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Extract from the Register of European Patents

EP About this file: EP2997122

EP2997122 - COMPOSITIONS AND METHODS FOR REMOVING CERIA PARTICLES FROM A SURFACE [Right-click to bookmark this link]
StatusThe application is deemed to be withdrawn
Status updated on  08.12.2017
Database last updated on 03.08.2024
FormerRequest for examination was made
Status updated on  10.08.2017
Most recent event   Tooltip08.12.2017Application deemed to be withdrawnpublished on 10.01.2018  [2018/02]
Applicant(s)For all designated states
Entegris, Inc.
129 Concord Road
Billerica, MA 01821 / US
[N/P]
Former [2017/11]For all designated states
Entegris, Inc.
129 Concord Road
Billerica, MA 01821 / US
Former [2016/12]For all designated states
Advanced Technology Materials, Inc.
7 Commerce Drive
Danbury, CT 06810 / US
Inventor(s)01 / LIU, Jun
13 Locust Lane Unit 48
Brookfield, CT 06804 / US
02 / SUN, Laisheng
15 Scuppop Road, Unit 804
Danbury, CT 06811 / US
 [2016/12]
Representative(s)ABG Intellectual Property Law, S.L.
Avenida de Burgos, 16D
Edificio Euromor
28036 Madrid / ES
[N/P]
Former [2016/12]ABG Patentes, S.L.
Avenida de Burgos, 16D
Edificio Euromor
28036 Madrid / ES
Application number, filing date14797546.015.05.2014
[2016/12]
WO2014US38125
Priority number, dateUS201361824714P17.05.2013         Original published format: US 201361824714 P
[2016/12]
Filing languageEN
Procedural languageEN
PublicationType: A1 Application with search report
No.:WO2014186538
Date:20.11.2014
Language:EN
[2014/47]
Type: A1 Application with search report 
No.:EP2997122
Date:23.03.2016
Language:EN
The application published by WIPO in one of the EPO official languages on 20.11.2014 takes the place of the publication of the European patent application.
[2016/12]
Search report(s)International search report - published on:KR20.11.2014
(Supplementary) European search report - dispatched on:EP29.11.2016
ClassificationIPC:H01L21/3105
[2016/52]
CPC:
C11D3/0042 (EP,US); C11D1/008 (US); C11D3/2072 (US);
C11D3/2086 (US); C11D3/2096 (US); C11D3/30 (EP,US);
C11D3/33 (EP,US); H01L21/02057 (US); H01L21/02065 (EP,US);
C11D2111/22 (EP,US) (-)
Former IPC [2016/12]C11D3/26, C11D3/00, C11D1/00, C09K3/14
Designated contracting statesAL,   AT,   BE,   BG,   CH,   CY,   CZ,   DE,   DK,   EE,   ES,   FI,   FR,   GB,   GR,   HR,   HU,   IE,   IS,   IT,   LI,   LT,   LU,   LV,   MC,   MK,   MT,   NL,   NO,   PL,   PT,   RO,   RS,   SE,   SI,   SK,   SM,   TR [2016/12]
TitleGerman:ZUSAMMENSETZUNGEN UND VERFAHREN ZUR ENTFERNUNG VON CEROXIDTEILCHEN VON EINER OBERFLÄCHE[2016/12]
English:COMPOSITIONS AND METHODS FOR REMOVING CERIA PARTICLES FROM A SURFACE[2016/12]
French:COMPOSITIONS ET PROCÉDÉS POUR ÉLIMINER DES PARTICULES D'OXYDE DE CÉRIUM D'UNE SURFACE[2016/12]
Entry into regional phase24.11.2015National basic fee paid 
24.11.2015Search fee paid 
24.11.2015Designation fee(s) paid 
24.11.2015Examination fee paid 
Examination procedure24.11.2015Amendment by applicant (claims and/or description)
24.11.2015Examination requested  [2016/12]
27.06.2017Application deemed to be withdrawn, date of legal effect  [2018/02]
11.08.2017Despatch of communication that the application is deemed to be withdrawn, reason: reply to the communication from the examining division not received in time  [2018/02]
Fees paidRenewal fee
10.05.2016Renewal fee patent year 03
10.05.2017Renewal fee patent year 04
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Documents cited:Search[XI]EP1381663  (ESC INC [US]) [X] 1,3-10,14 * Formulations A-C, E-J, O, P, T, U, X; paragraphs [0023] - [0034] * [I] 2;
 [XI]US2008076688  (BARNES JEFFREY A [US], et al) [X] 1-10,14,15 * paragraphs [0089] , [0091] , [0092] , [0151] , [0155] - [0162] - [0187] - [0195] - [0197] , [0210] - [0215] - [0222] , [0227]; claims 1,19 * [I] 11-13;
 [XI]US2009239777  (ANGST DAVID [US], et al) [X] 1-10,14 * paragraphs [0011] , [0037] , [0038] , [0058] , [0061] , [0063] - [0070] - [0075] * [I] 11-13,15;
 [I]US7919446  (FRESCO ZACHARY M [US], et al) [I] 1-15 * column 1, line 53 - column 6, line 36 *;
 [XP]EP2687589  (ADVANCED TECH MATERIALS [US]) [XP] 1-10,14,15 * paragraphs [0069] - [0080] - [0 87] *;
 [E]WO2014176193  (ADVANCED TECH MATERIALS [US]) [E] 1-10,14,15* paragraphs [0034] , [0035] , [0038] - [0040] - [0042] , [0046] , [0047] *
International search[A]US2002077259  (SKEE DAVID C [US]);
 [A]US2003171233  (ABE YUMIKO [JP], et al);
 [A]US2006166847  (WALKER ELIZABETH [US], et al);
 [X]US2008076688  (BARNES JEFFREY A [US], et al);
 [X]US2009239777  (ANGST DAVID [US], et al)
The EPO accepts no responsibility for the accuracy of data originating from other authorities; in particular, it does not guarantee that it is complete, up to date or fit for specific purposes.