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Extract from the Register of European Patents

EP About this file: EP2991101

EP2991101 - EXPOSURE METHOD AND APPARATUS, AND DEVICE MANUFACTURING METHOD [Right-click to bookmark this link]
Former [2016/09]MOVABLE BODY DRIVE METHOD AND MOVABLE BODY DRIVE SYSTEM, PATTERN FORMATION METHOD AND APPARATUS, EXPOSURE METHOD AND APPARATUS, AND DEVICE MANUFACTURING METHOD
[2016/47]
StatusNo opposition filed within time limit
Status updated on  16.02.2018
Database last updated on 17.05.2024
FormerThe patent has been granted
Status updated on  10.03.2017
FormerGrant of patent is intended
Status updated on  29.11.2016
Most recent event   Tooltip05.06.2020Lapse of the patent in a contracting state
New state(s): PT		published on 08.07.2020  [2020/28]
Applicant(s)For all designated states
Nikon Corporation
15-3, Konan 2-chome
Minato-ku
Tokyo 108-6290 / JP
[2016/32]
Former [2016/09]For all designated states
Nikon Corporation
12-1 Yurakucho 1-chome
Chiyoda-ku
Tokyo 100-8331 / JP
Inventor(s)01 / Shibazaki, Yuichi
c/o NIKON CORPORATION
Intellectual Property Division
15-3, Konan 2-chome
Minato-ku
Tokyo, 108-6290 / JP
 [2017/15]
Former [2016/09]01 / Shibazaki, Yuichi
NIKON CORPORATION
2-3, Marunouchi 3-chome
Chiyoda-ku
Tokyo, 100-8331 / JP
Representative(s)Hoffmann Eitle
Patent- und Rechtsanwälte PartmbB
Arabellastraße 30
81925 München / DE
[2016/09]
Application number, filing date15182527.031.08.2007
[2016/09]
Priority number, dateJP2006023704531.08.2006         Original published format: JP 2006237045
JP2006023749101.09.2006         Original published format: JP 2006237491
JP2006023760601.09.2006         Original published format: JP 2006237606
[2016/09]
Filing languageEN
Procedural languageEN
PublicationType: A2 Application without search report 
No.:EP2991101
Date:02.03.2016
Language:EN
[2016/09]
Type: A3 Search report 
No.:EP2991101
Date:20.04.2016
Language:EN
[2016/16]
Type: B1 Patent specification 
No.:EP2991101
Date:12.04.2017
Language:EN
[2017/15]
Search report(s)(Supplementary) European search report - dispatched on:EP23.03.2016
ClassificationIPC:G03F7/20, G03F9/00, G01B11/00, G01B11/26, H01L21/027
[2016/47]
CPC:
G03F7/70725 (EP,KR,US); G03F7/20 (KR); G03F7/70141 (KR);
G03F7/70341 (EP,KR,US); G03F7/70616 (KR); G03F7/70758 (KR);
G03F7/70775 (EP,KR,US); G03F7/70783 (KR); G03F7/7085 (US);
G03F9/7088 (EP,US) (-)
Former IPC [2016/09]H01L21/027, G01B11/00, G01B11/26, G03F7/20
Designated contracting statesAT,   BE,   BG,   CH,   CY,   CZ,   DE,   DK,   EE,   ES,   FI,   FR,   GB,   GR,   HU,   IE,   IS,   IT,   LI,   LT,   LU,   LV,   MC,   MT,   NL,   PL,   PT,   RO,   SE,   SI,   SK,   TR [2016/09]
TitleGerman:BELICHTUNGSVERFAHREN UND -VORRICHTUNG SOWIE VERFAHREN ZUR HERSTELLUNG EINER VORRICHTUNG[2016/47]
English:EXPOSURE METHOD AND APPARATUS, AND DEVICE MANUFACTURING METHOD[2016/47]
French:PROCÉDÉ ET APPAREIL D'EXPOSITION ET PROCÉDÉ DE FABRICATION D'UN DISPOSITIF[2016/47]
Former [2016/09]ANTRIEBSVERFAHREN FÜR BEWEGLICHEN KÖRPER UND ANTRIEBSSYSTEM FÜR BEWEGLICHEN KÖRPER, MUSTERERZEUGUNGSVERFAHREN UND -VORRICHTUNG, BELICHTUNGSVERFAHREN UND -VORRICHTUNG SOWIE VORRICHTUNGSHERSTELLUNGSVERFAHREN
Former [2016/09]MOVABLE BODY DRIVE METHOD AND MOVABLE BODY DRIVE SYSTEM, PATTERN FORMATION METHOD AND APPARATUS, EXPOSURE METHOD AND APPARATUS, AND DEVICE MANUFACTURING METHOD
Former [2016/09]PROCÉDÉ ET SYSTÈME D'ENTRAÎNEMENT DE CORPS MOBILE, PROCÉDÉ DE FORMATION DE MOTIF ET APPAREIL, PROCÉDÉ ET APPAREIL D'EXPOSITION ET PROCÉDÉ DE FABRICATION DE DISPOSITIF
Examination procedure26.08.2015Examination requested  [2016/09]
12.04.2016Despatch of a communication from the examining division (Time limit: M04)
30.06.2016Reply to a communication from the examining division
30.01.2017Communication of intention to grant the patent
24.02.2017Fee for grant paid
24.02.2017Fee for publishing/printing paid
24.02.2017Receipt of the translation of the claim(s)
Parent application(s)   TooltipEP07806547.1  / EP2065920
Opposition(s)15.01.2018No opposition filed within time limit [2018/12]
Fees paidRenewal fee
26.08.2015Renewal fee patent year 03
26.08.2015Renewal fee patent year 04
26.08.2015Renewal fee patent year 05
26.08.2015Renewal fee patent year 06
26.08.2015Renewal fee patent year 07
26.08.2015Renewal fee patent year 08
26.08.2015Renewal fee patent year 09
11.08.2016Renewal fee patent year 10
Opt-out from the exclusive  Tooltip
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Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court.
Lapses during opposition  TooltipHU31.08.2007
AT12.04.2017
CY12.04.2017
CZ12.04.2017
DK12.04.2017
EE12.04.2017
ES12.04.2017
FI12.04.2017
LT12.04.2017
LV12.04.2017
MC12.04.2017
PL12.04.2017
PT12.04.2017
RO12.04.2017
SE12.04.2017
SI12.04.2017
SK12.04.2017
TR12.04.2017
BG12.07.2017
GR13.07.2017
IS12.08.2017
CH31.08.2017
GB31.08.2017
LI31.08.2017
LU31.08.2017
MT31.08.2017
[2020/28]
Former [2020/15]HU31.08.2007
AT12.04.2017
CY12.04.2017
CZ12.04.2017
DK12.04.2017
EE12.04.2017
ES12.04.2017
FI12.04.2017
LT12.04.2017
LV12.04.2017
MC12.04.2017
PL12.04.2017
RO12.04.2017
SE12.04.2017
SI12.04.2017
SK12.04.2017
TR12.04.2017
BG12.07.2017
GR13.07.2017
IS12.08.2017
CH31.08.2017
GB31.08.2017
LI31.08.2017
LU31.08.2017
MT31.08.2017
Former [2019/47]HU31.08.2007
AT12.04.2017
CY12.04.2017
CZ12.04.2017
DK12.04.2017
EE12.04.2017
ES12.04.2017
FI12.04.2017
LT12.04.2017
LV12.04.2017
MC12.04.2017
PL12.04.2017
RO12.04.2017
SE12.04.2017
SI12.04.2017
SK12.04.2017
BG12.07.2017
GR13.07.2017
IS12.08.2017
CH31.08.2017
GB31.08.2017
LI31.08.2017
LU31.08.2017
MT31.08.2017
Former [2019/31]HU31.08.2007
AT12.04.2017
CZ12.04.2017
DK12.04.2017
EE12.04.2017
ES12.04.2017
FI12.04.2017
LT12.04.2017
LV12.04.2017
MC12.04.2017
PL12.04.2017
RO12.04.2017
SE12.04.2017
SI12.04.2017
SK12.04.2017
BG12.07.2017
GR13.07.2017
IS12.08.2017
CH31.08.2017
GB31.08.2017
LI31.08.2017
LU31.08.2017
MT31.08.2017
Former [2018/43]AT12.04.2017
CZ12.04.2017
DK12.04.2017
EE12.04.2017
ES12.04.2017
FI12.04.2017
LT12.04.2017
LV12.04.2017
MC12.04.2017
PL12.04.2017
RO12.04.2017
SE12.04.2017
SI12.04.2017
SK12.04.2017
BG12.07.2017
GR13.07.2017
IS12.08.2017
CH31.08.2017
GB31.08.2017
LI31.08.2017
LU31.08.2017
MT31.08.2017
Former [2018/37]AT12.04.2017
CZ12.04.2017
DK12.04.2017
EE12.04.2017
ES12.04.2017
FI12.04.2017
LT12.04.2017
LV12.04.2017
MC12.04.2017
PL12.04.2017
RO12.04.2017
SE12.04.2017
SI12.04.2017
SK12.04.2017
BG12.07.2017
GR13.07.2017
IS12.08.2017
CH31.08.2017
GB31.08.2017
LI31.08.2017
LU31.08.2017
Former [2018/34]AT12.04.2017
CZ12.04.2017
DK12.04.2017
EE12.04.2017
ES12.04.2017
FI12.04.2017
LT12.04.2017
LV12.04.2017
MC12.04.2017
PL12.04.2017
RO12.04.2017
SE12.04.2017
SI12.04.2017
SK12.04.2017
BG12.07.2017
GR13.07.2017
IS12.08.2017
CH31.08.2017
LI31.08.2017
LU31.08.2017
Former [2018/25]AT12.04.2017
CZ12.04.2017
DK12.04.2017
EE12.04.2017
ES12.04.2017
FI12.04.2017
LT12.04.2017
LV12.04.2017
MC12.04.2017
PL12.04.2017
RO12.04.2017
SE12.04.2017
SI12.04.2017
SK12.04.2017
BG12.07.2017
GR13.07.2017
IS12.08.2017
CH31.08.2017
LI31.08.2017
Former [2018/21]AT12.04.2017
CZ12.04.2017
DK12.04.2017
EE12.04.2017
ES12.04.2017
FI12.04.2017
LT12.04.2017
LV12.04.2017
MC12.04.2017
PL12.04.2017
RO12.04.2017
SE12.04.2017
SK12.04.2017
BG12.07.2017
GR13.07.2017
IS12.08.2017
CH31.08.2017
LI31.08.2017
Former [2018/18]AT12.04.2017
CZ12.04.2017
DK12.04.2017
EE12.04.2017
ES12.04.2017
FI12.04.2017
LT12.04.2017
LV12.04.2017
MC12.04.2017
PL12.04.2017
RO12.04.2017
SE12.04.2017
SK12.04.2017
BG12.07.2017
GR13.07.2017
IS12.08.2017
Former [2018/10]AT12.04.2017
CZ12.04.2017
DK12.04.2017
EE12.04.2017
ES12.04.2017
FI12.04.2017
LT12.04.2017
LV12.04.2017
PL12.04.2017
RO12.04.2017
SE12.04.2017
SK12.04.2017
BG12.07.2017
GR13.07.2017
IS12.08.2017
Former [2018/09]AT12.04.2017
DK12.04.2017
EE12.04.2017
ES12.04.2017
FI12.04.2017
LT12.04.2017
LV12.04.2017
PL12.04.2017
SE12.04.2017
BG12.07.2017
GR13.07.2017
IS12.08.2017
Former [2017/50]AT12.04.2017
ES12.04.2017
FI12.04.2017
LT12.04.2017
LV12.04.2017
PL12.04.2017
SE12.04.2017
BG12.07.2017
GR13.07.2017
IS12.08.2017
Former [2017/49]AT12.04.2017
ES12.04.2017
FI12.04.2017
LT12.04.2017
GR13.07.2017
IS12.08.2017
Documents cited:Search[YA]EP0482553  (SUESS KG KARL [DE]) [Y] 1-5,10-18,21-25 * column 1, lines 1-11 * * column 4, lines 20-46 * * column 5, line 53 - column 7, line 3; figure 11 * * figure 3 * [A] 6-9,19,20;
 [Y]US2004263846  (KWAN YIM BUN PATRICK [DE]) [Y] 1-5,10-18,21-25 * paragraph [0014] * * paragraph [0059] - paragraph [0063]; claim 7 * * paragraph [0109] * * paragraph [0124] - paragraph [0128]; figures 6,7 * * paragraph [0132] - paragraph [0134]; figures 11,12 *;
 [A]US5610715  (YOSHII MINORU [JP], et al) [A] 1,14 * column 9, line 62 - column 10, line 67; figures 11,12,13A,13B *;
 [A]US2004140780  (CAHILL STEVEN P [US], et al) [A] 1,14 * paragraph [0046] - paragraph [0060]; figures 2,9-12 *;
 [XPA]EP1760529  (ASML NETHERLANDS BV [NL]) [XP] 1-5,8,11,14-18,25 * paragraph [0080] - paragraph [0096]; figures 4a-4c * * paragraph [0038] * [A] 6,7,9,10,12,13,19-24;
 [E]EP2003679  (NIKON CORP [JP]) [E] 1-25 * paragraph [0104] - paragraph [0110] * * paragraph [0168] - paragraph [0172]; figures 9A,9B *;
 [AP]EP1826615  (ASML NETHERLANDS BV [NL]) [AP] 1,14 * paragraph [0048] *
 [A]  - Kevin Mccarthy, "Accuracy in Positioning Systems", Reprinted from "The Motion Control Technology Conference Proceedings, March 19-21, 1991", (1991), URL: http://www.dovermotion.com/Downloads/KnowledgeCenter/Accuracy.pdf, (20140328), XP055110663 [A] 1,14 * pages 1-15 * * section headed "ABBÉ ERROR" on description pages 6-8 *
by applicantJP2002151405
 JP2004101362
 JP2005308592
 JP2001313250
 US2003025890
 WO2006038952
 WO9949504
 WO2004053955
 EP1420298
 WO03065428
 WO9960361
 EP1079223
 JPS57117238
 US4465368
 JP2002014005
 US2002041377
 JPH1116816
 US2002061469
 JPH06283403
 US5448332
 US4780617
 JPS6144429
 WO2005124834
 WO2005074014
 JPH10214783
 US6341007
 WO9840791
 US6262796
 US6639686
 WO2004107011
 WO9946835
 US7023610
 US6778257
 WO0135168
 JP2004519850
 US6611316
The EPO accepts no responsibility for the accuracy of data originating from other authorities; in particular, it does not guarantee that it is complete, up to date or fit for specific purposes.