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Extract from the Register of European Patents

EP About this file: EP3033764

EP3033764 - METHODS AND APPARATUS FOR DETERMINING FOCUS [Right-click to bookmark this link]
StatusNo opposition filed within time limit
Status updated on  12.08.2022
Database last updated on 18.05.2024
FormerThe patent has been granted
Status updated on  03.09.2021
FormerGrant of patent is intended
Status updated on  24.05.2021
Most recent event   Tooltip12.04.2024Lapse of the patent in a contracting state
New state(s): CY		published on 15.05.2024  [2024/20]
Applicant(s)For all designated states
KLA - Tencor Corporation
One Technology Drive
Milpitas, California 95035 / US
[2016/25]
Inventor(s)01 / PANDEV, Stillian Ivanov
2452 Rebecca Lynn Way
Santa Clara, California 95050 / US
 [2016/25]
Representative(s)FRKelly
Waterways House
Grand Canal Quay
Dublin D02 PD39 / IE
[N/P]
Former [2021/40]FRKelly
27 Clyde Road
Dublin D04 F838 / IE
Former [2016/25]Keane, Paul Fachtna
FRKelly
27 Clyde Road
Dublin 4 / IE
Application number, filing date14836059.708.08.2014
[2016/25]
WO2014US50390
Priority number, dateUS201361864527P10.08.2013         Original published format: US 201361864527 P
US20141445132004.08.2014         Original published format: US201414451320
[2016/25]
Filing languageEN
Procedural languageEN
PublicationType: A1 Application with search report
No.:WO2015023542
Date:19.02.2015
Language:EN
[2015/07]
Type: A1 Application with search report 
No.:EP3033764
Date:22.06.2016
Language:EN
The application published by WIPO in one of the EPO official languages on 19.02.2015 takes the place of the publication of the European patent application.
[2016/25]
Type: B1 Patent specification 
No.:EP3033764
Date:06.10.2021
Language:EN
[2021/40]
Search report(s)International search report - published on:KR19.02.2015
(Supplementary) European search report - dispatched on:EP22.02.2017
ClassificationIPC:H01L21/027, G03F7/20
[2017/12]
CPC:
G03F7/70641 (EP,US); G03F9/7026 (US)
Former IPC [2016/25]H01L21/027
Designated contracting statesAL,   AT,   BE,   BG,   CH,   CY,   CZ,   DE,   DK,   EE,   ES,   FI,   FR,   GB,   GR,   HR,   HU,   IE,   IS,   IT,   LI,   LT,   LU,   LV,   MC,   MK,   MT,   NL,   NO,   PL,   PT,   RO,   RS,   SE,   SI,   SK,   SM,   TR [2016/25]
Extension statesBANot yet paid
MENot yet paid
TitleGerman:VERFAHREN UND VORRICHTUNG ZUR FOKUSBESTIMMUNG[2016/25]
English:METHODS AND APPARATUS FOR DETERMINING FOCUS[2016/25]
French:PROCÉDÉS ET APPAREIL PERMETTANT DE DÉTERMINER LA MISE AU POINT[2016/25]
Entry into regional phase15.02.2016National basic fee paid 
15.02.2016Search fee paid 
15.02.2016Designation fee(s) paid 
15.02.2016Examination fee paid 
Examination procedure15.02.2016Examination requested  [2016/25]
19.09.2017Amendment by applicant (claims and/or description)
25.05.2021Communication of intention to grant the patent
25.08.2021Fee for grant paid
25.08.2021Fee for publishing/printing paid
25.08.2021Receipt of the translation of the claim(s)
Opposition(s)07.07.2022No opposition filed within time limit [2022/37]
Fees paidRenewal fee
29.08.2016Renewal fee patent year 03
28.08.2017Renewal fee patent year 04
27.08.2018Renewal fee patent year 05
27.08.2019Renewal fee patent year 06
27.08.2020Renewal fee patent year 07
27.08.2021Renewal fee patent year 08
Opt-out from the exclusive  Tooltip
competence of the Unified
Patent Court		 See the Register of the Unified Patent Court for opt-out data
Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court.
Lapses during opposition  TooltipHU08.08.2014
AL06.10.2021
AT06.10.2021
CY06.10.2021
CZ06.10.2021
DK06.10.2021
EE06.10.2021
ES06.10.2021
FI06.10.2021
HR06.10.2021
IT06.10.2021
LT06.10.2021
LV06.10.2021
MC06.10.2021
PL06.10.2021
RO06.10.2021
RS06.10.2021
SE06.10.2021
SI06.10.2021
SK06.10.2021
SM06.10.2021
BG06.01.2022
NO06.01.2022
GR07.01.2022
IS06.02.2022
PT07.02.2022
[2024/20]
Former [2024/18]HU08.08.2014
AL06.10.2021
AT06.10.2021
CZ06.10.2021
DK06.10.2021
EE06.10.2021
ES06.10.2021
FI06.10.2021
HR06.10.2021
IT06.10.2021
LT06.10.2021
LV06.10.2021
MC06.10.2021
PL06.10.2021
RO06.10.2021
RS06.10.2021
SE06.10.2021
SI06.10.2021
SK06.10.2021
SM06.10.2021
BG06.01.2022
NO06.01.2022
GR07.01.2022
IS06.02.2022
PT07.02.2022
Former [2023/27]AL06.10.2021
AT06.10.2021
CZ06.10.2021
DK06.10.2021
EE06.10.2021
ES06.10.2021
FI06.10.2021
HR06.10.2021
IT06.10.2021
LT06.10.2021
LV06.10.2021
MC06.10.2021
PL06.10.2021
RO06.10.2021
RS06.10.2021
SE06.10.2021
SI06.10.2021
SK06.10.2021
SM06.10.2021
BG06.01.2022
NO06.01.2022
GR07.01.2022
IS06.02.2022
PT07.02.2022
Former [2023/16]AL06.10.2021
AT06.10.2021
CZ06.10.2021
DK06.10.2021
EE06.10.2021
ES06.10.2021
FI06.10.2021
HR06.10.2021
LT06.10.2021
LV06.10.2021
MC06.10.2021
PL06.10.2021
RO06.10.2021
RS06.10.2021
SE06.10.2021
SI06.10.2021
SK06.10.2021
SM06.10.2021
BG06.01.2022
NO06.01.2022
GR07.01.2022
IS06.02.2022
PT07.02.2022
Former [2023/01]AL06.10.2021
AT06.10.2021
CZ06.10.2021
DK06.10.2021
EE06.10.2021
ES06.10.2021
FI06.10.2021
HR06.10.2021
LT06.10.2021
LV06.10.2021
PL06.10.2021
RO06.10.2021
RS06.10.2021
SE06.10.2021
SI06.10.2021
SK06.10.2021
SM06.10.2021
BG06.01.2022
NO06.01.2022
GR07.01.2022
IS06.02.2022
PT07.02.2022
Former [2022/49]AL06.10.2021
AT06.10.2021
CZ06.10.2021
DK06.10.2021
EE06.10.2021
ES06.10.2021
FI06.10.2021
HR06.10.2021
LT06.10.2021
LV06.10.2021
PL06.10.2021
RO06.10.2021
RS06.10.2021
SE06.10.2021
SK06.10.2021
SM06.10.2021
BG06.01.2022
NO06.01.2022
GR07.01.2022
IS06.02.2022
PT07.02.2022
Former [2022/35]AT06.10.2021
CZ06.10.2021
DK06.10.2021
EE06.10.2021
ES06.10.2021
FI06.10.2021
HR06.10.2021
LT06.10.2021
LV06.10.2021
PL06.10.2021
RO06.10.2021
RS06.10.2021
SE06.10.2021
SK06.10.2021
SM06.10.2021
BG06.01.2022
NO06.01.2022
GR07.01.2022
IS06.02.2022
PT07.02.2022
Former [2022/34]AT06.10.2021
EE06.10.2021
ES06.10.2021
FI06.10.2021
HR06.10.2021
LT06.10.2021
LV06.10.2021
PL06.10.2021
RO06.10.2021
RS06.10.2021
SE06.10.2021
SM06.10.2021
BG06.01.2022
NO06.01.2022
GR07.01.2022
IS06.02.2022
PT07.02.2022
Former [2022/33]AT06.10.2021
ES06.10.2021
FI06.10.2021
HR06.10.2021
LT06.10.2021
LV06.10.2021
PL06.10.2021
RS06.10.2021
SE06.10.2021
SM06.10.2021
BG06.01.2022
NO06.01.2022
GR07.01.2022
IS06.02.2022
PT07.02.2022
Former [2022/25]AT06.10.2021
ES06.10.2021
FI06.10.2021
HR06.10.2021
LT06.10.2021
LV06.10.2021
PL06.10.2021
RS06.10.2021
SE06.10.2021
BG06.01.2022
NO06.01.2022
GR07.01.2022
IS06.02.2022
PT07.02.2022
Former [2022/24]AT06.10.2021
ES06.10.2021
FI06.10.2021
HR06.10.2021
LT06.10.2021
LV06.10.2021
PL06.10.2021
RS06.10.2021
SE06.10.2021
BG06.01.2022
GR07.01.2022
IS06.02.2022
PT07.02.2022
Former [2022/23]AT06.10.2021
ES06.10.2021
FI06.10.2021
HR06.10.2021
LT06.10.2021
LV06.10.2021
PL06.10.2021
RS06.10.2021
BG06.01.2022
PT07.02.2022
Former [2022/22]AT06.10.2021
FI06.10.2021
LT06.10.2021
RS06.10.2021
BG06.01.2022
Former [2022/21]AT06.10.2021
RS06.10.2021
BG06.01.2022
Former [2022/19]BG06.01.2022
Documents cited:Search[Y]US2004190008  (MIEHER WALTER D [US], et al) [Y] 1-15 * paragraphs [0015] , [0043] , [0057] , [0069] , [0117] - [0122]; figures 2,10; claim 15 *;
 [A]US2007146668  (GEH BERND [US], et al) [A] 1-15* paragraph [0058] - paragraph [0063]; figure 3 *;
 [Y]US2007185684  (VUONG VI [US], et al) [Y] 1-15 * paragraphs [0039] , [0049] - [0060] - [0069] - [0070]; figures 4-10 *;
 [A]US2008192221  (MIEHER WALTER [US], et al) [A] 1-15 * paragraphs [0044] , [0050] - [0052] - [0061] , [0084] - [0087]; figures 1-4,11,12 *
International search[A]US6673638  (BENDIK JOSEPH J [US], et al);
 [A]KR20060071610  (DONGBU ELECTRONICS CO LTD [KR]);
 [A]US2007146668  (GEH BERND [US], et al);
 [A]US2008192221  (MIEHER WALTER [US], et al);
 [A]US2009323037  (AARTS IGOR MATHEUS PETRONELLA [NL], et al)
by applicantUS2004190008
 US2007146668
 US2007185684
 US2008192221
The EPO accepts no responsibility for the accuracy of data originating from other authorities; in particular, it does not guarantee that it is complete, up to date or fit for specific purposes.