blank Quick help
blank Maintenance news

Scheduled maintenance

Regular maintenance outages:
between 05.00 and 05.15 hrs CET (Monday to Sunday).

Other outages
Availability
Register Forum

2022.02.11

More...
blank News flashes

News Flashes

New version of the European Patent Register – SPC proceedings information in the Unitary Patent Register.

2024-07-24

More...
blank Related links

Release notes
European Patent Register Assistant
European Patent Register Resource Book
European Patent Register – pocket guide
FAQ - European Patent Register
FAQ - Register Alert
Federated Register (Flyer)
Global Dossier (Flyer)
Register events
Deep link coverage
Federated Register content
The Patent Information Tour
Fair use charter

Extract from the Register of European Patents

EP About this file: EP2874180

EP2874180 - THIN-FILM VAPOUR DEPOSITION METHOD [Right-click to bookmark this link]
Former [2015/21]THIN-FILM VAPOUR DEPOSITION DEVICE
[2020/11]
StatusNo opposition filed within time limit
Status updated on  28.05.2021
Database last updated on 02.09.2024
FormerThe patent has been granted
Status updated on  19.06.2020
FormerGrant of patent is intended
Status updated on  12.03.2020
FormerExamination is in progress
Status updated on  29.05.2019
Most recent event   Tooltip27.04.2024Lapse of the patent in a contracting state
New state(s): MK		published on 29.05.2024  [2024/22]
Applicant(s)For all designated states
Tes Co., Ltd.
2374-36 Jungbudae-ro
Yangji-myeon
Cheoin-gu
Yongin-si, Gyeonggi-do 449-825 / KR
For all designated states
Hwang, Sang-soo
Seongji Apt.
Songpa-dong
102-1208
11 Songi-ro 12-gil, Songpa-gu
Seoul 138-854 / KR
For all designated states
Lee, Woo-Jin
Myeongji Queendum Apt.
Myeongji-dong
304-802 51 Myeongji Ocean City 11-ro
Gangseo-gu
Busan 618-710 / KR
For all designated states
Shin, Ki-jo
Daewoo 3 Cha Apt.
Jeungpo-dong
301-102
35 Iseopdaecheon-ro 1407-gil
Icheon-si, Gyeonggi-do 467-110 / KR
For all designated states
Cha, Dong-il
Halla Vivaldi Park Apt.
Gwonseon-dong
410 33 Hyowon-ro 256-gil
Gwonseon-gu
Suwon-si, Gyeonggi-do 441-822 / KR
[2015/21]
Inventor(s)01 / HWANG, Sang-Soo
(Seongji Apt.
Songpa-dong) 102-1208
11 Songi-ro 12-gil
Songpa-gu
Seoul 138-854 / KR
02 / LEE, Woo-Jin
(Myeongji Queendum Apt.
Myeongji-dong) 304-802
51 Myeongji ocean city 11-ro
Gangseo-gu
Busan 618-710 / KR
03 / SHIN, Ki-Jo
(Daewoo 3 Cha Apt.
Jeungpo-dong) 301-102
35 Iseopdaecheon-ro 1407-gil
Icheon-si Gyeonggi-do 467-110 / KR
04 / CHA, Dong-Il
(Halla Vivaldi Park Apt.
Gwonseon-dong) 410
33 Hyowon-ro 256-gil
Gwonseon-gu
Suwon-si Gyeonggi-do 441-822 / KR
 [2015/21]
Representative(s)Louis Pöhlau Lohrentz
Patentanwälte
Postfach 30 55
90014 Nürnberg / DE
[2015/21]
Application number, filing date14746326.903.02.2014
[2020/30]
WO2014KR00922
Priority number, dateKR2013001245404.02.2013         Original published format: KR 20130012454
[2015/21]
Filing languageKO
Procedural languageEN
PublicationType: A1 Application with search report
No.:WO2014119971
Date:07.08.2014
Language:KO
[2014/32]
Type: A1 Application with search report 
No.:EP2874180
Date:20.05.2015
Language:EN
[2015/21]
Type: B1 Patent specification 
No.:EP2874180
Date:22.07.2020
Language:EN
[2020/30]
Search report(s)International search report - published on:KR07.08.2014
(Supplementary) European search report - dispatched on:EP18.03.2016
ClassificationIPC:C23C16/44, C23C16/452, H01L21/205, C23C16/40, C23C16/455
[2020/11]
CPC:
C23C16/45544 (EP,CN,US); H01L21/205 (KR); C23C16/4412 (EP,CN,US);
C23C16/403 (EP,US); C23C16/452 (EP,CN,US); C23C16/45536 (EP,US);
C23C16/45551 (EP,US); C23C16/45574 (EP,US); C23C16/45578 (EP,US) (-)
Former IPC [2016/16]H01L21/205, C23C16/40, C23C16/455
Former IPC [2015/21]H01L21/205
Designated contracting statesAL,   AT,   BE,   BG,   CH,   CY,   CZ,   DE,   DK,   EE,   ES,   FI,   FR,   GB,   GR,   HR,   HU,   IE,   IS,   IT,   LI,   LT,   LU,   LV,   MC,   MK,   MT,   NL,   NO,   PL,   PT,   RO,   RS,   SE,   SI,   SK,   SM,   TR [2015/21]
Extension statesBANot yet paid
MENot yet paid
TitleGerman:DÜNNFILMDAMPFABSCHEIDUNGSVERFAHREN[2020/11]
English:THIN-FILM VAPOUR DEPOSITION METHOD[2020/11]
French:METHODE DE DÉPÔT DE FILM MINCE EN PHASE VAPEUR[2020/11]
Former [2015/21]DÜNNFILMDAMPFABSCHEIDUNGSVORRICHTUNG
Former [2015/21]THIN-FILM VAPOUR DEPOSITION DEVICE
Former [2015/21]DISPOSITIF DE DÉPÔT DE FILM MINCE EN PHASE VAPEUR
Entry into regional phase10.02.2015Translation filed 
10.02.2015National basic fee paid 
10.02.2015Search fee paid 
10.02.2015Designation fee(s) paid 
10.02.2015Examination fee paid 
Examination procedure10.02.2015Examination requested  [2015/21]
10.10.2016Amendment by applicant (claims and/or description)
04.06.2019Despatch of a communication from the examining division (Time limit: M04)
08.10.2019Reply to a communication from the examining division
13.03.2020Communication of intention to grant the patent
10.06.2020Fee for grant paid
10.06.2020Fee for publishing/printing paid
10.06.2020Receipt of the translation of the claim(s)
Divisional application(s)The date of the Examining Division's first communication in respect of the earliest application for which a communication has been issued is  04.06.2019
Opposition(s)23.04.2021No opposition filed within time limit [2021/26]
Fees paidRenewal fee
25.02.2016Renewal fee patent year 03
12.05.2017Renewal fee patent year 04
20.02.2018Renewal fee patent year 05
10.01.2019Renewal fee patent year 06
26.02.2020Renewal fee patent year 07
Penalty fee
Additional fee for renewal fee
28.02.201704   M06   Fee paid on   12.05.2017
Opt-out from the exclusive  Tooltip
competence of the Unified
Patent Court		 See the Register of the Unified Patent Court for opt-out data
Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court.
Lapses during opposition  TooltipHU03.02.2014
AL22.07.2020
AT22.07.2020
CY22.07.2020
CZ22.07.2020
DK22.07.2020
EE22.07.2020
ES22.07.2020
HR22.07.2020
IT22.07.2020
LT22.07.2020
LV22.07.2020
MC22.07.2020
MK22.07.2020
PL22.07.2020
RO22.07.2020
RS22.07.2020
SE22.07.2020
SI22.07.2020
SK22.07.2020
SM22.07.2020
BG22.10.2020
NO22.10.2020
GR23.10.2020
IS22.11.2020
PT23.11.2020
GB03.02.2021
IE03.02.2021
LU03.02.2021
BE28.02.2021
CH28.02.2021
FR28.02.2021
LI28.02.2021
[2024/22]
Former [2023/30]HU03.02.2014
AL22.07.2020
AT22.07.2020
CY22.07.2020
CZ22.07.2020
DK22.07.2020
EE22.07.2020
ES22.07.2020
HR22.07.2020
IT22.07.2020
LT22.07.2020
LV22.07.2020
MC22.07.2020
PL22.07.2020
RO22.07.2020
RS22.07.2020
SE22.07.2020
SI22.07.2020
SK22.07.2020
SM22.07.2020
BG22.10.2020
NO22.10.2020
GR23.10.2020
IS22.11.2020
PT23.11.2020
GB03.02.2021
IE03.02.2021
LU03.02.2021
BE28.02.2021
CH28.02.2021
FR28.02.2021
LI28.02.2021
Former [2023/27]HU03.02.2014
AL22.07.2020
AT22.07.2020
CZ22.07.2020
DK22.07.2020
EE22.07.2020
ES22.07.2020
HR22.07.2020
IT22.07.2020
LT22.07.2020
LV22.07.2020
MC22.07.2020
PL22.07.2020
RO22.07.2020
RS22.07.2020
SE22.07.2020
SI22.07.2020
SK22.07.2020
SM22.07.2020
BG22.10.2020
NO22.10.2020
GR23.10.2020
IS22.11.2020
PT23.11.2020
GB03.02.2021
IE03.02.2021
LU03.02.2021
BE28.02.2021
CH28.02.2021
FR28.02.2021
LI28.02.2021
Former [2022/33]AL22.07.2020
AT22.07.2020
CZ22.07.2020
DK22.07.2020
EE22.07.2020
ES22.07.2020
HR22.07.2020
IT22.07.2020
LT22.07.2020
LV22.07.2020
MC22.07.2020
PL22.07.2020
RO22.07.2020
RS22.07.2020
SE22.07.2020
SI22.07.2020
SK22.07.2020
SM22.07.2020
BG22.10.2020
NO22.10.2020
GR23.10.2020
IS22.11.2020
PT23.11.2020
GB03.02.2021
IE03.02.2021
LU03.02.2021
BE28.02.2021
CH28.02.2021
FR28.02.2021
LI28.02.2021
Former [2022/08]AL22.07.2020
AT22.07.2020
CZ22.07.2020
DK22.07.2020
EE22.07.2020
ES22.07.2020
HR22.07.2020
IT22.07.2020
LT22.07.2020
LV22.07.2020
MC22.07.2020
PL22.07.2020
RO22.07.2020
RS22.07.2020
SE22.07.2020
SI22.07.2020
SK22.07.2020
SM22.07.2020
BG22.10.2020
NO22.10.2020
GR23.10.2020
IS22.11.2020
PT23.11.2020
GB03.02.2021
IE03.02.2021
LU03.02.2021
CH28.02.2021
FR28.02.2021
LI28.02.2021
Former [2022/07]AL22.07.2020
AT22.07.2020
CZ22.07.2020
DK22.07.2020
EE22.07.2020
ES22.07.2020
HR22.07.2020
IT22.07.2020
LT22.07.2020
LV22.07.2020
MC22.07.2020
PL22.07.2020
RO22.07.2020
RS22.07.2020
SE22.07.2020
SI22.07.2020
SK22.07.2020
SM22.07.2020
BG22.10.2020
NO22.10.2020
GR23.10.2020
IS22.11.2020
PT23.11.2020
IE03.02.2021
LU03.02.2021
CH28.02.2021
FR28.02.2021
LI28.02.2021
Former [2021/47]AL22.07.2020
AT22.07.2020
CZ22.07.2020
DK22.07.2020
EE22.07.2020
ES22.07.2020
HR22.07.2020
IT22.07.2020
LT22.07.2020
LV22.07.2020
MC22.07.2020
PL22.07.2020
RO22.07.2020
RS22.07.2020
SE22.07.2020
SI22.07.2020
SK22.07.2020
SM22.07.2020
BG22.10.2020
NO22.10.2020
GR23.10.2020
IS22.11.2020
PT23.11.2020
LU03.02.2021
CH28.02.2021
LI28.02.2021
Former [2021/41]AL22.07.2020
AT22.07.2020
CZ22.07.2020
DK22.07.2020
EE22.07.2020
ES22.07.2020
HR22.07.2020
IT22.07.2020
LT22.07.2020
LV22.07.2020
MC22.07.2020
PL22.07.2020
RO22.07.2020
RS22.07.2020
SE22.07.2020
SI22.07.2020
SK22.07.2020
SM22.07.2020
BG22.10.2020
NO22.10.2020
GR23.10.2020
IS22.11.2020
PT23.11.2020
Former [2021/36]AL22.07.2020
AT22.07.2020
CZ22.07.2020
DK22.07.2020
EE22.07.2020
ES22.07.2020
HR22.07.2020
IT22.07.2020
LT22.07.2020
LV22.07.2020
PL22.07.2020
RO22.07.2020
RS22.07.2020
SE22.07.2020
SI22.07.2020
SK22.07.2020
SM22.07.2020
BG22.10.2020
NO22.10.2020
GR23.10.2020
IS22.11.2020
PT23.11.2020
Former [2021/28]AL22.07.2020
AT22.07.2020
CZ22.07.2020
DK22.07.2020
EE22.07.2020
ES22.07.2020
HR22.07.2020
IT22.07.2020
LT22.07.2020
LV22.07.2020
PL22.07.2020
RO22.07.2020
RS22.07.2020
SE22.07.2020
SK22.07.2020
SM22.07.2020
BG22.10.2020
NO22.10.2020
GR23.10.2020
IS22.11.2020
PT23.11.2020
Former [2021/25]AL22.07.2020
AT22.07.2020
CZ22.07.2020
DK22.07.2020
EE22.07.2020
ES22.07.2020
HR22.07.2020
IT22.07.2020
LT22.07.2020
LV22.07.2020
PL22.07.2020
RO22.07.2020
RS22.07.2020
SE22.07.2020
SM22.07.2020
BG22.10.2020
NO22.10.2020
GR23.10.2020
IS22.11.2020
PT23.11.2020
Former [2021/23]AT22.07.2020
CZ22.07.2020
DK22.07.2020
EE22.07.2020
ES22.07.2020
HR22.07.2020
IT22.07.2020
LT22.07.2020
LV22.07.2020
PL22.07.2020
RO22.07.2020
RS22.07.2020
SE22.07.2020
SM22.07.2020
BG22.10.2020
NO22.10.2020
GR23.10.2020
IS22.11.2020
PT23.11.2020
Former [2021/22]AT22.07.2020
CZ22.07.2020
DK22.07.2020
EE22.07.2020
ES22.07.2020
HR22.07.2020
IT22.07.2020
LT22.07.2020
LV22.07.2020
PL22.07.2020
RO22.07.2020
RS22.07.2020
SE22.07.2020
BG22.10.2020
NO22.10.2020
GR23.10.2020
IS22.11.2020
PT23.11.2020
Former [2021/20]AT22.07.2020
DK22.07.2020
ES22.07.2020
HR22.07.2020
IT22.07.2020
LT22.07.2020
LV22.07.2020
PL22.07.2020
RS22.07.2020
SE22.07.2020
BG22.10.2020
NO22.10.2020
GR23.10.2020
IS22.11.2020
PT23.11.2020
Former [2021/10]AT22.07.2020
ES22.07.2020
HR22.07.2020
LT22.07.2020
LV22.07.2020
PL22.07.2020
RS22.07.2020
SE22.07.2020
BG22.10.2020
NO22.10.2020
GR23.10.2020
IS22.11.2020
PT23.11.2020
Former [2021/09]AT22.07.2020
ES22.07.2020
LT22.07.2020
SE22.07.2020
BG22.10.2020
NO22.10.2020
GR23.10.2020
PT23.11.2020
Former [2021/07]LT22.07.2020
NO22.10.2020
Documents cited:Search[Y]US2009081366  (KERR ROGER S [US], et al) [Y] 7,8,11 * paragraph [0099] * * paragraph [0049] *;
 [XY]US2009165715  (OH JAE-EUNG [US]) [X] 1-6,9,10,13-15 * paragraphs [0063] , [0037]; figure 16 * * paragraph [0058]; figure 12 * [Y] 7,8,11,12;
 [A]US2010037820  (LEE SANG IN [US]) [A] 1 * paragraph [0071]; figure 8 *;
 [A]EP2159304  (TNO [NL]) [A] 1* paragraphs [0074] , [0075]; figure 7 *;
 [Y]WO2012051485  (CAMBRIDGE NANOTECH INC [US], et al) [Y] 12 * paragraph [0099]; figure 3 *
International search[A]JPH11319546  (CANON KK);
 [Y]KR20060117607  (OH JAE EUNG [KR]);
 [A]KR20110051043  (K C TECH CO LTD [KR]);
 [A]KR20110058527  (TES CO LTD [KR]);
 [Y]JP2012501537  (NEDERLANDSE ORGANISATIE VOOR TOEGEPAST- NATUURWETENSCHAPPELIJK ONDERZO)
The EPO accepts no responsibility for the accuracy of data originating from other authorities; in particular, it does not guarantee that it is complete, up to date or fit for specific purposes.