EP3255658 - METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE, AND UNDERFILL FILM [Right-click to bookmark this link] | Status | No opposition filed within time limit Status updated on 24.07.2020 Database last updated on 14.06.2024 | |
Former | The patent has been granted Status updated on 16.08.2019 | ||
Former | Grant of patent is intended Status updated on 15.04.2019 | ||
Former | Request for examination was made Status updated on 10.11.2017 | ||
Former | The international publication has been made Status updated on 16.06.2017 | Most recent event Tooltip | 08.07.2022 | Lapse of the patent in a contracting state New state(s): MK | published on 10.08.2022 [2022/32] | Applicant(s) | For all designated states Dexerials Corporation Gate City Osaki East Tower 8F 1-11-2, Osaki Shinagawa-ku Tokyo 141-0032 / JP | [2017/50] | Inventor(s) | 01 /
KUBOTA, Kenji c/o DEXERIALS CORPORATION Gate City Osaki East Tower 8F 1-11-2 Osaki, Shinagawa-ku Tokyo 141-0032 / JP | 02 /
SAITO, Takayuki c/o DEXERIALS CORPORATION Gate City Osaki East Tower 8F 1-11-2 Osaki, Shinagawa-ku Tokyo 141-0032 / JP | [2017/50] | Representative(s) | Müller-Boré & Partner Patentanwälte PartG mbB Friedenheimer Brücke 21 80639 München / DE | [2017/50] | Application number, filing date | 16746712.5 | 05.02.2016 | [2017/50] | WO2016JP53462 | Priority number, date | JP20150022672 | 06.02.2015 Original published format: JP 2015022672 | [2017/50] | Filing language | JA | Procedural language | EN | Publication | Type: | A1 Application with search report | No.: | WO2016125881 | Date: | 11.08.2016 | Language: | JA | [2016/32] | Type: | A1 Application with search report | No.: | EP3255658 | Date: | 13.12.2017 | Language: | EN | [2017/50] | Type: | B1 Patent specification | No.: | EP3255658 | Date: | 18.09.2019 | Language: | EN | [2019/38] | Search report(s) | International search report - published on: | JP | 11.08.2016 | (Supplementary) European search report - dispatched on: | EP | 14.08.2018 | Classification | IPC: | H01L21/60, C09J7/00, C09J133/04, C09J163/08, H01L23/00, H01L21/56, H01L23/29, C08G59/42, // H01L25/065 | [2019/17] | CPC: |
C09J7/10 (EP,US);
C09J7/00 (KR);
C08G59/42 (EP,KR,US);
C09J133/04 (EP,US);
C09J133/16 (KR,US);
C09J163/00 (EP,KR,US);
C09J163/08 (KR,US);
H01L21/563 (KR,US);
H01L23/293 (KR,US);
H01L23/3157 (KR,US);
H01L24/13 (EP,KR,US);
H01L24/16 (EP,KR,US);
H01L24/29 (EP,KR,US);
H01L24/32 (EP,KR,US);
H01L24/75 (EP,KR,US);
H01L24/80 (KR);
H01L24/81 (EP,US);
H01L24/83 (EP,US);
H01L24/92 (EP,US);
H01L24/97 (EP,KR,US);
H01L25/0657 (EP,KR,US);
H01L25/50 (EP,KR,US);
C09J2203/326 (KR,US);
C09J2433/00 (KR,US);
C09J2463/00 (KR,US);
H01L2224/13082 (EP,US);
H01L2224/131 (EP);
H01L2224/13111 (EP,US);
H01L2224/13144 (EP,US);
H01L2224/13147 (EP,US);
H01L2224/13155 (EP,US);
H01L2224/16148 (EP,US);
H01L2224/16238 (EP,US);
H01L2224/2919 (EP,US);
H01L2224/32145 (EP,US);
H01L2224/32225 (EP,US);
H01L2224/73104 (EP,US);
H01L2224/73204 (EP,US);
H01L2224/75252 (EP,US);
H01L2224/7598 (EP,US);
H01L2224/75981 (EP,US);
H01L2224/81005 (EP,US);
H01L2224/81193 (EP,US);
H01L2224/81203 (EP,US);
H01L2224/81815 (EP,US);
H01L2224/81907 (EP,US);
H01L2224/83191 (EP,US);
H01L2224/83192 (EP,US);
H01L2224/83203 (EP,US);
H01L2224/83862 (EP,US);
H01L2224/83907 (EP,US);
H01L2224/92 (EP,US);
H01L2224/9211 (EP,US);
H01L2224/94 (EP,US);
H01L2224/97 (EP,US);
H01L2225/06513 (EP,US);
H01L2225/06568 (EP,US);
H01L2924/0665 (US);
H01L2924/18161 (US);
H01L2924/364 (US);
H01L2924/384 (EP,US)
(-)
| C-Set: |
C09J163/00, C08K5/18, C08L33/08 (US,EP);
H01L2224/13111, H01L2924/01047 (US,EP);
H01L2224/13111, H01L2924/01047, H01L2924/01029 (EP,US);
H01L2224/13111, H01L2924/01051 (US,EP);
H01L2224/13111, H01L2924/01082 (US,EP);
H01L2224/13111, H01L2924/01083 (US,EP);
H01L2224/13144, H01L2924/00014 (US,EP);
H01L2224/13147, H01L2924/00014 (US,EP);
H01L2224/13155, H01L2924/00014 (US,EP);
H01L2224/131, H01L2924/014 (EP);
H01L2224/2919, H01L2924/0635 (US,EP);
H01L2224/2919, H01L2924/0665 (US,EP);
H01L2224/2919, H01L2924/095, H01L2924/0635, H01L2924/0665 (US,EP);
H01L2224/73204, H01L2224/16145, H01L2224/32145, H01L2924/00 (EP);
H01L2224/73204, H01L2224/16225, H01L2224/32225, H01L2924/00 (EP);
H01L2224/75252, H01L2924/00014 (US,EP);
H01L2224/75981, H01L2924/00014 (US,EP);
H01L2224/81203, H01L2924/00012 (US,EP);
H01L2224/81815, H01L2924/00014 (EP,US);
H01L2224/83203, H01L2924/00012 (EP,US);
H01L2224/83862, H01L2924/00014 (EP,US);
H01L2224/9211, H01L2224/81, H01L2224/83 (EP,US);
H01L2224/92, H01L2224/11, H01L2224/27, H01L21/78, H01L2224/81 (US,EP);
H01L2224/92, H01L2224/11, H01L2224/27, H01L21/78, H01L2224/83 (US,EP);
H01L2224/94, H01L2224/11 (US,EP);
H01L2224/94, H01L2224/27 (EP,US); |
Former IPC [2018/37] | H01L21/60, C09J7/00, C09J133/04, C09J163/08, H01L23/00, H01L21/56, H01L23/29, // H01L25/065 | ||
Former IPC [2017/50] | H01L21/60, C09J7/00, C09J133/04, C09J163/08 | Designated contracting states | AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LI, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR [2017/50] | Extension states | BA | Not yet paid | ME | Not yet paid | Validation states | MA | Not yet paid | MD | Not yet paid | Title | German: | VERFAHREN ZUR HERSTELLUNG EINES HALBLEITERBAUELEMENTS SOWIE UNTERFÜLLUNGSFILM | [2017/50] | English: | METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE, AND UNDERFILL FILM | [2017/50] | French: | PROCÉDÉ DE FABRICATION DE DISPOSITIF À SEMI-CONDUCTEUR, ET FILM DE REMPLISSAGE SOUS-JACENT | [2017/50] | Entry into regional phase | 09.06.2017 | Translation filed | 14.06.2017 | National basic fee paid | 14.06.2017 | Search fee paid | 14.06.2017 | Designation fee(s) paid | 14.06.2017 | Examination fee paid | Examination procedure | 09.06.2017 | Date on which the examining division has become responsible | 14.06.2017 | Examination requested [2017/50] | 27.02.2019 | Amendment by applicant (claims and/or description) | 16.04.2019 | Communication of intention to grant the patent | 05.08.2019 | Receipt of the translation of the claim(s) | 08.08.2019 | Fee for grant paid | 08.08.2019 | Fee for publishing/printing paid | Opposition(s) | 19.06.2020 | No opposition filed within time limit [2020/35] | Fees paid | Renewal fee | 26.02.2018 | Renewal fee patent year 03 | 26.02.2019 | Renewal fee patent year 04 |
Opt-out from the exclusive Tooltip competence of the Unified Patent Court | See the Register of the Unified Patent Court for opt-out data | ||
Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court. | Lapses during opposition Tooltip | HU | 05.02.2016 | AL | 18.09.2019 | AT | 18.09.2019 | CY | 18.09.2019 | CZ | 18.09.2019 | DK | 18.09.2019 | EE | 18.09.2019 | ES | 18.09.2019 | FI | 18.09.2019 | HR | 18.09.2019 | IT | 18.09.2019 | LT | 18.09.2019 | LV | 18.09.2019 | MC | 18.09.2019 | MK | 18.09.2019 | MT | 18.09.2019 | NL | 18.09.2019 | PL | 18.09.2019 | RO | 18.09.2019 | RS | 18.09.2019 | SE | 18.09.2019 | SI | 18.09.2019 | SK | 18.09.2019 | SM | 18.09.2019 | TR | 18.09.2019 | BG | 18.12.2019 | NO | 18.12.2019 | GR | 19.12.2019 | IS | 19.01.2020 | PT | 20.01.2020 | GB | 05.02.2020 | IE | 05.02.2020 | LU | 05.02.2020 | CH | 29.02.2020 | FR | 29.02.2020 | LI | 29.02.2020 | [2022/32] |
Former [2022/27] | HU | 05.02.2016 | |
AL | 18.09.2019 | ||
AT | 18.09.2019 | ||
CY | 18.09.2019 | ||
CZ | 18.09.2019 | ||
DK | 18.09.2019 | ||
EE | 18.09.2019 | ||
ES | 18.09.2019 | ||
FI | 18.09.2019 | ||
HR | 18.09.2019 | ||
IT | 18.09.2019 | ||
LT | 18.09.2019 | ||
LV | 18.09.2019 | ||
MC | 18.09.2019 | ||
MT | 18.09.2019 | ||
NL | 18.09.2019 | ||
PL | 18.09.2019 | ||
RO | 18.09.2019 | ||
RS | 18.09.2019 | ||
SE | 18.09.2019 | ||
SI | 18.09.2019 | ||
SK | 18.09.2019 | ||
SM | 18.09.2019 | ||
TR | 18.09.2019 | ||
BG | 18.12.2019 | ||
NO | 18.12.2019 | ||
GR | 19.12.2019 | ||
IS | 19.01.2020 | ||
PT | 20.01.2020 | ||
GB | 05.02.2020 | ||
IE | 05.02.2020 | ||
LU | 05.02.2020 | ||
CH | 29.02.2020 | ||
FR | 29.02.2020 | ||
LI | 29.02.2020 | ||
Former [2021/08] | AL | 18.09.2019 | |
AT | 18.09.2019 | ||
CZ | 18.09.2019 | ||
DK | 18.09.2019 | ||
EE | 18.09.2019 | ||
ES | 18.09.2019 | ||
FI | 18.09.2019 | ||
HR | 18.09.2019 | ||
IT | 18.09.2019 | ||
LT | 18.09.2019 | ||
LV | 18.09.2019 | ||
MC | 18.09.2019 | ||
NL | 18.09.2019 | ||
PL | 18.09.2019 | ||
RO | 18.09.2019 | ||
RS | 18.09.2019 | ||
SE | 18.09.2019 | ||
SI | 18.09.2019 | ||
SK | 18.09.2019 | ||
SM | 18.09.2019 | ||
BG | 18.12.2019 | ||
NO | 18.12.2019 | ||
GR | 19.12.2019 | ||
IS | 19.01.2020 | ||
PT | 20.01.2020 | ||
GB | 05.02.2020 | ||
IE | 05.02.2020 | ||
LU | 05.02.2020 | ||
CH | 29.02.2020 | ||
FR | 29.02.2020 | ||
LI | 29.02.2020 | ||
Former [2021/07] | AL | 18.09.2019 | |
AT | 18.09.2019 | ||
CZ | 18.09.2019 | ||
DK | 18.09.2019 | ||
EE | 18.09.2019 | ||
ES | 18.09.2019 | ||
FI | 18.09.2019 | ||
HR | 18.09.2019 | ||
IT | 18.09.2019 | ||
LT | 18.09.2019 | ||
LV | 18.09.2019 | ||
MC | 18.09.2019 | ||
NL | 18.09.2019 | ||
PL | 18.09.2019 | ||
RO | 18.09.2019 | ||
RS | 18.09.2019 | ||
SE | 18.09.2019 | ||
SI | 18.09.2019 | ||
SK | 18.09.2019 | ||
SM | 18.09.2019 | ||
BG | 18.12.2019 | ||
NO | 18.12.2019 | ||
GR | 19.12.2019 | ||
IS | 19.01.2020 | ||
PT | 20.01.2020 | ||
IE | 05.02.2020 | ||
LU | 05.02.2020 | ||
CH | 29.02.2020 | ||
FR | 29.02.2020 | ||
LI | 29.02.2020 | ||
Former [2020/52] | AL | 18.09.2019 | |
AT | 18.09.2019 | ||
CZ | 18.09.2019 | ||
DK | 18.09.2019 | ||
EE | 18.09.2019 | ||
ES | 18.09.2019 | ||
FI | 18.09.2019 | ||
HR | 18.09.2019 | ||
IT | 18.09.2019 | ||
LT | 18.09.2019 | ||
LV | 18.09.2019 | ||
MC | 18.09.2019 | ||
NL | 18.09.2019 | ||
PL | 18.09.2019 | ||
RO | 18.09.2019 | ||
RS | 18.09.2019 | ||
SE | 18.09.2019 | ||
SI | 18.09.2019 | ||
SK | 18.09.2019 | ||
SM | 18.09.2019 | ||
BG | 18.12.2019 | ||
NO | 18.12.2019 | ||
GR | 19.12.2019 | ||
IS | 19.01.2020 | ||
PT | 20.01.2020 | ||
LU | 05.02.2020 | ||
CH | 29.02.2020 | ||
LI | 29.02.2020 | ||
Former [2020/50] | AL | 18.09.2019 | |
AT | 18.09.2019 | ||
CZ | 18.09.2019 | ||
DK | 18.09.2019 | ||
EE | 18.09.2019 | ||
ES | 18.09.2019 | ||
FI | 18.09.2019 | ||
HR | 18.09.2019 | ||
IT | 18.09.2019 | ||
LT | 18.09.2019 | ||
LV | 18.09.2019 | ||
MC | 18.09.2019 | ||
NL | 18.09.2019 | ||
PL | 18.09.2019 | ||
RO | 18.09.2019 | ||
RS | 18.09.2019 | ||
SE | 18.09.2019 | ||
SI | 18.09.2019 | ||
SK | 18.09.2019 | ||
SM | 18.09.2019 | ||
BG | 18.12.2019 | ||
NO | 18.12.2019 | ||
GR | 19.12.2019 | ||
IS | 19.01.2020 | ||
PT | 20.01.2020 | ||
LU | 05.02.2020 | ||
Former [2020/48] | AL | 18.09.2019 | |
AT | 18.09.2019 | ||
CZ | 18.09.2019 | ||
DK | 18.09.2019 | ||
EE | 18.09.2019 | ||
ES | 18.09.2019 | ||
FI | 18.09.2019 | ||
HR | 18.09.2019 | ||
IT | 18.09.2019 | ||
LT | 18.09.2019 | ||
LV | 18.09.2019 | ||
NL | 18.09.2019 | ||
PL | 18.09.2019 | ||
RO | 18.09.2019 | ||
RS | 18.09.2019 | ||
SE | 18.09.2019 | ||
SI | 18.09.2019 | ||
SK | 18.09.2019 | ||
SM | 18.09.2019 | ||
BG | 18.12.2019 | ||
NO | 18.12.2019 | ||
GR | 19.12.2019 | ||
IS | 19.01.2020 | ||
PT | 20.01.2020 | ||
LU | 05.02.2020 | ||
Former [2020/37] | AL | 18.09.2019 | |
AT | 18.09.2019 | ||
CZ | 18.09.2019 | ||
DK | 18.09.2019 | ||
EE | 18.09.2019 | ||
ES | 18.09.2019 | ||
FI | 18.09.2019 | ||
HR | 18.09.2019 | ||
IT | 18.09.2019 | ||
LT | 18.09.2019 | ||
LV | 18.09.2019 | ||
NL | 18.09.2019 | ||
PL | 18.09.2019 | ||
RO | 18.09.2019 | ||
RS | 18.09.2019 | ||
SE | 18.09.2019 | ||
SI | 18.09.2019 | ||
SK | 18.09.2019 | ||
SM | 18.09.2019 | ||
BG | 18.12.2019 | ||
NO | 18.12.2019 | ||
GR | 19.12.2019 | ||
IS | 19.01.2020 | ||
PT | 20.01.2020 | ||
Former [2020/36] | AL | 18.09.2019 | |
AT | 18.09.2019 | ||
CZ | 18.09.2019 | ||
DK | 18.09.2019 | ||
EE | 18.09.2019 | ||
ES | 18.09.2019 | ||
FI | 18.09.2019 | ||
HR | 18.09.2019 | ||
IT | 18.09.2019 | ||
LT | 18.09.2019 | ||
LV | 18.09.2019 | ||
NL | 18.09.2019 | ||
PL | 18.09.2019 | ||
RO | 18.09.2019 | ||
RS | 18.09.2019 | ||
SE | 18.09.2019 | ||
SK | 18.09.2019 | ||
SM | 18.09.2019 | ||
BG | 18.12.2019 | ||
NO | 18.12.2019 | ||
GR | 19.12.2019 | ||
IS | 19.01.2020 | ||
PT | 20.01.2020 | ||
Former [2020/27] | AL | 18.09.2019 | |
AT | 18.09.2019 | ||
CZ | 18.09.2019 | ||
EE | 18.09.2019 | ||
ES | 18.09.2019 | ||
FI | 18.09.2019 | ||
HR | 18.09.2019 | ||
IT | 18.09.2019 | ||
LT | 18.09.2019 | ||
LV | 18.09.2019 | ||
NL | 18.09.2019 | ||
PL | 18.09.2019 | ||
RO | 18.09.2019 | ||
RS | 18.09.2019 | ||
SE | 18.09.2019 | ||
SK | 18.09.2019 | ||
SM | 18.09.2019 | ||
BG | 18.12.2019 | ||
NO | 18.12.2019 | ||
GR | 19.12.2019 | ||
PT | 20.01.2020 | ||
IS | 24.02.2020 | ||
Former [2020/25] | AL | 18.09.2019 | |
AT | 18.09.2019 | ||
CZ | 18.09.2019 | ||
EE | 18.09.2019 | ||
ES | 18.09.2019 | ||
FI | 18.09.2019 | ||
HR | 18.09.2019 | ||
IT | 18.09.2019 | ||
LT | 18.09.2019 | ||
LV | 18.09.2019 | ||
NL | 18.09.2019 | ||
PL | 18.09.2019 | ||
RO | 18.09.2019 | ||
RS | 18.09.2019 | ||
SE | 18.09.2019 | ||
SK | 18.09.2019 | ||
BG | 18.12.2019 | ||
NO | 18.12.2019 | ||
GR | 19.12.2019 | ||
PT | 20.01.2020 | ||
IS | 24.02.2020 | ||
Former [2020/24] | AL | 18.09.2019 | |
AT | 18.09.2019 | ||
EE | 18.09.2019 | ||
ES | 18.09.2019 | ||
FI | 18.09.2019 | ||
HR | 18.09.2019 | ||
IT | 18.09.2019 | ||
LT | 18.09.2019 | ||
LV | 18.09.2019 | ||
NL | 18.09.2019 | ||
PL | 18.09.2019 | ||
RO | 18.09.2019 | ||
RS | 18.09.2019 | ||
SE | 18.09.2019 | ||
BG | 18.12.2019 | ||
NO | 18.12.2019 | ||
GR | 19.12.2019 | ||
PT | 20.01.2020 | ||
IS | 24.02.2020 | ||
Former [2020/23] | AL | 18.09.2019 | |
AT | 18.09.2019 | ||
EE | 18.09.2019 | ||
ES | 18.09.2019 | ||
FI | 18.09.2019 | ||
HR | 18.09.2019 | ||
IT | 18.09.2019 | ||
LT | 18.09.2019 | ||
LV | 18.09.2019 | ||
NL | 18.09.2019 | ||
PL | 18.09.2019 | ||
RO | 18.09.2019 | ||
RS | 18.09.2019 | ||
SE | 18.09.2019 | ||
BG | 18.12.2019 | ||
NO | 18.12.2019 | ||
GR | 19.12.2019 | ||
PT | 20.01.2020 | ||
Former [2020/22] | AL | 18.09.2019 | |
EE | 18.09.2019 | ||
FI | 18.09.2019 | ||
HR | 18.09.2019 | ||
LT | 18.09.2019 | ||
LV | 18.09.2019 | ||
NL | 18.09.2019 | ||
RS | 18.09.2019 | ||
SE | 18.09.2019 | ||
BG | 18.12.2019 | ||
NO | 18.12.2019 | ||
GR | 19.12.2019 | ||
PT | 20.01.2020 | ||
Former [2020/20] | AL | 18.09.2019 | |
FI | 18.09.2019 | ||
HR | 18.09.2019 | ||
LT | 18.09.2019 | ||
LV | 18.09.2019 | ||
NL | 18.09.2019 | ||
RS | 18.09.2019 | ||
SE | 18.09.2019 | ||
BG | 18.12.2019 | ||
NO | 18.12.2019 | ||
GR | 19.12.2019 | ||
Former [2020/15] | AL | 18.09.2019 | |
FI | 18.09.2019 | ||
HR | 18.09.2019 | ||
LT | 18.09.2019 | ||
LV | 18.09.2019 | ||
RS | 18.09.2019 | ||
SE | 18.09.2019 | ||
BG | 18.12.2019 | ||
NO | 18.12.2019 | ||
GR | 19.12.2019 | ||
Former [2020/12] | FI | 18.09.2019 | |
HR | 18.09.2019 | ||
LT | 18.09.2019 | ||
LV | 18.09.2019 | ||
RS | 18.09.2019 | ||
SE | 18.09.2019 | ||
BG | 18.12.2019 | ||
NO | 18.12.2019 | ||
GR | 19.12.2019 | ||
Former [2020/10] | FI | 18.09.2019 | |
LT | 18.09.2019 | ||
SE | 18.09.2019 | ||
BG | 18.12.2019 | ||
NO | 18.12.2019 | ||
Former [2020/09] | FI | 18.09.2019 | |
LT | 18.09.2019 | ||
NO | 18.12.2019 | ||
Former [2020/08] | LT | 18.09.2019 | |
NO | 18.12.2019 | Documents cited: | Search | [A]JP2008074928 (HITACHI CHEMICAL CO LTD) [A] 1-10* the whole document *; | [A]JP2012234804 (SUMITOMO ELECTRIC INDUSTRIES) [A] 1-10 * paragraphs [0029] - [0036]; figure 3 *; | [A]EP2833394 (DEXERIALS CORP [JP]) [A] 1-10 * paragraphs [0035] - [0044]; figures 1-3 * | International search | [A]JP2002252254 (SONY CHEMICALS) [A] 1-10* , paragraphs [0031] to [0061] & US 2004/0079464 A1 paragraphs [0062] to [0097] & WO 2002/071469 A1 & TW 523885 B & CN 1505835 A & HK 1064804 A & KR 10-0790671 B1 *; | [A]WO2013080708 (TORAY INDUSTRIES [JP]) [A] 1-10 * , paragraphs [0109] to [0114] & US 2014/0291870 A1 paragraph [0146] & EP 2787039 A1 & CN 103958602 A & KR 10-2014-0103943 A & TW 201333098 A *; | [A]JP2013211352 (DEXERIALS CORP) [A] 1-10 * , paragraphs [0049] to [0154] & US 2015/0140738 A1 paragraphs [0057] to [0158] & WO 2013/146141 A1 & EP 2833394 A1 & TW 201351588 A & KR 10-2015-0001769 A * |