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Extract from the Register of European Patents

EP About this file: EP2969272

EP2969272 - APPARATUS FOR PROVIDING A LOCAL CLEAN MICRO-ENVIRONMENT NEAR OPTICAL SURFACES OF AN EXTREME ULTRAVIOLET OPTICAL SYSTEM [Right-click to bookmark this link]
Former [2016/03]SYSTEM AND METHOD FOR CLEANING OPTICAL SURFACES OF AN EXTREME ULTRAVIOLET OPTICAL SYSTEM
[2023/03]
StatusNo opposition filed within time limit
Status updated on  27.04.2024
Database last updated on 03.10.2024
FormerThe patent has been granted
Status updated on  19.05.2023
FormerGrant of patent is intended
Status updated on  04.01.2023
FormerExamination is in progress
Status updated on  21.03.2020
Most recent event   Tooltip24.05.2024Lapse of the patent in a contracting state
New state(s): IT		published on 26.06.2024  [2024/26]
Applicant(s)For all designated states
KLA - Tencor Corporation
One Technology Drive
Milpitas, California 95035 / US
[2016/03]
Inventor(s)01 / DELGADO, Gildardo
5945 Linwood Common
Livermore, California 94550 / US
02 / CHILESE, Francis C.
500 Estancia Court
San Ramon, California 94583 / US
03 / GARCIA, Rudy
407 Appian Way
Union City, California 94587 / US
04 / TAHMASSEBPUR, Mohammed
38 Victory Cpirt
San Ramon, California 94582 / US
05 / HARB, Salam
1381 Elwood Drive
Los Gatos, California 95032 / US
 [2016/03]
Representative(s)FRKelly
Waterways House
Grand Canal Quay
Dublin D02 PD39 / IE
[N/P]
Former [2023/25]FRKelly
27 Clyde Road
Dublin D04 F838 / IE
Former [2016/03]Keane, Paul Fachtna
FRKelly
27 Clyde Road
Dublin 4 / IE
Application number, filing date14769672.814.03.2014
[2016/03]
WO2014US26910
Priority number, dateUS201361792581P15.03.2013         Original published format: US 201361792581 P
US20131385761505.04.2013         Original published format: US201313857615
[2016/03]
Filing languageEN
Procedural languageEN
PublicationType: A1 Application with search report
No.:WO2014152067
Date:25.09.2014
Language:EN
[2014/39]
Type: A1 Application with search report 
No.:EP2969272
Date:20.01.2016
Language:EN
The application published by WIPO in one of the EPO official languages on 25.09.2014 takes the place of the publication of the European patent application.
[2016/03]
Type: B1 Patent specification 
No.:EP2969272
Date:21.06.2023
Language:EN
[2023/25]
Search report(s)International search report - published on:KR25.09.2014
(Supplementary) European search report - dispatched on:EP09.01.2017
ClassificationIPC:G03F7/20, G03F1/84, B08B5/02, G02B3/00
[2017/06]
CPC:
B08B5/02 (EP,US); G02B27/0006 (EP); G03F1/84 (EP,US);
G03F7/70616 (EP,US); G03F7/70925 (EP,US); G03F7/70933 (EP,US);
G02B17/0892 (EP); G02B19/0095 (EP) (-)
Former IPC [2016/03]B08B5/02, G02B3/00
Designated contracting statesAL,   AT,   BE,   BG,   CH,   CY,   CZ,   DE,   DK,   EE,   ES,   FI,   FR,   GB,   GR,   HR,   HU,   IE,   IS,   IT,   LI,   LT,   LU,   LV,   MC,   MK,   MT,   NL,   NO,   PL,   PT,   RO,   RS,   SE,   SI,   SK,   SM,   TR [2016/03]
Extension statesBANot yet paid
MENot yet paid
TitleGerman:VORRICHTUNG ZUR BEREITSTELLUNG EINER LOKALEN SAUBEREN MIKROUMGEBUNG IN DER NÄHE VON OPTISCHEN OBERFLÄCHEN EINES OPTISCHEN EXTREM-UV-SYSTEMS[2023/03]
English:APPARATUS FOR PROVIDING A LOCAL CLEAN MICRO-ENVIRONMENT NEAR OPTICAL SURFACES OF AN EXTREME ULTRAVIOLET OPTICAL SYSTEM[2023/03]
French:APPAREIL POUR FOURNIR UN MICRO-ENVIRONNEMENT PROPRE LOCAL À PROXIMITÉ DE SURFACES OPTIQUES D'UN SYSTÈME OPTIQUE À ULTRAVIOLET EXTRÊME[2023/03]
Former [2016/03]SYSTEM UND VERFAHREN ZUR REINIGUNG DER OPTISCHEN FLÄCHEN EINES OPTISCHEN EXTREM-UV-SYSTEMS
Former [2016/03]SYSTEM AND METHOD FOR CLEANING OPTICAL SURFACES OF AN EXTREME ULTRAVIOLET OPTICAL SYSTEM
Former [2016/03]SYSTÈME ET PROCÉDÉ POUR NETTOYER DES SURFACES OPTIQUES D'UN SYSTÈME OPTIQUE DANS L'ULTRAVIOLET LOINTAIN
Entry into regional phase21.09.2015National basic fee paid 
21.09.2015Search fee paid 
21.09.2015Designation fee(s) paid 
21.09.2015Examination fee paid 
Examination procedure21.09.2015Examination requested  [2016/03]
04.08.2017Amendment by applicant (claims and/or description)
25.03.2020Despatch of a communication from the examining division (Time limit: M04)
30.07.2020Reply to a communication from the examining division
24.11.2020Despatch of a communication from the examining division (Time limit: M04)
01.04.2021Reply to a communication from the examining division
05.01.2023Communication of intention to grant the patent
15.05.2023Fee for grant paid
15.05.2023Fee for publishing/printing paid
15.05.2023Receipt of the translation of the claim(s)
Divisional application(s)The date of the Examining Division's first communication in respect of the earliest application for which a communication has been issued is  25.03.2020
Opposition(s)22.03.2024No opposition filed within time limit [2024/22]
Fees paidRenewal fee
31.03.2016Renewal fee patent year 03
27.03.2017Renewal fee patent year 04
27.03.2018Renewal fee patent year 05
27.03.2019Renewal fee patent year 06
27.03.2020Renewal fee patent year 07
29.03.2021Renewal fee patent year 08
28.03.2022Renewal fee patent year 09
27.03.2023Renewal fee patent year 10
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Patent Court		 See the Register of the Unified Patent Court for opt-out data
Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court.
Lapses during opposition  TooltipAT21.06.2023
CZ21.06.2023
DK21.06.2023
EE21.06.2023
ES21.06.2023
FI21.06.2023
HR21.06.2023
IT21.06.2023
LT21.06.2023
LV21.06.2023
PL21.06.2023
RO21.06.2023
RS21.06.2023
SE21.06.2023
SI21.06.2023
SK21.06.2023
SM21.06.2023
NO21.09.2023
GR22.09.2023
IS21.10.2023
PT23.10.2023
[2024/26]
Former [2024/24]AT21.06.2023
CZ21.06.2023
DK21.06.2023
EE21.06.2023
ES21.06.2023
FI21.06.2023
HR21.06.2023
LT21.06.2023
LV21.06.2023
PL21.06.2023
RO21.06.2023
RS21.06.2023
SE21.06.2023
SI21.06.2023
SK21.06.2023
SM21.06.2023
NO21.09.2023
GR22.09.2023
IS21.10.2023
PT23.10.2023
Former [2024/22]AT21.06.2023
CZ21.06.2023
DK21.06.2023
EE21.06.2023
ES21.06.2023
FI21.06.2023
HR21.06.2023
LT21.06.2023
LV21.06.2023
PL21.06.2023
RO21.06.2023
RS21.06.2023
SE21.06.2023
SK21.06.2023
SM21.06.2023
NO21.09.2023
GR22.09.2023
IS21.10.2023
PT23.10.2023
Former [2024/10]AT21.06.2023
CZ21.06.2023
EE21.06.2023
ES21.06.2023
FI21.06.2023
HR21.06.2023
LT21.06.2023
LV21.06.2023
PL21.06.2023
RO21.06.2023
RS21.06.2023
SE21.06.2023
SK21.06.2023
SM21.06.2023
NO21.09.2023
GR22.09.2023
IS21.10.2023
PT23.10.2023
Former [2024/09]AT21.06.2023
CZ21.06.2023
ES21.06.2023
FI21.06.2023
HR21.06.2023
LT21.06.2023
LV21.06.2023
RS21.06.2023
SE21.06.2023
SK21.06.2023
SM21.06.2023
NO21.09.2023
GR22.09.2023
IS21.10.2023
Former [2024/08]FI21.06.2023
HR21.06.2023
LT21.06.2023
LV21.06.2023
RS21.06.2023
SE21.06.2023
SK21.06.2023
SM21.06.2023
NO21.09.2023
GR22.09.2023
Former [2024/03]FI21.06.2023
HR21.06.2023
LT21.06.2023
LV21.06.2023
RS21.06.2023
SE21.06.2023
NO21.09.2023
GR22.09.2023
Former [2024/01]HR21.06.2023
LT21.06.2023
LV21.06.2023
RS21.06.2023
SE21.06.2023
NO21.09.2023
GR22.09.2023
Former [2023/51]HR21.06.2023
RS21.06.2023
SE21.06.2023
NO21.09.2023
GR22.09.2023
Former [2023/50]SE21.06.2023
NO21.09.2023
GR22.09.2023
Former [2023/48]SE21.06.2023
NO21.09.2023
Documents cited:Search[X]US6192897  (KLEBANOFF LEONARD E [US], et al) [X] 1,3-7,9,10,12 * abstract * * figure 1 * * column 1, lines 14-18 * * column 2, line 51 - column 3, line 64 *;
 [XI]EP1726993  (ZEISS CARL SMT AG [DE]) [X] 1-7,9,10 * abstract * * figures 1,5,6a,6b * * paragraphs [0001] , [0007] , [0046] - [0050] - [0057] - [0061] * [I] 8,13;
 [XI]US2011279799  (SINGER WOLFGANG [DE], et al) [X] 1-8,10-12 * abstract * * figures 3a-3c * * paragraphs [0002] , [0003] , [0013] , [0014] , [0070] - [0077] * [I] 9,13-15;
 [E]WO2014126915  (KLA TENCOR CORP [US], et al) [E] 1-15 * abstract * * figures 1A, 1B * * page 1, lines 14-34 * * page 2, lines 2-22 ** page 6, line 5 - page 9, line 28 *
International search[Y]US2005104015  (WEDOWSKI MARCO [DE], et al);
 [X]US2008001101  (WILHELMUS VAN HERPEN MAARTEN M [NL], et al);
 [A]US2010288302  (EHM DIRK HEINRICH [DE], et al);
 [A]US2011058147  (EHM DIRK HEINRICH [DE], et al);
 [A]US2011188011  (EHM DIRK HEINRICH [DE], et al)
ExaminationUS2004165160
 US2007125964
 US2010288302
The EPO accepts no responsibility for the accuracy of data originating from other authorities; in particular, it does not guarantee that it is complete, up to date or fit for specific purposes.