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EP3623868
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EP About this file: EP3623868
| EP3623868 - METROLOGY APPARATUS AND METHOD FOR DETERMINING A CHARACTERISTIC OF ONE OR MORE STRUCTURES ON A SUBSTRATE [Right-click to bookmark this link] | Status | The application is deemed to be withdrawn Status updated on 12.02.2021 Database last updated on 04.06.2024 | |
| Former | The application has been published Status updated on 14.02.2020 | Most recent event Tooltip | 12.02.2021 | Application deemed to be withdrawn | published on 17.03.2021 [2021/11] | Applicant(s) | For all designated states ASML Netherlands B.V. P.O. Box 324 5500 AH Veldhoven / NL | [2020/12] | Inventor(s) | 01 /
PANDEY, Nitesh P.O. Box 324 5500 AH Veldhoven / NL | [2020/12] | Representative(s) | ASML Netherlands B.V. Corporate Intellectual Property P.O. Box 324 5500 AH Veldhoven / NL | [N/P] |
| Former [2020/12] | Willekens, Jeroen Pieter Frank ASML Netherlands B.V. Corporate Intellectual Property De Run 6501 P.O. Box 324 5500 AH Veldhoven / NL | Application number, filing date | 18193998.4 | 12.09.2018 | [2020/12] | Filing language | EN | Procedural language | EN | Publication | Type: | A1 Application with search report | No.: | EP3623868 | Date: | 18.03.2020 | Language: | EN | [2020/12] | Search report(s) | (Supplementary) European search report - dispatched on: | EP | 25.03.2019 | Classification | IPC: | G03F7/20, G01N21/47, G01N21/956 | [2020/12] | CPC: |
G03F7/70616 (EP);
G03F7/0035 (US);
G01N21/956 (EP);
G03F7/70341 (US);
G03F7/70466 (US);
G03F7/70633 (US);
G03F7/7065 (US)
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| Designated contracting states | AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LI, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR [2020/12] | Extension states | BA | Not yet paid | ME | Not yet paid | Validation states | KH | Not yet paid | MA | Not yet paid | MD | Not yet paid | TN | Not yet paid | Title | German: | METROLOGIEVORRICHTUNG UND VERFAHREN ZUR BESTIMMUNG EINER EIGENSCHAFT EINER ODER MEHRERER STRUKTUREN AUF EINEM SUBSTRAT | [2020/12] | English: | METROLOGY APPARATUS AND METHOD FOR DETERMINING A CHARACTERISTIC OF ONE OR MORE STRUCTURES ON A SUBSTRATE | [2020/12] | French: | APPAREIL DE MÉTROLOGIE ET PROCÉDÉ POUR DÉTERMINER UNE CARACTÉRISTIQUE D'UNE OU DE PLUSIEURS STRUCTURES SUR UN SUBSTRAT | [2020/12] | Examination procedure | 19.09.2020 | Application deemed to be withdrawn, date of legal effect [2021/11] | 19.10.2020 | Despatch of communication that the application is deemed to be withdrawn, reason: examination fee not paid in time [2021/11] | Fees paid | Penalty fee | Additional fee for renewal fee | 30.09.2020 | 03 M06 Not yet paid |
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| Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court. | Documents cited: | Search | [Y]US2009153825 (EDART REMI DANIEL MARIE [NL], et al) [Y] 1-15* paragraph [0059]; figure 8; claims 1,6,7,10 *; | [Y]US2011073775 (SETIJA IRWAN DANNI [NL], et al) [Y] 1-15 * paragraphs [0053] - [0055] - [0097] - [0107]; figures 3,6,7 *; | [Y] - TURNER J F ET AL, "NEAR-INFRARED ACOUSTO-OPTIC TUNABLE FILTER HEDAMARD TRANSFORM SPECTROSCOPY", APPLIED SPECTROSCOPY, THE SOCIETY FOR APPLIED SPECTROSCOPY. BALTIMORE, US, (19960201), vol. 50, no. 2, doi:10.1366/0003702963906609, ISSN 0003-7028, pages 277 - 284, XP000550081 [Y] 1-15 * the whole document * DOI: http://dx.doi.org/10.1366/0003702963906609 | [Y] - SCHAEBERLE M D ET AL, "MULTIPLEXED ACOUSTO-OPTIC TUNABLE FILTER (AOTF) SPECTRAL IMAGING MICROSCOPY", VISUAL COMMUNICATIONS AND IMAGE PROCESSING; 20-1-2004 - 20-1-2004; SAN JOSE,, (19940209), vol. 2173, doi:10.1117/12.175166, ISBN 978-1-62841-730-2, pages 11 - 20, XP000672458 [Y] 1-15 * the whole document * DOI: http://dx.doi.org/10.1117/12.175166 | by applicant | US6952253 | EP1628164 | US2010328655 | US2011026032 | WO2011012624 | US2011102753 | US2011249244 | US2012044470 | US2016161863 | WO2017186483 | - "Noise, fluctuation, and HADAMARD-transform spectrometry", NITZSCHE, GUNTER; RAINER RIESENBERG, SPIE's First International Symposium on Fluctuations and Noise, International Society for Optics and Photonics | EP20170199764 |