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EP3289113
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EP About this file: EP3289113
| EP3289113 - METHOD FOR PRODUCING COATED SUBSTRATES [Right-click to bookmark this link] | Status | Examination is in progress Status updated on 15.04.2021 Database last updated on 16.07.2024 | |
| Former | Request for examination was made Status updated on 02.02.2018 | ||
| Former | The international publication has been made Status updated on 22.02.2017 | Most recent event Tooltip | 23.03.2024 | New entry: Renewal fee paid | Applicant(s) | For all designated states Bühler Alzenau GmbH Siemensstraße 88 63755 Alzenau / DE | [2018/10] | Inventor(s) | 01 /
PISTNER, Jürgen Am Erlenborn 13 b 63755 Alzenau-Michelbach / DE | 02 /
HAGEDORN, Harro Hoherodskopf Straße 50 60435 Frankfurt am Main / DE | [2018/10] | Representative(s) | Vossius & Partner Patentanwälte Rechtsanwälte mbB Siebertstrasse 3 81675 München / DE | [N/P] |
| Former [2018/10] | Pohlmann, Bernd Michael RPK Patentanwälte Reinhardt, Pohlmann und Kaufmann Partnerschaft mbB Rossmarkt 12 60311 Frankfurt am Main / DE | Application number, filing date | 16714365.0 | 31.03.2016 | [2018/10] | WO2016EP57065 | Priority number, date | DE201510104977 | 31.03.2015 Original published format: DE102015104977 | [2018/10] | Filing language | DE | Procedural language | DE | Publication | Type: | A1 Application with search report | No.: | WO2016156496 | Date: | 06.10.2016 | Language: | DE | [2016/40] | Type: | A1 Application with search report | No.: | EP3289113 | Date: | 07.03.2018 | Language: | DE | The application published by WIPO in one of the EPO official languages on 06.10.2016 takes the place of the publication of the European patent application. | [2018/10] | Search report(s) | International search report - published on: | EP | 06.10.2016 | Classification | IPC: | C23C14/00, C23C14/54 | [2018/10] | CPC: |
C23C14/0078 (EP,US);
C23C14/547 (EP,US);
H01J37/18 (US);
H01J37/32036 (EP,US);
H01J37/32119 (EP,US);
H01J37/32155 (EP,US)
| Designated contracting states | AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LI, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR [2018/10] | Title | German: | VERFAHREN ZUR HERSTELLUNG VON BESCHICHTETEN SUBSTRATEN | [2018/10] | English: | METHOD FOR PRODUCING COATED SUBSTRATES | [2018/10] | French: | PROCÉDÉ DE FABRICATION DE SUBSTRATS REVÊTUS | [2018/10] | Entry into regional phase | 18.10.2017 | National basic fee paid | 28.09.2017 | Designation fee(s) paid | 18.10.2017 | Examination fee paid | Examination procedure | 31.01.2017 | Request for preliminary examination filed International Preliminary Examining Authority: EP | 28.09.2017 | Date on which the examining division has become responsible | 18.10.2017 | Examination requested [2018/10] | 07.08.2018 | Amendment by applicant (claims and/or description) | 14.04.2021 | Despatch of a communication from the examining division (Time limit: M06) | 25.10.2021 | Reply to a communication from the examining division | Fees paid | Renewal fee | 28.03.2018 | Renewal fee patent year 03 | 27.03.2019 | Renewal fee patent year 04 | 23.03.2020 | Renewal fee patent year 05 | 22.03.2021 | Renewal fee patent year 06 | 23.03.2022 | Renewal fee patent year 07 | 20.03.2023 | Renewal fee patent year 08 | 22.03.2024 | Renewal fee patent year 09 |
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| Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court. | Cited in | International search | [YD]US5225057 (LEFEBVRE PAUL M [US], et al) [YD] 9,12* column 15, line 4 - line 64; figures 18-25 *; | [XY]US2004026240 (SHIDOJI EIJI [JP], et al) [X] 1-4,6-8,10,13-18 * the whole document * [Y] 5,9,11,12; | [Y]US2006151312 (SCHERER MICHAEL [DE], et al) [Y] 11 * paragraphs [0037] - [0053]; figure 1 *; | [Y]WO2014050319 (HITACHI HIGH TECH CORP [JP]) [Y] 5 * figure 9 * | by applicant | DE2700979 | DD271827 | US5225057 | EP0349556 | EP0516436 | EP0795623 | EP0716160 | DE69421033T | DE10008482 | WO0173151 | DE10234855 | EP1198607 | WO2005008717 | EP1592821 | EP1552544 | DE102013101269 | - Y. YIN, THE ORIGINS OF SELF-BIAS ON DIELECTRIC SUBSTRATS IN RF PLASMA PROCESSING, SURFACE AND COATINGS TECHNOLOGY, (2006), vol. 200, pages 3670 - 3674 |