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Extract from the Register of European Patents

EP About this file: EP3717674

EP3717674 - DEPOSITION APPARATUS, METHOD OF COATING A FLEXIBLE SUBSTRATE AND FLEXIBLE SUBSTRATE HAVING A COATING [Right-click to bookmark this link]
StatusThe application is deemed to be withdrawn
Status updated on  30.09.2022
Database last updated on 28.09.2024
FormerRequest for examination was made
Status updated on  04.09.2020
FormerThe international publication has been made
Status updated on  07.06.2019
Formerunknown
Status updated on  08.12.2017
Most recent event   Tooltip30.09.2022Application deemed to be withdrawnpublished on 02.11.2022  [2022/44]
Applicant(s)For all designated states
Applied Materials, Inc.
3050 Bowers Avenue
Santa Clara, CA 95054 / US
[2020/41]
Inventor(s)01 / HABERKORN, Edgar
Lettgenbrunner Str. 14
63637 Jossgrund / DE
02 / LORENZ, Stefan
Auwanne 8
63791 Karlstein / DE
03 / HEIN, Stefan
Amselweg 9
63825 Blankenbach / DE
04 / MORRISON, Neil
Rosenhöhweg 25
64287 Darmstadt / DE
05 / KUKLA, Reiner
Bühlweg 7
63457 Hanau / DE
06 / KURTHEN, Christof
Pfarrer-Grimm-Str. 20
83052 Bruckmühl / DE
07 / DEPPISCH, Thomas
An den Bornwiesen 11
63743 Aschaffenburg / DE
 [2020/41]
Representative(s)Zimmermann & Partner Patentanwälte mbB
Postfach 330 920
80069 München / DE
[2020/41]
Application number, filing date17804899.728.11.2017
[2020/41]
WO2017EP80694
Filing languageEN
Procedural languageEN
PublicationType: A1 Application with search report
No.:WO2019105534
Date:06.06.2019
Language:EN
[2019/23]
Type: A1 Application with search report 
No.:EP3717674
Date:07.10.2020
Language:EN
The application published by WIPO in one of the EPO official languages on 06.06.2019 takes the place of the publication of the European patent application.
[2020/41]
Search report(s)International search report - published on:EP06.06.2019
ClassificationIPC:C23C14/06, C23C14/34, C23C14/56, C23C14/58
[2020/41]
CPC:
C23C14/0605 (EP,KR); C23C14/562 (EP,KR); C23C14/5833 (EP,KR,US);
C23C14/0611 (US); C23C14/3414 (KR); C23C14/3435 (EP);
C23C14/3442 (KR); C23C14/3485 (US); C23C14/505 (US);
C23C14/3407 (US); C23C14/35 (US) (-)
Designated contracting statesAL,   AT,   BE,   BG,   CH,   CY,   CZ,   DE,   DK,   EE,   ES,   FI,   FR,   GB,   GR,   HR,   HU,   IE,   IS,   IT,   LI,   LT,   LU,   LV,   MC,   MK,   MT,   NL,   NO,   PL,   PT,   RO,   RS,   SE,   SI,   SK,   SM,   TR [2020/41]
TitleGerman:ABSCHEIDUNGSVORRICHTUNG, VERFAHREN ZUR BESCHICHTUNG EINES FLEXIBLEN SUBSTRATS UND FLEXIBLES SUBSTRAT MIT EINER BESCHICHTUNG[2020/41]
English:DEPOSITION APPARATUS, METHOD OF COATING A FLEXIBLE SUBSTRATE AND FLEXIBLE SUBSTRATE HAVING A COATING[2020/41]
French:APPAREIL DE DÉPÔT, PROCÉDÉ DE REVÊTEMENT D'UN SUBSTRAT SOUPLE ET SUBSTRAT SOUPLE MUNI D'UN REVÊTEMENT[2020/41]
Entry into regional phase29.06.2020National basic fee paid 
29.06.2020Designation fee(s) paid 
29.06.2020Examination fee paid 
Examination procedure29.06.2020Examination requested  [2020/41]
29.06.2020Date on which the examining division has become responsible
01.02.2021Amendment by applicant (claims and/or description)
01.06.2022Application deemed to be withdrawn, date of legal effect  [2022/44]
23.06.2022Despatch of communication that the application is deemed to be withdrawn, reason: renewal fee not paid in time  [2022/44]
Fees paidRenewal fee
29.06.2020Renewal fee patent year 03
20.11.2020Renewal fee patent year 04
Penalty fee
Additional fee for renewal fee
30.11.202105   M06   Not yet paid
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Cited inInternational search[A]JPS63307268  (MITSUI MINING & SMELTING CO) [A] 6,12 * paragraph [0001]; figures 6,7 *;
 [A]DE102004004177  (AXYNTEC DUENNSCHICHTTECHNIK GM [DE]) [A] 6,12 * paragraph [0027]; claim 1 *;
 [X]US2012021201  (JUN YOUNGHA [KR], et al) [X] 15 * paragraph [0049] *;
 [XI]WO2016182171  (GENECOAT LTD [KR]) [X] 1-3,8,9,11,13-15 * paragraphs [0029] , [0038] , [0039] , [0044]; figure 1 * [I] 4-7,10,12;
 [A]US2017067155  (LI JAIME ANTONIO [US], et al) [A] 1,10,11* claim 20 *;
 [A]CN206204411U  (APPLIED MATERIALS INC) [A] 9 * abstract *;
 WO2018001523  [ ] (APPLIED MATERIALS INC [US], et al);
 [XA]  - KONOSUKE INAGAWA ET AL, "Characteristics of Diamondlike Carbon Film Deposited by Magnetron Plasma Enhanced Chemical Vapor Deposition Using a Roll Coater.", SHINKU / VACUUM SOCIETY OF JAPAN. JOURNAL., JP, (20000101), vol. 43, no. 5, doi:10.3131/jvsj.43.599, ISSN 0559-8516, pages 599 - 602, XP055495236 [X] 15 * abstract * [A] 6,12

DOI:   http://dx.doi.org/10.3131/jvsj.43.599
 [A]  - NEIL A. MORRISON ET AL, "Roll-to-Roll processing of flexible devices and components : Utilization in wearable and mobile electronics and the coming IOT era", VAKUUM IN FORSCHUNG UND PRAXIS, DE, (20160901), vol. 28, no. 4, doi:10.1002/vipr.201600612, ISSN 0947-076X, pages 30 - 35, XP055495446 [A] 1-15 * the whole document *

DOI:   http://dx.doi.org/10.1002/vipr.201600612
The EPO accepts no responsibility for the accuracy of data originating from other authorities; in particular, it does not guarantee that it is complete, up to date or fit for specific purposes.