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Extract from the Register of European Patents

EP About this file: EP3516684

EP3516684 - METHOD AND APPARATUS FOR CLEANING SUBSTRATES [Right-click to bookmark this link]
Former [2019/31]	METHODS AND APPARATUS FOR CLEANING SUBSTRATES
	[2020/34]
Status	No opposition filed within time limit Status updated on 26.11.2021 Database last updated on 09.09.2024
Former	The patent has been granted Status updated on 18.12.2020
Former	Grant of patent is intended Status updated on 18.08.2020
Former	Request for examination was made Status updated on 28.06.2019
Former	The international publication has been made Status updated on 30.03.2018
Most recent event Tooltip	14.06.2024	Lapse of the patent in a contracting state New state(s): TR	published on 17.07.2024 [2024/29]
Applicant(s)	For all designated states ACM Research (Shanghai) Inc. Bld. 4, No. 1690 Cailun Road Zhangjiang High-Tech Park Shanghai 201203 / CN
	[2019/31]
Inventor(s)	01 / WANG, Hui Bld. 4 No. 1690 Cailun Road Zhangjiang High-Tech Park Shanghai 201203 / CN
	02 / WANG, Xi Bld. 4 No. 1690 Cailun Road Zhangjiang High-Tech Park Shanghai 201203 / CN
	03 / CHEN, Fuping Bld. 4 No. 1690 Cailun Road Zhangjiang High-Tech Park Shanghai 201203 / CN
	04 / CHEN, Fufa Bld. 4 No. 1690 Cailun Road Zhangjiang High-Tech Park Shanghai 201203 / CN
	05 / WANG, Jian Bld. 4 No. 1690 Cailun Road Zhangjiang High-Tech Park Shanghai 201203 / CN
	06 / ZHANG, Xiaoyan Bld. 4 No. 1690 Cailun Road Zhangjiang High-Tech Park Shanghai 201203 / CN
	07 / JIN, Yinuo Bld. 4 No. 1690 Cailun Road Zhangjiang High-Tech Park Shanghai 201203 / CN
	08 / JIA, Zhaowei Bld. 4 No. 1690 Cailun Road Zhangjiang High-Tech Park Shanghai 201203 / CN
	09 / WANG, Jun Bld. 4 No. 1690 Cailun Road Zhangjiang High-Tech Park Shanghai 201203 / CN
	10 / LI, Xuejun Bld. 4 No. 1690 Cailun Road Zhangjiang High-Tech Park Shanghai 201203 / CN
	[2019/31]
Representative(s)	Osha BWB 2, rue de la Paix 75002 Paris / FR
	[N/P]
Former [2019/31]	Osha Liang 2, rue de la Paix 75002 Paris / FR
Application number, filing date	16916419.1	20.09.2016
	[2019/31]
	WO2016CN99428
Filing language	EN
Procedural language	EN
Publication	Type:	A1 Application with search report
	No.:	WO2018053678
	Date:	29.03.2018
	Language:	EN
	[2018/13]
	Type:	A1 Application with search report
	No.:	EP3516684
	Date:	31.07.2019
	Language:	EN
	The application published by WIPO in one of the EPO official languages on 29.03.2018 takes the place of the publication of the European patent application.
	[2019/31]
	Type:	B1 Patent specification
	No.:	EP3516684
	Date:	20.01.2021
	Language:	EN
	[2021/03]
Search report(s)	International search report - published on:	CN	29.03.2018
	(Supplementary) European search report - dispatched on:	EP	04.05.2020
Classification	IPC:	H01L21/67	[2019/31]
	CPC:	H01L21/67253 (EP,KR,US); H01L21/02041 (KR); H01L21/67051 (EP,US); H01L21/02068 (US); H01L21/02307 (KR); H01L21/67028 (KR); (+) H01L21/67057 (EP,US); H01L21/67098 (KR); H01L21/67248 (KR); H01L21/68 (US); H01L21/687 (US); Y02P70/50 (EP) (-)
Designated contracting states	AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LI, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR [2019/31]
Extension states	BA	Not yet paid
	ME	Not yet paid
Validation states	MA	Not yet paid
	MD	Not yet paid
Title	German:	VERFAHREN UND VORRICHTUNG ZUR REINIGUNG VON SUBSTRATEN	[2019/31]
	English:	METHOD AND APPARATUS FOR CLEANING SUBSTRATES	[2020/34]
	French:	PROCÉDÉ ET DISPOSITIF DE NETTOYAGE DE SUBSTRATS	[2020/34]
	Former [2019/31]	METHODS AND APPARATUS FOR CLEANING SUBSTRATES
	Former [2019/31]	PROCÉDÉS ET DISPOSITIFS DE NETTOYAGE DE SUBSTRATS
Entry into regional phase	19.04.2019	National basic fee paid
	19.04.2019	Search fee paid
	19.04.2019	Designation fee(s) paid
	19.04.2019	Examination fee paid
Examination procedure	17.04.2019	Amendment by applicant (claims and/or description)
	19.04.2019	Examination requested [2019/31]
	19.08.2020	Communication of intention to grant the patent
	02.12.2020	Receipt of the translation of the claim(s)
	14.12.2020	Fee for grant paid
	14.12.2020	Fee for publishing/printing paid
Opposition(s)	21.10.2021	No opposition filed within time limit [2021/52]
Fees paid	Renewal fee
	22.04.2019	Renewal fee patent year 03
	17.09.2019	Renewal fee patent year 04
	11.09.2020	Renewal fee patent year 05
Opt-out from the exclusive Tooltip competence of the Unified Patent Court	See the Register of the Unified Patent Court for opt-out data
	Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court.
Lapses during opposition Tooltip	HU	20.09.2016
	AL	20.01.2021
	AT	20.01.2021
	CY	20.01.2021
	CZ	20.01.2021
	DK	20.01.2021
	EE	20.01.2021
	ES	20.01.2021
	FI	20.01.2021
	HR	20.01.2021
	IT	20.01.2021
	LT	20.01.2021
	LV	20.01.2021
	MC	20.01.2021
	MK	20.01.2021
	PL	20.01.2021
	RO	20.01.2021
	RS	20.01.2021
	SE	20.01.2021
	SI	20.01.2021
	SK	20.01.2021
	SM	20.01.2021
	TR	20.01.2021
	BG	20.04.2021
	NO	20.04.2021
	GR	21.04.2021
	IS	20.05.2021
	PT	20.05.2021
	IE	20.09.2021
	LU	20.09.2021
	CH	30.09.2021
	LI	30.09.2021
	[2024/29]
Former [2024/22]	HU	20.09.2016
	AL	20.01.2021
	AT	20.01.2021
	CY	20.01.2021
	CZ	20.01.2021
	DK	20.01.2021
	EE	20.01.2021
	ES	20.01.2021
	FI	20.01.2021
	HR	20.01.2021
	IT	20.01.2021
	LT	20.01.2021
	LV	20.01.2021
	MC	20.01.2021
	MK	20.01.2021
	PL	20.01.2021
	RO	20.01.2021
	RS	20.01.2021
	SE	20.01.2021
	SI	20.01.2021
	SK	20.01.2021
	SM	20.01.2021
	BG	20.04.2021
	NO	20.04.2021
	GR	21.04.2021
	IS	20.05.2021
	PT	20.05.2021
	IE	20.09.2021
	LU	20.09.2021
	CH	30.09.2021
	LI	30.09.2021
Former [2023/33]	HU	20.09.2016
	AL	20.01.2021
	AT	20.01.2021
	CY	20.01.2021
	CZ	20.01.2021
	DK	20.01.2021
	EE	20.01.2021
	ES	20.01.2021
	FI	20.01.2021
	HR	20.01.2021
	IT	20.01.2021
	LT	20.01.2021
	LV	20.01.2021
	MC	20.01.2021
	PL	20.01.2021
	RO	20.01.2021
	RS	20.01.2021
	SE	20.01.2021
	SI	20.01.2021
	SK	20.01.2021
	SM	20.01.2021
	BG	20.04.2021
	NO	20.04.2021
	GR	21.04.2021
	IS	20.05.2021
	PT	20.05.2021
	IE	20.09.2021
	LU	20.09.2021
	CH	30.09.2021
	LI	30.09.2021
Former [2023/30]	AL	20.01.2021
	AT	20.01.2021
	CY	20.01.2021
	CZ	20.01.2021
	DK	20.01.2021
	EE	20.01.2021
	ES	20.01.2021
	FI	20.01.2021
	HR	20.01.2021
	IT	20.01.2021
	LT	20.01.2021
	LV	20.01.2021
	MC	20.01.2021
	PL	20.01.2021
	RO	20.01.2021
	RS	20.01.2021
	SE	20.01.2021
	SI	20.01.2021
	SK	20.01.2021
	SM	20.01.2021
	BG	20.04.2021
	NO	20.04.2021
	GR	21.04.2021
	IS	20.05.2021
	PT	20.05.2021
	IE	20.09.2021
	LU	20.09.2021
	CH	30.09.2021
	LI	30.09.2021
Former [2022/37]	AL	20.01.2021
	AT	20.01.2021
	CZ	20.01.2021
	DK	20.01.2021
	EE	20.01.2021
	ES	20.01.2021
	FI	20.01.2021
	HR	20.01.2021
	IT	20.01.2021
	LT	20.01.2021
	LV	20.01.2021
	MC	20.01.2021
	PL	20.01.2021
	RO	20.01.2021
	RS	20.01.2021
	SE	20.01.2021
	SI	20.01.2021
	SK	20.01.2021
	SM	20.01.2021
	BG	20.04.2021
	NO	20.04.2021
	GR	21.04.2021
	IS	20.05.2021
	PT	20.05.2021
	IE	20.09.2021
	LU	20.09.2021
	CH	30.09.2021
	LI	30.09.2021
Former [2022/35]	AL	20.01.2021
	AT	20.01.2021
	CZ	20.01.2021
	DK	20.01.2021
	EE	20.01.2021
	ES	20.01.2021
	FI	20.01.2021
	HR	20.01.2021
	IT	20.01.2021
	LT	20.01.2021
	LV	20.01.2021
	MC	20.01.2021
	PL	20.01.2021
	RO	20.01.2021
	RS	20.01.2021
	SE	20.01.2021
	SI	20.01.2021
	SK	20.01.2021
	SM	20.01.2021
	BG	20.04.2021
	NO	20.04.2021
	GR	21.04.2021
	IS	20.05.2021
	PT	20.05.2021
	IE	20.09.2021
	LU	20.09.2021
Former [2022/34]	AL	20.01.2021
	AT	20.01.2021
	CZ	20.01.2021
	DK	20.01.2021
	EE	20.01.2021
	ES	20.01.2021
	FI	20.01.2021
	HR	20.01.2021
	IT	20.01.2021
	LT	20.01.2021
	LV	20.01.2021
	MC	20.01.2021
	PL	20.01.2021
	RO	20.01.2021
	RS	20.01.2021
	SE	20.01.2021
	SI	20.01.2021
	SK	20.01.2021
	SM	20.01.2021
	BG	20.04.2021
	NO	20.04.2021
	GR	21.04.2021
	IS	20.05.2021
	PT	20.05.2021
	LU	20.09.2021
Former [2022/25]	AL	20.01.2021
	AT	20.01.2021
	CZ	20.01.2021
	DK	20.01.2021
	EE	20.01.2021
	ES	20.01.2021
	FI	20.01.2021
	HR	20.01.2021
	IT	20.01.2021
	LT	20.01.2021
	LV	20.01.2021
	MC	20.01.2021
	PL	20.01.2021
	RO	20.01.2021
	RS	20.01.2021
	SE	20.01.2021
	SI	20.01.2021
	SK	20.01.2021
	SM	20.01.2021
	BG	20.04.2021
	NO	20.04.2021
	GR	21.04.2021
	IS	20.05.2021
	PT	20.05.2021
Former [2022/23]	AL	20.01.2021
	AT	20.01.2021
	CZ	20.01.2021
	DK	20.01.2021
	EE	20.01.2021
	ES	20.01.2021
	FI	20.01.2021
	HR	20.01.2021
	IT	20.01.2021
	LT	20.01.2021
	LV	20.01.2021
	PL	20.01.2021
	RO	20.01.2021
	RS	20.01.2021
	SE	20.01.2021
	SI	20.01.2021
	SK	20.01.2021
	SM	20.01.2021
	BG	20.04.2021
	NO	20.04.2021
	GR	21.04.2021
	IS	20.05.2021
	PT	20.05.2021
Former [2022/13]	AL	20.01.2021
	AT	20.01.2021
	CZ	20.01.2021
	DK	20.01.2021
	EE	20.01.2021
	ES	20.01.2021
	FI	20.01.2021
	HR	20.01.2021
	LT	20.01.2021
	LV	20.01.2021
	PL	20.01.2021
	RO	20.01.2021
	RS	20.01.2021
	SE	20.01.2021
	SI	20.01.2021
	SK	20.01.2021
	SM	20.01.2021
	BG	20.04.2021
	NO	20.04.2021
	GR	21.04.2021
	PT	20.05.2021
Former [2022/10]	AL	20.01.2021
	AT	20.01.2021
	CZ	20.01.2021
	DK	20.01.2021
	EE	20.01.2021
	ES	20.01.2021
	FI	20.01.2021
	HR	20.01.2021
	LT	20.01.2021
	LV	20.01.2021
	PL	20.01.2021
	RO	20.01.2021
	RS	20.01.2021
	SE	20.01.2021
	SK	20.01.2021
	SM	20.01.2021
	BG	20.04.2021
	NO	20.04.2021
	GR	21.04.2021
	PT	20.05.2021
Former [2022/08]	AL	20.01.2021
	AT	20.01.2021
	CZ	20.01.2021
	DK	20.01.2021
	EE	20.01.2021
	ES	20.01.2021
	FI	20.01.2021
	HR	20.01.2021
	LT	20.01.2021
	LV	20.01.2021
	PL	20.01.2021
	RO	20.01.2021
	RS	20.01.2021
	SE	20.01.2021
	SK	20.01.2021
	SM	20.01.2021
	BG	20.04.2021
	NO	20.04.2021
	GR	21.04.2021
	IS	20.05.2021
	PT	20.05.2021
Former [2022/07]	AL	20.01.2021
	AT	20.01.2021
	CZ	20.01.2021
	DK	20.01.2021
	EE	20.01.2021
	FI	20.01.2021
	HR	20.01.2021
	LT	20.01.2021
	LV	20.01.2021
	PL	20.01.2021
	RO	20.01.2021
	RS	20.01.2021
	SE	20.01.2021
	SK	20.01.2021
	SM	20.01.2021
	BG	20.04.2021
	NO	20.04.2021
	GR	21.04.2021
	IS	20.05.2021
	PT	20.05.2021
Former [2021/50]	AT	20.01.2021
	CZ	20.01.2021
	DK	20.01.2021
	EE	20.01.2021
	FI	20.01.2021
	HR	20.01.2021
	LT	20.01.2021
	LV	20.01.2021
	PL	20.01.2021
	RO	20.01.2021
	RS	20.01.2021
	SE	20.01.2021
	SK	20.01.2021
	SM	20.01.2021
	BG	20.04.2021
	NO	20.04.2021
	GR	21.04.2021
	IS	20.05.2021
	PT	20.05.2021
Former [2021/49]	AT	20.01.2021
	CZ	20.01.2021
	DK	20.01.2021
	EE	20.01.2021
	FI	20.01.2021
	HR	20.01.2021
	LT	20.01.2021
	LV	20.01.2021
	PL	20.01.2021
	RS	20.01.2021
	SE	20.01.2021
	SM	20.01.2021
	BG	20.04.2021
	NO	20.04.2021
	GR	21.04.2021
	IS	20.05.2021
	PT	20.05.2021
Former [2021/48]	AT	20.01.2021
	CZ	20.01.2021
	EE	20.01.2021
	FI	20.01.2021
	HR	20.01.2021
	LT	20.01.2021
	LV	20.01.2021
	PL	20.01.2021
	RS	20.01.2021
	SE	20.01.2021
	SM	20.01.2021
	BG	20.04.2021
	NO	20.04.2021
	GR	21.04.2021
	IS	20.05.2021
	PT	20.05.2021
Former [2021/46]	AT	20.01.2021
	FI	20.01.2021
	HR	20.01.2021
	LT	20.01.2021
	LV	20.01.2021
	PL	20.01.2021
	RS	20.01.2021
	SE	20.01.2021
	SM	20.01.2021
	BG	20.04.2021
	NO	20.04.2021
	GR	21.04.2021
	IS	20.05.2021
	PT	20.05.2021
Former [2021/42]	AT	20.01.2021
	FI	20.01.2021
	HR	20.01.2021
	LT	20.01.2021
	LV	20.01.2021
	PL	20.01.2021
	RS	20.01.2021
	SE	20.01.2021
	BG	20.04.2021
	NO	20.04.2021
	GR	21.04.2021
	IS	20.05.2021
	PT	20.05.2021
Former [2021/39]	AT	20.01.2021
	FI	20.01.2021
	HR	20.01.2021
	LT	20.01.2021
	LV	20.01.2021
	PL	20.01.2021
	RS	20.01.2021
	SE	20.01.2021
	BG	20.04.2021
	NO	20.04.2021
	GR	21.04.2021
	PT	20.05.2021
Former [2021/38]	AT	20.01.2021
	FI	20.01.2021
	HR	20.01.2021
	LT	20.01.2021
	LV	20.01.2021
	RS	20.01.2021
	SE	20.01.2021
	BG	20.04.2021
	NO	20.04.2021
	GR	21.04.2021
	PT	20.05.2021
Former [2021/37]	AT	20.01.2021
	FI	20.01.2021
	HR	20.01.2021
	LT	20.01.2021
	LV	20.01.2021
	RS	20.01.2021
	BG	20.04.2021
	NO	20.04.2021
	GR	21.04.2021
	PT	20.05.2021
Former [2021/36]	FI	20.01.2021
	HR	20.01.2021
	LT	20.01.2021
	BG	20.04.2021
	NO	20.04.2021
	GR	21.04.2021
	PT	20.05.2021
Former [2021/35]	FI	20.01.2021
	HR	20.01.2021
	LT	20.01.2021
	NO	20.04.2021
	PT	20.05.2021
Former [2021/33]	FI	20.01.2021
	LT	20.01.2021
	NO	20.04.2021
	PT	20.05.2021
Documents cited:	Search	[A]JPH06292942 (METALLGESELLSCHAFT AG) [A] 1-17 * abstract * * claims 1-6 * * paragraphs [0036] , [0042] * * figures 1-5b *;
		[A]US2006260641 (WU YI [US], et al) [A] 1-17 * abstract * * claims 1-20 ** figures 1-4B *;
		[A]US2009025761 (MATSUMOTO YOUICHIROU [JP], et al) [A] 1-17 * abstract * * claims 1-17 * * paragraphs [0008] , [0009] , [0013] , [0015] , [0019] , [0036] , [0086] , [0088] , [0092] , [0103] , [0105] , [0106] * * figures 1-13 *
	International search	[A]JPH10235303 (SHIBAURA ENG WORKS LTD) [A] 1-64* the whole document *;
		[A]CN1712144 (TOKYO SHIBAURA ELECTRIC CO [JP]) [A] 1-64 * the whole document *;
		[A]US2012097195 (WANG JIAN [CN], et al) [A] 1-64 * description, paragraphs [0028], [0038]-[0055], claims 1, 15 and figure 1 *;
		[A]CN104576455 (WUXI DEXIN SOLAR POWER CO LTD) [A] 1-64 * the whole document *

The EPO accepts no responsibility for the accuracy of data originating from other authorities; in particular, it does not guarantee that it is complete, up to date or fit for specific purposes.

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