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EP3396698
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EP About this file: EP3396698
| EP3396698 - POWER CONVERTER UNIT, PLASMA PROCESSING EQUIPMENT AND METHOD OF CONTROLLING SEVERAL PLASMA PROCESSES [Right-click to bookmark this link] | Status | The application is deemed to be withdrawn Status updated on 30.08.2019 Database last updated on 14.06.2024 | |
| Former | The application has been published Status updated on 28.09.2018 | Most recent event Tooltip | 30.08.2019 | Application deemed to be withdrawn | published on 02.10.2019 [2019/40] | Applicant(s) | For all designated states TRUMPF Hüttinger GmbH + Co. KG Bötzinger Strasse 80 79111 Freiburg / DE | [2018/44] | Inventor(s) | 01 /
ENGELSTÄDTER, Jan Peter Talhauser Strasse 20 79285 Ebringen / DE | 02 /
OZIMEK, Pawel 6/1 Melomanow Str. 00-712 Warsaw / PL | 03 /
RUDA, Krzysztof ul. Kocjana 01-473 Warsaw / PL | 04 /
SWIATNICKI, Jakub ul. Laska 52/35 98-220 Zdunska Wola / PL | [2018/44] | Representative(s) | Trumpf Patentabteilung Trumpf GmbH & Co KG TH501 Patente und Lizenzen Johann-Maus-Straße 2 71254 Ditzingen / DE | [2018/44] | Application number, filing date | 17168573.8 | 27.04.2017 | [2018/44] | Filing language | EN | Procedural language | EN | Publication | Type: | A1 Application with search report | No.: | EP3396698 | Date: | 31.10.2018 | Language: | EN | [2018/44] | Search report(s) | (Supplementary) European search report - dispatched on: | EP | 09.10.2017 | Classification | IPC: | H01J37/32, C23C14/34, H01J37/34, H02J3/36, H02M7/00 | [2018/44] | CPC: |
H01J37/34 (EP);
H02M7/06 (CN,US);
H01J37/32889 (EP,CN,US);
C23C16/50 (EP);
H01J37/32899 (EP,CN,US);
H02J3/36 (EP);
H02M3/33569 (US);
H02M5/458 (EP,US);
H02M7/5387 (CN,US);
C23C14/54 (US);
C23C16/52 (US);
H01J2237/332 (CN,US);
H01J2237/3321 (CN,US);
H01J2237/334 (CN,US);
H02M1/0003 (EP);
| Designated contracting states | AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LI, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR [2018/44] | Extension states | BA | Not yet paid | ME | Not yet paid | Validation states | MA | Not yet paid | MD | Not yet paid | Title | German: | STROMMWANDLUNGSEINHEIT, PLASMAVERARBEITUNGSAUSRÜSTUNG UND VERFAHREN ZUR STEUERUNG MEHRERER PLASMAPROZESSE | [2018/44] | English: | POWER CONVERTER UNIT, PLASMA PROCESSING EQUIPMENT AND METHOD OF CONTROLLING SEVERAL PLASMA PROCESSES | [2018/44] | French: | UNITÉ DE CONVERSION DE PUISSANCE, ÉQUIPEMENT DE TRAITEMENT AU PLASMA ET PROCÉDÉ DE COMMANDE DE PLUSIEURS TRAITEMENTS AU PLASMA | [2018/44] | Examination procedure | 01.05.2019 | Application deemed to be withdrawn, date of legal effect [2019/40] | 15.05.2019 | Despatch of communication that the application is deemed to be withdrawn, reason: examination fee not paid in time [2019/40] | Fees paid | Penalty fee | Additional fee for renewal fee | 30.04.2019 | 03 M06 Not yet paid |
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| Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court. | Documents cited: | Search | [A]US5777863 (KOWALEVSKII DMITRI [US], et al) [A] 1-14 * the whole document * * paragraph [0005] * * paragraph [0014] - paragraph [0016] * * paragraph [0041] - paragraph [0044] *; | [A]DE19702187 (FRAUNHOFER GES FORSCHUNG [DE]) [A] 1-14* the whole document *; | [I]US2007045111 (TRUSCH ALFRED [DE], et al) [I] 1-6,10-14 * figure 1 * * paragraph [0005] * * paragraph [0014] - paragraph [0016] * * paragraph [0041] - paragraph [0044] *; | [A]US2011036707 (HORISHITA YOSHIKUNI [JP], et al) [A] 1-14 * figures 1, 2 * * paragraph [0012] - paragraph [0018] * | by applicant | US6271053 | US6495392 | US6620299 | US6756318 | US2005034667 | US2006156979 | US7396759 | US2014357064 |