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Extract from the Register of European Patents

EP About this file: EP3551780

EP3551780 - METHODS FOR DEPOSITING POLYMER LAYER FOR SENSOR APPLICATIONS VIA HOT WIRE CHEMICAL VAPOR DEPOSITION [Right-click to bookmark this link]
StatusThe application is deemed to be withdrawn
Status updated on  11.06.2021
Database last updated on 26.07.2024
FormerRequest for examination was made
Status updated on  13.09.2019
FormerThe international publication has been made
Status updated on  16.06.2018
Most recent event   Tooltip11.06.2021Application deemed to be withdrawnpublished on 14.07.2021  [2021/28]
Applicant(s)For all designated states
Applied Materials, Inc.
3050 Bowers Avenue
Santa Clara, CA 95054 / US
[2019/42]
Inventor(s)01 / NEIKIRK, Colin
621 Tasman Drive
Apt. 2216
Sunnyvale, California 94089 / US
02 / MELNIK, Yuriy
3760 Tamarack Lane
Apt. 26
Santa Clara, California 95051 / US
03 / NARWANKAR, Pravin K.
392 Waverly Street
Sunnyvale, California 94086 / US
 [2019/42]
Representative(s)Zimmermann & Partner Patentanwälte mbB
Postfach 330 920
80069 München / DE
[2019/42]
Application number, filing date17878511.907.12.2017
[2019/42]
WO2017US65056
Priority number, dateUS201662432357P09.12.2016         Original published format: US 201662432357 P
US20171583355206.12.2017         Original published format: US201715833552
[2019/42]
Filing languageEN
Procedural languageEN
PublicationType: A1 Application with search report
No.:WO2018106886
Date:14.06.2018
Language:EN
[2018/24]
Type: A1 Application with search report 
No.:EP3551780
Date:16.10.2019
Language:EN
The application published by WIPO in one of the EPO official languages on 14.06.2018 takes the place of the publication of the European patent application.
[2019/42]
Search report(s)International search report - published on:KR14.06.2018
(Supplementary) European search report - dispatched on:EP03.07.2020
ClassificationIPC:C23C16/452, C23C16/448, H01L21/02, C23C16/44, C23C16/455, C23C16/46
[2020/32]
CPC:
C23C16/44 (EP); G01N27/414 (US); C23C16/4401 (EP);
C23C16/4481 (US); C23C16/45512 (EP); C23C16/46 (EP,US);
C23C16/463 (EP,US); C23C16/52 (US); H01L21/02118 (EP,US);
H01L21/02271 (US); H01L21/02277 (EP,US); H01L21/02304 (EP,US);
H01L23/293 (US) (-)
Former IPC [2019/42]C23C16/452, C23C16/448, H01L21/02
Designated contracting statesAL,   AT,   BE,   BG,   CH,   CY,   CZ,   DE,   DK,   EE,   ES,   FI,   FR,   GB,   GR,   HR,   HU,   IE,   IS,   IT,   LI,   LT,   LU,   LV,   MC,   MK,   MT,   NL,   NO,   PL,   PT,   RO,   RS,   SE,   SI,   SK,   SM,   TR [2019/42]
TitleGerman:VERFAHREN ZUR ABSCHEIDUNG EINER POLYMERSCHICHT FÜR SENSORANWENDUNGEN MITTELS CHEMISCHER HEISSDRAHTGASPHASENABSCHEIDUNG[2019/42]
English:METHODS FOR DEPOSITING POLYMER LAYER FOR SENSOR APPLICATIONS VIA HOT WIRE CHEMICAL VAPOR DEPOSITION[2019/42]
French:PROCÉDÉS DE DÉPÔT D'UNE COUCHE POLYMÈRE POUR APPLICATIONS DE CAPTEUR PAR DÉPÔT CHIMIQUE EN PHASE VAPEUR AU FIL CHAUD[2019/42]
Entry into regional phase22.05.2019National basic fee paid 
22.05.2019Search fee paid 
22.05.2019Designation fee(s) paid 
22.05.2019Examination fee paid 
Examination procedure22.05.2019Examination requested  [2019/42]
02.02.2021Application deemed to be withdrawn, date of legal effect  [2021/28]
23.02.2021Despatch of communication that the application is deemed to be withdrawn, reason: reply to the communication from the examining division not received in time  [2021/28]
Fees paidRenewal fee
19.12.2019Renewal fee patent year 03
Penalty fee
Additional fee for renewal fee
31.12.202004   M06   Not yet paid
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Patent Court		 See the Register of the Unified Patent Court for opt-out data
Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court.
Documents cited:Search[X]US4735702  (REINHOUDT DAVID N [NL], et al) [X] 15 * examples I-VI; claims 1-7,19 *;
 [X]US2011045349  (PUSHPARAJ VICTOR L [US], et al) [X] 1,4,10* paragraph [0051]; claims 1-15 *;
 [X]WO2012165944  (UNIV UTRECHT HOLDING BV [NL], et al) [X] 1,4,15 * figure 1; claims 1,36,39 *;
 [XA]US2013337615  (XU JINGJING [US], et al) [X] 1,5-7,9-14 * paragraphs [0026] , [0036] , [0043] , [0044]; figure 1; claims 1-20 * [A] 2-4,8,15
International search[A]US4735702  (REINHOUDT DAVID N [NL], et al) [A] 1-15* See column 5, lines 25-53 and claim 1. *;
 [A]JP2004043544  (SUMITOMO CHEMICAL CO) [A] 1-15 * See paragraphs [0050], [0053] and claim 1. *;
 [Y]US2006284166  (CHUA LAY-LAY [SG], et al) [Y] 1-15 * See paragraphs [0027], [0036], [0104], [0119], [0124], [0145], [0153], [0154] and claims 42-45, 62. *;
 [Y]US2007032620  (GLEASON KAREN K [US], et al) [Y] 1-13 * See paragraphs [0472], [0484] and claim 1. *;
 [Y]WO2012165944  (UNIV UTRECHT HOLDING BV [NL], et al) [Y] 1-15 * See page 5, lines 3-13, page 9, lines 21-32, page 13, lines 1-8, page 20, lines 23-27 and claim 1. *
The EPO accepts no responsibility for the accuracy of data originating from other authorities; in particular, it does not guarantee that it is complete, up to date or fit for specific purposes.