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EP3159912
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EP About this file: EP3159912
| EP3159912 - OPTICAL ELEMENT, EXPOSURE APPARATUS USING THIS, AND DEVICE MANUFACTURING METHOD [Right-click to bookmark this link] | Status | The application is deemed to be withdrawn Status updated on 11.09.2020 Database last updated on 16.07.2024 | |
| Former | Grant of patent is intended Status updated on 08.10.2019 | ||
| Former | Request for examination was made Status updated on 24.03.2017 | Most recent event Tooltip | 11.09.2020 | Application deemed to be withdrawn | published on 14.10.2020 [2020/42] | Applicant(s) | For all designated states Nikon Corporation 15-3, Konan 2-chome Minato-ku Tokyo 108-6290 / JP | [2017/17] | Inventor(s) | 01 /
Murakami, Katsuhiko c/o NIKON CORPORATION 2-3, Marunouchi 3-chome Chiyoda-ku Tokyo, 100-8331 / JP | 02 /
Komiya, Takaharu c/o NIKON CORPORATION 2-3, Marunouchi 3-chome Chiyoda-ku Tokyo, 100-8331 / JP | [2017/17] | Representative(s) | Hoffmann Eitle Patent- und Rechtsanwälte PartmbB Arabellastraße 30 81925 München / DE | [2017/17] | Application number, filing date | 16202165.3 | 25.01.2008 | [2017/17] | Priority number, date | JP20070014920 | 25.01.2007 Original published format: JP 2007014920 | [2017/17] | Filing language | EN | Procedural language | EN | Publication | Type: | A1 Application with search report | No.: | EP3159912 | Date: | 26.04.2017 | Language: | EN | [2017/17] | Search report(s) | (Supplementary) European search report - dispatched on: | EP | 22.03.2017 | Classification | IPC: | H01L21/027, G02B5/08, G02B5/26, G03F7/20, G21K1/06 | [2017/17] | CPC: |
G02B17/0657 (EP,US);
B82Y10/00 (EP,US);
G02B5/0816 (EP,US);
G02B5/0891 (EP,US);
G02B5/26 (EP,US);
G03F7/70308 (EP,US);
G03F7/70316 (EP,US);
G03F7/70575 (EP,US);
G03F7/70916 (EP,US);
| Designated contracting states | AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LI, LT, LU, LV, MC, MT, NL, NO, PL, PT, RO, SE, SI, SK, TR [2017/17] | Title | German: | OPTISCHES ELEMENT, BELICHTUNGSVORRICHTUNG MIT VERWENDUNG DAVON UND VORRICHTUNGSHERSTELLUNGSVERFAHREN | [2017/17] | English: | OPTICAL ELEMENT, EXPOSURE APPARATUS USING THIS, AND DEVICE MANUFACTURING METHOD | [2017/17] | French: | ÉLÉMENT OPTIQUE, APPAREIL D'EXPOSITION UTILISANT CET ÉLÉMENT ET PROCÉDÉ DE FABRICATION DU DISPOSITIF | [2017/17] | Examination procedure | 05.12.2016 | Examination requested [2017/17] | 05.12.2016 | Date on which the examining division has become responsible | 10.10.2017 | Amendment by applicant (claims and/or description) | 09.10.2019 | Communication of intention to grant the patent | 20.02.2020 | Application deemed to be withdrawn, date of legal effect [2020/42] | 26.05.2020 | Despatch of communication that the application is deemed to be withdrawn, reason: fee for grant / fee for printing not paid in time [2020/42] | Parent application(s) Tooltip | EP08703931.9 / EP2109134 | Fees paid | Renewal fee | 05.12.2016 | Renewal fee patent year 03 | 05.12.2016 | Renewal fee patent year 04 | 05.12.2016 | Renewal fee patent year 05 | 05.12.2016 | Renewal fee patent year 06 | 05.12.2016 | Renewal fee patent year 07 | 05.12.2016 | Renewal fee patent year 08 | 05.12.2016 | Renewal fee patent year 09 | 05.12.2016 | Renewal fee patent year 10 | 15.01.2018 | Renewal fee patent year 11 | 15.01.2019 | Renewal fee patent year 12 | Penalty fee | Additional fee for renewal fee | 31.01.2020 | 13 M06 Not yet paid |
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| Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court. | Documents cited: | Search | [A]DE10309084 (ZEISS CARL SMT AG [DE]) [A] 1-10 * paragraphs [0007] , [0017] - [0020] *; | [A]US2002076564 (REICHERT WERNER [DE], et al) [A] 1-10 * paragraphs [0006] - [0010] *; | [A]FR2864251 (ESSILOR INT [FR]) [A] 1 * abstract *; | [A]WO9641215 (SOLA INTERNATIONAL INC [US], et al) [A] 1 * abstract *; | [A]DE19963866 (SCHOTT AUER GMBH [DE]) [A] 1 * abstract * | by applicant | JP2003014893 |