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EP2816624
European procedure
Extract from the Register of European Patents
EP About this file: EP2816624
| EP2816624 - Method for producing a through substrate via and a through substrate capacitor in a substrate [Right-click to bookmark this link] | |||
| Former [2014/52] | Method for producing a through electrical connection and a through capacitor in a substrate, and corresponding device | ||
| [2021/29] | Status | No opposition filed within time limit Status updated on 21.10.2022 Database last updated on 19.10.2024 | |
| Former | The patent has been granted Status updated on 12.11.2021 | ||
| Former | Grant of patent is intended Status updated on 27.07.2021 | ||
| Former | Examination is in progress Status updated on 01.05.2019 | Most recent event Tooltip | 06.09.2024 | Lapse of the patent in a contracting state New state(s): MT | published on 09.10.2024 [2024/41] | Applicant(s) | For all designated states STMicroelectronics (Crolles 2) SAS 850, rue Jean Monnet 38920 Crolles / FR | For all designated states COMMISSARIAT À L'ÉNERGIE ATOMIQUE ET AUX ÉNERGIES ALTERNATIVES Bâtiment "Le Ponant D" 25, Rue Leblanc 75015 Paris / FR | [N/P] |
| Former [2021/50] | For all designated states STMicroelectronics (Crolles 2) SAS 850, rue Jean Monnet 38920 Crolles / FR | ||
| For all designated states COMMISSARIAT À L'ÉNERGIE ATOMIQUE ET AUX ÉNERGIES ALTERNATIVES Bâtiment "Le Ponant D" 25, rue Leblanc 75015 Paris / FR | |||
| Former [2014/52] | For all designated states STMicroelectronics (Crolles 2) SAS 850, rue Jean Monnet 38920 Crolles / FR | ||
| For all designated states COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES Bâtiment "Le Ponant D" 25, rue Leblanc 75015 Paris / FR | Inventor(s) | 01 /
Joblot, Sylvain 34 Chemin de Longechenal 38690 Bizonnes / FR | 02 /
Colonna, Jean-Philippe 142 route de Chartreuse 38700 CORENC / FR | 03 /
Guiller, Olivier La croix du rocher 38700 LE SAPPEY EN CHARTREUSE / FR | 04 /
Mourier, Thierry 51 D R des ayguinards 38240 MEYLAN / FR | [2021/50] |
| Former [2015/12] | 01 /
Joblot, Sylvain 34 Chemin de Longechenal 38690 Bizonnes / FR | ||
| 02 /
Colonna, Jean-Philippe 142 route de Chartreuse 38700 CORENC / FR | |||
| 03 /
Guiller, Olivier 24 rue Jean Bocq 38600 FONTAINE / FR | |||
| 04 /
Mourier, Thierry 51 D R des ayguinards 38240 MEYLAN / FR | |||
| Former [2014/52] | 01 /
Joblot, Sylvain 34 Chemin de Longechenal 38690 Bizonnes / FR | ||
| 02 /
Colonna, Jean-Philippe 142 route de Chartreuse 38700 CORENC / FR | |||
| 03 /
Guiller, Olivier 1 rue Edgar Quinet 38000 GRENOBLE / FR | |||
| 04 /
Mourier, Thierry 51 D R des ayguinards 38240 MEYLAN / FR | Representative(s) | Casalonga Casalonga & Partners Bayerstraße 71/73 80335 München / DE | [2014/52] | Application number, filing date | 14172883.2 | 18.06.2014 | [2014/52] | Priority number, date | FR20130055710 | 18.06.2013 Original published format: FR 1355710 | [2014/52] | Filing language | FR | Procedural language | FR | Publication | Type: | A1 Application with search report | No.: | EP2816624 | Date: | 24.12.2014 | Language: | FR | [2014/52] | Type: | B1 Patent specification | No.: | EP2816624 | Date: | 15.12.2021 | Language: | FR | [2021/50] | Search report(s) | (Supplementary) European search report - dispatched on: | EP | 13.11.2014 | Classification | IPC: | H01L49/02, H01L21/768, H01L23/48, H01L23/64, H01G2/10, H01G4/236, H01G4/35 | [2021/29] | CPC: |
H01L28/40 (EP,US);
H01G2/103 (EP,US);
H01G4/236 (EP,US);
H01G4/35 (EP,US);
H01L21/76898 (EP,US);
H01L23/481 (EP,US);
| C-Set: |
H01L2924/0002, H01L2924/00 (EP,US)
|
| Former IPC [2014/52] | H01L49/02, H01L21/768, H01L23/48, H01L23/64 | Designated contracting states | AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LI, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR [2014/52] | Title | German: | Verfahren zur Herstellung einer Substratdurchkontaktierung und eines durchgehenden Kondensators in einem Substrat | [2021/31] | English: | Method for producing a through substrate via and a through substrate capacitor in a substrate | [2021/31] | French: | Procédé de réalisation d'une liaison électrique traversante et d'un condensateur traversant dans un substrat | [2021/29] |
| Former [2014/52] | Verfahren zur Herstellung einer durchgehenden elektrischen Verbindung und eines durchgehenden Kondensators in einem Substrat, und entsprechende Vorrichtung | ||
| Former [2014/52] | Method for producing a through electrical connection and a through capacitor in a substrate, and corresponding device | ||
| Former [2014/52] | Procédé de réalisation d'une liaison électrique traversante et d'un condensateur traversant dans un substrat, et dispositif correspondant | Examination procedure | 26.05.2015 | Amendment by applicant (claims and/or description) | 10.06.2015 | Examination requested [2015/30] | 06.05.2019 | Despatch of a communication from the examining division (Time limit: M04) | 28.08.2019 | Reply to a communication from the examining division | 28.07.2021 | Communication of intention to grant the patent | 08.11.2021 | Fee for grant paid | 08.11.2021 | Fee for publishing/printing paid | 08.11.2021 | Receipt of the translation of the claim(s) | Opposition(s) | 16.09.2022 | No opposition filed within time limit [2022/47] | Fees paid | Renewal fee | 19.05.2016 | Renewal fee patent year 03 | 17.05.2017 | Renewal fee patent year 04 | 16.05.2018 | Renewal fee patent year 05 | 15.05.2019 | Renewal fee patent year 06 | 11.05.2020 | Renewal fee patent year 07 | 12.05.2021 | Renewal fee patent year 08 |
| Opt-out from the exclusive Tooltip competence of the Unified Patent Court | See the Register of the Unified Patent Court for opt-out data | ||
| Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court. | Lapses during opposition Tooltip | HU | 18.06.2014 | AL | 15.12.2021 | AT | 15.12.2021 | CY | 15.12.2021 | CZ | 15.12.2021 | DK | 15.12.2021 | EE | 15.12.2021 | ES | 15.12.2021 | FI | 15.12.2021 | HR | 15.12.2021 | IT | 15.12.2021 | LT | 15.12.2021 | LV | 15.12.2021 | MC | 15.12.2021 | MK | 15.12.2021 | MT | 15.12.2021 | NL | 15.12.2021 | PL | 15.12.2021 | RO | 15.12.2021 | RS | 15.12.2021 | SE | 15.12.2021 | SI | 15.12.2021 | SK | 15.12.2021 | SM | 15.12.2021 | BG | 15.03.2022 | NO | 15.03.2022 | GR | 16.03.2022 | IS | 15.04.2022 | PT | 18.04.2022 | IE | 18.06.2022 | LU | 18.06.2022 | BE | 30.06.2022 | CH | 30.06.2022 | LI | 30.06.2022 | [2024/41] |
| Former [2024/22] | HU | 18.06.2014 | |
| AL | 15.12.2021 | ||
| AT | 15.12.2021 | ||
| CY | 15.12.2021 | ||
| CZ | 15.12.2021 | ||
| DK | 15.12.2021 | ||
| EE | 15.12.2021 | ||
| ES | 15.12.2021 | ||
| FI | 15.12.2021 | ||
| HR | 15.12.2021 | ||
| IT | 15.12.2021 | ||
| LT | 15.12.2021 | ||
| LV | 15.12.2021 | ||
| MC | 15.12.2021 | ||
| MK | 15.12.2021 | ||
| NL | 15.12.2021 | ||
| PL | 15.12.2021 | ||
| RO | 15.12.2021 | ||
| RS | 15.12.2021 | ||
| SE | 15.12.2021 | ||
| SI | 15.12.2021 | ||
| SK | 15.12.2021 | ||
| SM | 15.12.2021 | ||
| BG | 15.03.2022 | ||
| NO | 15.03.2022 | ||
| GR | 16.03.2022 | ||
| IS | 15.04.2022 | ||
| PT | 18.04.2022 | ||
| IE | 18.06.2022 | ||
| LU | 18.06.2022 | ||
| BE | 30.06.2022 | ||
| CH | 30.06.2022 | ||
| LI | 30.06.2022 | ||
| Former [2024/20] | HU | 18.06.2014 | |
| AL | 15.12.2021 | ||
| AT | 15.12.2021 | ||
| CY | 15.12.2021 | ||
| CZ | 15.12.2021 | ||
| DK | 15.12.2021 | ||
| EE | 15.12.2021 | ||
| ES | 15.12.2021 | ||
| FI | 15.12.2021 | ||
| HR | 15.12.2021 | ||
| IT | 15.12.2021 | ||
| LT | 15.12.2021 | ||
| LV | 15.12.2021 | ||
| MC | 15.12.2021 | ||
| NL | 15.12.2021 | ||
| PL | 15.12.2021 | ||
| RO | 15.12.2021 | ||
| RS | 15.12.2021 | ||
| SE | 15.12.2021 | ||
| SI | 15.12.2021 | ||
| SK | 15.12.2021 | ||
| SM | 15.12.2021 | ||
| BG | 15.03.2022 | ||
| NO | 15.03.2022 | ||
| GR | 16.03.2022 | ||
| IS | 15.04.2022 | ||
| PT | 18.04.2022 | ||
| IE | 18.06.2022 | ||
| LU | 18.06.2022 | ||
| BE | 30.06.2022 | ||
| CH | 30.06.2022 | ||
| LI | 30.06.2022 | ||
| Former [2024/18] | HU | 18.06.2014 | |
| AL | 15.12.2021 | ||
| AT | 15.12.2021 | ||
| CZ | 15.12.2021 | ||
| DK | 15.12.2021 | ||
| EE | 15.12.2021 | ||
| ES | 15.12.2021 | ||
| FI | 15.12.2021 | ||
| HR | 15.12.2021 | ||
| IT | 15.12.2021 | ||
| LT | 15.12.2021 | ||
| LV | 15.12.2021 | ||
| MC | 15.12.2021 | ||
| NL | 15.12.2021 | ||
| PL | 15.12.2021 | ||
| RO | 15.12.2021 | ||
| RS | 15.12.2021 | ||
| SE | 15.12.2021 | ||
| SI | 15.12.2021 | ||
| SK | 15.12.2021 | ||
| SM | 15.12.2021 | ||
| BG | 15.03.2022 | ||
| NO | 15.03.2022 | ||
| GR | 16.03.2022 | ||
| IS | 15.04.2022 | ||
| PT | 18.04.2022 | ||
| IE | 18.06.2022 | ||
| LU | 18.06.2022 | ||
| BE | 30.06.2022 | ||
| CH | 30.06.2022 | ||
| LI | 30.06.2022 | ||
| Former [2023/25] | AL | 15.12.2021 | |
| AT | 15.12.2021 | ||
| CZ | 15.12.2021 | ||
| DK | 15.12.2021 | ||
| EE | 15.12.2021 | ||
| ES | 15.12.2021 | ||
| FI | 15.12.2021 | ||
| HR | 15.12.2021 | ||
| IT | 15.12.2021 | ||
| LT | 15.12.2021 | ||
| LV | 15.12.2021 | ||
| MC | 15.12.2021 | ||
| NL | 15.12.2021 | ||
| PL | 15.12.2021 | ||
| RO | 15.12.2021 | ||
| RS | 15.12.2021 | ||
| SE | 15.12.2021 | ||
| SI | 15.12.2021 | ||
| SK | 15.12.2021 | ||
| SM | 15.12.2021 | ||
| BG | 15.03.2022 | ||
| NO | 15.03.2022 | ||
| GR | 16.03.2022 | ||
| IS | 15.04.2022 | ||
| PT | 18.04.2022 | ||
| IE | 18.06.2022 | ||
| LU | 18.06.2022 | ||
| BE | 30.06.2022 | ||
| CH | 30.06.2022 | ||
| LI | 30.06.2022 | ||
| Former [2023/21] | AL | 15.12.2021 | |
| AT | 15.12.2021 | ||
| CZ | 15.12.2021 | ||
| DK | 15.12.2021 | ||
| EE | 15.12.2021 | ||
| ES | 15.12.2021 | ||
| FI | 15.12.2021 | ||
| HR | 15.12.2021 | ||
| LT | 15.12.2021 | ||
| LV | 15.12.2021 | ||
| MC | 15.12.2021 | ||
| NL | 15.12.2021 | ||
| PL | 15.12.2021 | ||
| RO | 15.12.2021 | ||
| RS | 15.12.2021 | ||
| SE | 15.12.2021 | ||
| SI | 15.12.2021 | ||
| SK | 15.12.2021 | ||
| SM | 15.12.2021 | ||
| BG | 15.03.2022 | ||
| NO | 15.03.2022 | ||
| GR | 16.03.2022 | ||
| IS | 15.04.2022 | ||
| PT | 18.04.2022 | ||
| IE | 18.06.2022 | ||
| LU | 18.06.2022 | ||
| CH | 30.06.2022 | ||
| LI | 30.06.2022 | ||
| Former [2023/20] | AL | 15.12.2021 | |
| AT | 15.12.2021 | ||
| CZ | 15.12.2021 | ||
| DK | 15.12.2021 | ||
| EE | 15.12.2021 | ||
| ES | 15.12.2021 | ||
| FI | 15.12.2021 | ||
| HR | 15.12.2021 | ||
| LT | 15.12.2021 | ||
| LV | 15.12.2021 | ||
| MC | 15.12.2021 | ||
| NL | 15.12.2021 | ||
| PL | 15.12.2021 | ||
| RO | 15.12.2021 | ||
| RS | 15.12.2021 | ||
| SE | 15.12.2021 | ||
| SI | 15.12.2021 | ||
| SK | 15.12.2021 | ||
| SM | 15.12.2021 | ||
| BG | 15.03.2022 | ||
| NO | 15.03.2022 | ||
| GR | 16.03.2022 | ||
| IS | 15.04.2022 | ||
| PT | 18.04.2022 | ||
| IE | 18.06.2022 | ||
| Former [2023/08] | AL | 15.12.2021 | |
| AT | 15.12.2021 | ||
| CZ | 15.12.2021 | ||
| DK | 15.12.2021 | ||
| EE | 15.12.2021 | ||
| ES | 15.12.2021 | ||
| FI | 15.12.2021 | ||
| HR | 15.12.2021 | ||
| LT | 15.12.2021 | ||
| LV | 15.12.2021 | ||
| MC | 15.12.2021 | ||
| NL | 15.12.2021 | ||
| PL | 15.12.2021 | ||
| RO | 15.12.2021 | ||
| RS | 15.12.2021 | ||
| SE | 15.12.2021 | ||
| SI | 15.12.2021 | ||
| SK | 15.12.2021 | ||
| SM | 15.12.2021 | ||
| BG | 15.03.2022 | ||
| NO | 15.03.2022 | ||
| GR | 16.03.2022 | ||
| IS | 15.04.2022 | ||
| PT | 18.04.2022 | ||
| Former [2023/01] | AL | 15.12.2021 | |
| AT | 15.12.2021 | ||
| CZ | 15.12.2021 | ||
| DK | 15.12.2021 | ||
| EE | 15.12.2021 | ||
| ES | 15.12.2021 | ||
| FI | 15.12.2021 | ||
| HR | 15.12.2021 | ||
| LT | 15.12.2021 | ||
| LV | 15.12.2021 | ||
| NL | 15.12.2021 | ||
| PL | 15.12.2021 | ||
| RO | 15.12.2021 | ||
| RS | 15.12.2021 | ||
| SE | 15.12.2021 | ||
| SI | 15.12.2021 | ||
| SK | 15.12.2021 | ||
| SM | 15.12.2021 | ||
| BG | 15.03.2022 | ||
| NO | 15.03.2022 | ||
| GR | 16.03.2022 | ||
| IS | 15.04.2022 | ||
| PT | 18.04.2022 | ||
| Former [2022/49] | AL | 15.12.2021 | |
| AT | 15.12.2021 | ||
| CZ | 15.12.2021 | ||
| DK | 15.12.2021 | ||
| EE | 15.12.2021 | ||
| ES | 15.12.2021 | ||
| FI | 15.12.2021 | ||
| HR | 15.12.2021 | ||
| LT | 15.12.2021 | ||
| LV | 15.12.2021 | ||
| NL | 15.12.2021 | ||
| PL | 15.12.2021 | ||
| RO | 15.12.2021 | ||
| RS | 15.12.2021 | ||
| SE | 15.12.2021 | ||
| SK | 15.12.2021 | ||
| SM | 15.12.2021 | ||
| BG | 15.03.2022 | ||
| NO | 15.03.2022 | ||
| GR | 16.03.2022 | ||
| IS | 15.04.2022 | ||
| PT | 18.04.2022 | ||
| Former [2022/46] | AT | 15.12.2021 | |
| CZ | 15.12.2021 | ||
| DK | 15.12.2021 | ||
| EE | 15.12.2021 | ||
| ES | 15.12.2021 | ||
| FI | 15.12.2021 | ||
| HR | 15.12.2021 | ||
| LT | 15.12.2021 | ||
| LV | 15.12.2021 | ||
| NL | 15.12.2021 | ||
| PL | 15.12.2021 | ||
| RO | 15.12.2021 | ||
| RS | 15.12.2021 | ||
| SE | 15.12.2021 | ||
| SK | 15.12.2021 | ||
| SM | 15.12.2021 | ||
| BG | 15.03.2022 | ||
| NO | 15.03.2022 | ||
| GR | 16.03.2022 | ||
| IS | 15.04.2022 | ||
| PT | 18.04.2022 | ||
| Former [2022/42] | AT | 15.12.2021 | |
| CZ | 15.12.2021 | ||
| EE | 15.12.2021 | ||
| ES | 15.12.2021 | ||
| FI | 15.12.2021 | ||
| HR | 15.12.2021 | ||
| LT | 15.12.2021 | ||
| LV | 15.12.2021 | ||
| NL | 15.12.2021 | ||
| PL | 15.12.2021 | ||
| RO | 15.12.2021 | ||
| RS | 15.12.2021 | ||
| SE | 15.12.2021 | ||
| SK | 15.12.2021 | ||
| SM | 15.12.2021 | ||
| BG | 15.03.2022 | ||
| NO | 15.03.2022 | ||
| GR | 16.03.2022 | ||
| IS | 15.04.2022 | ||
| PT | 18.04.2022 | ||
| Former [2022/36] | AT | 15.12.2021 | |
| CZ | 15.12.2021 | ||
| EE | 15.12.2021 | ||
| ES | 15.12.2021 | ||
| FI | 15.12.2021 | ||
| HR | 15.12.2021 | ||
| LT | 15.12.2021 | ||
| LV | 15.12.2021 | ||
| NL | 15.12.2021 | ||
| PL | 15.12.2021 | ||
| RO | 15.12.2021 | ||
| RS | 15.12.2021 | ||
| SE | 15.12.2021 | ||
| SK | 15.12.2021 | ||
| SM | 15.12.2021 | ||
| BG | 15.03.2022 | ||
| NO | 15.03.2022 | ||
| GR | 16.03.2022 | ||
| PT | 18.04.2022 | ||
| Former [2022/35] | CZ | 15.12.2021 | |
| EE | 15.12.2021 | ||
| ES | 15.12.2021 | ||
| FI | 15.12.2021 | ||
| HR | 15.12.2021 | ||
| LT | 15.12.2021 | ||
| LV | 15.12.2021 | ||
| NL | 15.12.2021 | ||
| RO | 15.12.2021 | ||
| RS | 15.12.2021 | ||
| SE | 15.12.2021 | ||
| SK | 15.12.2021 | ||
| SM | 15.12.2021 | ||
| BG | 15.03.2022 | ||
| NO | 15.03.2022 | ||
| GR | 16.03.2022 | ||
| PT | 18.04.2022 | ||
| Former [2022/34] | EE | 15.12.2021 | |
| ES | 15.12.2021 | ||
| FI | 15.12.2021 | ||
| HR | 15.12.2021 | ||
| LT | 15.12.2021 | ||
| LV | 15.12.2021 | ||
| NL | 15.12.2021 | ||
| RO | 15.12.2021 | ||
| RS | 15.12.2021 | ||
| SE | 15.12.2021 | ||
| SM | 15.12.2021 | ||
| BG | 15.03.2022 | ||
| NO | 15.03.2022 | ||
| GR | 16.03.2022 | ||
| PT | 18.04.2022 | ||
| Former [2022/33] | FI | 15.12.2021 | |
| HR | 15.12.2021 | ||
| LT | 15.12.2021 | ||
| LV | 15.12.2021 | ||
| NL | 15.12.2021 | ||
| RS | 15.12.2021 | ||
| SE | 15.12.2021 | ||
| SM | 15.12.2021 | ||
| BG | 15.03.2022 | ||
| NO | 15.03.2022 | ||
| GR | 16.03.2022 | ||
| Former [2022/30] | FI | 15.12.2021 | |
| HR | 15.12.2021 | ||
| LT | 15.12.2021 | ||
| LV | 15.12.2021 | ||
| NL | 15.12.2021 | ||
| RS | 15.12.2021 | ||
| SE | 15.12.2021 | ||
| BG | 15.03.2022 | ||
| NO | 15.03.2022 | ||
| GR | 16.03.2022 | ||
| Former [2022/25] | FI | 15.12.2021 | |
| HR | 15.12.2021 | ||
| LT | 15.12.2021 | ||
| LV | 15.12.2021 | ||
| RS | 15.12.2021 | ||
| SE | 15.12.2021 | ||
| BG | 15.03.2022 | ||
| NO | 15.03.2022 | ||
| GR | 16.03.2022 | ||
| Former [2022/24] | FI | 15.12.2021 | |
| HR | 15.12.2021 | ||
| LT | 15.12.2021 | ||
| LV | 15.12.2021 | ||
| RS | 15.12.2021 | ||
| SE | 15.12.2021 | ||
| BG | 15.03.2022 | ||
| GR | 16.03.2022 | ||
| Former [2022/22] | FI | 15.12.2021 | |
| LT | 15.12.2021 | ||
| RS | 15.12.2021 | ||
| BG | 15.03.2022 | ||
| Former [2022/21] | RS | 15.12.2021 | |
| BG | 15.03.2022 | ||
| Former [2022/19] | BG | 15.03.2022 | Documents cited: | Search | [A]US2006001174 (MATSUI SATOSHI [JP]); | [YA]US2008173993 (ANDRY PAUL S [US], et al); | [A]US2010308435 (NOWAK MATTHEW MICHAEL [US], et al); | [YA]US2011027962 (BERNSTEIN KERRY [US], et al); | [XDY]FR2968130 (ST MICROELECTRONICS SA [FR], et al); | [A]US2012258589 (VOLANT RICHARD P [US], et al); | by applicant | FR1059919 |