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EP3016134
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EP About this file: EP3016134
| EP3016134 - METHOD OF ETCHING ORGANIC FILM [Right-click to bookmark this link] | Status | The application is deemed to be withdrawn Status updated on 03.04.2021 Database last updated on 22.08.2024 | |
| Former | Grant of patent is intended Status updated on 14.07.2020 | Most recent event Tooltip | 03.04.2021 | Application deemed to be withdrawn | published on 05.05.2021 [2021/18] | Applicant(s) | For all designated states TOKYO ELECTRON LIMITED 3-1, Akasaka 5-chome Minato-ku Tokyo 107-6325 / JP | [2016/18] | Inventor(s) | 01 /
KITAMURA, Akinori c/o Tokyo Electron Miyagi Limited, 1 Techno Hills Taiwa-cho Kurokawa-gun, Miyagi 981-3629 / JP | 02 /
KARIU, Kosuke c/o Tokyo Electron Miyagi Limited, 1 Techno Hills Taiwa-cho Kurokawa-gun, Miyagi 981-3629 / JP | 03 /
OZU, Toshihisa c/o Tokyo Electron Korea Limited, 56, Samsung 1-ro 1-gil, Hwaseongsi 445-170 Gyeonggi-do / KR | 04 /
LEE, Hai Woo c/o Tokyo Electron Korea Limited, 56, Samsung 1-ro 1-gil, Hwaseongsi 445-170 Gyeonggi-do / KR | [2016/18] | Representative(s) | Manitz Finsterwald Patent- und Rechtsanwaltspartnerschaft mbB Martin-Greif-Strasse 1 80336 München / DE | [N/P] |
| Former [2016/18] | Manitz, Finsterwald & Partner GbR Martin-Greif-Strasse 1 80336 München / DE | Application number, filing date | 15192272.1 | 30.10.2015 | [2016/18] | Priority number, date | JP20140222543 | 31.10.2014 Original published format: JP 2014222543 | [2016/18] | Filing language | EN | Procedural language | EN | Publication | Type: | A1 Application with search report | No.: | EP3016134 | Date: | 04.05.2016 | Language: | EN | [2016/18] | Search report(s) | (Supplementary) European search report - dispatched on: | EP | 04.03.2016 | Classification | IPC: | H01L21/311, // H01J37/32 | [2016/18] | CPC: |
H01L21/31138 (EP,US);
H01J37/32192 (EP,US);
H01J37/3222 (EP,US);
H01L21/02071 (US);
H01L21/0271 (US);
H01L21/3065 (US);
H01L21/308 (US);
H01L21/31116 (US);
H01L21/31127 (US);
H01L21/31144 (US);
H01L21/32136 (US);
H01J2237/334 (US);
H01J2237/3341 (US)
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| Designated contracting states | AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LI, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR [2016/18] | Extension states | BA | Not yet paid | ME | Not yet paid | Validation states | MA | Not yet paid | Title | German: | VERFAHREN ZUM ÄTZEN EINER ORGANISCHEN SCHICHT | [2016/18] | English: | METHOD OF ETCHING ORGANIC FILM | [2016/18] | French: | PROCÉDÉ DE GRAVURE DE FILM ORGANIQUE | [2016/18] | Examination procedure | 30.10.2015 | Examination requested [2016/18] | 31.10.2016 | Amendment by applicant (claims and/or description) | 15.07.2020 | Communication of intention to grant the patent | 26.11.2020 | Application deemed to be withdrawn, date of legal effect [2021/18] | 16.12.2020 | Despatch of communication that the application is deemed to be withdrawn, reason: fee for grant / fee for printing not paid in time [2021/18] | Fees paid | Renewal fee | 30.10.2017 | Renewal fee patent year 03 | 30.10.2018 | Renewal fee patent year 04 | 30.10.2019 | Renewal fee patent year 05 | Penalty fee | Additional fee for renewal fee | 31.10.2020 | 06 M06 Not yet paid |
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| Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court. | Documents cited: | Search | [I]US2006213865 (HONDA MASANOBU [JP], et al) [I] 1-9 * paragraphs [0078] , [0 92] , [0 93]; figure - *; | [I]US2004219797 (HONDA MASANOBU [JP], et al) [I] 1-9 * paragraph [0121]; figure - *; | [A]WO2013157359 (TOKYO ELECTRON LTD [JP]) [A] 7,8; | [AP]US2015064924 (TAKABA HIROYUKI [JP], et al) [AP] 7,8 * figure 1 * | by applicant | JP2001358218 | JP2002252222 |