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EP3267470
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EP About this file: EP3267470
| EP3267470 - CARBON DOPANT GAS AND CO-FLOW FOR IMPLANT BEAM AND SOURCE LIFE PERFORMANCE IMPROVEMENT [Right-click to bookmark this link] | Status | The application is deemed to be withdrawn Status updated on 25.01.2019 Database last updated on 24.07.2024 | |
| Former | The application has been published Status updated on 08.12.2017 | Most recent event Tooltip | 25.01.2019 | Application deemed to be withdrawn | published on 27.02.2019 [2019/09] | Applicant(s) | For all designated states Entegris, Inc. 129 Concord Road Billerica, MA 01821 / US | [N/P] |
| Former [2018/02] | For all designated states Entegris, Inc. 129 Concord Road Billerica, MA 01821 / US | Inventor(s) | 01 /
BYL, Oleg 81 Pascoe Drive Southbury, CT 06488 / US | 02 /
STURM, Edward A. 9 Grandview Lane New Milford, CT 06776 / US | 03 /
TANG, Ying 8 Hollis Drive Brookfield, CT 06804 / US | 04 /
YEDAVE, Sharad N. 1401 Revere Road Danbury, CT 06811 / US | 05 /
SWEENEY, Joseph D. 60 Spencer Hill Road Winsted, CT 06098 / US | 06 /
SERGI, Steven 56 Woodbury Hill Woodbury, CT 06798 / US | 07 /
CHAMBERS, Barry Lewis 2225 Holding Pond Lane Midlothian, VA 23112 / US | [2018/02] | Representative(s) | Greaves Brewster LLP Copa House Station Road Cheddar, Somerset BS27 3AH / GB | [N/P] |
| Former [2018/02] | Bumke, Jakob Wenzel, et al Greaves Brewster LLP Copa House Station Road Cheddar BS27 3AH / GB | Application number, filing date | 17180899.1 | 13.02.2013 | [2018/02] | Priority number, date | US201261598817P | 14.02.2012 Original published format: US 201261598817 P | US201261625571P | 17.04.2012 Original published format: US 201261625571 P | [2018/02] | Filing language | EN | Procedural language | EN | Publication | Type: | A2 Application without search report | No.: | EP3267470 | Date: | 10.01.2018 | Language: | EN | [2018/02] | Type: | A3 Search report | No.: | EP3267470 | Date: | 18.04.2018 | Language: | EN | [2018/16] | Search report(s) | (Supplementary) European search report - dispatched on: | EP | 19.03.2018 | Classification | IPC: | H01L21/265, H01J37/317, H01J37/08 | [2018/02] | CPC: |
H01J37/08 (EP,KR,US);
H01L21/265 (CN,KR,US);
H01J37/317 (CN);
H01J37/3171 (EP,KR,US);
H01L31/18 (US);
H01L33/005 (US);
H01J2237/022 (EP,KR,US)
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| Designated contracting states | AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LI, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR [2018/02] | Title | German: | KOHLENSTOFFDOTIERUNGSGAS UND CO-FLOW ZUR OPTIMIERUNG DER IMPLANTATSTRAHL- UND QUELLENLEBENSDAUERLEISTUNG | [2018/02] | English: | CARBON DOPANT GAS AND CO-FLOW FOR IMPLANT BEAM AND SOURCE LIFE PERFORMANCE IMPROVEMENT | [2018/02] | French: | GAZ DOPANT DE CARBONE ET CO-ÉCOULEMENT POUR FAISCEAU D'IMPLANT ET AMÉLIORATION DE PERFORMANCES DE SOURCE DE VIE | [2018/02] | Examination procedure | 01.09.2018 | Application deemed to be withdrawn, date of legal effect [2019/09] | 17.10.2018 | Despatch of communication that the application is deemed to be withdrawn, reason: renewal fee not paid in time [2019/09] | Parent application(s) Tooltip | EP13748952.2 / EP2815424 | Fees paid | Renewal fee | 12.07.2017 | Renewal fee patent year 03 | 12.07.2017 | Renewal fee patent year 04 | 12.07.2017 | Renewal fee patent year 05 | Penalty fee | Additional fee for renewal fee | 28.02.2018 | 06 M06 Not yet paid |
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| Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court. | Documents cited: | Search | [XI]US2005211923 (BANKS PETER M [GB]) [X] 1,15 * paragraphs [0004] - [0007] - [0011] - [0018] - [0023] , [0029] - [0038]; figure - * [I] 2-14; | [A]US2011021011 (SWEENEY JOSEPH D [US], et al) [A] 1-15 * paragraphs [0003] , [0010] - [0020] *; | [XI]US2010112795 (KAIM ROBERT [US], et al) [X] 1,15 * paragraphs [0020] , [0030] , [0033] - [0036] - [0048] , [0073]; figure 2 * [I] 2-14; | [IY]US2004200417 (HANAWA HIROJI [US], et al) [I] 1-15 * paragraphs [0301] , [0344] , [0345] , [0349]; figures 87,112 * [Y] 1-15; | [Y]JP2010275114 ; | [A]JP2010189694 (MIYAKO ROLLER INDUSTRY CO) [A] 1-15 * abstract * * paragraphs [0011] - [0013] * | [Y] - DATABASE WPI, 0, Derwent World Patents Index, vol. 2010, no. 82, Database accession no. 2010-Q03202, XP002775239 & JP2010275114 A 20101209 (MIYAKO ROLLER KOGYO KK) [Y] 1-15 * abstract * * paragraph [0044] * |