EP3516684 - METHOD AND APPARATUS FOR CLEANING SUBSTRATES [Right-click to bookmark this link] | |||
Former [2019/31] | METHODS AND APPARATUS FOR CLEANING SUBSTRATES | ||
[2020/34] | Status | No opposition filed within time limit Status updated on 26.11.2021 Database last updated on 09.09.2024 | |
Former | The patent has been granted Status updated on 18.12.2020 | ||
Former | Grant of patent is intended Status updated on 18.08.2020 | ||
Former | Request for examination was made Status updated on 28.06.2019 | ||
Former | The international publication has been made Status updated on 30.03.2018 | Most recent event Tooltip | 14.06.2024 | Lapse of the patent in a contracting state New state(s): TR | published on 17.07.2024 [2024/29] | Applicant(s) | For all designated states ACM Research (Shanghai) Inc. Bld. 4, No. 1690 Cailun Road Zhangjiang High-Tech Park Shanghai 201203 / CN | [2019/31] | Inventor(s) | 01 /
WANG, Hui Bld. 4 No. 1690 Cailun Road Zhangjiang High-Tech Park Shanghai 201203 / CN | 02 /
WANG, Xi Bld. 4 No. 1690 Cailun Road Zhangjiang High-Tech Park Shanghai 201203 / CN | 03 /
CHEN, Fuping Bld. 4 No. 1690 Cailun Road Zhangjiang High-Tech Park Shanghai 201203 / CN | 04 /
CHEN, Fufa Bld. 4 No. 1690 Cailun Road Zhangjiang High-Tech Park Shanghai 201203 / CN | 05 /
WANG, Jian Bld. 4 No. 1690 Cailun Road Zhangjiang High-Tech Park Shanghai 201203 / CN | 06 /
ZHANG, Xiaoyan Bld. 4 No. 1690 Cailun Road Zhangjiang High-Tech Park Shanghai 201203 / CN | 07 /
JIN, Yinuo Bld. 4 No. 1690 Cailun Road Zhangjiang High-Tech Park Shanghai 201203 / CN | 08 /
JIA, Zhaowei Bld. 4 No. 1690 Cailun Road Zhangjiang High-Tech Park Shanghai 201203 / CN | 09 /
WANG, Jun Bld. 4 No. 1690 Cailun Road Zhangjiang High-Tech Park Shanghai 201203 / CN | 10 /
LI, Xuejun Bld. 4 No. 1690 Cailun Road Zhangjiang High-Tech Park Shanghai 201203 / CN | [2019/31] | Representative(s) | Osha BWB 2, rue de la Paix 75002 Paris / FR | [N/P] |
Former [2019/31] | Osha Liang 2, rue de la Paix 75002 Paris / FR | Application number, filing date | 16916419.1 | 20.09.2016 | [2019/31] | WO2016CN99428 | Filing language | EN | Procedural language | EN | Publication | Type: | A1 Application with search report | No.: | WO2018053678 | Date: | 29.03.2018 | Language: | EN | [2018/13] | Type: | A1 Application with search report | No.: | EP3516684 | Date: | 31.07.2019 | Language: | EN | The application published by WIPO in one of the EPO official languages on 29.03.2018 takes the place of the publication of the European patent application. | [2019/31] | Type: | B1 Patent specification | No.: | EP3516684 | Date: | 20.01.2021 | Language: | EN | [2021/03] | Search report(s) | International search report - published on: | CN | 29.03.2018 | (Supplementary) European search report - dispatched on: | EP | 04.05.2020 | Classification | IPC: | H01L21/67 | [2019/31] | CPC: |
H01L21/67253 (EP,KR,US);
H01L21/02041 (KR);
H01L21/67051 (EP,US);
H01L21/02068 (US);
H01L21/02307 (KR);
H01L21/67028 (KR);
H01L21/67057 (EP,US);
H01L21/67098 (KR);
H01L21/67248 (KR);
| Designated contracting states | AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LI, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR [2019/31] | Extension states | BA | Not yet paid | ME | Not yet paid | Validation states | MA | Not yet paid | MD | Not yet paid | Title | German: | VERFAHREN UND VORRICHTUNG ZUR REINIGUNG VON SUBSTRATEN | [2019/31] | English: | METHOD AND APPARATUS FOR CLEANING SUBSTRATES | [2020/34] | French: | PROCÉDÉ ET DISPOSITIF DE NETTOYAGE DE SUBSTRATS | [2020/34] |
Former [2019/31] | METHODS AND APPARATUS FOR CLEANING SUBSTRATES | ||
Former [2019/31] | PROCÉDÉS ET DISPOSITIFS DE NETTOYAGE DE SUBSTRATS | Entry into regional phase | 19.04.2019 | National basic fee paid | 19.04.2019 | Search fee paid | 19.04.2019 | Designation fee(s) paid | 19.04.2019 | Examination fee paid | Examination procedure | 17.04.2019 | Amendment by applicant (claims and/or description) | 19.04.2019 | Examination requested [2019/31] | 19.08.2020 | Communication of intention to grant the patent | 02.12.2020 | Receipt of the translation of the claim(s) | 14.12.2020 | Fee for grant paid | 14.12.2020 | Fee for publishing/printing paid | Opposition(s) | 21.10.2021 | No opposition filed within time limit [2021/52] | Fees paid | Renewal fee | 22.04.2019 | Renewal fee patent year 03 | 17.09.2019 | Renewal fee patent year 04 | 11.09.2020 | Renewal fee patent year 05 |
Opt-out from the exclusive Tooltip competence of the Unified Patent Court | See the Register of the Unified Patent Court for opt-out data | ||
Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court. | Lapses during opposition Tooltip | HU | 20.09.2016 | AL | 20.01.2021 | AT | 20.01.2021 | CY | 20.01.2021 | CZ | 20.01.2021 | DK | 20.01.2021 | EE | 20.01.2021 | ES | 20.01.2021 | FI | 20.01.2021 | HR | 20.01.2021 | IT | 20.01.2021 | LT | 20.01.2021 | LV | 20.01.2021 | MC | 20.01.2021 | MK | 20.01.2021 | PL | 20.01.2021 | RO | 20.01.2021 | RS | 20.01.2021 | SE | 20.01.2021 | SI | 20.01.2021 | SK | 20.01.2021 | SM | 20.01.2021 | TR | 20.01.2021 | BG | 20.04.2021 | NO | 20.04.2021 | GR | 21.04.2021 | IS | 20.05.2021 | PT | 20.05.2021 | IE | 20.09.2021 | LU | 20.09.2021 | CH | 30.09.2021 | LI | 30.09.2021 | [2024/29] |
Former [2024/22] | HU | 20.09.2016 | |
AL | 20.01.2021 | ||
AT | 20.01.2021 | ||
CY | 20.01.2021 | ||
CZ | 20.01.2021 | ||
DK | 20.01.2021 | ||
EE | 20.01.2021 | ||
ES | 20.01.2021 | ||
FI | 20.01.2021 | ||
HR | 20.01.2021 | ||
IT | 20.01.2021 | ||
LT | 20.01.2021 | ||
LV | 20.01.2021 | ||
MC | 20.01.2021 | ||
MK | 20.01.2021 | ||
PL | 20.01.2021 | ||
RO | 20.01.2021 | ||
RS | 20.01.2021 | ||
SE | 20.01.2021 | ||
SI | 20.01.2021 | ||
SK | 20.01.2021 | ||
SM | 20.01.2021 | ||
BG | 20.04.2021 | ||
NO | 20.04.2021 | ||
GR | 21.04.2021 | ||
IS | 20.05.2021 | ||
PT | 20.05.2021 | ||
IE | 20.09.2021 | ||
LU | 20.09.2021 | ||
CH | 30.09.2021 | ||
LI | 30.09.2021 | ||
Former [2023/33] | HU | 20.09.2016 | |
AL | 20.01.2021 | ||
AT | 20.01.2021 | ||
CY | 20.01.2021 | ||
CZ | 20.01.2021 | ||
DK | 20.01.2021 | ||
EE | 20.01.2021 | ||
ES | 20.01.2021 | ||
FI | 20.01.2021 | ||
HR | 20.01.2021 | ||
IT | 20.01.2021 | ||
LT | 20.01.2021 | ||
LV | 20.01.2021 | ||
MC | 20.01.2021 | ||
PL | 20.01.2021 | ||
RO | 20.01.2021 | ||
RS | 20.01.2021 | ||
SE | 20.01.2021 | ||
SI | 20.01.2021 | ||
SK | 20.01.2021 | ||
SM | 20.01.2021 | ||
BG | 20.04.2021 | ||
NO | 20.04.2021 | ||
GR | 21.04.2021 | ||
IS | 20.05.2021 | ||
PT | 20.05.2021 | ||
IE | 20.09.2021 | ||
LU | 20.09.2021 | ||
CH | 30.09.2021 | ||
LI | 30.09.2021 | ||
Former [2023/30] | AL | 20.01.2021 | |
AT | 20.01.2021 | ||
CY | 20.01.2021 | ||
CZ | 20.01.2021 | ||
DK | 20.01.2021 | ||
EE | 20.01.2021 | ||
ES | 20.01.2021 | ||
FI | 20.01.2021 | ||
HR | 20.01.2021 | ||
IT | 20.01.2021 | ||
LT | 20.01.2021 | ||
LV | 20.01.2021 | ||
MC | 20.01.2021 | ||
PL | 20.01.2021 | ||
RO | 20.01.2021 | ||
RS | 20.01.2021 | ||
SE | 20.01.2021 | ||
SI | 20.01.2021 | ||
SK | 20.01.2021 | ||
SM | 20.01.2021 | ||
BG | 20.04.2021 | ||
NO | 20.04.2021 | ||
GR | 21.04.2021 | ||
IS | 20.05.2021 | ||
PT | 20.05.2021 | ||
IE | 20.09.2021 | ||
LU | 20.09.2021 | ||
CH | 30.09.2021 | ||
LI | 30.09.2021 | ||
Former [2022/37] | AL | 20.01.2021 | |
AT | 20.01.2021 | ||
CZ | 20.01.2021 | ||
DK | 20.01.2021 | ||
EE | 20.01.2021 | ||
ES | 20.01.2021 | ||
FI | 20.01.2021 | ||
HR | 20.01.2021 | ||
IT | 20.01.2021 | ||
LT | 20.01.2021 | ||
LV | 20.01.2021 | ||
MC | 20.01.2021 | ||
PL | 20.01.2021 | ||
RO | 20.01.2021 | ||
RS | 20.01.2021 | ||
SE | 20.01.2021 | ||
SI | 20.01.2021 | ||
SK | 20.01.2021 | ||
SM | 20.01.2021 | ||
BG | 20.04.2021 | ||
NO | 20.04.2021 | ||
GR | 21.04.2021 | ||
IS | 20.05.2021 | ||
PT | 20.05.2021 | ||
IE | 20.09.2021 | ||
LU | 20.09.2021 | ||
CH | 30.09.2021 | ||
LI | 30.09.2021 | ||
Former [2022/35] | AL | 20.01.2021 | |
AT | 20.01.2021 | ||
CZ | 20.01.2021 | ||
DK | 20.01.2021 | ||
EE | 20.01.2021 | ||
ES | 20.01.2021 | ||
FI | 20.01.2021 | ||
HR | 20.01.2021 | ||
IT | 20.01.2021 | ||
LT | 20.01.2021 | ||
LV | 20.01.2021 | ||
MC | 20.01.2021 | ||
PL | 20.01.2021 | ||
RO | 20.01.2021 | ||
RS | 20.01.2021 | ||
SE | 20.01.2021 | ||
SI | 20.01.2021 | ||
SK | 20.01.2021 | ||
SM | 20.01.2021 | ||
BG | 20.04.2021 | ||
NO | 20.04.2021 | ||
GR | 21.04.2021 | ||
IS | 20.05.2021 | ||
PT | 20.05.2021 | ||
IE | 20.09.2021 | ||
LU | 20.09.2021 | ||
Former [2022/34] | AL | 20.01.2021 | |
AT | 20.01.2021 | ||
CZ | 20.01.2021 | ||
DK | 20.01.2021 | ||
EE | 20.01.2021 | ||
ES | 20.01.2021 | ||
FI | 20.01.2021 | ||
HR | 20.01.2021 | ||
IT | 20.01.2021 | ||
LT | 20.01.2021 | ||
LV | 20.01.2021 | ||
MC | 20.01.2021 | ||
PL | 20.01.2021 | ||
RO | 20.01.2021 | ||
RS | 20.01.2021 | ||
SE | 20.01.2021 | ||
SI | 20.01.2021 | ||
SK | 20.01.2021 | ||
SM | 20.01.2021 | ||
BG | 20.04.2021 | ||
NO | 20.04.2021 | ||
GR | 21.04.2021 | ||
IS | 20.05.2021 | ||
PT | 20.05.2021 | ||
LU | 20.09.2021 | ||
Former [2022/25] | AL | 20.01.2021 | |
AT | 20.01.2021 | ||
CZ | 20.01.2021 | ||
DK | 20.01.2021 | ||
EE | 20.01.2021 | ||
ES | 20.01.2021 | ||
FI | 20.01.2021 | ||
HR | 20.01.2021 | ||
IT | 20.01.2021 | ||
LT | 20.01.2021 | ||
LV | 20.01.2021 | ||
MC | 20.01.2021 | ||
PL | 20.01.2021 | ||
RO | 20.01.2021 | ||
RS | 20.01.2021 | ||
SE | 20.01.2021 | ||
SI | 20.01.2021 | ||
SK | 20.01.2021 | ||
SM | 20.01.2021 | ||
BG | 20.04.2021 | ||
NO | 20.04.2021 | ||
GR | 21.04.2021 | ||
IS | 20.05.2021 | ||
PT | 20.05.2021 | ||
Former [2022/23] | AL | 20.01.2021 | |
AT | 20.01.2021 | ||
CZ | 20.01.2021 | ||
DK | 20.01.2021 | ||
EE | 20.01.2021 | ||
ES | 20.01.2021 | ||
FI | 20.01.2021 | ||
HR | 20.01.2021 | ||
IT | 20.01.2021 | ||
LT | 20.01.2021 | ||
LV | 20.01.2021 | ||
PL | 20.01.2021 | ||
RO | 20.01.2021 | ||
RS | 20.01.2021 | ||
SE | 20.01.2021 | ||
SI | 20.01.2021 | ||
SK | 20.01.2021 | ||
SM | 20.01.2021 | ||
BG | 20.04.2021 | ||
NO | 20.04.2021 | ||
GR | 21.04.2021 | ||
IS | 20.05.2021 | ||
PT | 20.05.2021 | ||
Former [2022/13] | AL | 20.01.2021 | |
AT | 20.01.2021 | ||
CZ | 20.01.2021 | ||
DK | 20.01.2021 | ||
EE | 20.01.2021 | ||
ES | 20.01.2021 | ||
FI | 20.01.2021 | ||
HR | 20.01.2021 | ||
LT | 20.01.2021 | ||
LV | 20.01.2021 | ||
PL | 20.01.2021 | ||
RO | 20.01.2021 | ||
RS | 20.01.2021 | ||
SE | 20.01.2021 | ||
SI | 20.01.2021 | ||
SK | 20.01.2021 | ||
SM | 20.01.2021 | ||
BG | 20.04.2021 | ||
NO | 20.04.2021 | ||
GR | 21.04.2021 | ||
PT | 20.05.2021 | ||
Former [2022/10] | AL | 20.01.2021 | |
AT | 20.01.2021 | ||
CZ | 20.01.2021 | ||
DK | 20.01.2021 | ||
EE | 20.01.2021 | ||
ES | 20.01.2021 | ||
FI | 20.01.2021 | ||
HR | 20.01.2021 | ||
LT | 20.01.2021 | ||
LV | 20.01.2021 | ||
PL | 20.01.2021 | ||
RO | 20.01.2021 | ||
RS | 20.01.2021 | ||
SE | 20.01.2021 | ||
SK | 20.01.2021 | ||
SM | 20.01.2021 | ||
BG | 20.04.2021 | ||
NO | 20.04.2021 | ||
GR | 21.04.2021 | ||
PT | 20.05.2021 | ||
Former [2022/08] | AL | 20.01.2021 | |
AT | 20.01.2021 | ||
CZ | 20.01.2021 | ||
DK | 20.01.2021 | ||
EE | 20.01.2021 | ||
ES | 20.01.2021 | ||
FI | 20.01.2021 | ||
HR | 20.01.2021 | ||
LT | 20.01.2021 | ||
LV | 20.01.2021 | ||
PL | 20.01.2021 | ||
RO | 20.01.2021 | ||
RS | 20.01.2021 | ||
SE | 20.01.2021 | ||
SK | 20.01.2021 | ||
SM | 20.01.2021 | ||
BG | 20.04.2021 | ||
NO | 20.04.2021 | ||
GR | 21.04.2021 | ||
IS | 20.05.2021 | ||
PT | 20.05.2021 | ||
Former [2022/07] | AL | 20.01.2021 | |
AT | 20.01.2021 | ||
CZ | 20.01.2021 | ||
DK | 20.01.2021 | ||
EE | 20.01.2021 | ||
FI | 20.01.2021 | ||
HR | 20.01.2021 | ||
LT | 20.01.2021 | ||
LV | 20.01.2021 | ||
PL | 20.01.2021 | ||
RO | 20.01.2021 | ||
RS | 20.01.2021 | ||
SE | 20.01.2021 | ||
SK | 20.01.2021 | ||
SM | 20.01.2021 | ||
BG | 20.04.2021 | ||
NO | 20.04.2021 | ||
GR | 21.04.2021 | ||
IS | 20.05.2021 | ||
PT | 20.05.2021 | ||
Former [2021/50] | AT | 20.01.2021 | |
CZ | 20.01.2021 | ||
DK | 20.01.2021 | ||
EE | 20.01.2021 | ||
FI | 20.01.2021 | ||
HR | 20.01.2021 | ||
LT | 20.01.2021 | ||
LV | 20.01.2021 | ||
PL | 20.01.2021 | ||
RO | 20.01.2021 | ||
RS | 20.01.2021 | ||
SE | 20.01.2021 | ||
SK | 20.01.2021 | ||
SM | 20.01.2021 | ||
BG | 20.04.2021 | ||
NO | 20.04.2021 | ||
GR | 21.04.2021 | ||
IS | 20.05.2021 | ||
PT | 20.05.2021 | ||
Former [2021/49] | AT | 20.01.2021 | |
CZ | 20.01.2021 | ||
DK | 20.01.2021 | ||
EE | 20.01.2021 | ||
FI | 20.01.2021 | ||
HR | 20.01.2021 | ||
LT | 20.01.2021 | ||
LV | 20.01.2021 | ||
PL | 20.01.2021 | ||
RS | 20.01.2021 | ||
SE | 20.01.2021 | ||
SM | 20.01.2021 | ||
BG | 20.04.2021 | ||
NO | 20.04.2021 | ||
GR | 21.04.2021 | ||
IS | 20.05.2021 | ||
PT | 20.05.2021 | ||
Former [2021/48] | AT | 20.01.2021 | |
CZ | 20.01.2021 | ||
EE | 20.01.2021 | ||
FI | 20.01.2021 | ||
HR | 20.01.2021 | ||
LT | 20.01.2021 | ||
LV | 20.01.2021 | ||
PL | 20.01.2021 | ||
RS | 20.01.2021 | ||
SE | 20.01.2021 | ||
SM | 20.01.2021 | ||
BG | 20.04.2021 | ||
NO | 20.04.2021 | ||
GR | 21.04.2021 | ||
IS | 20.05.2021 | ||
PT | 20.05.2021 | ||
Former [2021/46] | AT | 20.01.2021 | |
FI | 20.01.2021 | ||
HR | 20.01.2021 | ||
LT | 20.01.2021 | ||
LV | 20.01.2021 | ||
PL | 20.01.2021 | ||
RS | 20.01.2021 | ||
SE | 20.01.2021 | ||
SM | 20.01.2021 | ||
BG | 20.04.2021 | ||
NO | 20.04.2021 | ||
GR | 21.04.2021 | ||
IS | 20.05.2021 | ||
PT | 20.05.2021 | ||
Former [2021/42] | AT | 20.01.2021 | |
FI | 20.01.2021 | ||
HR | 20.01.2021 | ||
LT | 20.01.2021 | ||
LV | 20.01.2021 | ||
PL | 20.01.2021 | ||
RS | 20.01.2021 | ||
SE | 20.01.2021 | ||
BG | 20.04.2021 | ||
NO | 20.04.2021 | ||
GR | 21.04.2021 | ||
IS | 20.05.2021 | ||
PT | 20.05.2021 | ||
Former [2021/39] | AT | 20.01.2021 | |
FI | 20.01.2021 | ||
HR | 20.01.2021 | ||
LT | 20.01.2021 | ||
LV | 20.01.2021 | ||
PL | 20.01.2021 | ||
RS | 20.01.2021 | ||
SE | 20.01.2021 | ||
BG | 20.04.2021 | ||
NO | 20.04.2021 | ||
GR | 21.04.2021 | ||
PT | 20.05.2021 | ||
Former [2021/38] | AT | 20.01.2021 | |
FI | 20.01.2021 | ||
HR | 20.01.2021 | ||
LT | 20.01.2021 | ||
LV | 20.01.2021 | ||
RS | 20.01.2021 | ||
SE | 20.01.2021 | ||
BG | 20.04.2021 | ||
NO | 20.04.2021 | ||
GR | 21.04.2021 | ||
PT | 20.05.2021 | ||
Former [2021/37] | AT | 20.01.2021 | |
FI | 20.01.2021 | ||
HR | 20.01.2021 | ||
LT | 20.01.2021 | ||
LV | 20.01.2021 | ||
RS | 20.01.2021 | ||
BG | 20.04.2021 | ||
NO | 20.04.2021 | ||
GR | 21.04.2021 | ||
PT | 20.05.2021 | ||
Former [2021/36] | FI | 20.01.2021 | |
HR | 20.01.2021 | ||
LT | 20.01.2021 | ||
BG | 20.04.2021 | ||
NO | 20.04.2021 | ||
GR | 21.04.2021 | ||
PT | 20.05.2021 | ||
Former [2021/35] | FI | 20.01.2021 | |
HR | 20.01.2021 | ||
LT | 20.01.2021 | ||
NO | 20.04.2021 | ||
PT | 20.05.2021 | ||
Former [2021/33] | FI | 20.01.2021 | |
LT | 20.01.2021 | ||
NO | 20.04.2021 | ||
PT | 20.05.2021 | Documents cited: | Search | [A]JPH06292942 (METALLGESELLSCHAFT AG) [A] 1-17 * abstract * * claims 1-6 * * paragraphs [0036] , [0042] * * figures 1-5b *; | [A]US2006260641 (WU YI [US], et al) [A] 1-17 * abstract * * claims 1-20 ** figures 1-4B *; | [A]US2009025761 (MATSUMOTO YOUICHIROU [JP], et al) [A] 1-17 * abstract * * claims 1-17 * * paragraphs [0008] , [0009] , [0013] , [0015] , [0019] , [0036] , [0086] , [0088] , [0092] , [0103] , [0105] , [0106] * * figures 1-13 * | International search | [A]JPH10235303 (SHIBAURA ENG WORKS LTD) [A] 1-64* the whole document *; | [A]CN1712144 (TOKYO SHIBAURA ELECTRIC CO [JP]) [A] 1-64 * the whole document *; | [A]US2012097195 (WANG JIAN [CN], et al) [A] 1-64 * description, paragraphs [0028], [0038]-[0055], claims 1, 15 and figure 1 *; | [A]CN104576455 (WUXI DEXIN SOLAR POWER CO LTD) [A] 1-64 * the whole document * |