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Extract from the Register of European Patents

EP About this file: EP3095755

EP3095755 - MONOLITHIC FABRICATION OF THERMALLY ISOLATED MICROELECTROMECHANICAL SYSTEM (MEMS) DEVICES [Right-click to bookmark this link]
StatusNo opposition filed within time limit
Status updated on  01.06.2018
Database last updated on 15.07.2024
FormerThe patent has been granted
Status updated on  23.06.2017
FormerGrant of patent is intended
Status updated on  13.03.2017
Most recent event   Tooltip17.07.2020Lapse of the patent in a contracting state
New state(s): AL		published on 19.08.2020  [2020/34]
Applicant(s)For all designated states
Honeywell International Inc.
Intellectual Property-Patent Services
P.O. Box 377
115 Tabor Road, M/S 4D3
Morris Plains, NJ 07950 / US
[N/P]
Former [2016/47]For all designated states
Honeywell International Inc.
Intellectual Property-Patent Services
115 Tabor Road M/S 4D3 P.O.Box 377
Morris Plains, NJ 07950 / US
Inventor(s)01 / REINKE, John
Honeywell International Inc.
Intellectual Property-Patent Services
P.O. Box 377
115 Tabor Road, M/S 4D3
Morris Plains, NJ 07950 / US
02 / LODDEN, Grant
Honeywell International Inc.
Intellectual Property-Patent Services
P.O. Box 377
115 Tabor Road, M/S 4D3
Morris Plains, NJ 07950 / US
 [2016/47]
Representative(s)Houghton, Mark Phillip
Patent Outsourcing Limited 1 King Street
Bakewell, Derbyshire DE45 1DZ / GB
[2016/47]
Application number, filing date16168459.204.05.2016
[2016/47]
Priority number, dateUS201562165286P22.05.2015         Original published format: US 201562165286 P
US20151480620122.07.2015         Original published format: US201514806201
[2016/47]
Filing languageEN
Procedural languageEN
PublicationType: A1 Application with search report 
No.:EP3095755
Date:23.11.2016
Language:EN
[2016/47]
Type: B1 Patent specification 
No.:EP3095755
Date:26.07.2017
Language:EN
[2017/30]
Search report(s)(Supplementary) European search report - dispatched on:EP15.09.2016
ClassificationIPC:B81B7/00, B81C1/00
[2016/47]
CPC:
B81B7/0087 (EP,US); B81C1/0069 (CN,US); B81B7/0019 (US);
B81B3/0081 (EP,US); B81C1/00476 (CN); B81C1/00523 (CN);
H02N1/00 (US); B81B2201/0228 (US); B81B2201/025 (EP,US);
H01L2224/48091 (EP) (-)
C-Set:
H01L2224/48091, H01L2924/00014 (EP)
Designated contracting statesAL,   AT,   BE,   BG,   CH,   CY,   CZ,   DE,   DK,   EE,   ES,   FI,   FR,   GB,   GR,   HR,   HU,   IE,   IS,   IT,   LI,   LT,   LU,   LV,   MC,   MK,   MT,   NL,   NO,   PL,   PT,   RO,   RS,   SE,   SI,   SK,   SM,   TR [2016/47]
TitleGerman:MONOLITHISCHE HERSTELLUNG VON THERMISCH ISOLIERTEN VORRICHTUNGEN MIT MIKROELEKTROMECHANISCHEN SYSTEMEN (MEMS)[2016/47]
English:MONOLITHIC FABRICATION OF THERMALLY ISOLATED MICROELECTROMECHANICAL SYSTEM (MEMS) DEVICES[2016/47]
French:FABRICATION MONOLITHIQUE DE DISPOSITIFS DE SYSTÈME MICROÉLECTROMÉCANIQUE ISOLÉ THERMIQUEMENT (MEMS)[2016/47]
Examination procedure04.05.2016Examination requested  [2016/47]
19.12.2016Amendment by applicant (claims and/or description)
14.03.2017Communication of intention to grant the patent
14.06.2017Fee for grant paid
14.06.2017Fee for publishing/printing paid
14.06.2017Receipt of the translation of the claim(s)
Opposition(s)30.04.2018No opposition filed within time limit [2018/27]
Opt-out from the exclusive  Tooltip
competence of the Unified
Patent Court		 See the Register of the Unified Patent Court for opt-out data
Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court.
Lapses during opposition  TooltipHU04.05.2016
AL26.07.2017
AT26.07.2017
CY26.07.2017
CZ26.07.2017
DK26.07.2017
EE26.07.2017
ES26.07.2017
FI26.07.2017
HR26.07.2017
IT26.07.2017
LT26.07.2017
LV26.07.2017
MC26.07.2017
MK26.07.2017
NL26.07.2017
PL26.07.2017
PT26.07.2017
RO26.07.2017
RS26.07.2017
SE26.07.2017
SI26.07.2017
SK26.07.2017
SM26.07.2017
TR26.07.2017
BG26.10.2017
NO26.10.2017
GR27.10.2017
IS26.11.2017
[2020/34]
Former [2020/31]HU04.05.2016
AT26.07.2017
CY26.07.2017
CZ26.07.2017
DK26.07.2017
EE26.07.2017
ES26.07.2017
FI26.07.2017
HR26.07.2017
IT26.07.2017
LT26.07.2017
LV26.07.2017
MC26.07.2017
MK26.07.2017
NL26.07.2017
PL26.07.2017
PT26.07.2017
RO26.07.2017
RS26.07.2017
SE26.07.2017
SI26.07.2017
SK26.07.2017
SM26.07.2017
TR26.07.2017
BG26.10.2017
NO26.10.2017
GR27.10.2017
IS26.11.2017
Former [2020/30]HU04.05.2016
AT26.07.2017
CZ26.07.2017
DK26.07.2017
EE26.07.2017
ES26.07.2017
FI26.07.2017
HR26.07.2017
IT26.07.2017
LT26.07.2017
LV26.07.2017
MC26.07.2017
NL26.07.2017
PL26.07.2017
PT26.07.2017
RO26.07.2017
RS26.07.2017
SE26.07.2017
SI26.07.2017
SK26.07.2017
SM26.07.2017
TR26.07.2017
BG26.10.2017
NO26.10.2017
GR27.10.2017
IS26.11.2017
Former [2020/28]AT26.07.2017
CZ26.07.2017
DK26.07.2017
EE26.07.2017
ES26.07.2017
FI26.07.2017
HR26.07.2017
IT26.07.2017
LT26.07.2017
LV26.07.2017
MC26.07.2017
NL26.07.2017
PL26.07.2017
PT26.07.2017
RS26.07.2017
SE26.07.2017
SI26.07.2017
SK26.07.2017
SM26.07.2017
TR26.07.2017
BG26.10.2017
NO26.10.2017
GR27.10.2017
IS26.11.2017
Former [2020/15]AT26.07.2017
CZ26.07.2017
DK26.07.2017
EE26.07.2017
ES26.07.2017
FI26.07.2017
HR26.07.2017
IT26.07.2017
LT26.07.2017
LV26.07.2017
MC26.07.2017
NL26.07.2017
PL26.07.2017
RS26.07.2017
SE26.07.2017
SI26.07.2017
SK26.07.2017
SM26.07.2017
TR26.07.2017
BG26.10.2017
NO26.10.2017
GR27.10.2017
IS26.11.2017
Former [2019/06]AT26.07.2017
CZ26.07.2017
DK26.07.2017
EE26.07.2017
ES26.07.2017
FI26.07.2017
HR26.07.2017
IT26.07.2017
LT26.07.2017
LV26.07.2017
MC26.07.2017
NL26.07.2017
PL26.07.2017
RS26.07.2017
SE26.07.2017
SI26.07.2017
SK26.07.2017
SM26.07.2017
BG26.10.2017
NO26.10.2017
GR27.10.2017
IS26.11.2017
Former [2018/40]AT26.07.2017
CZ26.07.2017
DK26.07.2017
EE26.07.2017
ES26.07.2017
FI26.07.2017
HR26.07.2017
IT26.07.2017
LT26.07.2017
LV26.07.2017
NL26.07.2017
PL26.07.2017
RS26.07.2017
SE26.07.2017
SI26.07.2017
SK26.07.2017
SM26.07.2017
BG26.10.2017
NO26.10.2017
GR27.10.2017
IS26.11.2017
Former [2018/25]AT26.07.2017
CZ26.07.2017
DK26.07.2017
EE26.07.2017
ES26.07.2017
FI26.07.2017
HR26.07.2017
IT26.07.2017
LT26.07.2017
LV26.07.2017
NL26.07.2017
PL26.07.2017
RS26.07.2017
SE26.07.2017
SK26.07.2017
SM26.07.2017
BG26.10.2017
NO26.10.2017
GR27.10.2017
IS26.11.2017
Former [2018/21]AT26.07.2017
CZ26.07.2017
DK26.07.2017
ES26.07.2017
FI26.07.2017
HR26.07.2017
LT26.07.2017
LV26.07.2017
NL26.07.2017
PL26.07.2017
RS26.07.2017
SE26.07.2017
BG26.10.2017
NO26.10.2017
GR27.10.2017
IS26.11.2017
Former [2018/12]AT26.07.2017
ES26.07.2017
FI26.07.2017
HR26.07.2017
LT26.07.2017
LV26.07.2017
NL26.07.2017
PL26.07.2017
RS26.07.2017
SE26.07.2017
BG26.10.2017
NO26.10.2017
GR27.10.2017
IS26.11.2017
Former [2018/11]AT26.07.2017
ES26.07.2017
FI26.07.2017
HR26.07.2017
LT26.07.2017
NL26.07.2017
PL26.07.2017
RS26.07.2017
SE26.07.2017
BG26.10.2017
NO26.10.2017
GR27.10.2017
IS26.11.2017
Former [2018/10]AT26.07.2017
FI26.07.2017
HR26.07.2017
LT26.07.2017
NL26.07.2017
RS26.07.2017
SE26.07.2017
NO26.10.2017
Former [2018/09]FI26.07.2017
LT26.07.2017
NL26.07.2017
SE26.07.2017
NO26.10.2017
Former [2018/08]FI26.07.2017
LT26.07.2017
NL26.07.2017
NO26.10.2017
Former [2018/07]LT26.07.2017
NO26.10.2017
Documents cited:Search[A]US2009085191  (NAJAFI KHALIL [US], et al) [A] 1,2,5-9* the whole document *;
 [X]US2010290199  (SCHMID BERNHARD [DE], et al) [X] 1-10 * the whole document *;
 [X]EP2700614  (HONEYWELL INT INC [US]) [X] 1-10 * the whole document *
The EPO accepts no responsibility for the accuracy of data originating from other authorities; in particular, it does not guarantee that it is complete, up to date or fit for specific purposes.