] 1-17 * abstract * * figures 1-9 * * paragraphs [0064] - [0071] - [0074] *
by applicant   - A. BAGHIZADEH; D. AGHA-ALIGOL; D. FATHY; M. LAMEHI-RACHTI; M. MORADI, "Formation of As enriched layer by steam oxidation of As+-implanted Si", APPLIED SURFACE SCIENCE, (2009), vol. 255, pages 5857 - 5860
    - "Oxide Growth Enhancement on Highly n-Type Doped Silicon under Steam Oxidation", ERICH BIERMANN; HORST H. BERGER; PETER LINKE; BERNT MULLER, J. Electrochem. Soc., THE ELECTROCHEMICAL SOCIETY, INC., (199604), vol. 143
    - B. E. DEAL; M. SKLARRESEARCH, "Thermal Oxidation of Heavily Doped Silicon", DEVELOPMENT LABORATORY, FAIRCHILD SEMICONDUCTOR, vol. 112, no. 4
    - DE BAUER; S.G. THOMAS, THIN SOLID FILMS, (2012), vol. 520, pages 3133 - 3138
The EPO accepts no responsibility for the accuracy of data originating from other authorities; in particular, it does not guarantee that it is complete, up to date or fit for specific purposes.