EP2874180 - THIN-FILM VAPOUR DEPOSITION METHOD [Right-click to bookmark this link] | |||
Former [2015/21] | THIN-FILM VAPOUR DEPOSITION DEVICE | ||
[2020/11] | Status | No opposition filed within time limit Status updated on 28.05.2021 Database last updated on 02.09.2024 | |
Former | The patent has been granted Status updated on 19.06.2020 | ||
Former | Grant of patent is intended Status updated on 12.03.2020 | ||
Former | Examination is in progress Status updated on 29.05.2019 | Most recent event Tooltip | 27.04.2024 | Lapse of the patent in a contracting state New state(s): MK | published on 29.05.2024 [2024/22] | Applicant(s) | For all designated states Tes Co., Ltd. 2374-36 Jungbudae-ro Yangji-myeon Cheoin-gu Yongin-si, Gyeonggi-do 449-825 / KR | For all designated states Hwang, Sang-soo Seongji Apt. Songpa-dong 102-1208 11 Songi-ro 12-gil, Songpa-gu Seoul 138-854 / KR | For all designated states Lee, Woo-Jin Myeongji Queendum Apt. Myeongji-dong 304-802 51 Myeongji Ocean City 11-ro Gangseo-gu Busan 618-710 / KR | For all designated states Shin, Ki-jo Daewoo 3 Cha Apt. Jeungpo-dong 301-102 35 Iseopdaecheon-ro 1407-gil Icheon-si, Gyeonggi-do 467-110 / KR | For all designated states Cha, Dong-il Halla Vivaldi Park Apt. Gwonseon-dong 410 33 Hyowon-ro 256-gil Gwonseon-gu Suwon-si, Gyeonggi-do 441-822 / KR | [2015/21] | Inventor(s) | 01 /
HWANG, Sang-Soo (Seongji Apt. Songpa-dong) 102-1208 11 Songi-ro 12-gil Songpa-gu Seoul 138-854 / KR | 02 /
LEE, Woo-Jin (Myeongji Queendum Apt. Myeongji-dong) 304-802 51 Myeongji ocean city 11-ro Gangseo-gu Busan 618-710 / KR | 03 /
SHIN, Ki-Jo (Daewoo 3 Cha Apt. Jeungpo-dong) 301-102 35 Iseopdaecheon-ro 1407-gil Icheon-si Gyeonggi-do 467-110 / KR | 04 /
CHA, Dong-Il (Halla Vivaldi Park Apt. Gwonseon-dong) 410 33 Hyowon-ro 256-gil Gwonseon-gu Suwon-si Gyeonggi-do 441-822 / KR | [2015/21] | Representative(s) | Louis Pöhlau Lohrentz Patentanwälte Postfach 30 55 90014 Nürnberg / DE | [2015/21] | Application number, filing date | 14746326.9 | 03.02.2014 | [2020/30] | WO2014KR00922 | Priority number, date | KR20130012454 | 04.02.2013 Original published format: KR 20130012454 | [2015/21] | Filing language | KO | Procedural language | EN | Publication | Type: | A1 Application with search report | No.: | WO2014119971 | Date: | 07.08.2014 | Language: | KO | [2014/32] | Type: | A1 Application with search report | No.: | EP2874180 | Date: | 20.05.2015 | Language: | EN | [2015/21] | Type: | B1 Patent specification | No.: | EP2874180 | Date: | 22.07.2020 | Language: | EN | [2020/30] | Search report(s) | International search report - published on: | KR | 07.08.2014 | (Supplementary) European search report - dispatched on: | EP | 18.03.2016 | Classification | IPC: | C23C16/44, C23C16/452, H01L21/205, C23C16/40, C23C16/455 | [2020/11] | CPC: |
C23C16/45544 (EP,CN,US);
H01L21/205 (KR);
C23C16/4412 (EP,CN,US);
C23C16/403 (EP,US);
C23C16/452 (EP,CN,US);
C23C16/45536 (EP,US);
|
Former IPC [2016/16] | H01L21/205, C23C16/40, C23C16/455 | ||
Former IPC [2015/21] | H01L21/205 | Designated contracting states | AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LI, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR [2015/21] | Extension states | BA | Not yet paid | ME | Not yet paid | Title | German: | DÜNNFILMDAMPFABSCHEIDUNGSVERFAHREN | [2020/11] | English: | THIN-FILM VAPOUR DEPOSITION METHOD | [2020/11] | French: | METHODE DE DÉPÔT DE FILM MINCE EN PHASE VAPEUR | [2020/11] |
Former [2015/21] | DÜNNFILMDAMPFABSCHEIDUNGSVORRICHTUNG | ||
Former [2015/21] | THIN-FILM VAPOUR DEPOSITION DEVICE | ||
Former [2015/21] | DISPOSITIF DE DÉPÔT DE FILM MINCE EN PHASE VAPEUR | Entry into regional phase | 10.02.2015 | Translation filed | 10.02.2015 | National basic fee paid | 10.02.2015 | Search fee paid | 10.02.2015 | Designation fee(s) paid | 10.02.2015 | Examination fee paid | Examination procedure | 10.02.2015 | Examination requested [2015/21] | 10.10.2016 | Amendment by applicant (claims and/or description) | 04.06.2019 | Despatch of a communication from the examining division (Time limit: M04) | 08.10.2019 | Reply to a communication from the examining division | 13.03.2020 | Communication of intention to grant the patent | 10.06.2020 | Fee for grant paid | 10.06.2020 | Fee for publishing/printing paid | 10.06.2020 | Receipt of the translation of the claim(s) | Divisional application(s) | The date of the Examining Division's first communication in respect of the earliest application for which a communication has been issued is 04.06.2019 | Opposition(s) | 23.04.2021 | No opposition filed within time limit [2021/26] | Fees paid | Renewal fee | 25.02.2016 | Renewal fee patent year 03 | 12.05.2017 | Renewal fee patent year 04 | 20.02.2018 | Renewal fee patent year 05 | 10.01.2019 | Renewal fee patent year 06 | 26.02.2020 | Renewal fee patent year 07 | Penalty fee | Additional fee for renewal fee | 28.02.2017 | 04   M06   Fee paid on   12.05.2017 |
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Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court. | Lapses during opposition Tooltip | HU | 03.02.2014 | AL | 22.07.2020 | AT | 22.07.2020 | CY | 22.07.2020 | CZ | 22.07.2020 | DK | 22.07.2020 | EE | 22.07.2020 | ES | 22.07.2020 | HR | 22.07.2020 | IT | 22.07.2020 | LT | 22.07.2020 | LV | 22.07.2020 | MC | 22.07.2020 | MK | 22.07.2020 | PL | 22.07.2020 | RO | 22.07.2020 | RS | 22.07.2020 | SE | 22.07.2020 | SI | 22.07.2020 | SK | 22.07.2020 | SM | 22.07.2020 | BG | 22.10.2020 | NO | 22.10.2020 | GR | 23.10.2020 | IS | 22.11.2020 | PT | 23.11.2020 | GB | 03.02.2021 | IE | 03.02.2021 | LU | 03.02.2021 | BE | 28.02.2021 | CH | 28.02.2021 | FR | 28.02.2021 | LI | 28.02.2021 | [2024/22] |
Former [2023/30] | HU | 03.02.2014 | |
AL | 22.07.2020 | ||
AT | 22.07.2020 | ||
CY | 22.07.2020 | ||
CZ | 22.07.2020 | ||
DK | 22.07.2020 | ||
EE | 22.07.2020 | ||
ES | 22.07.2020 | ||
HR | 22.07.2020 | ||
IT | 22.07.2020 | ||
LT | 22.07.2020 | ||
LV | 22.07.2020 | ||
MC | 22.07.2020 | ||
PL | 22.07.2020 | ||
RO | 22.07.2020 | ||
RS | 22.07.2020 | ||
SE | 22.07.2020 | ||
SI | 22.07.2020 | ||
SK | 22.07.2020 | ||
SM | 22.07.2020 | ||
BG | 22.10.2020 | ||
NO | 22.10.2020 | ||
GR | 23.10.2020 | ||
IS | 22.11.2020 | ||
PT | 23.11.2020 | ||
GB | 03.02.2021 | ||
IE | 03.02.2021 | ||
LU | 03.02.2021 | ||
BE | 28.02.2021 | ||
CH | 28.02.2021 | ||
FR | 28.02.2021 | ||
LI | 28.02.2021 | ||
Former [2023/27] | HU | 03.02.2014 | |
AL | 22.07.2020 | ||
AT | 22.07.2020 | ||
CZ | 22.07.2020 | ||
DK | 22.07.2020 | ||
EE | 22.07.2020 | ||
ES | 22.07.2020 | ||
HR | 22.07.2020 | ||
IT | 22.07.2020 | ||
LT | 22.07.2020 | ||
LV | 22.07.2020 | ||
MC | 22.07.2020 | ||
PL | 22.07.2020 | ||
RO | 22.07.2020 | ||
RS | 22.07.2020 | ||
SE | 22.07.2020 | ||
SI | 22.07.2020 | ||
SK | 22.07.2020 | ||
SM | 22.07.2020 | ||
BG | 22.10.2020 | ||
NO | 22.10.2020 | ||
GR | 23.10.2020 | ||
IS | 22.11.2020 | ||
PT | 23.11.2020 | ||
GB | 03.02.2021 | ||
IE | 03.02.2021 | ||
LU | 03.02.2021 | ||
BE | 28.02.2021 | ||
CH | 28.02.2021 | ||
FR | 28.02.2021 | ||
LI | 28.02.2021 | ||
Former [2022/33] | AL | 22.07.2020 | |
AT | 22.07.2020 | ||
CZ | 22.07.2020 | ||
DK | 22.07.2020 | ||
EE | 22.07.2020 | ||
ES | 22.07.2020 | ||
HR | 22.07.2020 | ||
IT | 22.07.2020 | ||
LT | 22.07.2020 | ||
LV | 22.07.2020 | ||
MC | 22.07.2020 | ||
PL | 22.07.2020 | ||
RO | 22.07.2020 | ||
RS | 22.07.2020 | ||
SE | 22.07.2020 | ||
SI | 22.07.2020 | ||
SK | 22.07.2020 | ||
SM | 22.07.2020 | ||
BG | 22.10.2020 | ||
NO | 22.10.2020 | ||
GR | 23.10.2020 | ||
IS | 22.11.2020 | ||
PT | 23.11.2020 | ||
GB | 03.02.2021 | ||
IE | 03.02.2021 | ||
LU | 03.02.2021 | ||
BE | 28.02.2021 | ||
CH | 28.02.2021 | ||
FR | 28.02.2021 | ||
LI | 28.02.2021 | ||
Former [2022/08] | AL | 22.07.2020 | |
AT | 22.07.2020 | ||
CZ | 22.07.2020 | ||
DK | 22.07.2020 | ||
EE | 22.07.2020 | ||
ES | 22.07.2020 | ||
HR | 22.07.2020 | ||
IT | 22.07.2020 | ||
LT | 22.07.2020 | ||
LV | 22.07.2020 | ||
MC | 22.07.2020 | ||
PL | 22.07.2020 | ||
RO | 22.07.2020 | ||
RS | 22.07.2020 | ||
SE | 22.07.2020 | ||
SI | 22.07.2020 | ||
SK | 22.07.2020 | ||
SM | 22.07.2020 | ||
BG | 22.10.2020 | ||
NO | 22.10.2020 | ||
GR | 23.10.2020 | ||
IS | 22.11.2020 | ||
PT | 23.11.2020 | ||
GB | 03.02.2021 | ||
IE | 03.02.2021 | ||
LU | 03.02.2021 | ||
CH | 28.02.2021 | ||
FR | 28.02.2021 | ||
LI | 28.02.2021 | ||
Former [2022/07] | AL | 22.07.2020 | |
AT | 22.07.2020 | ||
CZ | 22.07.2020 | ||
DK | 22.07.2020 | ||
EE | 22.07.2020 | ||
ES | 22.07.2020 | ||
HR | 22.07.2020 | ||
IT | 22.07.2020 | ||
LT | 22.07.2020 | ||
LV | 22.07.2020 | ||
MC | 22.07.2020 | ||
PL | 22.07.2020 | ||
RO | 22.07.2020 | ||
RS | 22.07.2020 | ||
SE | 22.07.2020 | ||
SI | 22.07.2020 | ||
SK | 22.07.2020 | ||
SM | 22.07.2020 | ||
BG | 22.10.2020 | ||
NO | 22.10.2020 | ||
GR | 23.10.2020 | ||
IS | 22.11.2020 | ||
PT | 23.11.2020 | ||
IE | 03.02.2021 | ||
LU | 03.02.2021 | ||
CH | 28.02.2021 | ||
FR | 28.02.2021 | ||
LI | 28.02.2021 | ||
Former [2021/47] | AL | 22.07.2020 | |
AT | 22.07.2020 | ||
CZ | 22.07.2020 | ||
DK | 22.07.2020 | ||
EE | 22.07.2020 | ||
ES | 22.07.2020 | ||
HR | 22.07.2020 | ||
IT | 22.07.2020 | ||
LT | 22.07.2020 | ||
LV | 22.07.2020 | ||
MC | 22.07.2020 | ||
PL | 22.07.2020 | ||
RO | 22.07.2020 | ||
RS | 22.07.2020 | ||
SE | 22.07.2020 | ||
SI | 22.07.2020 | ||
SK | 22.07.2020 | ||
SM | 22.07.2020 | ||
BG | 22.10.2020 | ||
NO | 22.10.2020 | ||
GR | 23.10.2020 | ||
IS | 22.11.2020 | ||
PT | 23.11.2020 | ||
LU | 03.02.2021 | ||
CH | 28.02.2021 | ||
LI | 28.02.2021 | ||
Former [2021/41] | AL | 22.07.2020 | |
AT | 22.07.2020 | ||
CZ | 22.07.2020 | ||
DK | 22.07.2020 | ||
EE | 22.07.2020 | ||
ES | 22.07.2020 | ||
HR | 22.07.2020 | ||
IT | 22.07.2020 | ||
LT | 22.07.2020 | ||
LV | 22.07.2020 | ||
MC | 22.07.2020 | ||
PL | 22.07.2020 | ||
RO | 22.07.2020 | ||
RS | 22.07.2020 | ||
SE | 22.07.2020 | ||
SI | 22.07.2020 | ||
SK | 22.07.2020 | ||
SM | 22.07.2020 | ||
BG | 22.10.2020 | ||
NO | 22.10.2020 | ||
GR | 23.10.2020 | ||
IS | 22.11.2020 | ||
PT | 23.11.2020 | ||
Former [2021/36] | AL | 22.07.2020 | |
AT | 22.07.2020 | ||
CZ | 22.07.2020 | ||
DK | 22.07.2020 | ||
EE | 22.07.2020 | ||
ES | 22.07.2020 | ||
HR | 22.07.2020 | ||
IT | 22.07.2020 | ||
LT | 22.07.2020 | ||
LV | 22.07.2020 | ||
PL | 22.07.2020 | ||
RO | 22.07.2020 | ||
RS | 22.07.2020 | ||
SE | 22.07.2020 | ||
SI | 22.07.2020 | ||
SK | 22.07.2020 | ||
SM | 22.07.2020 | ||
BG | 22.10.2020 | ||
NO | 22.10.2020 | ||
GR | 23.10.2020 | ||
IS | 22.11.2020 | ||
PT | 23.11.2020 | ||
Former [2021/28] | AL | 22.07.2020 | |
AT | 22.07.2020 | ||
CZ | 22.07.2020 | ||
DK | 22.07.2020 | ||
EE | 22.07.2020 | ||
ES | 22.07.2020 | ||
HR | 22.07.2020 | ||
IT | 22.07.2020 | ||
LT | 22.07.2020 | ||
LV | 22.07.2020 | ||
PL | 22.07.2020 | ||
RO | 22.07.2020 | ||
RS | 22.07.2020 | ||
SE | 22.07.2020 | ||
SK | 22.07.2020 | ||
SM | 22.07.2020 | ||
BG | 22.10.2020 | ||
NO | 22.10.2020 | ||
GR | 23.10.2020 | ||
IS | 22.11.2020 | ||
PT | 23.11.2020 | ||
Former [2021/25] | AL | 22.07.2020 | |
AT | 22.07.2020 | ||
CZ | 22.07.2020 | ||
DK | 22.07.2020 | ||
EE | 22.07.2020 | ||
ES | 22.07.2020 | ||
HR | 22.07.2020 | ||
IT | 22.07.2020 | ||
LT | 22.07.2020 | ||
LV | 22.07.2020 | ||
PL | 22.07.2020 | ||
RO | 22.07.2020 | ||
RS | 22.07.2020 | ||
SE | 22.07.2020 | ||
SM | 22.07.2020 | ||
BG | 22.10.2020 | ||
NO | 22.10.2020 | ||
GR | 23.10.2020 | ||
IS | 22.11.2020 | ||
PT | 23.11.2020 | ||
Former [2021/23] | AT | 22.07.2020 | |
CZ | 22.07.2020 | ||
DK | 22.07.2020 | ||
EE | 22.07.2020 | ||
ES | 22.07.2020 | ||
HR | 22.07.2020 | ||
IT | 22.07.2020 | ||
LT | 22.07.2020 | ||
LV | 22.07.2020 | ||
PL | 22.07.2020 | ||
RO | 22.07.2020 | ||
RS | 22.07.2020 | ||
SE | 22.07.2020 | ||
SM | 22.07.2020 | ||
BG | 22.10.2020 | ||
NO | 22.10.2020 | ||
GR | 23.10.2020 | ||
IS | 22.11.2020 | ||
PT | 23.11.2020 | ||
Former [2021/22] | AT | 22.07.2020 | |
CZ | 22.07.2020 | ||
DK | 22.07.2020 | ||
EE | 22.07.2020 | ||
ES | 22.07.2020 | ||
HR | 22.07.2020 | ||
IT | 22.07.2020 | ||
LT | 22.07.2020 | ||
LV | 22.07.2020 | ||
PL | 22.07.2020 | ||
RO | 22.07.2020 | ||
RS | 22.07.2020 | ||
SE | 22.07.2020 | ||
BG | 22.10.2020 | ||
NO | 22.10.2020 | ||
GR | 23.10.2020 | ||
IS | 22.11.2020 | ||
PT | 23.11.2020 | ||
Former [2021/20] | AT | 22.07.2020 | |
DK | 22.07.2020 | ||
ES | 22.07.2020 | ||
HR | 22.07.2020 | ||
IT | 22.07.2020 | ||
LT | 22.07.2020 | ||
LV | 22.07.2020 | ||
PL | 22.07.2020 | ||
RS | 22.07.2020 | ||
SE | 22.07.2020 | ||
BG | 22.10.2020 | ||
NO | 22.10.2020 | ||
GR | 23.10.2020 | ||
IS | 22.11.2020 | ||
PT | 23.11.2020 | ||
Former [2021/10] | AT | 22.07.2020 | |
ES | 22.07.2020 | ||
HR | 22.07.2020 | ||
LT | 22.07.2020 | ||
LV | 22.07.2020 | ||
PL | 22.07.2020 | ||
RS | 22.07.2020 | ||
SE | 22.07.2020 | ||
BG | 22.10.2020 | ||
NO | 22.10.2020 | ||
GR | 23.10.2020 | ||
IS | 22.11.2020 | ||
PT | 23.11.2020 | ||
Former [2021/09] | AT | 22.07.2020 | |
ES | 22.07.2020 | ||
LT | 22.07.2020 | ||
SE | 22.07.2020 | ||
BG | 22.10.2020 | ||
NO | 22.10.2020 | ||
GR | 23.10.2020 | ||
PT | 23.11.2020 | ||
Former [2021/07] | LT | 22.07.2020 | |
NO | 22.10.2020 | Documents cited: | Search | [Y]US2009081366 (KERR ROGER S [US], et al) [Y] 7,8,11 * paragraph [0099] * * paragraph [0049] *; | [XY]US2009165715 (OH JAE-EUNG [US]) [X] 1-6,9,10,13-15 * paragraphs [0063] , [0037]; figure 16 * * paragraph [0058]; figure 12 * [Y] 7,8,11,12; | [A]US2010037820 (LEE SANG IN [US]) [A] 1 * paragraph [0071]; figure 8 *; | [A]EP2159304 (TNO [NL]) [A] 1* paragraphs [0074] , [0075]; figure 7 *; | [Y]WO2012051485 (CAMBRIDGE NANOTECH INC [US], et al) [Y] 12 * paragraph [0099]; figure 3 * | International search | [A]JPH11319546 (CANON KK); | [Y]KR20060117607 (OH JAE EUNG [KR]); | [A]KR20110051043 (K C TECH CO LTD [KR]); | [A]KR20110058527 (TES CO LTD [KR]); | [Y]JP2012501537 (NEDERLANDSE ORGANISATIE VOOR TOEGEPAST- NATUURWETENSCHAPPELIJK ONDERZO) |