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EP3535780
European procedure
Extract from the Register of European Patents
EP About this file: EP3535780
| EP3535780 - DEVICE AND METHOD FOR MONITORING THE LEAK-TIGHTNESS OF A TRANSPORT ENCLOSURE FOR THE ATMOSPHERIC CONVEYANCE AND STORAGE OF SEMICONDUCTOR SUBSTRATES [Right-click to bookmark this link] | Status | The patent has been granted Status updated on 23.02.2024 Database last updated on 26.07.2024 | |
| Former | Grant of patent is intended Status updated on 16.11.2023 | ||
| Former | Examination is in progress Status updated on 18.06.2021 | ||
| Former | Request for examination was made Status updated on 09.08.2019 | ||
| Former | The international publication has been made Status updated on 11.05.2018 | ||
| Former | unknown Status updated on 24.11.2017 | Most recent event Tooltip | 19.07.2024 | Lapse of the patent in a contracting state New state(s): BG, FI, GR, HR, RS | published on 21.08.2024 [2024/34] | Applicant(s) | For all designated states Pfeiffer Vacuum 98 Avenue De Brogny 74000 Annecy / FR | [2019/37] | Inventor(s) | 01 /
BELLET, Bertrand 109 Avenue de France 74000 Annecy / FR | 02 /
BOUNOUAR, Julien 84 Avenue de France 74000 Annecy / FR | 03 /
CHAPEL, Nicolas 14 Impasse des écorées 74150 Sales / FR | [2019/37] | Representative(s) | Innovincia, et al 11, avenue des Tilleuls 74200 Thonon-Les-Bains / FR | [2024/13] |
| Former [2019/37] | Croonenbroek, Thomas Jakob, et al Innovincia 11, avenue des Tilleuls 74200 Thonon-les-Bains / FR | Application number, filing date | 17797603.2 | 06.11.2017 | [2019/37] | WO2017EP78367 | Priority number, date | FR20160060750 | 07.11.2016 Original published format: FR 1660750 | [2019/37] | Filing language | FR | Procedural language | FR | Publication | Type: | A1 Application with search report | No.: | WO2018083312 | Date: | 11.05.2018 | Language: | FR | [2018/19] | Type: | A1 Application with search report | No.: | EP3535780 | Date: | 11.09.2019 | Language: | FR | The application published by WIPO in one of the EPO official languages on 11.05.2018 takes the place of the publication of the European patent application. | [2019/37] | Type: | B1 Patent specification | No.: | EP3535780 | Date: | 27.03.2024 | Language: | FR | [2024/13] | Search report(s) | International search report - published on: | EP | 11.05.2018 | Classification | IPC: | H01L21/673, G01M3/32 | [2023/43] | CPC: |
H01L21/67393 (EP,KR,US);
B65G47/91 (US);
G01M3/3272 (EP,KR);
H01L21/67017 (KR);
H01L21/67126 (KR);
H01L21/67242 (KR);
H01L21/67376 (US);
H01L21/67379 (US);
H01L21/6732 (US);
H01L21/67386 (US)
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| Former IPC [2019/37] | H01L21/673, G01M3/00 | Designated contracting states | AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LI, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR [2019/37] | Extension states | BA | Not yet paid | ME | Not yet paid | Validation states | MA | Not yet paid | MD | Not yet paid | Title | German: | VORRICHTUNG UND VERFAHREN ZUR ÜBERWACHUNG DER DICHTIGKEIT EINES TRANSPORTBEHÄLTERS ZUR ATMOSPHÄRISCHEN FÖRDERUNG UND LAGERUNG VON HALBLEITERSUBSTRATEN | [2019/37] | English: | DEVICE AND METHOD FOR MONITORING THE LEAK-TIGHTNESS OF A TRANSPORT ENCLOSURE FOR THE ATMOSPHERIC CONVEYANCE AND STORAGE OF SEMICONDUCTOR SUBSTRATES | [2019/37] | French: | DISPOSITIF ET PROCÉDÉ DE CONTRÔLE DE L'ÉTANCHÉITÉ D'UNE ENCEINTE DE TRANSPORT POUR LE CONVOYAGE ET LE STOCKAGE ATMOSPHÉRIQUE DE SUBSTRATS SEMI-CONDUCTEURS | [2019/37] | Entry into regional phase | 03.04.2019 | National basic fee paid | 03.04.2019 | Designation fee(s) paid | 03.04.2019 | Examination fee paid | Examination procedure | 03.04.2019 | Examination requested [2019/37] | 03.04.2019 | Date on which the examining division has become responsible | 18.11.2019 | Amendment by applicant (claims and/or description) | 18.06.2021 | Despatch of a communication from the examining division (Time limit: M06) | 09.12.2021 | Reply to a communication from the examining division | 23.01.2023 | Despatch of a communication from the examining division (Time limit: M04) | 04.05.2023 | Reply to a communication from the examining division | 17.11.2023 | Communication of intention to grant the patent | 16.02.2024 | Fee for grant paid | 16.02.2024 | Fee for publishing/printing paid | 16.02.2024 | Receipt of the translation of the claim(s) | Fees paid | Renewal fee | 22.11.2019 | Renewal fee patent year 03 | 25.11.2020 | Renewal fee patent year 04 | 24.11.2021 | Renewal fee patent year 05 | 23.11.2022 | Renewal fee patent year 06 | 24.11.2023 | Renewal fee patent year 07 |
| Opt-out from the exclusive Tooltip competence of the Unified Patent Court | See the Register of the Unified Patent Court for opt-out data | ||
| Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court. | Lapses during opposition Tooltip | BG | 27.03.2024 | FI | 27.03.2024 | HR | 27.03.2024 | LT | 27.03.2024 | NO | 27.06.2024 | RS | 27.06.2024 | GR | 28.06.2024 | [2024/34] |
| Former [2024/33] | LT | 27.03.2024 | |
| NO | 27.06.2024 | Cited in | International search | [YA]JP2003315197 (TRECENTI TECHNOLOGIES INC) [Y] 14,16-21 * abstract *[A] 1; | [XAYI]WO2012108418 (KONDOH IND LTD [JP], et al) [X] 1 * abstract * [A] 2,9,15 [Y] 14,16-21 [I] 3-8,10-13 | Examination | WO2016035675 |