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Extract from the Register of European Patents

EP About this file: EP3321391

EP3321391 - CHEMICAL VAPOR DEPOSITION DEVICE AND CHEMICAL VAPOR DEPOSITION METHOD [Right-click to bookmark this link]
StatusThe application is deemed to be withdrawn
Status updated on  10.01.2020
Database last updated on 11.09.2024
FormerRequest for examination was made
Status updated on  13.04.2018
FormerThe international publication has been made
Status updated on  20.01.2017
Most recent event   Tooltip10.01.2020Application deemed to be withdrawnpublished on 12.02.2020  [2020/07]
Applicant(s)For all designated states
Mitsubishi Materials Corporation
2-3, Marunouchi 3-chome
Chiyoda-ku
Tokyo 100-8117 / JP
[2019/32]
Former [2018/20]For all designated states
Mitsubishi Materials Corporation
3-2, Otemachi 1-chome Chiyoda-ku
Tokyo 100-8117 / JP
Inventor(s)01 / TATSUOKA Sho
c/o MITSUBISHI MATERIALS CORPORATION
Central Research Institute
1002-14 Mukohyama
Naka-shi Ibaraki 311-0102 / JP
02 / YAMAGUCHI Kenji
c/o MITSUBISHI MATERIALS CORPORATION
Central Research Institute
1002-14 Mukohyama
Naka-shi Ibaraki 311-0102 / JP
 [2018/20]
Representative(s)Gille Hrabal Partnerschaftsgesellschaft mbB Patentanwälte
Brucknerstraße 20
40593 Düsseldorf / DE
[N/P]
Former [2018/20]Gille Hrabal
Brucknerstrasse 20
40593 Düsseldorf / DE
Application number, filing date16824406.908.07.2016
[2018/20]
WO2016JP70292
Priority number, dateJP2015013872110.07.2015         Original published format: JP 2015138721
JP2016013527507.07.2016         Original published format: JP 2016135275
[2018/20]
Filing languageJA
Procedural languageEN
PublicationType: A1 Application with search report
No.:WO2017010426
Date:19.01.2017
Language:JA
[2017/03]
Type: A1 Application with search report 
No.:EP3321391
Date:16.05.2018
Language:EN
[2018/20]
Search report(s)International search report - published on:JP19.01.2017
(Supplementary) European search report - dispatched on:EP21.01.2019
ClassificationIPC:C23C16/455, B23B27/14
[2018/20]
CPC:
C23C16/34 (EP,KR,US); C23C16/45589 (KR); C23C16/455 (US);
C23C16/45574 (EP,KR,US); C23C16/45576 (EP,US); C23C16/45578 (EP,KR,US);
C23C16/4583 (EP,KR,US); B23B2228/04 (KR); B23B2228/10 (KR) (-)
Designated contracting statesAL,   AT,   BE,   BG,   CH,   CY,   CZ,   DE,   DK,   EE,   ES,   FI,   FR,   GB,   GR,   HR,   HU,   IE,   IS,   IT,   LI,   LT,   LU,   LV,   MC,   MK,   MT,   NL,   NO,   PL,   PT,   RO,   RS,   SE,   SI,   SK,   SM,   TR [2018/20]
TitleGerman:VORRICHTUNG UND VERFAHREN ZUR CHEMISCHEN DAMPFPHASENABSCHEIDUNG[2018/20]
English:CHEMICAL VAPOR DEPOSITION DEVICE AND CHEMICAL VAPOR DEPOSITION METHOD[2018/20]
French:DISPOSITIF DE DÉPÔT CHIMIQUE EN PHASE VAPEUR ET PROCÉDÉ DE DÉPÔT CHIMIQUE EN PHASE VAPEUR[2018/20]
Entry into regional phase05.01.2018Translation filed 
05.01.2018National basic fee paid 
05.01.2018Search fee paid 
05.01.2018Designation fee(s) paid 
05.01.2018Examination fee paid 
Examination procedure05.01.2018Examination requested  [2018/20]
05.01.2018Date on which the examining division has become responsible
13.02.2019Application deemed to be withdrawn, date of legal effect  [2020/07]
24.09.2019Despatch of communication that the application is deemed to be withdrawn, reason: reply to the communication from the examining division not received in time  [2020/07]
Fees paidRenewal fee
23.07.2018Renewal fee patent year 03
Penalty fee
Additional fee for renewal fee
31.07.201904   M06   Not yet paid
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Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court.
Documents cited:Search[Y]US2012103260  (PARK SANG JOON [KR], et al) [Y] 1-10 * paragraph [0023] - paragraph [0056] *;
 [Y]JP2012533876  [Y] 1-10* paragraph [0014] - paragraph [0047] *;
 [Y]JP2014129562  (SUMITOMO ELEC HARDMETAL CORP) [Y] 1-10 * paragraph [0065] *;
 [X]EP2869334  (TGO TECH CORP [KR]) [X] 1-7,9,10 * paragraph [0023] - paragraph [0043]; figures 1-5 *;
 [X]JP2015124407  (SUMITOMO ELEC HARDMETAL CORP) [X] 1-10 * paragraph [0082] * * paragraph [0098]; table 5 * * paragraph [0070] - paragraph [0100]; figures 1-3 *;
 [YP]US2015345013  (PASEUTH ANONGSACK [JP], et al) [YP] 1-10 * paragraph [0065] *
International search[Y]JP2012533876  (Wonik IPS Co., Ltd.) [Y] 1-10 * , paragraphs [0014] to [0047] & US 2012/0103260 A1 paragraphs [0023] to [0056] & WO 2011/007967 A2 & KR 10-2011-0007434 A & TW 201115673 A & CN 102576669 A *;
 [Y]JPH08250429  (HITACHI LTD, et al) [Y] 1-10 * , paragraphs [0011] to [0029] (Family: none) *;
 [Y]JP2014129562  (SUMITOMO ELEC HARDMETAL CORP) [Y] 1-10 * , paragraphs [0017] to [0095] & US 2015/0345013 A1 paragraphs [0017] to [0136] & WO 2014/103533 A1 & EP 2940181 A1 & CN 104870685 A & KR 10-2015-0101448 A *
The EPO accepts no responsibility for the accuracy of data originating from other authorities; in particular, it does not guarantee that it is complete, up to date or fit for specific purposes.