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Extract from the Register of European Patents

EP About this file: EP2927748

EP2927748 - COMPENSATION OF IMAGING DEVIATIONS IN A PARTICLE-BEAM WRITER USING A CONVOLUTION KERNEL [Right-click to bookmark this link]
StatusNo opposition filed within time limit
Status updated on  05.01.2024
Database last updated on 19.10.2024
FormerThe patent has been granted
Status updated on  27.01.2023
FormerGrant of patent is intended
Status updated on  28.09.2022
FormerExamination is in progress
Status updated on  14.07.2017
Most recent event   Tooltip12.07.2024Lapse of the patent in a contracting state
New state(s): IE		published on 14.08.2024  [2024/33]
Applicant(s)For all designated states
IMS Nanofabrication GmbH
Schreygasse 3
1020 Wien / AT
[2018/06]
Former [2015/41]For all designated states
IMS Nanofabrication AG
Schreygasse 3
1020 Wien / AT
Inventor(s)01 / Platzgummer, Elmar
Strudlhofgasse 17
1090 Wien / AT
 [2015/41]
Representative(s)Patentanwaltskanzlei Matschnig & Forsthuber OG
Biberstraße 22
Postfach 36
1010 Wien / AT
[2015/41]
Application number, filing date15175372.006.07.2015
[2015/41]
Priority number, dateEP2014017656310.07.2014         Original published format: EP 14176563
EP2014019918319.12.2014         Original published format: EP 14199183
[2015/41]
Filing languageEN
Procedural languageEN
PublicationType: A2 Application without search report 
No.:EP2927748
Date:07.10.2015
Language:EN
[2015/41]
Type: A3 Search report 
No.:EP2927748
Date:30.12.2015
Language:EN
[2015/53]
Type: B1 Patent specification 
No.:EP2927748
Date:01.03.2023
Language:EN
[2023/09]
Search report(s)(Supplementary) European search report - dispatched on:EP26.11.2015
ClassificationIPC:G03F7/20, H01J37/317, H01J37/302
[2015/41]
CPC:
H01J37/3177 (EP,US); G06F30/392 (US); G06F30/398 (US);
H01J37/045 (US); H01J37/09 (US); H01J37/3026 (EP,US);
H01J37/3175 (US); H01J2237/043 (US); H01J2237/3175 (EP,US);
H01J2237/31764 (EP,US) (-)
Designated contracting statesAL,   AT,   BE,   BG,   CH,   CY,   CZ,   DE,   DK,   EE,   ES,   FI,   FR,   GB,   GR,   HR,   HU,   IE,   IS,   IT,   LI,   LT,   LU,   LV,   MC,   MK,   MT,   NL,   NO,   PL,   PT,   RO,   RS,   SE,   SI,   SK,   SM,   TR [2016/33]
Former [2015/41]AL,  AT,  BE,  BG,  CH,  CY,  CZ,  DE,  DK,  EE,  ES,  FI,  FR,  GB,  GR,  HR,  HU,  IE,  IS,  IT,  LI,  LT,  LU,  LV,  MC,  MK,  MT,  NL,  NO,  PL,  PT,  RO,  RS,  SE,  SI,  SK,  SM,  TR 
TitleGerman:KOMPENSATION VON BILDABWEICHUNGEN IN EINEM PARTIKELSTRAHLSCHREIBER UNTER VERWENDUNG EINES FALTUNGSKERNS[2015/41]
English:COMPENSATION OF IMAGING DEVIATIONS IN A PARTICLE-BEAM WRITER USING A CONVOLUTION KERNEL[2015/41]
French:COMPENSATION DE DÉVIATIONS D'IMAGERIE DANS UN GRAVEUR À FAISCEAU DE PARTICULES À L'AIDE D'UN NOYAU DE CONVOLUTION[2015/41]
Examination procedure24.06.2016Amendment by applicant (claims and/or description)
27.06.2016Examination requested  [2016/33]
17.07.2017Despatch of a communication from the examining division (Time limit: M06)
16.01.2018Reply to a communication from the examining division
01.07.2019Despatch of a communication from the examining division (Time limit: M06)
07.01.2020Reply to a communication from the examining division
09.09.2022Date of oral proceedings
27.09.2022Minutes of oral proceedings despatched
29.09.2022Communication of intention to grant the patent
17.01.2023Fee for grant paid
17.01.2023Fee for publishing/printing paid
17.01.2023Receipt of the translation of the claim(s)
Opposition(s)04.12.2023No opposition filed within time limit [2024/06]
Fees paidRenewal fee
21.07.2017Renewal fee patent year 03
11.07.2018Renewal fee patent year 04
17.07.2019Renewal fee patent year 05
16.07.2020Renewal fee patent year 06
14.07.2021Renewal fee patent year 07
08.07.2022Renewal fee patent year 08
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Patent Court		 See the Register of the Unified Patent Court for opt-out data
Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court.
Lapses during opposition  TooltipAT01.03.2023
CZ01.03.2023
DK01.03.2023
EE01.03.2023
ES01.03.2023
FI01.03.2023
HR01.03.2023
IT01.03.2023
LT01.03.2023
LV01.03.2023
MC01.03.2023
PL01.03.2023
RO01.03.2023
RS01.03.2023
SE01.03.2023
SI01.03.2023
SK01.03.2023
SM01.03.2023
NO01.06.2023
GR02.06.2023
IS01.07.2023
PT03.07.2023
GB06.07.2023
IE06.07.2023
LU06.07.2023
BE31.07.2023
CH31.07.2023
FR31.07.2023
[2024/33]
Former [2024/26]AT01.03.2023
CZ01.03.2023
DK01.03.2023
EE01.03.2023
ES01.03.2023
FI01.03.2023
HR01.03.2023
IT01.03.2023
LT01.03.2023
LV01.03.2023
MC01.03.2023
PL01.03.2023
RO01.03.2023
RS01.03.2023
SE01.03.2023
SI01.03.2023
SK01.03.2023
SM01.03.2023
NO01.06.2023
GR02.06.2023
IS01.07.2023
PT03.07.2023
GB06.07.2023
LU06.07.2023
BE31.07.2023
CH31.07.2023
FR31.07.2023
Former [2024/24]AT01.03.2023
CZ01.03.2023
DK01.03.2023
EE01.03.2023
ES01.03.2023
FI01.03.2023
HR01.03.2023
LT01.03.2023
LV01.03.2023
MC01.03.2023
PL01.03.2023
RO01.03.2023
RS01.03.2023
SE01.03.2023
SI01.03.2023
SK01.03.2023
SM01.03.2023
NO01.06.2023
GR02.06.2023
IS01.07.2023
PT03.07.2023
GB06.07.2023
LU06.07.2023
BE31.07.2023
CH31.07.2023
FR31.07.2023
Former [2024/18]AT01.03.2023
CZ01.03.2023
DK01.03.2023
EE01.03.2023
ES01.03.2023
FI01.03.2023
HR01.03.2023
LT01.03.2023
LV01.03.2023
MC01.03.2023
PL01.03.2023
RO01.03.2023
RS01.03.2023
SE01.03.2023
SI01.03.2023
SK01.03.2023
SM01.03.2023
NO01.06.2023
GR02.06.2023
IS01.07.2023
PT03.07.2023
LU06.07.2023
Former [2024/14]AT01.03.2023
CZ01.03.2023
DK01.03.2023
EE01.03.2023
ES01.03.2023
FI01.03.2023
HR01.03.2023
LT01.03.2023
LV01.03.2023
MC01.03.2023
PL01.03.2023
RO01.03.2023
RS01.03.2023
SE01.03.2023
SI01.03.2023
SK01.03.2023
SM01.03.2023
NO01.06.2023
GR02.06.2023
IS01.07.2023
PT03.07.2023
Former [2024/10]AT01.03.2023
CZ01.03.2023
DK01.03.2023
EE01.03.2023
ES01.03.2023
FI01.03.2023
HR01.03.2023
LT01.03.2023
LV01.03.2023
PL01.03.2023
RO01.03.2023
RS01.03.2023
SE01.03.2023
SI01.03.2023
SK01.03.2023
SM01.03.2023
NO01.06.2023
GR02.06.2023
IS01.07.2023
PT03.07.2023
Former [2023/50]AT01.03.2023
CZ01.03.2023
EE01.03.2023
ES01.03.2023
FI01.03.2023
HR01.03.2023
LT01.03.2023
LV01.03.2023
PL01.03.2023
RO01.03.2023
RS01.03.2023
SE01.03.2023
SK01.03.2023
SM01.03.2023
NO01.06.2023
GR02.06.2023
IS01.07.2023
PT03.07.2023
Former [2023/49]AT01.03.2023
CZ01.03.2023
EE01.03.2023
ES01.03.2023
FI01.03.2023
HR01.03.2023
LT01.03.2023
LV01.03.2023
PL01.03.2023
RO01.03.2023
RS01.03.2023
SE01.03.2023
SM01.03.2023
NO01.06.2023
GR02.06.2023
PT03.07.2023
Former [2023/48]AT01.03.2023
EE01.03.2023
ES01.03.2023
FI01.03.2023
HR01.03.2023
LT01.03.2023
LV01.03.2023
PL01.03.2023
RS01.03.2023
SE01.03.2023
SM01.03.2023
NO01.06.2023
GR02.06.2023
PT03.07.2023
Former [2023/46]ES01.03.2023
FI01.03.2023
HR01.03.2023
LT01.03.2023
LV01.03.2023
PL01.03.2023
RS01.03.2023
SE01.03.2023
SM01.03.2023
NO01.06.2023
GR02.06.2023
PT03.07.2023
Former [2023/38]ES01.03.2023
FI01.03.2023
HR01.03.2023
LT01.03.2023
LV01.03.2023
PL01.03.2023
RS01.03.2023
SE01.03.2023
NO01.06.2023
GR02.06.2023
Former [2023/37]ES01.03.2023
FI01.03.2023
HR01.03.2023
LT01.03.2023
LV01.03.2023
RS01.03.2023
SE01.03.2023
NO01.06.2023
GR02.06.2023
Former [2023/36]ES01.03.2023
FI01.03.2023
HR01.03.2023
LT01.03.2023
LV01.03.2023
RS01.03.2023
SE01.03.2023
NO01.06.2023
Former [2023/35]ES01.03.2023
HR01.03.2023
LT01.03.2023
RS01.03.2023
NO01.06.2023
Former [2023/34]ES01.03.2023
LT01.03.2023
RS01.03.2023
Former [2023/33]ES01.03.2023
LT01.03.2023
Documents cited:Search[A]US2008024745  (BASELMANS JOHANNES MATHEUS [NL], et al) [A] 6,8* paragraphs [0003] - [0007] *;
 [IA]US2008080782  (OLSSON MARTIN [SE], et al) [I] 1-5,7,9-15 * paragraphs [0002] , [0006] - [0009] - [0013] - [0014] - [0059] - [0061] - [0064] - [0068] - [0073] - [0104] - [0166] - [0171] - [0230] - [0234] * * paragraphs [0259] - [0665] - [0296] - [0030] * * figures 1,4-6,21-26 * [A] 6,8;
 [A]US2010187434  (PLATZGUMMER ELMAR [AT], et al) [A] 1-15 * paragraphs [0044] - [0049]; figure 1 *
ExaminationUS2003160980
by applicantUS6858118
 US7276714
 US8198601
 US8222621
 US8546767
The EPO accepts no responsibility for the accuracy of data originating from other authorities; in particular, it does not guarantee that it is complete, up to date or fit for specific purposes.