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Extract from the Register of European Patents

EP About this file: EP2961857

EP2961857 - SPUTTERING APPARATUS [Right-click to bookmark this link]
StatusNo opposition filed within time limit
Status updated on  19.03.2021
Database last updated on 15.06.2024
FormerThe patent has been granted
Status updated on  10.04.2020
FormerGrant of patent is intended
Status updated on  02.12.2019
FormerExamination is in progress
Status updated on  08.05.2019
Most recent event   Tooltip27.04.2024Lapse of the patent in a contracting state
New state(s): MK		published on 29.05.2024  [2024/22]
Applicant(s)For all designated states
Bühler AG
Gupfenstrasse 5
9240 Uzwil / CH
[N/P]
Former [2020/07]For all designated states
Bühler AG
Gupfenstrasse 5
9240 Uzwil / CH
Former [2016/01]For all designated states
Sputtering Components, Inc.
375 Alexander Drive SW
Owatonna, Minnesota 55021 / US
Inventor(s)01 / CROWLEY, Daniel Theodore
4301 Co. Road 45 N
Owatonna, MN 55060 / US
02 / MORSE, Patrick Lawrence
5181 N. Silverbell Road
Tuscon, AZ 85745 / US
03 / GERMAN, John Robert
1135 Lemond Road
Owatonna, MN 55060 / US
 [2016/01]
Representative(s)Gill Jennings & Every LLP
The Broadgate Tower
20 Primrose Street
London EC2A 2ES / GB
[2020/20]
Former [2016/01]Beresford, Keith Denis Lewis, et al
Beresford Crump LLP
16 High Holborn
London WC1V 6BX / GB
Application number, filing date14757416.425.02.2014
[2016/01]
WO2014US18212
Priority number, dateUS201361771460P01.03.2013         Original published format: US 201361771460 P
US20131401987706.09.2013         Original published format: US201314019877
[2016/01]
Filing languageEN
Procedural languageEN
PublicationType: A1 Application with search report
No.:WO2014134004
Date:04.09.2014
Language:EN
[2014/36]
Type: A1 Application with search report 
No.:EP2961857
Date:06.01.2016
Language:EN
The application published by WIPO in one of the EPO official languages on 04.09.2014 takes the place of the publication of the European patent application.
[2016/01]
Type: B1 Patent specification 
No.:EP2961857
Date:13.05.2020
Language:EN
[2020/20]
Search report(s)International search report - published on:KR04.09.2014
(Supplementary) European search report - dispatched on:EP29.07.2016
ClassificationIPC:C23C14/34, C23C14/35, H01J37/34
[2016/35]
CPC:
H01J37/3455 (EP,US); H01J37/345 (US); H01J37/347 (EP,US);
H01J37/3476 (EP,US); H01J37/3479 (EP,US)
Former IPC [2016/01]C23C14/34, C23C14/35
Designated contracting statesAL,   AT,   BE,   BG,   CH,   CY,   CZ,   DE,   DK,   EE,   ES,   FI,   FR,   GB,   GR,   HR,   HU,   IE,   IS,   IT,   LI,   LT,   LU,   LV,   MC,   MK,   MT,   NL,   NO,   PL,   PT,   RO,   RS,   SE,   SI,   SK,   SM,   TR [2016/01]
Extension statesBANot yet paid
MENot yet paid
TitleGerman:SPUTTERVORRICHTUNG[2016/01]
English:SPUTTERING APPARATUS[2016/01]
French:APPAREIL DE PULVÉRISATION CATHODIQUE[2016/01]
Entry into regional phase30.06.2015National basic fee paid 
30.06.2015Search fee paid 
30.06.2015Designation fee(s) paid 
30.06.2015Examination fee paid 
Examination procedure30.06.2015Examination requested  [2016/01]
08.09.2015Observations by third parties
22.02.2017Amendment by applicant (claims and/or description)
13.05.2019Despatch of a communication from the examining division (Time limit: M04)
13.08.2019Reply to a communication from the examining division
03.12.2019Communication of intention to grant the patent
31.03.2020Fee for grant paid
31.03.2020Fee for publishing/printing paid
31.03.2020Receipt of the translation of the claim(s)
Divisional application(s)EP20162666.0  / EP3686314
The date of the Examining Division's first communication in respect of the earliest application for which a communication has been issued is  13.05.2019
Opposition(s)16.02.2021No opposition filed within time limit [2021/16]
Fees paidRenewal fee
26.02.2016Renewal fee patent year 03
03.03.2017Renewal fee patent year 04
14.02.2018Renewal fee patent year 05
22.02.2019Renewal fee patent year 06
20.02.2020Renewal fee patent year 07
Penalty fee
Additional fee for renewal fee
28.02.201704   M06   Fee paid on   03.03.2017
Opt-out from the exclusive  Tooltip
competence of the Unified
Patent Court		 See the Register of the Unified Patent Court for opt-out data
Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court.
Lapses during opposition  TooltipHU25.02.2014
AL13.05.2020
AT13.05.2020
CY13.05.2020
CZ13.05.2020
DK13.05.2020
EE13.05.2020
ES13.05.2020
FI13.05.2020
HR13.05.2020
LT13.05.2020
LV13.05.2020
MC13.05.2020
MK13.05.2020
NL13.05.2020
RO13.05.2020
RS13.05.2020
SE13.05.2020
SI13.05.2020
SK13.05.2020
SM13.05.2020
BG13.08.2020
NO13.08.2020
GR14.08.2020
IS13.09.2020
PT14.09.2020
[2024/22]
Former [2023/30]HU25.02.2014
AL13.05.2020
AT13.05.2020
CY13.05.2020
CZ13.05.2020
DK13.05.2020
EE13.05.2020
ES13.05.2020
FI13.05.2020
HR13.05.2020
LT13.05.2020
LV13.05.2020
MC13.05.2020
NL13.05.2020
RO13.05.2020
RS13.05.2020
SE13.05.2020
SI13.05.2020
SK13.05.2020
SM13.05.2020
BG13.08.2020
NO13.08.2020
GR14.08.2020
IS13.09.2020
PT14.09.2020
Former [2023/27]HU25.02.2014
AL13.05.2020
AT13.05.2020
CZ13.05.2020
DK13.05.2020
EE13.05.2020
ES13.05.2020
FI13.05.2020
HR13.05.2020
LT13.05.2020
LV13.05.2020
MC13.05.2020
NL13.05.2020
RO13.05.2020
RS13.05.2020
SE13.05.2020
SI13.05.2020
SK13.05.2020
SM13.05.2020
BG13.08.2020
NO13.08.2020
GR14.08.2020
IS13.09.2020
PT14.09.2020
Former [2021/41]AL13.05.2020
AT13.05.2020
CZ13.05.2020
DK13.05.2020
EE13.05.2020
ES13.05.2020
FI13.05.2020
HR13.05.2020
LT13.05.2020
LV13.05.2020
MC13.05.2020
NL13.05.2020
RO13.05.2020
RS13.05.2020
SE13.05.2020
SI13.05.2020
SK13.05.2020
SM13.05.2020
BG13.08.2020
NO13.08.2020
GR14.08.2020
IS13.09.2020
PT14.09.2020
Former [2021/24]AL13.05.2020
AT13.05.2020
CZ13.05.2020
DK13.05.2020
EE13.05.2020
ES13.05.2020
FI13.05.2020
HR13.05.2020
LT13.05.2020
LV13.05.2020
NL13.05.2020
RO13.05.2020
RS13.05.2020
SE13.05.2020
SI13.05.2020
SK13.05.2020
SM13.05.2020
BG13.08.2020
NO13.08.2020
GR14.08.2020
IS13.09.2020
PT14.09.2020
Former [2021/10]AL13.05.2020
AT13.05.2020
CZ13.05.2020
DK13.05.2020
EE13.05.2020
ES13.05.2020
FI13.05.2020
HR13.05.2020
LT13.05.2020
LV13.05.2020
NL13.05.2020
RO13.05.2020
RS13.05.2020
SE13.05.2020
SK13.05.2020
SM13.05.2020
BG13.08.2020
NO13.08.2020
GR14.08.2020
IS13.09.2020
PT14.09.2020
Former [2021/09]AL13.05.2020
AT13.05.2020
CZ13.05.2020
DK13.05.2020
EE13.05.2020
ES13.05.2020
FI13.05.2020
HR13.05.2020
LT13.05.2020
LV13.05.2020
NL13.05.2020
RO13.05.2020
RS13.05.2020
SE13.05.2020
SM13.05.2020
BG13.08.2020
NO13.08.2020
GR14.08.2020
IS13.09.2020
PT14.09.2020
Former [2021/08]AL13.05.2020
DK13.05.2020
ES13.05.2020
FI13.05.2020
HR13.05.2020
LT13.05.2020
LV13.05.2020
NL13.05.2020
RO13.05.2020
RS13.05.2020
SE13.05.2020
SM13.05.2020
BG13.08.2020
NO13.08.2020
GR14.08.2020
IS13.09.2020
PT14.09.2020
Former [2021/04]AL13.05.2020
FI13.05.2020
HR13.05.2020
LT13.05.2020
LV13.05.2020
NL13.05.2020
RS13.05.2020
SE13.05.2020
BG13.08.2020
NO13.08.2020
GR14.08.2020
IS13.09.2020
PT14.09.2020
Former [2021/01]FI13.05.2020
HR13.05.2020
LT13.05.2020
LV13.05.2020
RS13.05.2020
SE13.05.2020
BG13.08.2020
NO13.08.2020
GR14.08.2020
IS13.09.2020
PT14.09.2020
Former [2020/51]FI13.05.2020
HR13.05.2020
LT13.05.2020
LV13.05.2020
RS13.05.2020
SE13.05.2020
NO13.08.2020
GR14.08.2020
IS13.09.2020
PT14.09.2020
Former [2020/50]FI13.05.2020
HR13.05.2020
LT13.05.2020
LV13.05.2020
SE13.05.2020
NO13.08.2020
GR14.08.2020
IS13.09.2020
PT14.09.2020
Former [2020/48]FI13.05.2020
LT13.05.2020
SE13.05.2020
NO13.08.2020
IS13.09.2020
PT14.09.2020
Former [2020/47]LT13.05.2020
NO13.08.2020
IS13.09.2020
Former [2020/46]IS13.09.2020
Documents cited:Search[XY]US2009229970  (ITAGAKI KATSUNORI [JP], et al) [X] 1 * figures 1,2 * * paragraph [0038] - paragraph [0053] * * paragraph [0056] - paragraph [0072] * * paragraph [0098] - paragraph [0099] * [Y] 14;
 [XAI]WO2009138348  (BEKAERT ADVANCED COATINGS [BE], et al) [X] 1-5,8,9,11,15 * figures 2, 3 * * paragraph [0018] * * paragraph [0024] - paragraph [0028] * * paragraph [0054] * [A] 6,13,18 [I] 7,10,12,16,17,19,20;
 [Y]US2011259733  (WATANABE EISAKU [JP], et al) [Y] 14 * figures 1, 4a, 4b ** paragraph [0024] - paragraph [0042] *
International search[Y]JPH1161403  (MITSUBISHI ELECTRIC CORP, et al);
 [A]US2002148725  (SUBRAMANI ANANTHA [US], et al);
 [Y]US2004050690  (GREEN GORDON ROBERT [GB], et al);
 [A]US2009283400  (STOWELL MICHAEL W [US], et al);
 [A]US2010243428  (CROWLEY DANIEL THEODORE [US])
by applicantUS2009229970
 WO2009138348
 US2011259733
otherWO03015124
 US2008173535
 WO2009138348
 WO2011068263
The EPO accepts no responsibility for the accuracy of data originating from other authorities; in particular, it does not guarantee that it is complete, up to date or fit for specific purposes.