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Extract from the Register of European Patents

EP About this file: EP3084818

EP3084818 - SUBSTRATE SUPPORT APPARATUS HAVING REDUCED SUBSTRATE PARTICLE GENERATION [Right-click to bookmark this link]
StatusNo opposition filed within time limit
Status updated on  01.10.2021
Database last updated on 30.10.2024
FormerThe patent has been granted
Status updated on  23.10.2020
FormerGrant of patent is intended
Status updated on  09.06.2020
Most recent event   Tooltip22.07.2022Lapse of the patent in a contracting state
New state(s): BE		published on 24.08.2022  [2022/34]
Applicant(s)For all designated states
Applied Materials, Inc.
3050 Bowers Avenue
Santa Clara, California 95054 / US
[2016/43]
Inventor(s)01 / AGARWAL, Pulkit
2865 Homestead Road Apt. 32
Santa Clara, California 95051 / US
02 / SUH, Song-Moon
1780 Albert Avenue
San Jose, California 95124 / US
03 / MORI, Glen
1900 Portmarnock Way
Gilroy, California 95020 / US
04 / SANSONI, Steven V.
189 Ponte Court
Livermore, CA 94550 / US
 [2016/43]
Representative(s)Zimmermann & Partner Patentanwälte mbB
Josephspitalstr. 15
80331 München / DE
[2016/43]
Application number, filing date14871014.808.12.2014
[2016/43]
WO2014US69031
Priority number, dateUS201361917324P17.12.2013         Original published format: US 201361917324 P
US20141455494526.11.2014         Original published format: US201414554945
[2016/43]
Filing languageEN
Procedural languageEN
PublicationType: A1 Application with search report
No.:WO2015094743
Date:25.06.2015
Language:EN
[2015/25]
Type: A1 Application with search report 
No.:EP3084818
Date:26.10.2016
Language:EN
The application published by WIPO in one of the EPO official languages on 25.06.2015 takes the place of the publication of the European patent application.
[2016/43]
Type: B1 Patent specification 
No.:EP3084818
Date:25.11.2020
Language:EN
[2020/48]
Search report(s)International search report - published on:KR25.06.2015
(Supplementary) European search report - dispatched on:EP03.02.2017
ClassificationIPC:B25J11/00, B25J15/00, H01L21/687
[2020/23]
CPC:
H01L21/68757 (EP,KR,US); B25J11/0095 (EP,KR,US); B25J15/0014 (EP,KR,US);
H01L21/68707 (EP,KR,US); H01L21/6875 (EP,KR,US)
Former IPC [2016/43]H01L21/683
Designated contracting statesAL,   AT,   BE,   BG,   CH,   CY,   CZ,   DE,   DK,   EE,   ES,   FI,   FR,   GB,   GR,   HR,   HU,   IE,   IS,   IT,   LI,   LT,   LU,   LV,   MC,   MK,   MT,   NL,   NO,   PL,   PT,   RO,   RS,   SE,   SI,   SK,   SM,   TR [2016/43]
Extension statesBANot yet paid
MENot yet paid
TitleGerman:SUBSTRATTRÄGERVORRICHTUNG MIT REDUZIERTER SUBSTRATPARTIKELERZEUGUNG[2016/43]
English:SUBSTRATE SUPPORT APPARATUS HAVING REDUCED SUBSTRATE PARTICLE GENERATION[2016/43]
French:APPAREIL DE SUPPORT DE SUBSTRAT PRÉSENTANT UNE PRODUCTION DE PARTICULES DE SUBSTRAT RÉDUITE[2016/43]
Entry into regional phase08.06.2016National basic fee paid 
08.06.2016Search fee paid 
08.06.2016Designation fee(s) paid 
08.06.2016Examination fee paid 
Examination procedure08.06.2016Examination requested  [2016/43]
08.06.2017Amendment by applicant (claims and/or description)
10.06.2020Communication of intention to grant the patent
14.10.2020Fee for grant paid
14.10.2020Fee for publishing/printing paid
14.10.2020Receipt of the translation of the claim(s)
Opposition(s)26.08.2021No opposition filed within time limit [2021/44]
Fees paidRenewal fee
08.12.2016Renewal fee patent year 03
08.12.2017Renewal fee patent year 04
20.12.2018Renewal fee patent year 05
19.12.2019Renewal fee patent year 06
Opt-out from the exclusive  Tooltip
competence of the Unified
Patent Court		 See the Register of the Unified Patent Court for opt-out data
Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court.
Lapses during opposition  TooltipHU08.12.2014
AL25.11.2020
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Documents cited:Search[YA]EP1063683  (APPLIED MATERIALS INC [US]) [Y] 9-15 * abstract * * figures 1-15 *[A] 1-8;
 [IY]US2005252454  (PARKHE VIJAY D [US], et al) [I] 1-8 * abstract * * claims 1-36 * * page 3, paragraphs 30-33 * * pages 7,8, paragraphs 55-57 * * page 10, paragraph 73 * * page 11, paragraph 77 * * page 13, paragraphs 87,88 * * figures 1,3,6,7B,11 * [Y] 9-15;
 [YA]US2008105201  (RONAN TIMOTHY [US], et al) [Y] 9-15 * abstract * * page 2, paragraphs 22,23 * * page 3, paragraphs 28,29 * * page 4, paragraph 37 * * figures 1-6B * [A] 1-8;
 [YA]US2010178137  (CHINTALAPATI PRUDHVI R [US], et al) [Y] 9-15 * abstract * * claims 1-24 * * pages 3,4, paragraphs 39-48 * * figures 1-7 * [A] 1-8
International search[A]JPH0529431  (MATSUSHITA ELECTRIC IND CO LTD);
 [A]US2004241992  (KONO RYUJI [JP], et al);
 [X]US2005252454  (PARKHE VIJAY D [US], et al);
 [A]KR20060023735  (SAMSUNG ELECTRONICS CO LTD [KR]);
 [Y]US2010178137  (CHINTALAPATI PRUDHVI R [US], et al)
by applicantUS2005252454
 US2010178137
The EPO accepts no responsibility for the accuracy of data originating from other authorities; in particular, it does not guarantee that it is complete, up to date or fit for specific purposes.