EP3540761 - POLISHING COMPOSITION AND METHOD FOR POLISHING SILICON WAFER [Right-click to bookmark this link] | |||
Former [2019/38] | POLISHING COMPOSITION AND SILICON WAFER POLISHING METHOD | ||
[2021/31] | Status | No opposition filed within time limit Status updated on 11.11.2022 Database last updated on 03.09.2024 | |
Former | The patent has been granted Status updated on 03.12.2021 | ||
Former | Grant of patent is intended Status updated on 25.07.2021 | ||
Former | Examination is in progress Status updated on 31.07.2020 | ||
Former | Request for examination was made Status updated on 16.08.2019 | ||
Former | The international publication has been made Status updated on 18.05.2018 | Most recent event Tooltip | 14.06.2024 | Lapse of the patent in a contracting state New state(s): TR | published on 17.07.2024 [2024/29] | Applicant(s) | For all designated states Fujimi Incorporated 1-1 Chiryo 2-chome Nishibiwajima-cho Kiyosu-shi, Aichi 452-8502 / JP | [2019/38] | Inventor(s) | 01 /
AKIZUKI Reiko c/o FUJIMI INCORPORATED 1-1 Chiryo 2-chome Nishibiwajima-cho Kiyosu-shi Aichi 452-8502 / JP | 02 /
TSUCHIYA Kohsuke c/o FUJIMI INCORPORATED 1-1 Chiryo 2-chome Nishibiwajima-cho Kiyosu-shi Aichi 452-8502 / JP | 03 /
TANIGUCHI Megumi c/o FUJIMI INCORPORATED 1-1 Chiryo 2-chome Nishibiwajima-cho Kiyosu-shi Aichi 452-8502 / JP | [2019/38] | Representative(s) | Grünecker Patent- und Rechtsanwälte PartG mbB Leopoldstraße 4 80802 München / DE | [2019/38] | Application number, filing date | 17869067.3 | 06.11.2017 | [2019/38] | WO2017JP39983 | Priority number, date | JP20160219004 | 09.11.2016 Original published format: JP 2016219004 | [2019/38] | Filing language | JA | Procedural language | EN | Publication | Type: | A1 Application with search report | No.: | WO2018088371 | Date: | 17.05.2018 | Language: | JA | [2018/20] | Type: | A1 Application with search report | No.: | EP3540761 | Date: | 18.09.2019 | Language: | EN | [2019/38] | Type: | B1 Patent specification | No.: | EP3540761 | Date: | 05.01.2022 | Language: | EN | [2022/01] | Search report(s) | International search report - published on: | JP | 17.05.2018 | (Supplementary) European search report - dispatched on: | EP | 18.09.2019 | Classification | IPC: | H01L21/304, B24B37/00, C09G1/02, C09K3/14 | [2019/38] | CPC: |
C09G1/02 (EP,KR);
C09K3/14 (EP);
C09K3/1409 (EP,KR);
C09K3/1463 (EP);
H01L21/304 (EP,KR);
H01L21/31051 (KR)
| Designated contracting states | AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LI, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR [2019/38] | Extension states | BA | Not yet paid | ME | Not yet paid | Validation states | MA | Not yet paid | MD | Not yet paid | Title | German: | POLIERZUSAMMENSETZUNG UND POLIERVERFAHREN FÜR SILICIUMWAFER | [2019/38] | English: | POLISHING COMPOSITION AND METHOD FOR POLISHING SILICON WAFER | [2021/31] | French: | COMPOSITION DE POLISSAGE ET PROCÉDÉ DE POLISSAGE DE TRANCHE DE SILICIUM | [2019/38] |
Former [2019/38] | POLISHING COMPOSITION AND SILICON WAFER POLISHING METHOD | Entry into regional phase | 06.05.2019 | Translation filed | 06.05.2019 | National basic fee paid | 06.05.2019 | Search fee paid | 06.05.2019 | Designation fee(s) paid | 06.05.2019 | Examination fee paid | Examination procedure | 06.05.2019 | Examination requested [2019/38] | 21.01.2020 | Amendment by applicant (claims and/or description) | 31.07.2020 | Despatch of a communication from the examining division (Time limit: M06) | 28.10.2020 | Reply to a communication from the examining division | 26.07.2021 | Communication of intention to grant the patent | 28.09.2021 | Fee for grant paid | 28.09.2021 | Fee for publishing/printing paid | 28.09.2021 | Receipt of the translation of the claim(s) | Opposition(s) | 06.10.2022 | No opposition filed within time limit [2022/50] | Fees paid | Renewal fee | 26.11.2019 | Renewal fee patent year 03 | 28.09.2020 | Renewal fee patent year 04 | 25.11.2021 | Renewal fee patent year 05 |
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Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court. | Lapses during opposition Tooltip | HU | 06.11.2017 | AL | 05.01.2022 | AT | 05.01.2022 | CY | 05.01.2022 | CZ | 05.01.2022 | DK | 05.01.2022 | EE | 05.01.2022 | ES | 05.01.2022 | FI | 05.01.2022 | HR | 05.01.2022 | IT | 05.01.2022 | LT | 05.01.2022 | LV | 05.01.2022 | MC | 05.01.2022 | MK | 05.01.2022 | NL | 05.01.2022 | PL | 05.01.2022 | RO | 05.01.2022 | RS | 05.01.2022 | SE | 05.01.2022 | SI | 05.01.2022 | SK | 05.01.2022 | SM | 05.01.2022 | TR | 05.01.2022 | BG | 05.04.2022 | NO | 05.04.2022 | GR | 06.04.2022 | IS | 05.05.2022 | PT | 05.05.2022 | [2024/29] |
Former [2024/27] | HU | 06.11.2017 | |
AL | 05.01.2022 | ||
AT | 05.01.2022 | ||
CY | 05.01.2022 | ||
CZ | 05.01.2022 | ||
DK | 05.01.2022 | ||
EE | 05.01.2022 | ||
ES | 05.01.2022 | ||
FI | 05.01.2022 | ||
HR | 05.01.2022 | ||
IT | 05.01.2022 | ||
LT | 05.01.2022 | ||
LV | 05.01.2022 | ||
MC | 05.01.2022 | ||
MK | 05.01.2022 | ||
NL | 05.01.2022 | ||
PL | 05.01.2022 | ||
RO | 05.01.2022 | ||
RS | 05.01.2022 | ||
SE | 05.01.2022 | ||
SI | 05.01.2022 | ||
SK | 05.01.2022 | ||
SM | 05.01.2022 | ||
BG | 05.04.2022 | ||
NO | 05.04.2022 | ||
GR | 06.04.2022 | ||
IS | 05.05.2022 | ||
PT | 05.05.2022 | ||
Former [2024/21] | HU | 06.11.2017 | |
AL | 05.01.2022 | ||
AT | 05.01.2022 | ||
CY | 05.01.2022 | ||
CZ | 05.01.2022 | ||
DK | 05.01.2022 | ||
EE | 05.01.2022 | ||
ES | 05.01.2022 | ||
FI | 05.01.2022 | ||
HR | 05.01.2022 | ||
IT | 05.01.2022 | ||
LT | 05.01.2022 | ||
LV | 05.01.2022 | ||
MC | 05.01.2022 | ||
NL | 05.01.2022 | ||
PL | 05.01.2022 | ||
RO | 05.01.2022 | ||
RS | 05.01.2022 | ||
SE | 05.01.2022 | ||
SI | 05.01.2022 | ||
SK | 05.01.2022 | ||
SM | 05.01.2022 | ||
BG | 05.04.2022 | ||
NO | 05.04.2022 | ||
GR | 06.04.2022 | ||
IS | 05.05.2022 | ||
PT | 05.05.2022 | ||
Former [2024/18] | HU | 06.11.2017 | |
AL | 05.01.2022 | ||
AT | 05.01.2022 | ||
CZ | 05.01.2022 | ||
DK | 05.01.2022 | ||
EE | 05.01.2022 | ||
ES | 05.01.2022 | ||
FI | 05.01.2022 | ||
HR | 05.01.2022 | ||
IT | 05.01.2022 | ||
LT | 05.01.2022 | ||
LV | 05.01.2022 | ||
MC | 05.01.2022 | ||
NL | 05.01.2022 | ||
PL | 05.01.2022 | ||
RO | 05.01.2022 | ||
RS | 05.01.2022 | ||
SE | 05.01.2022 | ||
SI | 05.01.2022 | ||
SK | 05.01.2022 | ||
SM | 05.01.2022 | ||
BG | 05.04.2022 | ||
NO | 05.04.2022 | ||
GR | 06.04.2022 | ||
IS | 05.05.2022 | ||
PT | 05.05.2022 | ||
Former [2023/35] | AL | 05.01.2022 | |
AT | 05.01.2022 | ||
CZ | 05.01.2022 | ||
DK | 05.01.2022 | ||
EE | 05.01.2022 | ||
ES | 05.01.2022 | ||
FI | 05.01.2022 | ||
HR | 05.01.2022 | ||
IT | 05.01.2022 | ||
LT | 05.01.2022 | ||
LV | 05.01.2022 | ||
MC | 05.01.2022 | ||
NL | 05.01.2022 | ||
PL | 05.01.2022 | ||
RO | 05.01.2022 | ||
RS | 05.01.2022 | ||
SE | 05.01.2022 | ||
SI | 05.01.2022 | ||
SK | 05.01.2022 | ||
SM | 05.01.2022 | ||
BG | 05.04.2022 | ||
NO | 05.04.2022 | ||
GR | 06.04.2022 | ||
IS | 05.05.2022 | ||
PT | 05.05.2022 | ||
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EE | 05.01.2022 | ||
ES | 05.01.2022 | ||
FI | 05.01.2022 | ||
HR | 05.01.2022 | ||
LT | 05.01.2022 | ||
LV | 05.01.2022 | ||
MC | 05.01.2022 | ||
NL | 05.01.2022 | ||
PL | 05.01.2022 | ||
RO | 05.01.2022 | ||
RS | 05.01.2022 | ||
SE | 05.01.2022 | ||
SI | 05.01.2022 | ||
SK | 05.01.2022 | ||
SM | 05.01.2022 | ||
BG | 05.04.2022 | ||
NO | 05.04.2022 | ||
GR | 06.04.2022 | ||
IS | 05.05.2022 | ||
PT | 05.05.2022 | ||
Former [2023/10] | AL | 05.01.2022 | |
AT | 05.01.2022 | ||
CZ | 05.01.2022 | ||
DK | 05.01.2022 | ||
EE | 05.01.2022 | ||
ES | 05.01.2022 | ||
FI | 05.01.2022 | ||
HR | 05.01.2022 | ||
LT | 05.01.2022 | ||
LV | 05.01.2022 | ||
NL | 05.01.2022 | ||
PL | 05.01.2022 | ||
RO | 05.01.2022 | ||
RS | 05.01.2022 | ||
SE | 05.01.2022 | ||
SI | 05.01.2022 | ||
SK | 05.01.2022 | ||
SM | 05.01.2022 | ||
BG | 05.04.2022 | ||
NO | 05.04.2022 | ||
GR | 06.04.2022 | ||
IS | 05.05.2022 | ||
PT | 05.05.2022 | ||
Former [2023/01] | AL | 05.01.2022 | |
AT | 05.01.2022 | ||
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DK | 05.01.2022 | ||
EE | 05.01.2022 | ||
ES | 05.01.2022 | ||
FI | 05.01.2022 | ||
HR | 05.01.2022 | ||
LT | 05.01.2022 | ||
LV | 05.01.2022 | ||
NL | 05.01.2022 | ||
PL | 05.01.2022 | ||
RO | 05.01.2022 | ||
RS | 05.01.2022 | ||
SE | 05.01.2022 | ||
SK | 05.01.2022 | ||
SM | 05.01.2022 | ||
BG | 05.04.2022 | ||
NO | 05.04.2022 | ||
GR | 06.04.2022 | ||
IS | 05.05.2022 | ||
PT | 05.05.2022 | ||
Former [2022/49] | AT | 05.01.2022 | |
CZ | 05.01.2022 | ||
DK | 05.01.2022 | ||
EE | 05.01.2022 | ||
ES | 05.01.2022 | ||
FI | 05.01.2022 | ||
HR | 05.01.2022 | ||
LT | 05.01.2022 | ||
LV | 05.01.2022 | ||
NL | 05.01.2022 | ||
PL | 05.01.2022 | ||
RO | 05.01.2022 | ||
RS | 05.01.2022 | ||
SE | 05.01.2022 | ||
SK | 05.01.2022 | ||
SM | 05.01.2022 | ||
BG | 05.04.2022 | ||
NO | 05.04.2022 | ||
GR | 06.04.2022 | ||
IS | 05.05.2022 | ||
PT | 05.05.2022 | ||
Former [2022/48] | AT | 05.01.2022 | |
CZ | 05.01.2022 | ||
DK | 05.01.2022 | ||
EE | 05.01.2022 | ||
ES | 05.01.2022 | ||
FI | 05.01.2022 | ||
HR | 05.01.2022 | ||
LT | 05.01.2022 | ||
LV | 05.01.2022 | ||
NL | 05.01.2022 | ||
PL | 05.01.2022 | ||
RO | 05.01.2022 | ||
RS | 05.01.2022 | ||
SE | 05.01.2022 | ||
SM | 05.01.2022 | ||
BG | 05.04.2022 | ||
NO | 05.04.2022 | ||
GR | 06.04.2022 | ||
IS | 05.05.2022 | ||
PT | 05.05.2022 | ||
Former [2022/47] | AT | 05.01.2022 | |
DK | 05.01.2022 | ||
ES | 05.01.2022 | ||
FI | 05.01.2022 | ||
HR | 05.01.2022 | ||
LT | 05.01.2022 | ||
LV | 05.01.2022 | ||
NL | 05.01.2022 | ||
PL | 05.01.2022 | ||
RO | 05.01.2022 | ||
RS | 05.01.2022 | ||
SE | 05.01.2022 | ||
SM | 05.01.2022 | ||
BG | 05.04.2022 | ||
NO | 05.04.2022 | ||
GR | 06.04.2022 | ||
IS | 05.05.2022 | ||
PT | 05.05.2022 | ||
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ES | 05.01.2022 | ||
FI | 05.01.2022 | ||
HR | 05.01.2022 | ||
LT | 05.01.2022 | ||
LV | 05.01.2022 | ||
NL | 05.01.2022 | ||
PL | 05.01.2022 | ||
RS | 05.01.2022 | ||
SE | 05.01.2022 | ||
BG | 05.04.2022 | ||
NO | 05.04.2022 | ||
GR | 06.04.2022 | ||
IS | 05.05.2022 | ||
PT | 05.05.2022 | ||
Former [2022/42] | AT | 05.01.2022 | |
ES | 05.01.2022 | ||
FI | 05.01.2022 | ||
HR | 05.01.2022 | ||
LT | 05.01.2022 | ||
LV | 05.01.2022 | ||
NL | 05.01.2022 | ||
PL | 05.01.2022 | ||
RS | 05.01.2022 | ||
SE | 05.01.2022 | ||
BG | 05.04.2022 | ||
NO | 05.04.2022 | ||
GR | 06.04.2022 | ||
IS | 05.05.2022 | ||
PT | 05.05.2022 | ||
Former [2022/39] | AT | 05.01.2022 | |
ES | 05.01.2022 | ||
FI | 05.01.2022 | ||
HR | 05.01.2022 | ||
LT | 05.01.2022 | ||
LV | 05.01.2022 | ||
NL | 05.01.2022 | ||
PL | 05.01.2022 | ||
RS | 05.01.2022 | ||
SE | 05.01.2022 | ||
BG | 05.04.2022 | ||
NO | 05.04.2022 | ||
GR | 06.04.2022 | ||
PT | 05.05.2022 | ||
Former [2022/36] | AT | 05.01.2022 | |
ES | 05.01.2022 | ||
HR | 05.01.2022 | ||
LT | 05.01.2022 | ||
LV | 05.01.2022 | ||
NL | 05.01.2022 | ||
PL | 05.01.2022 | ||
RS | 05.01.2022 | ||
SE | 05.01.2022 | ||
BG | 05.04.2022 | ||
NO | 05.04.2022 | ||
GR | 06.04.2022 | ||
PT | 05.05.2022 | ||
Former [2022/35] | ES | 05.01.2022 | |
HR | 05.01.2022 | ||
LT | 05.01.2022 | ||
NL | 05.01.2022 | ||
RS | 05.01.2022 | ||
SE | 05.01.2022 | ||
BG | 05.04.2022 | ||
NO | 05.04.2022 | ||
PT | 05.05.2022 | ||
Former [2022/34] | ES | 05.01.2022 | |
LT | 05.01.2022 | ||
NL | 05.01.2022 | ||
NO | 05.04.2022 | ||
PT | 05.05.2022 | ||
Former [2022/33] | LT | 05.01.2022 | |
NL | 05.01.2022 | ||
NO | 05.04.2022 | ||
Former [2022/30] | NL | 05.01.2022 | Documents cited: | Search | [A]US2014302752 (TSUCHIYA KOHSUKE [JP], et al) [A] 1-4* the whole document *; | [A]US2016194538 (MIZOGUCHI KEISUKE [JP], et al) [A] 1-4 * the whole document * | International search | [A]WO2016060113 (KAO CORP [JP]) [A] 1-4 * , paragraphs [0016]-[0039] & CN 107075345 A & TW 201619348 A *; | [A]WO2016132676 (FUJIMI INC [JP]) [A] 1-4 * , paragraphs [0011]-[0021] & TW 201702347 A *; | [A]WO2016158324 (FUJIMI INC [JP]) [A] 1-4* , paragraphs [0070]-[0088] & TW 201700707 A * | by applicant | JP2001011433 |