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Extract from the Register of European Patents

EP About this file: EP3375006

EP3375006 - SPUTTERING ARRANGEMENT AND SPUTTERING METHOD FOR OPTIMIZED DISTRIBUTION OF THE ENERGY FLOW [Right-click to bookmark this link]
Status	No opposition filed within time limit Status updated on 18.03.2022 Database last updated on 15.07.2024
Former	The patent has been granted Status updated on 09.04.2021
Former	Grant of patent is intended Status updated on 07.12.2020
Former	Request for examination was made Status updated on 18.11.2020
Former	Grant of patent is intended Status updated on 30.07.2020
Former	Request for examination was made Status updated on 17.08.2018
Former	The international publication has been made Status updated on 19.05.2017
Former	unknown Status updated on 30.11.2016
Most recent event Tooltip	27.04.2024	Lapse of the patent in a contracting state New state(s): MK	published on 29.05.2024 [2024/22]
Applicant(s)	For all designated states Oerlikon Surface Solutions AG, Pfäffikon Churerstrasse 120 8808 Pfäffikon / CH
	[2018/38]
Inventor(s)	01 / KRASSNITZER, Siegfried Runastrasse 40A 6800 Feldkirch / AT
	02 / LENDI, Daniel Staatsstrasse 60 9472 Grabs / CH
	03 / KURAPOV, Denis Schulhausgasse 14 8880 Walenstadt / CH
	[2018/38]
Representative(s)	Misselhorn, Hein-Martin Patent- und Rechtsanwalt Am Stein 10 85049 Ingolstadt / DE
	[N/P]
Former [2018/38]	Misselhorn, Hein-Martin Patent- und Rechtsanwalt Donaustrasse 6 85049 Ingolstadt / DE
Application number, filing date	16798404.6	14.11.2016
	[2018/38]
	WO2016EP01891
Priority number, date	US201562254451P	12.11.2015 Original published format: US 201562254451 P
	[2018/38]
Filing language	DE
Procedural language	DE
Publication	Type:	A1 Application with search report
	No.:	WO2017080672
	Date:	18.05.2017
	Language:	DE
	[2017/20]
	Type:	A1 Application with search report
	No.:	EP3375006
	Date:	19.09.2018
	Language:	DE
	The application published by WIPO in one of the EPO official languages on 18.05.2017 takes the place of the publication of the European patent application.
	[2018/38]
	Type:	B1 Patent specification
	No.:	EP3375006
	Date:	12.05.2021
	Language:	DE
	[2021/19]
Search report(s)	International search report - published on:	EP	18.05.2017
Classification	IPC:	H01J37/34, C23C14/34	[2018/38]
	CPC:	H01J37/3467 (EP,IL,KR,US); C23C14/3485 (EP,IL,KR,RU,US); H01J37/3444 (EP,IL,KR,US)
Designated contracting states	AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LI, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR [2018/38]
Extension states	BA	Not yet paid
	ME	Not yet paid
Validation states	MA	Not yet paid
	MD	Not yet paid
Title	German:	SPUTTER-ANORDNUNG UND - VERFAHREN ZUR OPTIMIERTEN VERTEILUNG DES ENERGIEFLUSSES	[2018/38]
	English:	SPUTTERING ARRANGEMENT AND SPUTTERING METHOD FOR OPTIMIZED DISTRIBUTION OF THE ENERGY FLOW	[2018/38]
	French:	SYSTÈME DE PULVÉRISATION CATHODIQUE ET PROCÉDÉ PERMETTANT UNE RÉPARTITION OPTIMISÉE DU FLUX ÉNERGÉTIQUE	[2018/38]
Entry into regional phase	11.05.2018	National basic fee paid
	11.05.2018	Designation fee(s) paid
	11.05.2018	Examination fee paid
Examination procedure	11.05.2018	Examination requested [2018/38]
	11.05.2018	Date on which the examining division has become responsible
	20.12.2018	Amendment by applicant (claims and/or description)
	31.07.2020	Communication of intention to grant the patent
	17.11.2020	Disapproval of the communication of intention to grant the patent by the applicant or resumption of examination proceedings by the EPO
	08.12.2020	Communication of intention to grant the patent
	31.03.2021	Fee for grant paid
	31.03.2021	Fee for publishing/printing paid
	31.03.2021	Receipt of the translation of the claim(s)
Opposition(s)	15.02.2022	No opposition filed within time limit [2022/16]
Fees paid	Renewal fee
	29.11.2018	Renewal fee patent year 03
	21.11.2019	Renewal fee patent year 04
	19.11.2020	Renewal fee patent year 05
Opt-out from the exclusive Tooltip competence of the Unified Patent Court	See the Register of the Unified Patent Court for opt-out data
	Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court.
Lapses during opposition Tooltip	AL	12.05.2021
	CY	12.05.2021
	DK	12.05.2021
	EE	12.05.2021
	FI	12.05.2021
	HR	12.05.2021
	LT	12.05.2021
	LV	12.05.2021
	MC	12.05.2021
	MK	12.05.2021
	RO	12.05.2021
	RS	12.05.2021
	SI	12.05.2021
	SM	12.05.2021
	BG	12.08.2021
	NO	12.08.2021
	GR	13.08.2021
	IS	12.09.2021
	PT	13.09.2021
	AT	14.11.2021
	IE	14.11.2021
	[2024/22]
Former [2023/30]	AL	12.05.2021
	CY	12.05.2021
	DK	12.05.2021
	EE	12.05.2021
	FI	12.05.2021
	HR	12.05.2021
	LT	12.05.2021
	LV	12.05.2021
	MC	12.05.2021
	RO	12.05.2021
	RS	12.05.2021
	SI	12.05.2021
	SM	12.05.2021
	BG	12.08.2021
	NO	12.08.2021
	GR	13.08.2021
	IS	12.09.2021
	PT	13.09.2021
	AT	14.11.2021
	IE	14.11.2021
Former [2023/07]	AL	12.05.2021
	DK	12.05.2021
	EE	12.05.2021
	FI	12.05.2021
	HR	12.05.2021
	LT	12.05.2021
	LV	12.05.2021
	MC	12.05.2021
	RO	12.05.2021
	RS	12.05.2021
	SI	12.05.2021
	SM	12.05.2021
	BG	12.08.2021
	NO	12.08.2021
	GR	13.08.2021
	IS	12.09.2021
	PT	13.09.2021
	AT	14.11.2021
	IE	14.11.2021
Former [2022/48]	AL	12.05.2021
	DK	12.05.2021
	EE	12.05.2021
	FI	12.05.2021
	HR	12.05.2021
	LT	12.05.2021
	LV	12.05.2021
	MC	12.05.2021
	RO	12.05.2021
	RS	12.05.2021
	SI	12.05.2021
	SM	12.05.2021
	BG	12.08.2021
	NO	12.08.2021
	GR	13.08.2021
	IS	12.09.2021
	PT	13.09.2021
	IE	14.11.2021
Former [2022/33]	AL	12.05.2021
	DK	12.05.2021
	EE	12.05.2021
	FI	12.05.2021
	HR	12.05.2021
	LT	12.05.2021
	LV	12.05.2021
	MC	12.05.2021
	RO	12.05.2021
	RS	12.05.2021
	SI	12.05.2021
	SM	12.05.2021
	BG	12.08.2021
	NO	12.08.2021
	GR	13.08.2021
	IS	12.09.2021
	PT	13.09.2021
Former [2022/29]	AL	12.05.2021
	DK	12.05.2021
	EE	12.05.2021
	FI	12.05.2021
	HR	12.05.2021
	LT	12.05.2021
	LV	12.05.2021
	RO	12.05.2021
	RS	12.05.2021
	SI	12.05.2021
	SM	12.05.2021
	BG	12.08.2021
	NO	12.08.2021
	GR	13.08.2021
	IS	12.09.2021
	PT	13.09.2021
Former [2022/26]	AL	12.05.2021
	DK	12.05.2021
	EE	12.05.2021
	FI	12.05.2021
	HR	12.05.2021
	LT	12.05.2021
	LV	12.05.2021
	RO	12.05.2021
	RS	12.05.2021
	SM	12.05.2021
	BG	12.08.2021
	NO	12.08.2021
	GR	13.08.2021
	IS	12.09.2021
	PT	13.09.2021
Former [2022/23]	DK	12.05.2021
	EE	12.05.2021
	FI	12.05.2021
	HR	12.05.2021
	LT	12.05.2021
	LV	12.05.2021
	RO	12.05.2021
	RS	12.05.2021
	SM	12.05.2021
	BG	12.08.2021
	NO	12.08.2021
	GR	13.08.2021
	IS	12.09.2021
	PT	13.09.2021
Former [2022/10]	DK	12.05.2021
	EE	12.05.2021
	FI	12.05.2021
	HR	12.05.2021
	LT	12.05.2021
	LV	12.05.2021
	RO	12.05.2021
	RS	12.05.2021
	SM	12.05.2021
	BG	12.08.2021
	NO	12.08.2021
	GR	13.08.2021
	PT	13.09.2021
	IS	29.12.2021
Former [2022/08]	DK	12.05.2021
	FI	12.05.2021
	HR	12.05.2021
	LT	12.05.2021
	LV	12.05.2021
	RS	12.05.2021
	SM	12.05.2021
	BG	12.08.2021
	NO	12.08.2021
	GR	13.08.2021
	IS	12.09.2021
	PT	13.09.2021
Former [2022/07]	FI	12.05.2021
	HR	12.05.2021
	LT	12.05.2021
	LV	12.05.2021
	RS	12.05.2021
	SM	12.05.2021
	BG	12.08.2021
	NO	12.08.2021
	GR	13.08.2021
	IS	12.09.2021
	PT	13.09.2021
Former [2021/51]	FI	12.05.2021
	HR	12.05.2021
	LT	12.05.2021
	LV	12.05.2021
	RS	12.05.2021
	BG	12.08.2021
	NO	12.08.2021
	GR	13.08.2021
	IS	12.09.2021
	PT	13.09.2021
Former [2021/50]	FI	12.05.2021
	HR	12.05.2021
	LT	12.05.2021
	LV	12.05.2021
	BG	12.08.2021
	NO	12.08.2021
	GR	13.08.2021
	PT	13.09.2021
Former [2021/49]	FI	12.05.2021
	HR	12.05.2021
	LT	12.05.2021
	LV	12.05.2021
	BG	12.08.2021
	NO	12.08.2021
	GR	13.08.2021
Former [2021/47]	FI	12.05.2021
	LT	12.05.2021
	BG	12.08.2021
Former [2021/46]	FI	12.05.2021
	LT	12.05.2021
Cited in	International search	[A]DE19651615 (FRAUNHOFER GES FORSCHUNG [DE], et al) [A] 1-8* the whole document *;
		[X]DE102011018363 (OERLIKON TRADING AG [CH]) [X] 1-8 * figures 2a, 2b, 3 * * paragraph [0004] * * paragraph [0026] - paragraph [0029] * * paragraph [0031] - paragraph [0033] * * paragraph [0038] - paragraph [0039] *;
		[X]US2014248100 (KRASSNITZER SIEGFRIED [AT]) [X] 1-8 * figures 1,2 * * paragraph [0031] - paragraph [0032] * * paragraph [0039] - paragraph [0040] *
	by applicant	EP2272080
		WO2012143091

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