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EP3271771

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EP About this file: EP3271771

EP3271771 - DEVICE FOR SWIVELING A MIRROR ELEMENT WITH TWO DEGREES OF SWIVELING FREEDOM AND SENSOR FOR ANALYZING THE SWIVELING [Right-click to bookmark this link]
Status	Examination is in progress Status updated on 13.08.2021 Database last updated on 18.10.2024
Former	Request for examination was made Status updated on 28.12.2017
Former	The international publication has been made Status updated on 11.08.2017
Most recent event Tooltip	28.03.2024	New entry: Renewal fee paid
Applicant(s)	For all designated states Carl Zeiss SMT GmbH Rudolf-Eber-Strasse 2 73447 Oberkochen / DE
	[2018/04]
Inventor(s)	01 / HAUF, Markus Hafenberg 4 89075 Ulm / DE
	02 / SAROV, Yanko Feuerbachstrasse 3 73431 Aalen / DE
	[2018/04]
Representative(s)	Rau, Schneck & Hübner Patentanwälte Rechtsanwälte PartGmbB Königstraße 2 90402 Nürnberg / DE
	[2018/04]
Application number, filing date	16710701.0	11.03.2016
	[2018/04]
	WO2016EP55351
Priority number, date	DE201510204874	18.03.2015 Original published format: DE102015204874
	[2018/04]
Filing language	DE
Procedural language	DE
Publication	Type:	A1 Application with search report
	No.:	WO2016146541
	Date:	22.09.2016
	Language:	DE
	[2016/38]
	Type:	A1 Application with search report
	No.:	EP3271771
	Date:	24.01.2018
	Language:	DE
	The application published by WIPO in one of the EPO official languages on 22.09.2016 takes the place of the publication of the European patent application.
	[2018/04]
Search report(s)	International search report - published on:	EP	22.09.2016
	(Supplementary) European search report - dispatched on:	EP	16.08.2021
Classification	IPC:	G01C9/06, G02B26/08, G02B26/10, H02N1/00, // G02B19/00	[2021/37]
	CPC:	G01C9/06 (EP,KR,US); G02B26/0841 (EP,CN,KR,US); B81B3/00 (KR); G01D5/2412 (EP,CN,KR,US); G02B19/0023 (EP,CN,KR,US); G02B19/0095 (EP,CN,KR,US); (+) G02B26/085 (US); G02B26/101 (EP,US); G02B26/105 (US); G03F7/702 (US); G03F7/70275 (KR); H02N1/008 (EP,US) (-)
	Former IPC [2018/04]	G02B19/00, B81B3/00, G01C9/00, G02B26/08
Designated contracting states	AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LI, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR [2018/04]
Title	German:	EINRICHTUNG ZUR VERSCHWENKUNG EINES SPIEGEL-ELEMENTS MIT ZWEI SCHWENK-FREIHEITSGRADEN UND SENSOR ZUR BESTIMMUNG DER VERSCHWENKUNG	[2018/04]
	English:	DEVICE FOR SWIVELING A MIRROR ELEMENT WITH TWO DEGREES OF SWIVELING FREEDOM AND SENSOR FOR ANALYZING THE SWIVELING	[2018/04]
	French:	DISPOSITIF POUR FAIRE PIVOTER UN ÉLÉMENT MIROIR AYANT DEUX DEGRÉS DE LIBERTÉ DE PIVOTEMENT ET CAPTEUR PERMETTANT DE DÉTERMINER LE PIVOTEMENT	[2018/04]
Entry into regional phase	11.08.2017	National basic fee paid
	11.08.2017	Designation fee(s) paid
	11.08.2017	Examination fee paid
Examination procedure	11.08.2017	Examination requested [2018/04]
	11.08.2017	Date on which the examining division has become responsible
	03.05.2018	Amendment by applicant (claims and/or description)
	16.08.2021	Despatch of a communication from the examining division to which search results under Rule 164(2) EPC are annexed (Time limit: M06) [2021/37]
	16.08.2021	Despatch of a communication from the examining division (Time limit: M06)
	25.02.2022	Reply to a communication from the examining division
	19.10.2023	Despatch of a communication from the examining division (Time limit: M04)
	22.02.2024	Reply to a communication from the examining division
Fees paid	Renewal fee
	23.03.2018	Renewal fee patent year 03
	26.03.2019	Renewal fee patent year 04
	24.03.2020	Renewal fee patent year 05
	23.03.2021	Renewal fee patent year 06
	25.03.2022	Renewal fee patent year 07
	23.03.2023	Renewal fee patent year 08
	27.03.2024	Renewal fee patent year 09
Opt-out from the exclusive Tooltip competence of the Unified Patent Court	See the Register of the Unified Patent Court for opt-out data
	Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court.
Cited in	International search	[I]DE102012218219 (ZEISS CARL SMT GMBH [DE]);
	by applicant	EP1225481
		WO2010049076
		WO2012130768
		DE102013206529
		DE102013206531

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