| EP3335832 - POLISHING APPARATUS AND PRESSING PAD FOR PRESSING POLISHING TOOL [Right-click to bookmark this link] | Status | No opposition filed within time limit Status updated on 10.12.2021 Database last updated on 28.03.2026 | |
| Former | The patent has been granted Status updated on 01.01.2021 | ||
| Former | Grant of patent is intended Status updated on 26.08.2020 | ||
| Former | Request for examination was made Status updated on 11.01.2019 | ||
| Former | The application has been published Status updated on 18.05.2018 | Most recent event Tooltip | 19.12.2025 | Lapse of the patent in a contracting state New state(s): TR | published on 21.01.2026 [2026/04] | Applicant(s) | For all designated states Ebara Corporation 11-1 Haneda Asahi-cho Ohta-ku Tokyo 144-8510 / JP | [2018/25] | Inventor(s) | 01 /
NAKANISHI, Masayuki EBARA CORPORATION 11-1, Haneda Asahi-cho Ohta-ku Tokyo, Tokyo 144-8510 / JP | 02 /
KODERA, Kenji EBARA CORPORATION 11-1, Haneda Asahi-cho Ohta-ku Tokyo, Tokyo 144-8510 / JP | 03 /
MIYASAWA, Yasuyuki EBARA CORPORATION 11-1, Haneda Asahi-cho Ohta-ku Tokyo, Tokyo 144-8510 / JP | [2018/25] | Representative(s) | Emde, Eric Wagner & Geyer Partnerschaft mbB Patent- und Rechtsanwälte Gewürzmühlstrasse 5 80538 München / DE | [2021/05] |
| Former [2018/25] | Emde, Eric Wagner & Geyer Gewürzmühlstrasse 5 80538 München / DE | Application number, filing date | 17206505.4 | 11.12.2017 | [2018/25] | Priority number, date | JP20160243295 | 15.12.2016 Original published format: JP 2016243295 | JP20170210426 | 31.10.2017 Original published format: JP 2017210426 | [2018/25] | Filing language | EN | Procedural language | EN | Publication | Type: | A2 Application without search report | No.: | EP3335832 | Date: | 20.06.2018 | Language: | EN | [2018/25] | Type: | A3 Search report | No.: | EP3335832 | Date: | 27.06.2018 | Language: | EN | [2018/26] | Type: | B1 Patent specification | No.: | EP3335832 | Date: | 03.02.2021 | Language: | EN | [2021/05] | Search report(s) | (Supplementary) European search report - dispatched on: | EP | 28.05.2018 | Classification | IPC: | B24B21/00, B24B9/06, B24B21/08, B24B31/12, B24B37/07 | [2020/32] | CPC: |
B24B9/065 (EP,US);
B24B21/002 (EP,US);
B24B21/08 (EP,US);
B24B37/07 (EP,US);
H10P90/128 (US);
B24B31/12 (EP,US)
|
| Former IPC [2018/25] | B24B21/00, B24B21/08, B24B9/06, // H01L21/02 | Designated contracting states | AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LI, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR [2019/07] |
| Former [2018/25] | AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LI, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR | Title | German: | POLIERVORRICHTUNG UND PRESSKISSEN FÜR PRESSPOLIERWERKZEUG | [2018/25] | English: | POLISHING APPARATUS AND PRESSING PAD FOR PRESSING POLISHING TOOL | [2018/25] | French: | APPAREIL DE POLISSAGE ET PLAQUETTE DE PRESSION POUR PRESSER UN OUTIL DE POLISSAGE | [2018/25] | Examination procedure | 28.12.2018 | Amendment by applicant (claims and/or description) | 28.12.2018 | Examination requested [2019/07] | 28.12.2018 | Date on which the examining division has become responsible | 27.08.2020 | Communication of intention to grant the patent | 08.12.2020 | Fee for grant paid | 08.12.2020 | Fee for publishing/printing paid | 08.12.2020 | Receipt of the translation of the claim(s) | Opposition(s) | 04.11.2021 | No opposition filed within time limit [2022/02] | Fees paid | Renewal fee | 17.12.2019 | Renewal fee patent year 03 | 23.12.2020 | Renewal fee patent year 04 |
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| Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court. | Lapses during opposition Tooltip | HU | 11.12.2017 | AL | 03.02.2021 | AT | 03.02.2021 | CY | 03.02.2021 | CZ | 03.02.2021 | DK | 03.02.2021 | EE | 03.02.2021 | ES | 03.02.2021 | FI | 03.02.2021 | HR | 03.02.2021 | IT | 03.02.2021 | LT | 03.02.2021 | LV | 03.02.2021 | MC | 03.02.2021 | MK | 03.02.2021 | MT | 03.02.2021 | NL | 03.02.2021 | PL | 03.02.2021 | RO | 03.02.2021 | RS | 03.02.2021 | SE | 03.02.2021 | SI | 03.02.2021 | SK | 03.02.2021 | SM | 03.02.2021 | TR | 03.02.2021 | BG | 03.05.2021 | NO | 03.05.2021 | GR | 04.05.2021 | IS | 03.06.2021 | PT | 04.06.2021 | [2026/04] |
| Former [2024/41] | HU | 11.12.2017 | |
| AL | 03.02.2021 | ||
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| CY | 03.02.2021 | ||
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| DK | 03.02.2021 | ||
| EE | 03.02.2021 | ||
| ES | 03.02.2021 | ||
| FI | 03.02.2021 | ||
| HR | 03.02.2021 | ||
| IT | 03.02.2021 | ||
| LT | 03.02.2021 | ||
| LV | 03.02.2021 | ||
| MC | 03.02.2021 | ||
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| BG | 03.05.2021 | ||
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| Former [2024/22] | HU | 11.12.2017 | |
| AL | 03.02.2021 | ||
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| CY | 03.02.2021 | ||
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| IT | 03.02.2021 | ||
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| PL | 03.02.2021 | ||
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| SE | 03.02.2021 | ||
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| SM | 03.02.2021 | ||
| BG | 03.05.2021 | ||
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| GR | 04.05.2021 | ||
| IS | 03.06.2021 | ||
| PT | 04.06.2021 | ||
| Former [2023/30] | HU | 11.12.2017 | |
| AL | 03.02.2021 | ||
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| IT | 03.02.2021 | ||
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| MC | 03.02.2021 | ||
| NL | 03.02.2021 | ||
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| SM | 03.02.2021 | ||
| BG | 03.05.2021 | ||
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| IS | 03.06.2021 | ||
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| Former [2023/28] | HU | 11.12.2017 | |
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| EE | 03.02.2021 | ||
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| BG | 03.05.2021 | ||
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| Former [2022/33] | AL | 03.02.2021 | |
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| IT | 03.02.2021 | ||
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| SI | 03.02.2021 | ||
| SK | 03.02.2021 | ||
| SM | 03.02.2021 | ||
| BG | 03.05.2021 | ||
| NO | 03.05.2021 | ||
| GR | 04.05.2021 | ||
| IS | 03.06.2021 | ||
| PT | 04.06.2021 | ||
| Former [2022/23] | AL | 03.02.2021 | |
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| IT | 03.02.2021 | ||
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| NL | 03.02.2021 | ||
| PL | 03.02.2021 | ||
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| SE | 03.02.2021 | ||
| SI | 03.02.2021 | ||
| SK | 03.02.2021 | ||
| SM | 03.02.2021 | ||
| BG | 03.05.2021 | ||
| NO | 03.05.2021 | ||
| GR | 04.05.2021 | ||
| IS | 03.06.2021 | ||
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| Former [2022/13] | AL | 03.02.2021 | |
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| DK | 03.02.2021 | ||
| EE | 03.02.2021 | ||
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| HR | 03.02.2021 | ||
| LT | 03.02.2021 | ||
| LV | 03.02.2021 | ||
| NL | 03.02.2021 | ||
| PL | 03.02.2021 | ||
| RO | 03.02.2021 | ||
| RS | 03.02.2021 | ||
| SE | 03.02.2021 | ||
| SI | 03.02.2021 | ||
| SK | 03.02.2021 | ||
| SM | 03.02.2021 | ||
| BG | 03.05.2021 | ||
| NO | 03.05.2021 | ||
| GR | 04.05.2021 | ||
| PT | 04.06.2021 | ||
| Former [2022/10] | AL | 03.02.2021 | |
| AT | 03.02.2021 | ||
| CZ | 03.02.2021 | ||
| DK | 03.02.2021 | ||
| EE | 03.02.2021 | ||
| ES | 03.02.2021 | ||
| FI | 03.02.2021 | ||
| HR | 03.02.2021 | ||
| LT | 03.02.2021 | ||
| LV | 03.02.2021 | ||
| NL | 03.02.2021 | ||
| PL | 03.02.2021 | ||
| RO | 03.02.2021 | ||
| RS | 03.02.2021 | ||
| SE | 03.02.2021 | ||
| SK | 03.02.2021 | ||
| SM | 03.02.2021 | ||
| BG | 03.05.2021 | ||
| NO | 03.05.2021 | ||
| GR | 04.05.2021 | ||
| PT | 04.06.2021 | ||
| Former [2022/08] | AL | 03.02.2021 | |
| AT | 03.02.2021 | ||
| CZ | 03.02.2021 | ||
| DK | 03.02.2021 | ||
| EE | 03.02.2021 | ||
| ES | 03.02.2021 | ||
| FI | 03.02.2021 | ||
| HR | 03.02.2021 | ||
| LT | 03.02.2021 | ||
| LV | 03.02.2021 | ||
| NL | 03.02.2021 | ||
| PL | 03.02.2021 | ||
| RO | 03.02.2021 | ||
| RS | 03.02.2021 | ||
| SE | 03.02.2021 | ||
| SK | 03.02.2021 | ||
| SM | 03.02.2021 | ||
| BG | 03.05.2021 | ||
| NO | 03.05.2021 | ||
| GR | 04.05.2021 | ||
| IS | 03.06.2021 | ||
| PT | 04.06.2021 | ||
| Former [2022/07] | AL | 03.02.2021 | |
| AT | 03.02.2021 | ||
| CZ | 03.02.2021 | ||
| DK | 03.02.2021 | ||
| EE | 03.02.2021 | ||
| FI | 03.02.2021 | ||
| HR | 03.02.2021 | ||
| LT | 03.02.2021 | ||
| LV | 03.02.2021 | ||
| NL | 03.02.2021 | ||
| PL | 03.02.2021 | ||
| RO | 03.02.2021 | ||
| RS | 03.02.2021 | ||
| SE | 03.02.2021 | ||
| SK | 03.02.2021 | ||
| SM | 03.02.2021 | ||
| BG | 03.05.2021 | ||
| NO | 03.05.2021 | ||
| GR | 04.05.2021 | ||
| IS | 03.06.2021 | ||
| PT | 04.06.2021 | ||
| Former [2021/50] | AT | 03.02.2021 | |
| CZ | 03.02.2021 | ||
| DK | 03.02.2021 | ||
| EE | 03.02.2021 | ||
| FI | 03.02.2021 | ||
| HR | 03.02.2021 | ||
| LT | 03.02.2021 | ||
| LV | 03.02.2021 | ||
| NL | 03.02.2021 | ||
| PL | 03.02.2021 | ||
| RO | 03.02.2021 | ||
| RS | 03.02.2021 | ||
| SE | 03.02.2021 | ||
| SK | 03.02.2021 | ||
| SM | 03.02.2021 | ||
| BG | 03.05.2021 | ||
| NO | 03.05.2021 | ||
| GR | 04.05.2021 | ||
| IS | 03.06.2021 | ||
| PT | 04.06.2021 | ||
| Former [2021/49] | AT | 03.02.2021 | |
| CZ | 03.02.2021 | ||
| DK | 03.02.2021 | ||
| EE | 03.02.2021 | ||
| FI | 03.02.2021 | ||
| HR | 03.02.2021 | ||
| LT | 03.02.2021 | ||
| LV | 03.02.2021 | ||
| NL | 03.02.2021 | ||
| PL | 03.02.2021 | ||
| RS | 03.02.2021 | ||
| SE | 03.02.2021 | ||
| SM | 03.02.2021 | ||
| BG | 03.05.2021 | ||
| NO | 03.05.2021 | ||
| GR | 04.05.2021 | ||
| IS | 03.06.2021 | ||
| PT | 04.06.2021 | ||
| Former [2021/48] | AT | 03.02.2021 | |
| CZ | 03.02.2021 | ||
| EE | 03.02.2021 | ||
| FI | 03.02.2021 | ||
| HR | 03.02.2021 | ||
| LT | 03.02.2021 | ||
| LV | 03.02.2021 | ||
| NL | 03.02.2021 | ||
| PL | 03.02.2021 | ||
| RS | 03.02.2021 | ||
| SE | 03.02.2021 | ||
| SM | 03.02.2021 | ||
| BG | 03.05.2021 | ||
| NO | 03.05.2021 | ||
| GR | 04.05.2021 | ||
| IS | 03.06.2021 | ||
| PT | 04.06.2021 | ||
| Former [2021/46] | AT | 03.02.2021 | |
| FI | 03.02.2021 | ||
| HR | 03.02.2021 | ||
| LT | 03.02.2021 | ||
| LV | 03.02.2021 | ||
| NL | 03.02.2021 | ||
| PL | 03.02.2021 | ||
| RS | 03.02.2021 | ||
| SE | 03.02.2021 | ||
| SM | 03.02.2021 | ||
| BG | 03.05.2021 | ||
| NO | 03.05.2021 | ||
| GR | 04.05.2021 | ||
| IS | 03.06.2021 | ||
| PT | 04.06.2021 | ||
| Former [2021/42] | AT | 03.02.2021 | |
| FI | 03.02.2021 | ||
| HR | 03.02.2021 | ||
| LT | 03.02.2021 | ||
| LV | 03.02.2021 | ||
| NL | 03.02.2021 | ||
| PL | 03.02.2021 | ||
| RS | 03.02.2021 | ||
| SE | 03.02.2021 | ||
| BG | 03.05.2021 | ||
| NO | 03.05.2021 | ||
| GR | 04.05.2021 | ||
| IS | 03.06.2021 | ||
| PT | 04.06.2021 | ||
| Former [2021/39] | AT | 03.02.2021 | |
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| LT | 03.02.2021 | ||
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| NL | 03.02.2021 | ||
| PL | 03.02.2021 | ||
| RS | 03.02.2021 | ||
| SE | 03.02.2021 | ||
| BG | 03.05.2021 | ||
| NO | 03.05.2021 | ||
| GR | 04.05.2021 | ||
| PT | 04.06.2021 | ||
| Former [2021/38] | AT | 03.02.2021 | |
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| NL | 03.02.2021 | ||
| RS | 03.02.2021 | ||
| SE | 03.02.2021 | ||
| BG | 03.05.2021 | ||
| NO | 03.05.2021 | ||
| GR | 04.05.2021 | ||
| PT | 04.06.2021 | ||
| Former [2021/37] | AT | 03.02.2021 | |
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| LT | 03.02.2021 | ||
| LV | 03.02.2021 | ||
| RS | 03.02.2021 | ||
| BG | 03.05.2021 | ||
| NO | 03.05.2021 | ||
| GR | 04.05.2021 | ||
| PT | 04.06.2021 | ||
| Former [2021/36] | FI | 03.02.2021 | |
| HR | 03.02.2021 | ||
| LT | 03.02.2021 | ||
| BG | 03.05.2021 | ||
| NO | 03.05.2021 | ||
| GR | 04.05.2021 | ||
| PT | 04.06.2021 | ||
| Former [2021/35] | FI | 03.02.2021 | |
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| LT | 03.02.2021 | ||
| NO | 03.05.2021 | ||
| PT | 04.06.2021 | ||
| Former [2021/33] | FI | 03.02.2021 | |
| LT | 03.02.2021 | ||
| NO | 03.05.2021 | ||
| PT | 04.06.2021 | Documents cited: | Search | [XI] US2003139049 (NAKAMURA KENRO et al.) [X] 1-3,5,8-10,12 * paragraph [0088] - paragraph [0091]; figures 16A-16F *[I] 4,6,7,11,13,14 | [X] JP2008042220 (EBARA CORP et al.) [X] 1,2,5,8,9,11 * abstract * | [X] US2009017733 (TAKAHASHI TAMAMI et al.) [X] 1,2,5,8,9,12 * paragraph [0177]; figures 25-27 * | [X] US2009017730 (KUBOTA TAKEO et al.) [X] 1,2,5,8,9,12 * paragraph [0070] - paragraph [0074]; figures 15,16 * |